Chemical vapor deposition equipment, heating lamp assembly and heating lamp mounting assembly

Abstract

A chemical vapor deposition apparatus, a heating lamp assembly and a heating lamp mounting assembly wherein the heating lamp assembly comprises: a mounting member comprising a plurality of mounting holes; and the heating lamp modules comprise reflecting covers and heating lamps arranged in the reflecting covers, the bottoms of the reflecting covers are provided with openings, the heating lamp modules are arranged in the mounting holes, and the heating lamps irradiate through the openings. The adjusting capacity of the heating lamp assembly is high.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, in particular to a chemical vapor deposition device, a heating lamp component and a heating lamp installation component. Background Art

[0002] Semiconductor substrates can be processed for a variety of applications, including the manufacture of integrated devices and micro-devices. During processing, the substrate is located on a susceptor within a processing chamber. Precise control of the heat source is preferred to uniformly heat the substrate within tight tolerances. The temperature of the substrate can affect the uniformity of the material deposited on the substrate.

[0003] The ability to accurately control the temperature of substrates within a processing chamber has a significant impact on throughput and production yield. However, conventional heat lamp assemblies in processing equipment have poor regulation capabilities, and therefore, there is a pressing need for an improved heat lamp assembly that improves regulation capabilities. Summary of the invention

[0004] The technical problem solved by the utility model is to provide a chemical vapor deposition device, a heating lamp assembly and a heating lamp installation assembly to improve the adjustment capability of the heating lamp assembly.

[0005] To solve the above technical problems, the utility model provides a heating lamp mounting assembly for a heating lamp assembly, comprising: a mounting piece, which includes a plurality of mounting holes; a reflective cover, which is arranged in the mounting holes, and the bottom of the reflective cover has an opening, and the reflective cover is used to accommodate the heating lamp.

[0006] Optionally, the mounting hole is a blind hole, the bottom of the blind hole is made of a material that is permeable to heat radiation; and the inner wall of the mounting hole is coated with a reflective layer.

[0007] Optionally, the mounting hole is a mounting through hole; the material of the mounting piece includes: aluminum, and the inner side wall of the mounting through hole is coated with a reflective layer.

[0008] Optionally, the material of the reflector includes: one or a combination of copper, nickel, brass, bronze, silver, gold or aluminum.

[0009] Optionally, the mounting member includes a plurality of circles of heating areas arranged radially, and each of the heating areas includes a plurality of the mounting holes.

[0010] Optionally, the heating lamp mounting assembly includes a plurality of reflective covers, wherein the inner surface of the reflective cover has a reflective surface, and the reflective surface is used to reflect the light of the heating lamp, and the reflective surfaces of at least two of the plurality of reflective covers are different.

[0011] Optionally, the heating lamp is used to heat the substrate; the mounting piece is a dome-shaped structure, and the opening faces the substrate.

[0012] Optionally, the radius of curvature of the dome-shaped structure is greater than or equal to 100 mm.

[0013] Optionally, the dome-shaped structure includes a central area and a peripheral area surrounding the central area.

[0014] Optionally, the central area is sunken toward the center of the circle relative to the peripheral area.

[0015] Optionally, the central area is a planar structure; and the peripheral area is an arc-shaped structure.

[0016] Optionally, the central area is a first arc-shaped structure; and the peripheral area is a second arc-shaped structure.

[0017] Optionally, the radius of curvature of the first arc-shaped structure is greater than or equal to 100 mm; the radius of curvature of the second arc-shaped structure is greater than or equal to 100 mm.

[0018] Optionally, both the central area and the peripheral area are planar structures.

[0019] Optionally, both the central area and the peripheral area are planar structures, and the peripheral area forms an obtuse angle with the central area.

[0020] Optionally, different reflectors have different reflective surfaces.

[0021] Correspondingly, the utility model also provides a heating lamp assembly for chemical vapor deposition equipment, comprising: the above-mentioned heating lamp installation assembly; a heating lamp, which is placed in the reflecting cover.

[0022] Optionally, the heating lamp includes a middle heating section and connecting pieces extending from both ends of the middle heating section in the same direction.

[0023] Optionally, along a length direction perpendicular to the intermediate heating section, the reflector cover includes a first reflective portion, a second reflective portion and a fastener for fixing the first reflective portion and the second reflective portion, the first reflective portion has two first grooves, the second reflective portion has two second grooves, the second grooves correspond to the first grooves one by one, and when the fastener fixes the first reflective portion and the second reflective portion, the first groove and the second groove are arranged relative to each other to form a wiring hole, the wiring hole exposes the connector, the top of the first reflective portion and the top of the second reflective portion match above the intermediate heating section to close the top of the intermediate heating section, and the bottom of the first reflective portion and the bottom of the second reflective portion match each other below the intermediate heating section to form the opening.

[0024] Optionally, the wiring hole and the opening are arranged on opposite sides of the reflector.

[0025] Optionally, the first reflecting portion and the second reflecting portion are plate-shaped structures.

