Device for detecting damage of mask plate

Abstract

The utility model relates to the technical field of mask plates, in particular to a device for detecting the damage of a mask plate, which comprises a detection shell used for placing the detected mask plate; the conveying device is used for conveying the luminescent powder falling from the mask plate; the luminescent powder recycling box is used for recycling the luminescent powder; the cleaning device is used for cleaning the luminescent powder on the mask plate; according to the utility model, micron-sized luminescent powder is scattered on the mask plate, so that the luminescent powder is adhered to the positions with gaps on the mask plate, then the luminescent powder on the surface of the mask plate is cleaned by the cleaning device, and then the positions with the gaps can be inspected by naked eyes through illumination, so that the inspection of the mask plate is realized; according to the mask plate cleaning device, the height of the brush is larger than the depth of the mounting groove, so that the cleaning device can clean the luminescent powder on the surface of the mask plate when cleaning the luminescent powder on the mask plate, but the luminescent powder in the gap of the mask plate cannot be cleaned.

Description

Technical Field

[0001] The utility model belongs to the technical field of mask plates, and in particular relates to a device for inspecting damage of mask plates. Background Art

[0002] Mask generally refers to mask. It means that the program data has been made into a photoresist, and the program is made into it during the production process of the single-chip microcomputer. The advantages are: reliable program and low cost. The disadvantages are: large batch requirements, each time the program is modified, the photoresist needs to be remade, different programs cannot be produced at the same time, and the supply cycle is long.

[0003] When using the mask, it is necessary to ensure that there are no gaps or other damage on the surface of the mask, otherwise it will affect the use of the mask. When checking whether there are gaps on the surface of the mask, the existing technology can be observed through a magnifying glass, but the efficiency is relatively low. How to quickly check whether the mask is damaged is a problem that needs to be solved.

[0004] The utility model designs a device for inspecting mask damage to solve the above problems. Utility Model Content

[0005] Based on this, it is necessary to provide a device for inspecting mask damage in response to the problems existing in the current mask system. By sprinkling micron-level luminescent powder on the mask plate, the luminescent powder is adhered to the places with gaps on the mask plate. After the surface luminescent powder is cleaned, the places with luminescent gaps can be checked with the naked eye through light, thereby realizing the inspection of the mask plate.

[0006] The above purpose is achieved through the following technical solutions:

[0007] A device for inspecting mask damage, comprising:

[0008] The inspection shell is used to place the mask to be inspected.

[0009] The conveying device is used to transport the luminescent powder dropped from the mask.

[0010] Luminescent powder recycling box, used to recycle luminescent powder.

[0011] The cleaning device consists of a handle and a mounting wheel. The mounting wheel is provided with mounting grooves evenly distributed in the circumference. A plurality of brushes are evenly installed in each mounting groove, and the height of the brush is greater than the depth of the mounting groove.

[0012] In one embodiment, the conveying device includes a conveyor belt, a conveyor roller, and a rotating shaft, wherein two rotating shafts are rotatably installed in the inspection shell and are located at the lower side; a conveyor roller is fixedly installed on each of the two rotating shafts; and the two conveyor rollers are connected by a conveyor belt.

[0013] The motor is installed through a motor bracket, and the output shaft of the motor is fixedly connected to one of the two rotating shafts.

[0014] In one embodiment, a luminescent powder outlet is provided at the lower side of one end of the inspection shell, a luminescent powder recovery box is located at the lower side of the luminescent powder outlet and a lower end of the luminescent powder outlet is located in the luminescent powder recovery box.

[0015] In one of the embodiments, the lower side of the other end of the inspection shell has an air inlet; the air inlet is externally connected to an air pump with controllable wind speed.

[0016] In one of the embodiments, a back support for supporting the back of the mask is fixedly installed obliquely in the inspection shell, and the back support is located at an upper position in the inspection shell and close to the front wall of the inspection shell; a bottom support for supporting the bottom of the mask is fixedly installed obliquely on the lower side of the back support.

[0017] In one of the embodiments, the bottom support is composed of an L-shaped support base and a support block. The support base is fixedly installed obliquely in the inspection shell and the vertical plate of the support base is close to the rear wall of the inspection shell; a square notch is opened on the horizontal plate of the bottom support; and a plurality of support blocks are evenly fixedly installed at the front end of the bottom support horizontal plate.

[0018] In one of the embodiments, the height of the brush is greater than the depth of the installation groove by 0.1 mm.

[0019] In one embodiment, the diameter of the brush is 0.2 times the width of the mounting groove.

