Exposure alignment device
By providing an exposure alignment device with the first marking layer on the glass substrate, the alignment error problem caused by bending of the glass substrate is solved, and normal alignment of the photocoat and effective protection of the solar cell or touch unit are realized.
Patent Information
- Application Number
- CN202420985334.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Priority Date
- 2024-04-17
- Filing Date
- 2024-05-08
- Publication Date
- 2025-03-14
- Estimated Expiration
- 2034-05-08
AI Technical Summary
During the production process of solar cells, the glass substrate bend causes the exposure machine to be unable to read the alignment mark, which in turn affects the normal alignment of the photocoat, causing the process to not be carried out as scheduled.
An exposure alignment device is designed, by providing a first marking layer on a glass substrate to avoid the position of the solar cell or the touch unit, and aligning a plurality of photocoats using the first marking layer, and setting the touch unit or the solar cell at the corresponding position. The device includes a first substrate, an application unit, a colloid, a second substrate and a first marking layer, and aligning and protection are achieved through the voids and accommodation space formed by these components.
It effectively avoids the exposure machine reading error caused by bending of the glass substrate, ensures that the mask can be aligned normally, and thus ensures the smooth progress of subsequent processes, and protects the solar cell or touch unit from the influence of etching liquid.
Smart Images
Figure CN222618954U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to an exposure alignment device, in particular to an exposure alignment device used for aligning a plurality of photomasks. Background Art
[0002] A solar cell, also known as a solar chip, is a device that converts sunlight into electrical energy through the photovoltaic effect. By definition, a solar cell is not a battery because it does not store energy and is a type of photoelectric element.
[0003] In common semiconductor solar cells, through appropriate energy level design, light emitted by the sun can be effectively absorbed and voltage and current can be generated.
[0004] Solar power generation is a renewable and environmentally friendly way of generating electricity. It does not produce greenhouse gases such as carbon dioxide during the power generation process, so it does not pollute the environment. However, the production process of solar panels will produce a large amount of toxic wastewater, which needs to be disposed of separately.
[0005] The current common process requires that the touch unit be designed on the back of the solar cell, that is, one side of the glass substrate is the solar cell, and the other side of the glass substrate is the touch unit, and the positions of the two on the glass substrate need to correspond to each other. In this process, it is necessary to consider how to align the mask on the glass substrate to be manufactured so that the touch unit etched through the mask can be located at the position on the glass substrate corresponding to the solar cell.
[0006] In the past, alignment marks for mask alignment were set on the glass substrate of the solar cell. However, if another substrate was combined with the glass substrate to protect the solar cell from the influence of subsequent processes, the glass substrate would often bend, and the exposure machine would not be able to correctly read the alignment marks, which would make it impossible for the mask to be aligned normally, causing the process to be unable to proceed as scheduled.
[0007] Therefore, it can be seen from the above that an exposure alignment device is provided to prevent the exposure machine from being unable to read due to the bending of the glass substrate, and at the same time protect the solar cell from being affected by subsequent processes and causing failures, which is a problem that technicians in this field want to solve. Utility Model Content
[0008] An object of the present invention is to provide an exposure alignment device, which sets a first marking layer on a glass substrate in a vertical direction away from a solar cell or a touch unit, and uses the first marking layer to allow multiple masks to align the glass substrate and set the touch unit or the solar cell at a corresponding position on the glass substrate.
[0009] In view of the above-mentioned purpose, the utility model provides an exposure alignment device, which includes: a first substrate; a plurality of application units, which are arranged on one side of the first substrate; a plurality of colloids, which are arranged on the same side of the first substrate as the application units and are arranged with a first gap between the application units; a second substrate, which is arranged on the side of the colloids opposite to the first substrate; and a first marking layer, which is arranged on the same side of the second substrate as the colloids and is arranged in the first gap, the first marking layer is used to provide a plurality of mask alignment, so that the plurality of masks can be aligned on the glass substrate, so as to provide a subsequent process to set the touch unit or the solar cell at the corresponding position on the glass substrate, so that it can provide protection for the application unit, so that the application unit will not be affected by the etching liquid during etching, and the mask can be aligned through the first marking layer, so that the target unit can be accurately etched at the position on the first substrate relative to the application unit, so as to provide a first substrate including the application unit and the target unit.