[0026] Optionally, the first reflecting portion includes a first reflecting top and a first reflecting side portion extending downward from the first reflecting top; the second reflecting portion includes a second reflecting top and a second reflecting side portion extending downward from the second reflecting top; the first reflecting top and the second reflecting top cooperate with each other to close the top of the intermediate heating section, and the bottom of the first reflecting side portion and the bottom of the second reflecting side portion match each other to form the opening.

[0027] Optionally, the first reflecting side portion and the second reflecting side portion are arranged opposite to each other along a length direction perpendicular to the middle heating section, and surround a side wall of the middle heating section.

[0028] Optionally, the first reflecting side portion and the second reflecting side portion are arranged opposite to each other along a length direction parallel to the middle heating section, and surround a side wall of the middle heating section.

[0029] Optionally, the first reflecting part also has a third groove, and the second reflecting part also has a fourth groove, and the fourth groove is arranged opposite to the third groove. When the fastener fixes the first reflecting part and the second reflecting part, the third groove and the fourth groove are arranged opposite to each other to form an air inlet groove. The heating lamp module is placed in the mounting hole to expose the air inlet groove, and the air inlet groove is used to input cooling gas into the reflecting cover; the heating lamp assembly includes a plurality of fins, which are located above the reflecting cover, and an air duct is formed between adjacent fins, and the air duct is connected to the air inlet groove.

[0030] Optionally, the heating lamp is a U-shaped lamp, a strip lamp or a point lamp.

[0031] Correspondingly, the utility model also provides a chemical vapor deposition device, comprising: a reaction chamber, a first opening is provided on the upper part thereof, and a second opening is provided on the lower part thereof; an upper cover which is permeable to heat radiation, connected with the first opening and arranged above the reaction chamber; a lower cover which is permeable to heat radiation, connected with the second opening and arranged below the reaction chamber, the upper cover, the lower cover and the reaction chamber enclosing a processing space, the processing space being used to accommodate a substrate and perform a process on the substrate;

[0032] The heating lamp assembly is arranged at least one of above the upper cover and below the lower cover, and is used to heat the substrate.

[0033] Compared with the prior art, the technical solution of the embodiment of the utility model has the following beneficial effects:

[0034] In the heating lamp assembly for chemical vapor deposition equipment provided by the technical solution of the utility model, the heating lamp assembly includes: a mounting part, the mounting part includes a plurality of mounting holes, each of the mounting holes is used to accommodate a reflector, and the reflector accommodates a heating lamp. Since the reflectors do not affect each other and each can be provided with a reflector with a different reflective surface according to needs, the heating lamp assembly has a strong adjustment capability. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a structural schematic diagram of a chemical vapor deposition device of the utility model;

[0036] Figure 2 This is a top view of a heating lamp assembly of the utility model;

[0037] Figure 3 yes Figure 2 Schematic diagram of the cross-section structure along line AA;

[0038] Figure 4 This is an exploded view of a heating lamp module of the utility model;

[0039] Figure 5 yes Figure 4 Schematic diagram of the heating lamp module assembly structure;

[0040] Figure 6 It is a schematic diagram of the cross-sectional structure of a mounting piece of the utility model;

[0041] Figure 7 It is a three-dimensional structural schematic diagram of another mounting piece of the utility model;

[0042] Figure 8 yes Figure 7 Schematic diagram of the cross-section structure along line BB;

[0043] Fig. 9 It is a cross-sectional structural schematic diagram of another mounting member of the utility model;

[0044] Fig.10 It is a cross-sectional structural schematic diagram of another mounting member of the utility model;

[0045] Fig.11 It is a cross-sectional structural schematic diagram of another mounting member of the utility model;

[0046] Fig.12 It is an exploded view of another heating lamp module of the utility model;

[0047] Fig.13 yes Fig.12 Schematic diagram of the heating lamp module assembly structure;

[0048] Fig.14This is an exploded view of another heating lamp module of the utility model;

[0049] Fig.15 yes Fig.14 Schematic diagram of the heating lamp module assembly structure. DETAILED DESCRIPTION

[0050] As described in the background art, the heating lamp assembly in the existing chemical vapor deposition equipment has poor adjustment capability and low heating efficiency.

[0051] In order to solve the above technical problems, the technical solution of the utility model provides a chemical vapor deposition device and a heating lamp assembly thereof, wherein the heating lamp assembly includes a mounting member, and the mounting member includes a plurality of mounting holes, each of which is equipped with a reflector and a heating lamp placed in the reflector. In this way, the shape of each of the reflective plates can be adjusted as needed to adjust the temperature of different areas, so the adjustment ability is strong and the heating efficiency is high.

[0052] In order to make the above-mentioned objects, features and beneficial effects of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0053] Figure 1 The utility model is a structural schematic diagram of a chemical vapor deposition device.

