Double-sided etching equipment for high-precision metal mask

Abstract

The utility model discloses double-sided etching equipment for a high-precision metal mask plate, and belongs to the field of mask plate etching. A high-precision metal mask plate double-face etching device comprises a box body with the upper portion and the lower portion opened, the lower end of the box body is communicated with a storage box, a mounting frame is arranged in the box body, a fixing plate is fixed to the mounting frame, a sliding plate capable of being adjusted in a sliding mode is further arranged, and the two ends of a mask plate are fixed to the fixing plate and the sliding plate in an adhesive mode respectively; rotating shafts which are coaxial with each other are arranged at the two ends of the mounting frame respectively, and the rotating shafts are rotatably mounted on the box body; the spraying pipes are arranged on the two opposite sides of the box body respectively, the spraying pipes on the two sides can spray etching liquid to the two sides of the mask plate, double-face etching is achieved, and compared with single-face etching in the prior art, the etching efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the field of mask etching, and in particular relates to high-precision metal mask double-sided etching equipment. Background Art

[0002] Etching is a technique that uses chemical reactions or physical impact to remove materials. It is divided into two categories: wet etching and dry etching. Among them, wet etching is widely used in the etching of metals and masks. Wet etching is to use a suitable chemical solution to corrode and remove the parts of the material that are not covered by the photoresist to achieve a certain engraving depth (or etching through). In the process of wet etching of the metal mask, the etching liquid is sprayed on the surface of the metal mask using a nozzle to achieve the purpose of etching multiple through holes. At present, in the actual production process, a nozzle is usually used to spray the etching liquid on one side of the metal mask, but the single-sided spraying of the etching liquid can no longer meet the needs of production efficiency. Utility Model Content

[0003] In view of the deficiencies in the prior art, the purpose of the utility model is to provide a high-precision metal mask double-sided etching device to solve the problems in the prior art.

[0004] The purpose of the utility model can be achieved through the following technical solutions:

[0005] A high-precision metal mask double-sided etching device, comprising a box body which is open at the top and the bottom, a storage box is connected to the lower end of the box body, a mounting frame is arranged in the box body, a fixed plate is fixed on the mounting frame, and a sliding plate which can be slidably adjusted is also arranged, and the two ends of the mask are respectively bonded and fixed to the fixed plate and the sliding plate;

[0006] Coaxial rotating shafts are respectively arranged at both ends of the mounting frame, and the rotating shafts are rotatably mounted on the box body; a plurality of spray pipes are respectively arranged on the opposite sides of the box body, and the spray pipes on both sides can spray the etching liquid on both sides of the mask plate to realize double-sided etching, which improves the etching efficiency compared with the single-sided etching in the prior art.

[0007] Furthermore, a nozzle is provided at one end of the spray pipe, and the other end is located in a storage box. A pump is provided in the storage box to spray the etching liquid in the storage box onto both sides of the mask through the spray pipes on both sides.

[0008] Furthermore, a mounting groove is provided at the upper end of the storage box, and a filter plate is mounted in the mounting groove.

[0009] Furthermore, a connecting plate is respectively provided on both sides of the lower end of the box body, and the two connecting plates are fixed to the storage box by bolt connection.

[0010] Furthermore, a driving assembly is provided on the outside of the box body, and the driving assembly includes a gear fixed on the rotating shaft. A rack is slidably connected to the outside of the box body, and the rack and the gear are meshed with each other. Two mounting seats are provided on the outside of the box body, and a rotatable screw rod is provided between the two mounting seats. The screw rod passes through the rack and is threadedly connected to it.

[0011] Furthermore, the thread lead angle of the screw rod is smaller than the equivalent friction angle.

[0012] Furthermore, a T-shaped slot is provided on the mounting frame, a slider matching the T-shaped slot is provided at the lower end of the sliding plate, a bolt is provided on the sliding plate, the bolt passes through the sliding plate in a vertical direction and is threadedly connected to the sliding plate, and the bolt is turned to make its end tightly against the mounting frame, thereby achieving relative fixation between the sliding plate and the mounting frame.

[0013] Furthermore, an upper cover is fixed to the upper end of the box body by bolts.

[0014] Beneficial effects of the utility model:

[0015] 1. By setting a fixing component in the box to fix masks of different sizes, and setting a rotating shaft on the mounting frame to cooperate with the driving component to adjust the flipping state of the mask, and by setting multiple spray pipes on the opposite sides of the box, the etching liquid is sprayed on both sides of the mask to achieve double-sided etching, which improves the etching efficiency compared with the single-sided etching in the prior art.