[0010] The utility model provides an embodiment, wherein the application units are a plurality of solar cells.
[0011] The utility model provides an embodiment, wherein the application units are a plurality of touch control units.
[0012] The utility model provides an embodiment, which further comprises: a second marking layer, which is arranged on the same side of the second substrate as the colloids and in the first gap, and the second marking layer is used to provide alignment between the first substrate and the second substrate.
[0013] The utility model provides an embodiment, wherein the colloids further include: a plurality of frame glues, which are arranged on the same side of the first substrate as the application units and are arranged on the edge of the first substrate; and a plurality of peelable glues, which are arranged on the same side of the first substrate as the application units and are arranged with the first gap between them.
[0014] The utility model provides an embodiment, wherein the thickness of the first marking layer is 1000 angstroms to 10000 angstroms.
[0015] The utility model provides an embodiment, wherein the thickness of the colloids is 1 micrometer to 1000 micrometers.
[0016] The utility model provides an embodiment, wherein the colloids, the first substrate and the second substrate form a containing space, and the application units are disposed in the containing space.
[0017] The utility model provides an embodiment, wherein the first marking layer is disposed in an area where the colloids are not projected onto the second substrate, and an area where the application units are not projected onto the second substrate. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 : It is a side view of an embodiment of the utility model;
[0019] Figure 2 :It is a top view of an embodiment of the utility model;
[0020] Figure 3 : It is a side view of the etching completed of the utility model;
[0021] Figure 4 : It is a side view of another embodiment of the utility model;
[0022] Figure 5 : It is a side view of another embodiment of the utility model;
[0023] Figure 6 : It is a top view of another embodiment of the utility model;
[0024] Figure 7 :It is a top view of another embodiment of the utility model; and
[0025] Figure 8 : It is a top view of another embodiment of the utility model.
[0026]
Figure number comparison
[0027] 1 Exposure alignment device
[0028] 10. First substrate
[0029] 20 Application Units
[0030] 22 Solar Cells
[0031] 24 Touch units
[0032] 30 Colloid
[0033] 32 Frame glue
[0034] 34 Peelable adhesive
[0035] 40 Second substrate
[0036] 50 First marking layer
[0037] 60 Target Units 70 Second marking layer D1 First gap DETAILED DESCRIPTION
[0038] In order to further understand and appreciate the structural features and effects of the present invention, a preferred embodiment and detailed description are provided as follows:
[0039] Conventional technology places solar cells and alignment marks on the same substrate. However, when another glass substrate is used to protect the solar cells from etching liquid, the substrate on which the alignment marks are placed often bends, causing the marks to be at different levels, making them unreadable for exposure machines.
[0040] The utility model utilizes two glass substrates to protect the internal solar cell or touch unit, and provides a mask for alignment by setting a first marking layer on the substrate other than the solar cell or touch unit, so that the touch unit or solar cell set in the subsequent process can correspond to the solar cell or touch unit pre-set inside.
[0041] Hereinafter, the present invention will be described in detail by illustrating various embodiments of the present invention with reference to the drawings. However, the concept of the present invention may be embodied in many different forms and should not be construed as being limited to the exemplary embodiments described herein.
[0042] First, see Figure 1 , which is a side view of an embodiment of the utility model, as shown in the figure, it is an exposure alignment device 1, which includes: a first substrate 10; a plurality of application units 20, which are arranged on one side of the first substrate 10; a plurality of colloids 30, which are arranged on the same side of the first substrate 10 as the application units 20, and are spaced apart from the application units 20 by a first gap D1; a second substrate 40, which is arranged on the side of the colloids 30 opposite to the first substrate 10; and a first marking layer 50, which is arranged on the same side of the second substrate 40 as the colloids 30, and is arranged in the first gap D1, the first marking layer 50 is used to provide a plurality of mask alignments, and the first gap D1 is the interval between the colloids 30 and the application units 20.