[0054] Please refer to Figure 1 The chemical vapor deposition equipment includes: a reaction chamber 10, in which a base 11 is arranged, and the base 11 is used to carry a substrate W; an upper cover 12 that is permeable to heat radiation and is arranged above the base 11; a lower cover 13 that is permeable to heat radiation and is arranged below the base 11, and the upper cover 12, the reaction chamber 10 and the lower cover 13 form a closed processing space, and the processing space is used to deposit a thin film on the surface of the substrate W; a heating lamp assembly 15 arranged above the upper cover 12 that is permeable to heat radiation, and is used to heat the surface of the substrate W; a heating lamp assembly 15 arranged below the upper cover 12 that is permeable to heat radiation, and is used to heat the back of the substrate W.

[0055] The upper cover 12 that is permeable to heat radiation is fixedly connected to the reaction chamber 10, and the lower cover 13 that is permeable to heat radiation is fixedly connected to the reaction chamber 10. The chemical vapor deposition equipment also includes: a process gas inlet 14 and a process gas outlet 16 arranged between the upper cover 12 that is permeable to heat radiation and the lower cover 13 that is permeable to heat radiation, and the process gas inlet 14 and the process gas outlet 16 are respectively arranged on opposite sides of the reaction chamber 10.

[0056] The heating lamp assembly 15 above the upper cover 12 that is permeable to heat radiation is fixedly connected to the reaction chamber 10 above the upper cover 12 that is permeable to heat radiation, and the heating lamp assembly 15 below the lower cover 13 that is permeable to heat radiation is fixedly connected to the reaction chamber 10 below the lower cover 13 that is permeable to heat radiation. The upper cover 12 is an upper dome and is formed of an energy transmission material such as quartz; the lower cover 13 is a lower dome and is formed of an energy transmission material such as quartz. The heat of the heating lamp assembly 15 above the upper cover 12 passes through the upper cover 12 to reach the surface of the substrate, heating the surface of the substrate W, and the heat of the heating lamp assembly 15 above the lower cover 13 passes through the lower cover 13 to reach the back of the substrate, heating the back of the substrate W. When the process gas enters the processing space through the process gas inlet 14, it reaches the surface of the substrate W and reacts due to the heat, forming a thin film on the surface of the substrate W.

[0057] Please refer to Figure 1 The heating lamp assembly 15 includes: a mounting member 151, which includes a plurality of mounting through holes extending through the thickness thereof; a plurality of heating lamp modules 152, wherein the heating lamp module 152 includes: a reflector and a heating lamp disposed in the reflector, wherein the bottom of the reflector has an opening, the heating lamp module is disposed in the mounting through hole, and the heating lamp irradiates through the opening. The distribution of the heating lamp modules determines the distribution of the surface temperature of the substrate W, and accurate control of the distribution of the heating lamp modules is conducive to improving the temperature uniformity of the surface of the substrate W.

[0058] Please refer to Figure 1 The heating lamp mounting assembly includes: a mounting member 151, which includes a plurality of mounting through holes that penetrate the thickness thereof; a reflector, which is disposed in the mounting hole, and has an opening at the bottom of the reflector, and is used to accommodate the heating lamp. The heating lamp mounting assembly includes a plurality of reflectors, and the inner surface of the reflector has a reflective surface, and the reflective surface is used to reflect the light of the heating lamp. At least two of the plurality of reflectors have different reflective surfaces. Therefore, the shape of the reflective surface of the reflector can be set according to actual needs, so that the ability to adjust the surface temperature of the substrate W is stronger. Since the reflective ability of the reflector is stronger, more light is reflected to the surface of the substrate, which is beneficial to improve the heating efficiency of the substrate.

[0059] The heating lamp assembly 15 is described in detail as follows:

[0060] Figure 2 yes Figure 1 A top view of the heating lamp assembly; Figure 3 yes Figure 2 Schematic diagram of the cross-sectional structure along line AA.

[0061] Please refer to Figure 2 and Figure 3 The heating lamp assembly 15 includes: a mounting member 151, which includes a plurality of mounting through holes extending through the thickness thereof; a plurality of heating lamp modules 152, wherein the heating lamp module 152 includes: a reflective cover and a heating lamp disposed in the reflective cover, wherein the bottom of the reflective cover has an opening, the heating lamp module is disposed in the mounting through hole, and the heating lamp irradiates through the opening.

[0062] like Figure 2 As shown, the mounting member 151 includes a plurality of heating areas arranged radially, and each heating area includes a plurality of mounting through holes. In this embodiment, the mounting member 151 includes four heating areas, each heating area includes a plurality of mounting through holes, and each mounting through hole is used to mount the heating lamp assembly 15.

[0063] In one embodiment, the fixing method between the mounting member and the heating lamp module is as follows: the inner side wall of the mounting through hole has a boss extending outward, the boss is used to carry the heating lamp module, and the mounting member is fixedly connected to the heating lamp module to prevent the heating lamp module from sliding on the boss. In addition, the opening is formed between the bosses, so that after the heating lamp module 152 is placed on the boss, it can still irradiate the surface of the substrate W from the opening.

[0064] In another embodiment, the mounting member and the heating lamp module are matched with each other through a convex-concave design, that is: a groove is provided on the mounting member, and a protrusion matching the groove is provided on the outer wall of the heating lamp module, or a protrusion is provided on the mounting member, and a groove matching the protrusion is provided on the outer wall of the heating lamp module.

