Defect detection tool for semiconductor cavity assembly

Abstract

The utility model discloses a defect detection tool for a semiconductor cavity assembly, and relates to the technical field of semiconductor device defect detection devices. The defect detection tool for the semiconductor cavity assembly comprises a tool base, a defect detection device is arranged at the top of the tool base, the defect detection device comprises a detection adjusting unit and a limiting unit, the detection adjusting unit comprises a circular adjusting seat, an adjusting sliding rail is arranged in the circular adjusting seat, and the limiting unit is arranged in the adjusting sliding rail. Four sets of embedding blocks are arranged in the adjusting sliding rail in an array mode, and inserting grooves are formed in the embedding blocks. According to the utility model, the driving rod in the detection adjusting unit rotates to drive the connection frame to rotate, the rotation drives the insertion block to circumferentially slide in the adjusting slide rail in the circular adjusting seat, the insertion rod impacts the adjusting slide rail, and the insertion block drives the detection assembly arranged thereon to carry out multi-angle detection in the rotation process. And the arrangement of a plurality of groups of detection assemblies can ensure the comprehensiveness of the cavity assembly during detection.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor device defect detection devices, in particular to a defect detection tool for semiconductor cavity components. Background Art

[0002] A semiconductor cavity is a micro optical cavity that uses semiconductor materials as its constituent elements. It retains light in a small space through multiple reflections and diffractions, thereby forming a resonant cavity, enhancing the propagation speed and energy of light in it, and improving the power and efficiency of the laser. Therefore, the components inside the semiconductor cavity need to be inspected for defects before assembly after processing.

[0003] For example, a semiconductor device defect visual detection device disclosed in Chinese patent publication number CN218726694U drives a bidirectional screw to rotate through a first reduction motor, thereby driving two screw sleeves threadedly connected to the bidirectional screw and a clamping plate connected to the screw sleeve to move toward each other, thereby fixing the detection device and ensuring the detection effect of the semiconductor device; the second reduction motor drives the active bevel gear and the driven bevel gear to rotate, realizes the rotation of the rotating shaft and the fixed frame, drives the clamping plate and the device to automatically turn over, and realizes the detection of the front and back sides of the device. Compared with the traditional manual turning, it reduces labor intensity and improves the detection rate.

[0004] The following technical issues exist:

[0005] The above-mentioned device enables the device to automatically flip over through a transmission linkage structure. During this process, the power source is mainly provided by the motor, so its flipping force is difficult to control. Flipping too quickly can easily lead to loose connections between components inside the device, causing functional failure of the component after assembly, affecting efficiency. In addition, the stability of the original fixing mechanism must be ensured during the flipping process. Improper maintenance during long-term use can easily cause the cavity component to flip and detach, resulting in the cavity component falling or colliding, which has adverse effects on the integrity of the cavity component and even the safety of the inspection and processing. Utility Model Content

[0006] In view of the deficiencies in the prior art, the utility model provides a defect detection tool for a semiconductor cavity assembly, which solves the problems raised in the above-mentioned background technology.

[0007] To achieve the above objectives, the utility model is implemented through the following technical solutions: a defect detection tool for a semiconductor cavity assembly, comprising a tool base, a defect detection device is arranged at the top of the tool base, the defect detection device comprises a detection adjustment unit and a limit unit, the detection adjustment unit is connected to the limit unit, and the limit unit and the detection adjustment unit are both installed at the installation opening in the middle of the tool base;

[0008] The detection and adjustment unit includes a circular adjustment seat, the circular adjustment seat is hollow in the circular part, the limit unit is installed at the center of the circular adjustment seat, the circular adjustment seat is provided with an adjustment slide rail, and the adjustment slide rail is arranged with four groups of interlocking blocks in an array, the interlocking block is provided with an installation slot, the installation slot is provided with an insertion block, the top two ends of the insertion block are symmetrically distributed with curved connecting plates, the curved connecting plate is provided with an arc groove, the arc groove is provided with an adjustment rod, the adjustment rod is provided with an interlocking sleeve, and the detection component is provided below the interlocking sleeve. The technical solution adopted by the utility model to avoid flipping the semiconductor cavity component is to replace the reversal of the cavity component by adjusting the position of the interlocking block, and because the cavity component has a certain height and thickness, in order to ensure the comprehensiveness of the detection, the utility model adopts an adjustment slide rail to ensure that the detection angle of the detection component is expanded to 360°.