[0043] Continuing from above, see Figure 2 , which is a top view of an embodiment of the utility model. As shown in the figure, since the first substrate 10 is a transparent glass substrate, the first marking layer 50 can be seen through it. Therefore, the mask is aligned through the first marking layer 50, and the units to be set are set on the first substrate 10, and at the same vertical position as the application units 20. The colloids 30 are also used to give the application units 20 space and protect the application units 20 to prevent the etching liquid from affecting and damaging the application units 20 when etching is performed after the mask is aligned, so that they cannot perform their functions.
[0044] Continuing from the above, in this embodiment, the thickness of the first marking layer 50 is 1000 angstroms to 10000 angstroms, but not limited thereto. Continuing from the above, in this embodiment, the thickness of the colloids 30 is 1 micrometer to 1000 micrometers, but not limited thereto.
[0045] Continuing from the above, in this embodiment, the first marking layer 50 is disposed in an area where the colloids 30 are not projected onto the second substrate 40, and an area where the application units 20 are not projected onto the second substrate 40, so as to prevent the colloids 30 and the application units 20 from blocking the first marking layer 50, so that the exposure machine cannot correctly read the markings of the first marking layer 50. Figure 3 , which is a side view of the etching completed by the utility model. As shown in the figure, the mask is aligned through the first marking layer 50, and a plurality of target units 60 to be etched thereon are set on the first substrate 10. In this way, the target units 60 can be accurately set on the first substrate 10 and relative to the positions of the application units 20 with the help of the first marking layer 50.
[0046] Continuing from the above, in this embodiment, the first substrate 10 , the colloids 30 and the second substrate 50 form a receiving space S1 , and the application units 20 are placed in the receiving space S1 , so as to utilize the first substrate 10 , the colloids 30 and the second substrate 50 to protect the application units 20 .
[0047] Continuing with the above, in this embodiment, the first marking layer 50 is exposed to a PVD film-forming metal through a yellow light mask to form the first marking layer 50 in the first gap D1 after development, etching, and stripping. The first marking layer 50 is used to provide the target units 60 to be accurately set on the first substrate 10 during the manufacturing process.
[0048] Continuing from the above, in this embodiment, refer to Figure 1 as well as Figure 3 The adhesives 30 further include: a plurality of frame adhesives 32, which are disposed on the same side of the first substrate 10 as the application units 20 and are disposed on the edge of the first substrate 10; and a plurality of peelable adhesives 34, which are disposed on the same side of the first substrate 10 as the application units 20 and are spaced apart from the application units 20 by the first gap D1.
[0049] Continuing from the above, in this embodiment, the first substrate 10 and the second substrate 50 are bonded by the sealants 32 to form the accommodating space S1 with a vacuum environment, thereby reducing the possibility of damage to the first substrate 10 and the second substrate 50 in subsequent processes in the vacuum environment.
[0050] Continuing from the above, in this embodiment, the peelable adhesives 34 may include materials such as acrylic resin, or may include suitable protective materials and / or elastomeric materials, so that the peelable adhesives 34 have the characteristics of being removable, protective, and buffering.
[0051] See also Figure 3 as well as Figure 4 , Figure 4 This is a side view of another embodiment of the utility model. As shown in the figure, in this embodiment, the application units 20 are multiple solar cells 22, the target units 60 are multiple touch units 24, the mask is aligned through the first marking layer 50, and the touch units 24 to be etched thereon are set on the first substrate 10, so that the touch units 24 can be accurately set on the first substrate 10 and relative to the positions of the solar cells 22 with the help of the first marking layer 50.
[0052] Continuing from the above, since the solar cells 22 have high process precision requirements, such as thin film solar cells, they are first manufactured on the first substrate 10 as a single board, and after the first substrate 10 and the second substrate 40 are aligned and sealed, the touch units 24 are etched and disposed on the first substrate 10.