[0065] The fixing method between the heating lamp module and the mounting member may also be other connection methods, which are not limited here.

[0066] The heating lamp module is described in detail as follows:

[0067] Figure 4 This is an exploded view of a heating lamp module of the utility model; Figure 5 yes Figure 4 Schematic diagram of the heating lamp module assembly structure.

[0068] Please refer to Figure 4 and Figure 5 The heating lamp module 452 includes: a reflective cover and a heating lamp 4522 placed in the reflective cover. The bottom of the reflective cover has an opening 4523. The heating lamp module 452 is arranged in the mounting through hole, and the heating lamp 4522 irradiates through the opening 4523.

[0069] In this embodiment, the heating lamp 4522 is a U-shaped lamp. Specifically, the heating lamp 4522 includes: an intermediate heating section 4522a and a connecting piece 4522b extending from both ends of the intermediate heating section 4522a in the same direction. The intermediate heating section 4522a has a heating lamp for heating the substrate W, and the connecting piece 4522b is used to electrically connect to an external power source to transmit electrical energy to the intermediate heating section 4522a. In fact, the heating lamp is not limited and can also be a strip lamp or a point lamp.

[0070] In this embodiment, the reflector includes a first reflective portion 4521a, a second reflective portion 4521b, and a fastener 4521c fixedly connecting the first reflective portion 4521a and the second reflective portion 4521b. The first reflective portion 4521a has two first grooves 4521d, and the second reflective portion 4521b has two second grooves 4521e. The second grooves 4521e correspond to the first grooves 4521d one by one. When the fastener 4521c fixes the first reflective portion 4521a and the second reflective portion 4521b, the first reflective portion 4521a and the second reflective portion 4521b are fixedly connected. When the second reflecting portion 4521b is formed, the first groove 4521d and the second groove 4521e are arranged opposite to each other to form a wiring hole, and the wiring hole exposes the top of the connecting piece 4522b, the first reflecting portion 4521a and the second reflecting portion 4521b are matched above the middle heating section 4522a to close the top of the middle heating section 4522a, and the first reflecting portion 4521a and the second reflecting portion 4521b are matched with each other below the middle heating section 4522a to form the opening 4523.

[0071] In this embodiment, the first reflecting portion 4521a includes: a first reflecting top and a first reflecting side portion extending downward from the first reflecting top; the second reflecting portion 4521b includes a second reflecting top and a second reflecting side portion extending downward from the second reflecting top; and the first reflecting portion 4521a includes not only the first reflecting side portion parallel to the length direction of the intermediate heating section 4522a, but also includes the first reflecting side portion perpendicular to the length direction of the intermediate heating section 4522a. Similarly, the second reflecting portion 4521b includes not only the second reflecting side portion parallel to the length direction of the intermediate heating section 4522a, but also includes the second reflecting side portion perpendicular to the length direction of the intermediate heating section 4522a, that is, the upper part of the intermediate heating section 4522a is blocked by the first reflecting top and the second reflecting top, and the two ends and side walls of the intermediate heating section 4522a are blocked by the first reflecting side portion and the second reflecting side portion. It can be seen that the reflecting cover has a strong shielding ability for the heating lamp 4522, preventing the heat of the heating lamp 4522 from dissipating in undesirable places, which is beneficial to improving the utilization rate of the heating lamp 4522.

[0072] The inner surfaces of the first reflective top, the first reflective side, the second reflective top and the second reflective side together constitute the reflective surface of the reflector. Therefore, according to actual needs, the inner surface of at least one of the first reflective top, the first reflective side, the second reflective top and the second reflective side can be adjusted to obtain a reflector with different reflective surfaces. In addition, the adjustment of the inner surfaces of the first reflective top, the first reflective side, the second reflective top and the second reflective side enables the reflector to flexibly adjust the three-dimensional angle of the light of the heating lamp 4522. Since the reflector includes not only the first reflective top and the second reflective top, but also the first reflective side and the second reflective side, the light of the heating lamp can be reflected not only by the inner surfaces of the first reflective top and the second reflective top, but also by the inner surfaces of the first reflective side and the second reflective side, so that more light reaches the substrate, which is beneficial to improve the heating efficiency of the substrate.

[0073] Since the reflector has a good light shielding effect in this embodiment, the inner surface of the mounting member may not be provided with a reflective layer. Of course, in order to achieve a better light reflection effect, a reflective layer may be applied to the inner side wall of the mounting hole, and the reflective layer is used to reflect the light leaking from the joint of the first reflective top and the second reflective top, and the light leaking from the air inlet groove 4525, so that more light is reflected to the surface of the substrate, which is conducive to better improving the heating efficiency of the substrate.

[0074] The reflector further includes an air inlet groove 4525 . The heating lamp module 452 is placed in the mounting hole to expose the air inlet groove 4525 . The air inlet groove 4525 is used to input cooling gas into the reflector to cool the heating lamp 4522 .