[0020] The beneficial effects of the utility model are:

[0021] 1. The utility model sprinkles micron-level luminescent powder on the mask plate so that the places with gaps on the mask plate are adhered with the luminescent powder, and then the surface luminescent powder is cleaned by a cleaning device. After that, the places where the luminescent gaps exist can be checked by naked eyes through light, thereby realizing the inspection of the mask plate.

[0022] 2. The height of the brush in the utility model is greater than the depth of the installation groove. Such a design can ensure that the cleaning device can clean the luminescent powder on the surface of the mask plate when cleaning the luminescent powder on the mask plate, but the luminescent powder in the gaps of the mask plate will not be cleaned. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall appearance of the components.

[0024] Figure 2 It is a schematic diagram of the air intake distribution.

[0025] Figure 3 It is a schematic diagram of the structure of the conveying device.

[0026] Figure 4 It is a schematic diagram of the bottom support structure.

[0027] Figure 5 It is a schematic diagram of the cleaning device structure.

[0028] Figure 6 It is a schematic diagram of the installation wheel structure.

[0029] The reference numbers in the figure are: 1. Motor; 2. Motor bracket; 3. Luminescent powder recovery box; 4. Inspection shell; 41. Air inlet; 42. Luminescent powder outlet; 43. Back support; 44. Bottom support; 441. Support base; 442. Support block; 5. Inspection shell legs; 6. Mask plate; 7. Conveying device; 71. Conveyor belt; 72. Conveyor roller; 73. Rotating shaft; 8. Cleaning device; 81. Handle; 82. Mounting wheel; 821. Mounting wheel; 823. Mounting groove; 83. Brush. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below through embodiments and in combination with the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0031] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings). In the description of the present utility model, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present utility model.

[0032] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0033] like Figure 1-Figure 6 As shown, a device for inspecting damage to a mask plate 6 is used to inspect whether there is a gap in the mask plate 6, including: an inspection shell 4, used to place the inspected mask plate 6; a conveying device 7, used to transport the luminescent powder dropped from the mask plate 6; a luminescent powder recovery box 3, used to recover the luminescent powder; Figure 5 , 6 As shown, the cleaning device 8 consists of a handle 81 and a mounting wheel 82, and the mounting wheel 82 is provided with mounting grooves 823 evenly distributed circumferentially; a plurality of brushes 83 are evenly installed in each mounting groove 823, and the height of the brush 83 is greater than the depth of the mounting groove 823.

[0034] The utility model sprinkles micron-level luminescent powder on the mask plate so that the places with gaps on the mask plate are adhered with the luminescent powder, and then the surface luminescent powder is cleaned by a cleaning device 8. After that, the places where luminescence exists and gaps can be checked by naked eyes through light, thereby realizing the inspection of the mask plate 6; the cleaned luminescent powder will fall onto the conveying device 7 and be conveyed by the conveying device 7 to the luminescent powder recovery box 3 outside the inspection shell 4 for recycling and reuse.

[0035] In the present invention, the height of the brush 83 is greater than the depth of the mounting groove 823. Such a design can ensure that the cleaning device 8 can clean the luminescent powder on the surface of the mask plate 6 when cleaning the luminescent powder on the mask plate 6, but the luminescent powder in the gaps of the mask plate 6 will not be cleaned.

[0036] In one embodiment, if Figure 3 As shown, the conveying device 7 includes a conveyor belt 71, a conveyor roller 72, and a rotating shaft 73, wherein two rotating shafts 73 are rotatably installed in the inspection shell 4 and are located at the lower side; a conveyor roller 72 is fixedly installed on each of the two rotating shafts 73; and the two conveyor rollers 72 are connected by a conveyor belt 71.

[0037] like Figure 2 , 3 As shown, the motor 1 is installed through the motor 1 bracket, and the output shaft of the motor 1 is fixedly connected to one of the two rotating shafts 73. When the motor 1 is controlled to work, the motor 1 will drive the rotating shaft 73 fixedly connected to its output shaft to rotate, and the rotation of the rotating shaft 73 drives the conveyor belt 71 to rotate, and the luminescent powder dropped on the conveyor belt 71 is transported out and dropped on the inclined surface at the lower end of the inspection shell 4.

[0038] In one embodiment, if Figure 1 , 2 As shown in FIG. 3 , the lower side of one end of the inspection shell 4 has a luminescent powder outlet 42 , the luminescent powder recovery box 3 is located at the lower side of the luminescent powder outlet 42 and the lower end of the luminescent powder outlet 42 is located in the luminescent powder recovery box 3 .

[0039] In one embodiment, if Figure 3 As shown, the lower side of the other end of the test shell 4 has an air inlet 41; the air inlet 41 is externally connected to an air pump with controllable wind speed. The air pump blows gas into the test shell 4, and the gas blown into the test shell 4 will blow the luminescent powder that falls on the bottom of the test shell 4 into the luminescent powder outlet 42, and finally falls into the luminescent powder recovery box 3 for recycling and reuse.