[0016] 2. By connecting and setting a storage box at the lower end of the box body, one end of the spray pipe is located in the storage box, and the etching liquid can fall back into the storage box and be circulated under the action of the pump and the spray pipe.

[0017] 3. By setting a filter plate at the upper end of the storage box, the recovered etching liquid is filtered and treated to intercept impurities, thereby ensuring the quality of the recycling of the etching liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the utility model or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0020] Figure 2 It is a schematic diagram of the box structure of the utility model;

[0021] Figure 3 It is a schematic diagram of the internal structure of the box of the utility model;

[0022] Figure 4 It is a schematic diagram of the structure of the fixed component of the utility model;

[0023] Figure 5 It is a schematic diagram of the storage box structure of the utility model;

[0024] Figure 6 It is a schematic diagram of the structure of the drive assembly of the utility model. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] like Figures 1 to 3 As shown, a high-precision metal mask double-sided etching device comprises a box body 1, the upper and lower ends of the box body 1 are open, and the upper end of the box body 1 is fixed with an upper cover 3 by bolt connection to cover the upper end of the box body 1; a storage box 2 is arranged at the lower end of the box body 1, and a plurality of spray pipes 5 are arranged on opposite sides of the storage box 1, one end of the spray pipe 5 is provided with a nozzle, and the other end is located in the storage box 2, and a pump is arranged in the storage box 2 to spray the etching liquid in the storage box 2 on the two sides of the mask through the spray pipes 5 on both sides, so as to realize double-sided etching, which improves the etching efficiency compared with the single-sided etching in the prior art;

[0027] Moreover, the storage box 2 is connected to the box body 1, and after the mask is etched in the box body 1, the etching liquid can fall back into the storage box 2, which is convenient for recycling; in this embodiment, Figure 5 As shown, a mounting groove 21 is provided at the upper end of the storage box 2, and a filter plate 7 is installed in the mounting groove 21. The etching liquid falling from the box body 1 passes through the filter plate 7 to filter out impurities and then enters the storage box 2. Under the action of the pump and the spray pipe, the etching liquid is recycled.

[0028] In this embodiment, a connecting plate 11 is respectively provided on both sides of the lower end of the box body 1, and the two connecting plates 11 are fixed to the storage box 2 by bolt connection. Specifically, the bolts penetrate the connecting plates 11 and are screwed into the threaded holes at the upper ends of the storage box 2 to achieve a detachable fixed connection between the box body 1 and the storage box 2, so as to facilitate the disassembly, replacement and cleaning of the filter plate 7.

[0029] A fixing assembly 4 is provided in the box 1, and the fixing assembly 4 is used to fix the mask. Figure 4As shown, the fixing assembly 4 includes a mounting frame 41 in a square frame structure, a fixing plate 43 is fixed to the upper end of the mounting frame 41, a sliding plate 44 that can be slidably adjusted is arranged on the mounting frame 41, and both ends of the mask are respectively bonded and fixed to the fixing plate 43 and the sliding plate 44. During use, the position of the sliding plate 44 can be adjusted according to the length of the mask.

[0030] In this embodiment, a T-shaped slide groove 411 is provided on the mounting frame 41, and a slider matching the T-shaped slide groove 411 is provided at the lower end of the sliding plate 44. A bolt is provided on the sliding plate 44, and the bolt passes through the sliding plate 44 in the vertical direction and is threadedly connected with the sliding plate 44. By screwing the bolt so that its end is in close contact with the mounting frame 41, the relative fixation between the sliding plate 44 and the mounting frame 41 can be achieved. By loosening the bolt, the position of the sliding plate 44 can be adjusted.

[0031] A rotating shaft 42 is respectively provided at both ends of the mounting frame 41. The two rotating shafts 42 are coaxial with each other and are both rotatably connected to the ground box 1. During the etching operation, the mounting frame 41 is controlled to rotate around the rotating shaft 42 to Figure 3 The sideways position shown enables the spray pipes 5 on both sides of the box 1 to perform double-sided etching on the mask; when the mask needs to be installed, the mounting frame 41 is controlled to flip to a horizontal position to facilitate the installation and fixing of the mask.

[0032] In this embodiment, a driving assembly 6 is disposed on the outer side of the box body 1 to drive the mounting frame 41 to flip around the rotating shaft 42; Figure 6 As shown, the driving assembly 6 includes a gear 61 fixed on the rotating shaft 42, a rack 62 is slidably connected to the outer side of the box body 1, the rack 62 and the gear 61 are meshed with each other, two mounting seats 63 are arranged on the outer side of the box body 1, a screw rod 64 is rotatably connected between the two mounting seats 63, the screw rod 64 passes through the rack 62 and is threadedly connected thereto, and a motor is arranged on one of the mounting seats 63 to drive the screw rod 64 to rotate, so that the rack 62 can be driven to slide, thereby realizing the turning of the mounting frame 41 around the rotating shaft 42;

[0033] It is worth mentioning that in order to ensure that the mounting frame 41 drives the mask to maintain a stable state after flipping and adjustment, the screw rod 64 needs to have self-locking properties, that is, the thread lead angle of the screw rod 64 is smaller than the equivalent friction angle.