[0075] In this embodiment, the air inlet groove 4525 is arranged on the first reflective side portion and the second reflective side portion, so that the light leakage of the air inlet groove 4525 is small, so that more heat is reflected to the surface of the substrate, which is conducive to improving the heating efficiency of the substrate. In fact, the position of the air inlet groove 4525 is not limited, and it can also be arranged on the top of the reflector.

[0076] The mounting member 151 includes a plurality of mounting through holes extending through the thickness thereof. A heating lamp module 452 is disposed in each of the mounting through holes. When the heating lamp module 452 is installed in the mounting through hole, the opening 4523 faces the substrate W for heating the substrate W.

[0077] The material of the reflector includes: one or a combination of copper, nickel, brass, bronze, silver, gold or aluminum. The reflector is used to reflect the heat of the heating lamp module 452 to the surface of the substrate W.

[0078] In one embodiment, the material of the reflector can be made of one material, such as aluminum or steel. In another embodiment, the reflector is formed of a first material (such as aluminum or steel) and is plated with a second material. The second material can be any one of copper, nickel, brass, bronze, silver, gold, aluminum or an alloy thereof. The second material can be polished to increase reflectivity. In one embodiment, the entire reflector is formed of the second material.

[0079] Since each of the heating lamp modules 452 has an independent reflector, reflectors with different reflective surfaces can be installed in different mounting holes of the mounting member 151 according to actual needs, making the adjustment capability of the heating lamp modules 452 more flexible. Furthermore, if a heating lamp module 452 is damaged, only the damaged heating lamp module needs to be replaced, without replacing all the heating lamp modules 452, which is conducive to cost saving.

[0080] Figure 6 The utility model is a structural schematic diagram of a mounting piece.

[0081] In this embodiment, the material of the mounting member 651 includes aluminum alloy, the mounting member 651 includes a plurality of mounting through holes 6511 extending through the thickness thereof, the inner sidewalls of the mounting through holes 6511 are coated with a reflective layer, and the reflective layer material includes gold. Therefore, the inner sidewalls of the mounting through holes 6511 also have a reflective capability. Figure 5 middle) and the second reflecting portion 4521b (see Figure 5 The light that is leaked is irradiated on the inner wall of the mounting through hole 6511, which is beneficial to further reflect the heat to the surface of the substrate, and is beneficial to improve the heat utilization rate of the heating lamp module.

[0082] The mounting member 651 is a dome-shaped structure, that is, the mounting member 651 is an arc-shaped member protruding away from the surface of the substrate W. The significance of the mounting member 651 being designed as a dome-shaped structure is that, on the one hand, the dome-shaped structure is conducive to increasing the surface area of ​​the mounting member 651, arranging more heating lamps, and thus better controlling the temperature of the substrate surface; on the other hand, the dome structure has a tilt angle, which can reduce the tilt angle of the heating lamp module.

[0083] In this embodiment, the curvature radius of the mounting member 651 is greater than or equal to 100 mm. In other embodiments, the mounting member may also be a flat plate structure.

[0084] Figure 7 and Figure 8 This is a schematic diagram of the structure of another mounting member of the utility model; Figure 7It is a three-dimensional structural schematic diagram of another mounting piece of the utility model; Figure 8 for Figure 7 Schematic diagram of the cross-sectional structure along line BB.

[0085] Please refer to Figure 7 The mounting member 751 includes a central region C1 and a peripheral region C2 surrounding the central region C1. The central region C1 and the peripheral region C2 each include a plurality of heating regions, and each heating region includes a plurality of mounting holes 7511.

[0086] Please refer to Figure 8 The central area C1 is sunken and closer to the surface of the substrate than the peripheral area C2, which is conducive to better heating the central area of ​​the substrate.

[0087] In this embodiment, the central region C1 of the mounting member 751 is a flat plate structure, and the edge region C2 of the mounting member 751 is an arc structure, and the radius of curvature of the arc structure is greater than or equal to 100 mm.

[0088] Fig. 9 It is a schematic diagram of the cross-sectional structure of another mounting piece of the utility model.

[0089] Please refer to Fig. 9 The mounting member 851 includes a central region D1 and a peripheral region D2 surrounding the central region D1. The central region D1 and the peripheral region D2 each include a plurality of heating regions, and each heating region includes a plurality of mounting holes 8511.

[0090] In this embodiment, the central area D1 of the mounting member 851 is a first arc-shaped structure, and the edge area D2 of the mounting member 851 is a second arc-shaped structure. Since not only the central area D1 but also the edge area D2 of the mounting member 851 are arc-shaped structures, the surface area of ​​the mounting member 851 is large, which is conducive to the arrangement of more heating lamp modules. In addition, the first arc-shaped structure and the second arc-shaped structure both have an inclination angle, and the first arc-shaped structure and the second arc-shaped structure can be designed to have different curvature radii according to actual needs, which is conducive to improving the flexibility of adjusting the irradiation angle.