[0053] See also Figure 3 as well as Figure 5 , Figure 5 This is a side view of another embodiment of the utility model. As shown in the figure, in this embodiment, the application units 20 are the touch units 24, the target units 60 are the solar cells 22, the mask is aligned through the first marking layer 50, and the solar cells 22 to be etched thereon are arranged on the first substrate 10, so that the solar cells 22 can be accurately arranged on the first substrate 10 and relative to the positions of the touch units 24 with the help of the first marking layer 50.
[0054] See also Figure 3 as well as Figure 6 , Figure 6 This is a top view of another embodiment of the utility model. As shown in the figure, in this embodiment, the second substrate 40 further includes a second marking layer 70. The second marking layer 70 is exposed to the PVD film-forming metal through a yellow light mask to form the second marking layer 70 in the corners of the second substrate 40 after development, etching, and stripping. The second marking layer 70 is used to allow the first substrate 10 and the second substrate 40 to be accurately bonded, so that the first marking layer 50 on the second substrate 40 can be accurately aligned to the correct position to avoid being blocked by the colloids 30 and the application units 20, resulting in the inability to use the first marking layer 50 for alignment.
[0055] See also Figure 7 , which is a top view of another embodiment of the present utility model. As shown in the figure, in this embodiment, the arrangement of the colloids 30 can be a linear arrangement, and is not limited to the rectangular arrangement of the aforementioned embodiment.
[0056] See also Figure 8 , which is a top view of another embodiment of the present utility model. As shown in the figure, in this embodiment, the arrangement of the colloids 30 can be a grid arrangement, and is not limited to the rectangular or straight line arrangement of the aforementioned embodiments.
[0057] The embodiments described above are an exposure alignment device produced by the utility model, which can provide protection for the application unit so that the application unit will not be affected by the etching liquid during etching, and can also align the mask through the first marking layer so that the target unit can be accurately etched on the first substrate at a position relative to the application unit, thereby providing a first substrate including the application unit and the target unit.
[0058] The order of execution of each step in the above embodiment does not mean the order of execution. The order of execution of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiment of the present application.
[0059] The above is only a preferred embodiment of the present invention and is not intended to limit the scope of implementation of the present invention. All equivalent changes and modifications to the shape, structure, characteristics and spirit described in the claims of the present invention should be included in the scope of the claims of the present invention.
Claims
1. An exposure alignment device, characterized in that: It contains: a first substrate; A plurality of application units are disposed on one side of the first substrate; A plurality of colloids are disposed on the same side of the first substrate as the application units and are spaced apart from the application units by a first gap; A second substrate, disposed on a side of the colloids opposite to the first substrate; as well as A first marking layer is arranged on the same side of the second substrate as the colloids and in the first gap. The first marking layer is used to provide multiple mask alignment.
2. The exposure alignment device according to claim 1, characterized in that: The application units are a plurality of solar cells.
3. The exposure alignment device according to claim 1, wherein: The application units are a plurality of touch control units.
4. The exposure alignment device according to claim 1, wherein: It also includes: A second marking layer is arranged on the same side of the second substrate as the colloids and in the first gap. The second marking layer is used to provide alignment between the first substrate and the second substrate.
5. The exposure alignment device according to claim 1, characterized in that: The colloids further include: A plurality of sealants are disposed on the same side of the first substrate as the application units and are disposed on the edge of the first substrate; and A plurality of peelable adhesives are arranged on the same side of the first substrate as the application units and are spaced apart from the application units by the first gap.
6. The exposure alignment device according to claim 1, wherein: The thickness of the first marking layer is 1000 angstroms to 10000 angstroms.
7. The exposure alignment device according to claim 1, wherein: The thickness of the colloids is 1 micrometer to 1000 micrometers.
8. The exposure alignment device according to claim 1, wherein: The colloids, the first substrate and the second substrate form a containing space, and the application units are arranged in the containing space.
9. The exposure alignment device according to claim 1, wherein: The first marking layer is disposed in an area where the colloids are not projected onto the second substrate, and an area where the application units are not projected onto the second substrate.