[0009] A further improvement of the technical solution of the utility model is that: the circular adjustment seat is slidably connected to the engaging block through an adjusting slide rail, the engaging block is limitably connected to the inserting block through an inserting slot, the inserting block is welded to the curved connecting plate, the curved connecting plate is movably connected to the adjusting rod through an arc groove, the adjusting rod is rotatably connected to the engaging sleeve, and the engaging sleeve is connected to the detection component.

[0010] The further improvement of the technical solution of the utility model is that: the four sides of the outer wall of the circular adjustment seat are symmetrically arranged with fixed connection blocks, the fixed connection blocks are located on the tooling base, and the top of the insertion block is symmetrically provided with an arc connection block, a hinge assembly is provided in the arc connection block and is connected to the interlocking sleeve through the hinge assembly, an insertion rod is provided at the bottom of the insertion block, a connecting frame is provided at the other end of the insertion rod, and a driving rod is provided in the middle of the connecting frame. The detection and adjustment unit in the utility model drives the connecting frame to rotate by the driving rod, and during the rotation process, the insertion rod drives the insertion block to slide in a circle on the adjusting slide rail inside the circular adjustment seat. The main thing is that the arc length of a single rotation of the driving rod during manual or motor drive shall not exceed the connection part set in the middle of the adjusting slide rail, otherwise the insertion rod will hit the adjusting slide rail. During the above rotation process, the insertion block drives the detection assembly set thereon to perform multi-angle detection, and the setting of multiple groups of detection assemblies can ensure the comprehensiveness of the cavity assembly detection.

[0011] In particular, the articulated assembly consists of a crankshaft, a connecting shaft body, and an articulated rod. The connecting shaft body is fixedly installed in the arc-shaped connecting block, the articulated rod is rotatably installed on the connecting shaft body, the other end of the articulated rod is fixedly connected to the crankshaft, and the other end of the crankshaft is connected to the interlocking sleeve. Because the interlocking sleeve is rotatably installed on the adjusting rod, the detection assembly can adjust the detection angle at a fixed position during the detection process, thereby further expanding the detection effect and detection range.

[0012] It should be noted that the detection component is an optical detection mechanism in the comparative document, which is not disclosed in detail. Herein, it is briefly described that the detection component is mainly composed of a light-emitting component for emitting light in the optical system, a reflective component for receiving the reflection of the light source, and a detection component for receiving the reflected light. The light-emitting component in the present technical solution includes multiple groups of monochromatic light sources, a first beam splitter prism and a focusing lens. The light generated by the monochromatic light source is transmitted to the focusing lens after passing through the first beam splitter prism and then focused, and the focused light is transmitted to the reflective component through the focusing lens. The receiver includes several receiving components, and the number of receiving components is the same as the number of monochromatic light sources. The receiving component includes a second beam splitter prism, a filter and a color camera. The second beam splitter prism is used to reflect the reflected light to the filter, the filter is used to filter the reflected light, and the color camera is used to process the reflected light after filtering to obtain the final detection result.

[0013] A further improvement of the technical solution of the utility model is that: the fixed connecting block is fixedly connected to the tooling base by a fastener, and the fixed connecting block is fixedly connected to the outer wall of the circular adjustment seat, the insertion block is welded to the arc-shaped connecting block, and the insertion block is limitedly connected to the insertion rod, the connecting frame is fixedly connected to the insertion rod, and the driving rod is limitedly connected to the connecting frame.

[0014] A further improvement of the technical solution of the utility model is that the limiting unit includes an extension block, two groups of the extension blocks are arranged and symmetrically distributed at the center of the circular adjustment seat, the other end of the extension block is provided with a component placement plate, a stabilizing clamping block is arranged above the component placement plate, the other end of the stabilizing clamping block is provided with a push rod, and the other end of the push rod is located on the vertical plate.

[0015] The further improvement of the technical solution of the utility model is that: the extension block is fixedly connected to the inside of the circular adjustment seat, the extension block is fixedly connected to the component placement plate, the stabilizing clamp block is fixedly connected to the push rod, and the other end of the push rod is limitedly installed in the vertical plate. In the process of detection, in order to ensure the stability of the cavity component and the accuracy of the detection result, the utility model completes the fixed limit of different types of cavity components by extending the length of the push rods set at both ends, ensuring the smooth progress of the detection.