[0091] In addition, the central area D1 is sunken compared to the peripheral area, so that the central area D1 is closer to the surface of the substrate, and only lower power is needed to reach the required temperature, which is beneficial to reduce the power required for heating the substrate W as a whole.

[0092] Fig.10 It is a schematic diagram of the cross-sectional structure of another mounting piece of the utility model.

[0093] Please refer to Fig.10The mounting member 951 includes a central area E1 and a peripheral area E2 surrounding the central area E1.

[0094] In this embodiment, the central area E1 and the edge area E2 of the mounting member 951 form an obtuse angle α, and the range of the obtuse angle α is: 90 degrees to 180 degrees. A cooling device is arranged above the central area E1, and the cooling device is used to blow cold air to the surface of the mounting member 951. Since the outer surface of the central area E1 of the mounting member 951 and the outer surface of the edge area E2 are smoothly transitioned, there is no step formed by the sinking of the central area relative to the edge area to prevent the cold air from being blown from the central area E1 to the edge area E2, that is, the cold air can flow more easily from the central area E1 to the edge area E2, so that the cooling effect of the central area E1 and the edge area E2 of the mounting member 951 is better.

[0095] Fig.11 It is a schematic diagram of the cross-sectional structure of another mounting piece of the utility model.

[0096] Please refer to Fig.11 The mounting member 1051 includes a central region F1 and a peripheral region F2 surrounding the central region F1. The mounting member 1051 has a mounting hole 10511 for accommodating the heating lamp module.

[0097] In this embodiment, the central area F1 is sunken compared to the peripheral area, so that the central area F1 is closer to the surface of the substrate, and only lower power is needed to reach the required temperature, which is beneficial to reduce the power required for heating the substrate W as a whole.

[0098] In this embodiment, the central area F1 is a flat plate structure, the peripheral area F2 is a segmented flat plate structure, and further includes: an outermost area F3 located in the outer area F2, and the outermost area F3 is a flat plate structure. Since the central area F1, the peripheral area F2 and the outermost area F3 are all flat plate structures, the processing of the mounting member 1051 is simpler.

[0099] In the above embodiments, the mounting holes of the mounting parts are all mounting through holes that penetrate the thickness of the mounting parts. In fact, the mounting holes can also be blind holes, and the bottom of the blind holes is made of a material that can transmit heat radiation, such as quartz, so that the heat of the heating lamp module can pass through the bottom of the groove and irradiate to the surface of the substrate. Similarly, the inner side wall of the groove is provided with a reflective layer, such as gold, which is used to reflect the heat leaked by the reflective cover, which is conducive to improving the heat utilization rate of the heating lamp module.

[0100] Accordingly, the present invention also provides a chemical vapor deposition device, please refer to Figure 1, comprising: a reaction chamber 10, with a first opening on the top and a second opening on the bottom; an upper cover 12 that is permeable to heat radiation, connected to the first opening and arranged on the reaction chamber 10; a lower cover 13 that is permeable to heat radiation, connected to the second opening and arranged on the reaction chamber 10, the upper cover 12, the reaction chamber 10 and the lower cover 13 enclose the processing space; the above-mentioned heating lamp assembly 15 is arranged above the upper cover 12 and is used to heat the surface of the substrate; the heating lamp assembly 15 is arranged below the lower cover 13 and is used to heat the substrate.

[0101] In this embodiment, the heating lamp assembly 15 is disposed above the upper cover 12 and below the lower cover 13. Since each heating lamp assembly 15 is independent of each other, the shape of the reflector in each heating lamp assembly 15 can be set as needed, so the adjustment capability is strong. In addition, the heating lamp assembly 15 is not only disposed above the upper cover 12, but also disposed below the lower cover 13, so that the temperature adjustment capability of the surface of the substrate W is stronger and the heating efficiency is higher.

[0102] In another embodiment, the heating lamp assembly may be disposed only above the upper cover. In yet another embodiment, the heating lamp assembly may be disposed only below the lower cover.

[0103] Fig.12 It is an exploded view of another heating lamp module of the utility model; Fig.13 yes Fig.12 Schematic diagram of the heating lamp module assembly structure.

[0104] The shape of the heating lamp 2522 is the same as that of the above embodiment and will not be described herein.

[0105] In this embodiment, along the length direction perpendicular to the middle heating section of the heating lamp 2522, the reflecting cover includes a first reflecting portion 2521, a second reflecting portion 2523 and a fastener for fixing and connecting the first reflecting portion 2521 and the second reflecting portion 2523, the first reflecting portion 2521 has two first grooves, the second reflecting portion 2523 has two second grooves, the second grooves correspond to the first grooves one by one, when the fastener fixes the first reflecting portion 2521 and the second reflecting portion 2523, the first grooves and the second grooves are arranged opposite to each other to form a wiring hole, the wiring hole exposes the connecting member, the top of the first reflecting portion 2521 and the top of the second reflecting portion 2523 match above the middle heating section to close the middle heating section, the bottom of the first reflecting portion 2521 and the bottom of the second reflecting portion 2523 match each other to form the opening. The heating lamp 2522 is used to heat the surface of the substrate through the opening.