[0034] Of course, the method of driving the mounting frame 41 to flip around the rotating shaft 42 includes but is not limited to the driving component 6 in this embodiment. In some embodiments, a motor can be arranged on the outside of the box body 1 to directly drive the rotating shaft 42 to rotate, so as to realize the flipping adjustment of the mounting frame 41 and even the mask.

[0035] Working principle:

[0036] By setting a fixing component 4 in the box body 1 to fix masks of different sizes, and setting a rotating shaft 42 on the mounting frame 41 to cooperate with the driving component 6 to adjust the flipping state of the mask, and by setting a plurality of spraying pipes 5 on the opposite sides of the box body 1, the etching liquid is sprayed on both sides of the mask to achieve double-sided etching, which improves the etching efficiency compared with the single-sided etching in the prior art. By connecting the storage box 2 at the lower end of the box body 1, one end of the spraying pipe 5 is located in the storage box 2, and the etching liquid can fall back into the storage box 2 and be recycled under the action of the pump and the spraying pipe 5. By setting a filter plate 7 at the upper end of the storage box 2, the recovered etching liquid is filtered and treated to intercept impurities, thereby ensuring the quality of the recycling of the etching liquid.

[0037] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0038] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A high-precision metal mask double-sided etching device, comprising a box (1) open at both the top and the bottom, characterized in that: The lower end of the box body (1) is connected to a storage box (2), a mounting frame (41) is arranged inside the box body (1), a fixing plate (43) is fixed on the mounting frame (41), and a sliding plate (44) capable of sliding adjustment is also arranged, and two ends of the mask are respectively bonded and fixed to the fixing plate (43) and the sliding plate (44); Coaxial rotating shafts (42) are respectively arranged at both ends of the mounting frame (41), and the rotating shafts (42) are rotatably mounted on the box body (1); and a plurality of spraying pipes (5) are respectively arranged on opposite sides of the box body (1), and the spraying pipes (5) on both sides can spray etching liquid on both sides of the mask.

2. A high-precision metal mask double-sided etching device according to claim 1, characterized in that: One end of the spray pipe (5) is provided with a spray head, and the other end is located in the storage box (2). A pump is provided in the storage box (2) to spray the etching liquid in the storage box (2) onto both sides of the mask through the spray pipes (5) on both sides.

3. The high-precision metal mask double-sided etching equipment according to claim 2, characterized in that: The upper end of the storage box (2) is provided with a mounting groove (21), and a filter plate (7) is mounted in the mounting groove (21).

4. A high-precision metal mask double-sided etching device according to claim 1 or 3, characterized in that: A connecting plate (11) is provided on both sides of the lower end of the box body (1), and the two connecting plates (11) are fixed to the storage box (2) by bolt connection.

5. The high-precision metal mask double-sided etching equipment according to claim 1, characterized in that: A driving assembly (6) is arranged on the outer side of the housing (1), the driving assembly (6) comprising a gear (61) fixed on the rotating shaft (42), a rack (62) is slidably connected to the outer side of the housing (1), the rack (62) and the gear (61) are meshed with each other, two mounting seats (63) are arranged on the outer side of the housing (1), a rotatable screw rod (64) is arranged between the two mounting seats (63), and the screw rod (64) passes through the rack (62) and is threadedly connected thereto.

6. The high-precision metal mask double-sided etching equipment according to claim 5, characterized in that: The thread lead angle of the screw rod (64) is smaller than the equivalent friction angle.

7. The high-precision metal mask double-sided etching equipment according to claim 1, characterized in that: The mounting frame (41) is provided with a T-shaped slide groove (411), and a sliding block matched with the T-shaped slide groove (411) is provided at the lower end of the sliding plate (44). The sliding plate (44) is provided with a bolt, which passes through the sliding plate (44) in a vertical direction and is threadedly connected with the sliding plate (44). By screwing the bolt, the end of the bolt is tightly attached to the mounting frame (41), so that the sliding plate (44) and the mounting frame (41) are relatively fixed.

8. The high-precision metal mask double-sided etching equipment according to claim 1, characterized in that: An upper cover (3) is fixed to the upper end of the box body (1) by means of bolts.

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