[0016] Beneficial Effects

[0017] The utility model provides a defect detection tool for semiconductor cavity components. Compared with the prior art, it has the following beneficial effects:

[0018] 1. The defect detection tooling for the semiconductor cavity assembly drives the connecting frame to rotate by rotating the driving rod in the detection adjustment unit. During the rotation, the insertion rod drives the insertion block to slide in a circle on the adjustment slide rail inside the circular adjustment seat. It is important to note that the arc length of a single rotation of the driving rod during manual or motor drive must not exceed the connection portion set in the middle of the adjustment slide rail, otherwise the insertion rod will hit the adjustment slide rail. During the above rotation, the insertion block drives the detection assembly set thereon to perform multi-angle detection. The setting of multiple groups of detection assemblies can ensure the comprehensiveness of the cavity assembly detection.

[0019] 2. The defect detection tooling for the semiconductor cavity assembly completes the fixed limit of different types of cavity assemblies by extending the length of the push rods set at both ends of the limit unit, ensuring the smooth progress of the detection, and the engaging sleeve is rotatably installed on the adjusting rod, so that the detection assembly can adjust the detection angle at a fixed position during the detection process, further expanding the detection effect and detection range. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0021] Figure 2 It is a schematic diagram of the defect detection device of the utility model;

[0022] Figure 3 It is a schematic diagram of the detection and adjustment unit of the utility model;

[0023] Figure 4 It is a structural schematic diagram of the connection of the limit unit of the utility model.

[0024] In the figure: 1. tooling base; 201. circular adjustment seat; 202. adjustment slide rail; 203. fitting block; 204. insertion block; 205. curved connecting plate; 206. adjustment rod; 207. fitting sleeve; 208. detection component; 209. fixed connection block; 210. arc connection block; 211. insertion rod; 212. connection frame; 213. driving rod; 214. hinged component; 301. extension block; 302. component placement plate; 303. stabilizing clamping block; 304. push rod; 305. vertical plate. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] The utility model provides three technical solutions:

[0027] Figure 1-3 The first embodiment is shown: a defect detection tool for a semiconductor cavity assembly, comprising a tool base 1, a defect detection device is arranged at the top of the tool base 1, the defect detection device comprises a detection adjustment unit and a limit unit, the detection adjustment unit is connected to the limit unit, and the limit unit and the detection adjustment unit are both installed at the installation opening in the middle of the tool base 1;

[0028] The detection and adjustment unit includes a circular adjustment seat 201, the circular part of the circular adjustment seat 201 is hollow, the limit unit is installed at the center of the circular adjustment seat 201, an adjustment slide rail 202 is opened inside the circular adjustment seat 201, four groups of interlocking blocks 203 are arranged in an array inside the adjustment slide rail 202, an installation slot is arranged inside the interlocking block 203, an installation slot is arranged at the installation slot, a mounting block 204 is arranged at the top two ends of the mounting block 204, curved connecting plates 205 are symmetrically distributed, an arc groove is arranged inside the curved connecting plate 205, an adjustment rod 206 is arranged at the arc groove, an interlocking sleeve 207 is arranged on the adjustment rod 206, and a detection component 208 is arranged below the interlocking sleeve 207. The technical solution adopted by the present invention to avoid flipping the semiconductor cavity assembly is to replace the reversal of the cavity assembly by adjusting the position of the engaging block 203. Moreover, because the cavity assembly has a certain height and thickness, in order to ensure the comprehensiveness of the detection, the present invention adopts an adjustable slide rail 202 to ensure that the detection angle of the detection assembly 208 is expanded to 360°.

[0029] The circular adjustment seat 201 is slidably connected to the embedding block 203 through the adjusting slide rail 202, the embedding block 203 is limitedly connected to the insertion block 204 through the insertion slot, the insertion block 204 is welded to the curved connecting plate 205, the curved connecting plate 205 is movably connected to the adjusting rod 206 through the arc groove, the adjusting rod 206 is rotatably connected to the embedding sleeve 207, and the embedding sleeve 207 is connected to the detection component 208.