[0106] Please refer to Fig.12 and Fig.13 The first reflecting portion 2521 includes a first reflecting top portion 2521a and a first reflecting side portion 2521b extending downward from the first reflecting top portion 2521a; the second reflecting portion 2523 includes a second reflecting top portion 2523a and a second reflecting side portion 2523b extending downward from the second reflecting top portion 2523a; the first reflecting top portion 2521a and the second reflecting top portion 2523a cooperate with each other to close the top of the intermediate heating section, and the bottom of the first reflecting side portion 2521b and the bottom of the second reflecting side portion 2523b match each other to form the opening. The heating lamp 2522 is used to heat the surface of the substrate through the opening.

[0107] Along the length direction perpendicular to the intermediate heating section, the first reflecting side portion 2521b and the second reflecting side portion 2523b are arranged opposite to each other and surround the side wall of the intermediate heating section. The reflecting cover does not include the reflecting side portions at both ends of the intermediate heating section, so that the size of the reflecting cover along the length direction of the intermediate heating section is smaller, and more lamps can be arranged on the mounting member with the same surface area, which is beneficial to improving the temperature uniformity of the substrate surface. Alternatively, the size of the mounting member along the length direction of the intermediate heating section can be made smaller, so that heating lamps that meet the process requirements can be arranged.

[0108] The first reflecting portion 2521 further has a third groove, and the second reflecting portion 2523 further has a fourth groove, and the fourth groove is arranged opposite to the third groove. When the fastener fixes the first reflecting portion 2521 and the second reflecting portion 2523, the third groove and the fourth groove are arranged opposite to each other to form an air inlet groove 2525 (see Fig.13 ), the heating lamp module is placed in the mounting hole to expose the air inlet groove 2525, and the air inlet groove 2525 is used to input cooling gas into the reflector; the heating lamp assembly includes a plurality of fins 2524, which are located on the reflector, and an air channel is formed between adjacent fins 2524, and the air channel is connected to the air inlet groove. The arrangement of the fins 2524 allows more cooling gas to enter the air inlet groove 2525 and enter the reflector through the air channel, so as to better cool the heating lamp module 252.

[0109] Fig.14 This is an exploded view of another heating lamp module of the utility model; Fig.15 yes Fig.14 Schematic diagram of the heating lamp module assembly structure.

[0110] In this embodiment, the heating lamp 3522, the fins 3524, and the air inlet groove are the same as those in the above embodiment and are not described in detail here.

[0111] In this embodiment, the first reflecting part 3521 and the second reflecting part 3523 are plate-like structures, that is, the reflecting cover does not include side walls, so that the reflecting cover can be smaller not only in the length direction of the middle heating section, but also in the direction perpendicular to the length of the middle heating section, so that more lamps can be arranged on the mounting part with the same surface area, which is conducive to improving the temperature uniformity of the substrate surface. Alternatively, the mounting part can be smaller not only in the length direction of the middle heating section, but also in the direction perpendicular to the length of the middle heating section, so that the heating lamp module 352 that meets the process requirements can be arranged.

[0112] It should be noted that the bottoms of the first reflecting portion 3521 and the second reflecting portion 3523 of the plate-like structure are provided with arc-shaped surfaces for reflecting the light of the heating lamp to the surface of the substrate.

[0113] Correspondingly, the utility model also provides a heating lamp mounting assembly for a heating lamp assembly, comprising: a mounting piece, which includes a plurality of mounting holes; a reflective cover, which is arranged in the mounting holes, and the bottom of the reflective cover has an opening, and the reflective cover is used to accommodate the heating lamp.

[0114] Although the utility model is disclosed as above, the utility model is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the utility model. Therefore, the protection scope of the utility model shall be subject to the scope defined by the claims.

Claims

1. A heating lamp mounting assembly for a heating lamp assembly, characterized in that: include: A mounting member including a plurality of mounting holes; A reflective cover is arranged in the mounting hole, the bottom of the reflective cover has an opening, and the reflective cover is used to accommodate a heating lamp.

2. The heating lamp mounting assembly according to claim 1, characterized in that: The mounting hole is a blind hole, the bottom of which is made of a material that is permeable to heat radiation; and the inner side wall of the mounting hole is coated with a reflective layer.

3. The heating lamp mounting assembly according to claim 1, characterized in that: The mounting hole is a mounting through hole that penetrates the mounting member; the material of the mounting member includes: aluminum, and the inner side wall of the mounting through hole is coated with a reflective layer.

4. The heating lamp mounting assembly according to claim 1, characterized in that: The mounting member includes a plurality of heating areas arranged radially, and each of the heating areas includes a plurality of mounting holes.

5. The heating lamp mounting assembly according to claim 1, characterized in that: The heating lamp installation assembly comprises a plurality of reflective covers, the inner surface of the reflective cover has a reflective surface, and the reflective surface is used to reflect the light of the heating lamp, and at least two of the plurality of reflective covers have different reflective surfaces.