[0040] In one embodiment, if Figure 3 As shown, a back support 43 for supporting the back of the mask plate 6 is fixedly installed obliquely in the inspection shell 4, and the back support 43 is located at an upper position in the inspection shell 4 and close to the front wall of the inspection shell 4; a bottom support 44 for supporting the bottom of the mask plate 6 is fixedly installed on the oblique lower side of the back support 43. The back support 43 and the bottom support 44 provide support and placement for the inspection of the mask plate 6, ensuring that the mask plate 6 is placed obliquely in the inspection shell 4, which is convenient for sprinkling and cleaning the luminescent powder.

[0041] In one embodiment, if Figure 4 As shown, the bottom support 44 is composed of an L-shaped support base 441 and a support block 442. The support base 441 is fixedly installed in the test shell 4 obliquely and the vertical plate of the support base 441 is close to the rear wall of the test shell 4; a square notch is opened on the horizontal plate of the bottom support 44; and a plurality of support blocks 442 are evenly fixedly installed at the front end of the horizontal plate of the bottom support 44. The function of the support base 441 is to provide a limiting support for the bottom of the mask plate 6, and the function of the support block 442 is to provide a support for the front side of the bottom of the mask plate 6; in addition, the design of the support block 442 and the square notch is to ensure that the luminescent powder can fall smoothly onto the conveyor belt 71.

[0042] In one embodiment, the height of the brush 83 is 0.1 mm greater than the depth of the mounting groove 823. Through experiments, it is found that the 0.1 mm gap can ensure that the cleaning device 8 can better clean the luminescent powder on the surface of the mask plate 6 when cleaning the luminescent powder on the mask plate 6, while the luminescent powder in the gaps of the mask plate 6 will not be cleaned.

[0043] In one embodiment, the diameter of the brush 83 is 0.2 times the width of the mounting groove 823. This ensures that the brush 83 has enough swing space to ensure the cleaning effect of the brush 83.

[0044] The bottom of the test shell 4 is supported by test shell legs 5 .

[0045] The technical features of the above embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0046] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model shall be subject to the attached claims.

Claims

1. A device for inspecting mask damage, characterized in that: include: An inspection shell, used to place the inspected mask; A conveying device, used for transporting the luminescent powder dropped from the mask; Luminescent powder recycling box, used to recycle luminescent powder; The cleaning device consists of a handle and a mounting wheel. The mounting wheel is provided with mounting grooves evenly distributed in the circumference. A plurality of brushes are evenly installed in each mounting groove, and the height of the brush is greater than the depth of the mounting groove.

2. The device for inspecting mask damage according to claim 1, characterized in that: The conveying device comprises a conveyor belt, a conveyor roller, and a rotating shaft, wherein two rotating shafts are rotatably mounted in the inspection shell and are located at the lower side; a conveyor roller is fixedly mounted on each of the two rotating shafts; and the two conveyor rollers are connected by a conveyor belt; The motor is installed through a motor bracket, and the output shaft of the motor is fixedly connected to one of the two rotating shafts.

3. The device for inspecting mask damage according to claim 1, characterized in that: The lower side of one end of the inspection shell is provided with a luminescent powder outlet, the luminescent powder recovery box is located at the lower side of the luminescent powder outlet and the lower end of the luminescent powder outlet is located in the luminescent powder recovery box.

4. The device for inspecting mask damage according to claim 3, characterized in that: The lower side of the other end of the inspection shell is provided with an air inlet; the air inlet is externally connected to an air pump with controllable wind speed.

5. The device for inspecting mask damage according to claim 1, characterized in that: A back support for supporting the back of the mask is fixedly installed obliquely in the inspection shell. The back support is located at an upper position in the inspection shell and close to the front wall of the inspection shell. A bottom support for supporting the bottom of the mask is fixedly installed obliquely on the lower side of the back support.

6. The device for inspecting mask damage according to claim 5, characterized in that: The bottom support is composed of an L-shaped support base and a support block. The support base is fixedly installed in the inspection shell at an angle, and the vertical plate of the support base is close to the rear wall of the inspection shell. A square notch is opened on the bottom supporting transverse plate; a plurality of supporting blocks are evenly fixedly installed on the front end of the bottom supporting transverse plate.

7. The device for inspecting mask damage according to claim 1, characterized in that: The height of the brush is greater than the depth of the installation groove by 0.1 mm.

8. The device for inspecting mask damage according to claim 7, characterized in that: The diameter of the brush is 0.2 times the width of the installation groove.

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