[0030] Figure 3The first embodiment is shown: fixed connection blocks 209 are symmetrically arranged on the four sides of the outer wall of the circular adjustment seat 201, the fixed connection blocks 209 are located on the tooling base 1, and arc-shaped connection blocks 210 are symmetrically arranged on the top of the insertion block 204, a hinge assembly 214 is arranged in the arc-shaped connection block 210 and is connected to the engaging sleeve 207 through the hinge assembly 214, an insertion rod 211 is arranged at the bottom of the insertion block 204, a connecting frame 212 is arranged at the other end of the insertion rod 211, and a driving rod 213 is arranged in the middle of the connecting frame 212. The detection and adjustment unit in the utility model drives the connecting frame 212 to rotate by driving the driving rod 213. During the rotation, the insertion rod 211 drives the insertion block 204 to slide in a circle on the adjusting slide rail 202 inside the circular adjustment seat 201. It is important to note that the arc length of a single rotation of the driving rod 213 during manual or motor drive must not exceed the connecting portion set in the middle of the adjusting slide rail 202, otherwise the insertion rod 211 will hit the adjusting slide rail 202. During the above-mentioned rotation, the insertion block 204 drives the detection component 208 set thereon to perform multi-angle detection. The setting of multiple groups of detection components 208 can ensure the comprehensiveness of the cavity component detection.

[0031] In particular, the articulated assembly 214 consists of a crankshaft, a connecting shaft body, and an articulated rod. The connecting shaft body is fixedly installed in the arc-shaped connecting block 210, and the articulated rod is rotatably installed on the connecting shaft body. The other end of the articulated rod is fixedly connected to the crankshaft, and the other end of the crankshaft is connected to the interlocking sleeve 207. Because the interlocking sleeve 207 is rotatably installed on the adjusting rod 206, the detection assembly 208 can adjust the detection angle at a fixed position during the detection process, thereby further expanding the detection effect and detection range.

[0032] It should be noted that the detection component 208 is an optical detection mechanism in the comparative document, which is not disclosed in detail. Herein, it is briefly described that the detection component 208 is mainly composed of a light-emitting component for emitting light in the optical system, a reflective component for receiving reflection of the light source, and a detection component for receiving the reflected light. The light-emitting component in the present technical solution includes multiple groups of monochromatic light sources, a first beam splitter prism and a focusing lens. The light generated by the monochromatic light source is transmitted to the focusing lens after passing through the first beam splitter prism and then focused, and the focused light is transmitted to the reflective component through the focusing lens. The receiver includes several receiving components, and the number of receiving components is the same as the number of monochromatic light sources. The receiving component includes a second beam splitter prism, a filter and a color camera. The second beam splitter prism is used to reflect the reflected light to the filter, the filter is used to filter the reflected light, and the color camera is used to process the reflected light after filtering to obtain the final detection result.

[0033] The fixed connecting block 209 is fixedly connected to the tooling base 1 through fasteners, and the fixed connecting block 209 is fixedly connected to the outer wall of the circular adjustment seat 201, the insertion block 204 is welded to the arc-shaped connecting block 210, and the insertion block 204 is limitedly connected to the insertion rod 211, the connecting frame 212 is fixedly connected to the insertion rod 211, and the driving rod 213 is limitedly connected to the connecting frame 212.

[0034] The limiting unit includes an extension block 301, which is provided with two groups and is symmetrically distributed at the center of the circular adjustment seat 201. A component placement plate 302 is provided at the other end of the extension block 301, and a stabilizing clamp 303 is provided above the component placement plate 302. A push rod 304 is provided at the other end of the stabilizing clamp 303, and the other end of the push rod 304 is located on the vertical plate 305.

[0035] The extension block 301 is fixedly connected to the inside of the circular adjustment seat 201, the extension block 301 is fixedly connected to the component placement plate 302, the stabilizing clamp 303 is fixedly connected to the push rod 304, and the other end of the push rod 304 is limitedly installed in the vertical plate 305. In the process of detection, in order to ensure the stability of the cavity component and the accuracy of the detection result, the utility model completes the fixed limit of different types of cavity components by extending the length of the push rod 304 set at both ends, so as to ensure the smooth progress of the detection.

[0036] Figure 1-2 4 shows a third embodiment, which is mainly different from the first embodiment in that:

[0037] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited, and conventional equipment can be used.