6. The heating lamp mounting assembly according to claim 1, characterized in that: The heating lamp is used to heat the substrate; the mounting piece is a dome-shaped structure, and the opening faces the substrate.

7. The heating lamp mounting assembly according to claim 6, characterized in that: The curvature radius of the dome-shaped structure is greater than or equal to 100 mm.

8. The heating lamp mounting assembly according to claim 7, characterized in that: The dome-shaped structure includes a central area and a peripheral area surrounding the central area.

9. The heating lamp mounting assembly according to claim 8, characterized in that: The central region is recessed toward the substrate relative to the peripheral region.

10. The heating lamp mounting assembly according to claim 9, characterized in that: The central area is a planar structure; the peripheral area is an arc structure.

11. The heating lamp mounting assembly according to claim 9, characterized in that: The central area is a first arc-shaped structure; the peripheral area is a second arc-shaped structure.

12. The heating lamp mounting assembly according to claim 11, wherein: The radius of curvature of the first arc-shaped structure is greater than or equal to 100 mm; the radius of curvature of the second arc-shaped structure is greater than or equal to 100 mm.

13. The heating lamp mounting assembly according to claim 9, characterized in that: The central area and the peripheral area are both planar structures.

14. The heating lamp mounting assembly according to claim 8, wherein: The central area and the peripheral area are both planar structures, and the peripheral area forms an obtuse angle with the central area.

15. The heating lamp mounting assembly according to claim 5, characterized in that: Different reflectors have different reflective surfaces.

16. A heating lamp assembly for chemical vapor deposition equipment, characterized in that: include: The heating lamp mounting assembly according to any one of claims 1 to 15; The heating lamp is placed in the reflecting cover.

17. The heating lamp assembly according to claim 16, wherein: The heating lamp comprises a middle heating section and connecting pieces extending from two ends of the middle heating section in the same direction.

18. The heating lamp assembly according to claim 17, wherein: Along the length direction perpendicular to the intermediate heating section, the reflector cover includes a first reflective portion, a second reflective portion and a fastener fixedly connecting the first reflective portion and the second reflective portion, the first reflective portion has two first grooves, the second reflective portion has two second grooves, the second grooves correspond to the first grooves one by one, when the fastener fixes the first reflective portion and the second reflective portion, the first groove and the second groove are arranged opposite to each other to form a wiring hole, the wiring hole exposes the connector, the top of the first reflective portion and the top of the second reflective portion match above the intermediate heating section to close the top of the intermediate heating section, and the bottom of the first reflective portion and the bottom of the second reflective portion match each other to form the opening.

19. The heating lamp assembly of claim 18, wherein: The wiring hole and the opening are arranged on opposite sides of the reflector.

20. The heating lamp assembly of claim 18, wherein: The first reflecting portion and the second reflecting portion are plate-shaped structures.

21. The heating lamp assembly of claim 18, wherein: The first reflecting portion includes a first reflecting top and a first reflecting side portion extending downward from the first reflecting top; the second reflecting portion includes a second reflecting top and a second reflecting side portion extending downward from the second reflecting top; the first reflecting top and the second reflecting top cooperate with each other to close the top of the middle heating section, and the bottom of the first reflecting side portion and the bottom of the second reflecting side portion match each other to form the opening.

22. The heating lamp assembly of claim 21, wherein: The first reflecting side portion and the second reflecting side portion are arranged opposite to each other along a length direction perpendicular to the middle heating section, and surround the side wall of the middle heating section.

23. The heating lamp assembly according to claim 21 or 22, characterized in that: The first reflecting side portion and the second reflecting side portion are arranged opposite to each other along a length direction parallel to the middle heating section and surround the side wall of the middle heating section.

24. The heating lamp assembly of claim 18, wherein: The first reflecting part also has a third groove, and the second reflecting part also has a fourth groove, and the fourth groove is arranged opposite to the third groove. When the fastener fixes the first reflecting part and the second reflecting part, the third groove and the fourth groove are arranged opposite to each other to form an air inlet groove. The heating lamp module is placed in the mounting hole to expose the air inlet groove, and the air inlet groove is used to input cooling gas into the reflecting cover; the heating lamp assembly includes a plurality of fins, which are located on the reflecting cover, and an air duct is formed between adjacent fins, and the air duct is connected to the air inlet groove.

25. The heating lamp assembly of claim 16, wherein: The heating lamp is a U-shaped lamp, a strip lamp or a dot lamp.

26. A chemical vapor deposition device, characterized in that: include: A reaction chamber, having a first opening on its upper side and a second opening on its lower side; An upper cover that is permeable to heat radiation, connected to the first opening and disposed above the reaction chamber; A lower cover which is permeable to heat radiation is connected with the second opening and is arranged below the reaction chamber. The upper cover, the lower cover and the reaction chamber form a processing space, and the processing space is used to accommodate a substrate and perform a process on the substrate; The heating lamp assembly according to any one of claims 16 to 25 is arranged at least one of above the upper cover and below the lower cover, and is used to heat the substrate.

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