[0038] When in use, the driving rod 213 is driven manually or by a motor to make the connecting frame 212 rotate in a circle, and the insertion rod 211 drives the insertion block 204 to rotate and adjust in the adjustment track 202. During the adjustment process, the hinge assembly 214 is adjusted according to the needs of detection to complete the angle conversion of the crankshaft, the connecting shaft and the hinge rod, and finally complete the detection angle of the detection assembly 208. Finally, the cavity assembly is placed on the top of the assembly placement plate 302, and the length of the push rod 304 is appropriately adjusted according to the size to ensure that the stabilizing clamp 303 completes the detection and stabilization of the cavity assembly.

[0039] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0040] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A defect detection tool for a semiconductor cavity assembly, comprising a tool base (1), characterized in that: A defect detection device is arranged at the top of the tooling base (1), and the defect detection device comprises a detection adjustment unit and a limit unit, the detection adjustment unit is connected to the limit unit, and the limit unit and the detection adjustment unit are both installed at the installation opening in the middle of the tooling base (1); The detection and adjustment unit comprises a circular adjustment seat (201), the circular adjustment seat (201) is hollow in a circular shape, the limit unit is installed at the center of the circular adjustment seat (201), an adjustment slide rail (202) is provided inside the circular adjustment seat (201), four groups of embedded blocks (203) are arranged in an array inside the adjustment slide rail (202), an installation slot is provided inside the embedded block (203), an insertion block (204) is provided at the installation slot, curved connecting plates (205) are symmetrically distributed at both ends of the top of the insertion block (204), an arc groove is provided inside the curved connecting plate (205), an adjustment rod (206) is provided at the arc groove, an embedded sleeve (207) is provided on the adjustment rod (206), and a detection component (208) is provided below the embedded sleeve (207).

2. The defect detection tool for semiconductor cavity components according to claim 1, characterized in that: The circular adjustment seat (201) is slidably connected to the engaging block (203) via the adjustment slide rail (202); the engaging block (203) is position-limitingly connected to the inserting block (204) via the inserting slot; the inserting block (204) is welded to the curved connecting plate (205); the curved connecting plate (205) is movably connected to the adjustment rod (206) via the arc groove; the adjustment rod (206) is rotatably connected to the engaging sleeve (207); and the engaging sleeve (207) is connected to the detection component (208).

3. The defect detection tool for semiconductor cavity components according to claim 1, characterized in that: The four sides of the outer wall of the circular adjustment seat (201) are symmetrically arranged with fixed connection blocks (209), the fixed connection blocks (209) are located on the tooling base (1), and the top of the insertion block (204) is symmetrically provided with an arc-shaped connection block (210), a hinge assembly (214) is arranged inside the arc-shaped connection block (210) and is connected to the engaging sleeve (207) through the hinge assembly (214), an insertion rod (211) is arranged at the bottom of the insertion block (204), a connecting frame (212) is arranged at the other end of the insertion rod (211), and a driving rod (213) is arranged in the middle of the connecting frame (212).

4. The defect detection tool for semiconductor cavity components according to claim 3, characterized in that: The fixed connection block (209) is fixedly connected to the tooling base (1) via a fastener, and the fixed connection block (209) is fixedly connected to the outer wall of the circular adjustment seat (201), the insertion block (204) is welded to the arc-shaped connection block (210), and the insertion block (204) is limitedly connected to the insertion rod (211), the connection frame (212) is fixedly connected to the insertion rod (211), and the driving rod (213) is limitedly connected to the connection frame (212).

5. The defect detection tool for semiconductor cavity components according to claim 1, characterized in that: The limiting unit comprises an extension block (301), wherein two groups of the extension blocks (301) are arranged and symmetrically distributed at the center of the circular adjustment seat (201), a component placement plate (302) is arranged at the other end of the extension block (301), a stabilizing clamping block (303) is arranged above the component placement plate (302), a push rod (304) is arranged at the other end of the stabilizing clamping block (303), and the other end of the push rod (304) is located on the vertical plate (305).

6. The defect detection tool for semiconductor cavity components according to claim 5, characterized in that: The extension block (301) is fixedly connected to the inside of the circular adjustment seat (201), the extension block (301) is fixedly connected to the component placement plate (302), the stabilizing clamping block (303) is fixedly connected to the push rod (304), and the other end of the push rod (304) is limitedly installed in the vertical plate (305).

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