Automatic argon plasma polishing equipment

Abstract

The utility model relates to automatic argon ion polishing equipment which comprises a shell, an argon ion gun, a workbench and an adjusting mechanism. An argon ion gun is fixed to the middle of the shell. The adjusting mechanism comprises a translation assembly, a clamping assembly and a rotating assembly. The translation assembly comprises a positioning rod, a gear, a rack and a translation seat; the clamping assembly comprises a supporting plate, a left-hand thread screw, a clamping base and a guide rod. Supporting plates are arranged on the two sides of the translation seat, a guide rod is fixed between the supporting plates, the clamping seats are symmetrically distributed on the two sides with the argon ion gun as the center and slidably arranged on the guide rod in a sleeving mode, threaded sleeves are arranged on the clamping seats, the left-hand thread screws are rotationally arranged on the supporting plates, and the two left-hand thread sections of each left-hand thread screw are in threaded connection with the threaded sleeves on the clamping seats on the two sides respectively. A driving motor is arranged at the end part of the left-hand thread screw rod; the rotating assembly comprises a rotating shaft, clamping plates and a rotating motor. By means of the translation assembly, the clamping assembly and the rotating assembly, accurate positioning, clamping and rotating of the workbench are achieved, and the polishing precision and efficiency are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing equipment, in particular to an argon plasma automatic polishing equipment. Background Art

[0002] With the advancement of science and technology, the requirements for the precision of the surfaces of various materials are getting higher and higher, especially in the field of high-precision manufacturing, surface polishing technology is particularly important. Traditional polishing equipment often has problems such as complex operation, low polishing precision, and low efficiency, which cannot meet the needs of modern manufacturing.

[0003] Argon ion polishing is a new universal sample preparation method that can be used to prepare special materials and samples, such as composite materials, porous materials, etc. Its principle is to use ion beams to etch solids, and high-energy incident ions collide with atoms near the surface layer of solid samples, thereby removing surface atoms to achieve a polishing effect. Argon ion polishing has the characteristics of low stress and strain, less pollution, accurate positioning, simple operation and universality.

[0004] The main components of the argon ion polisher include ion source, accelerator tube, focusing lens, electron multiplier, sample platform, etc. Among them, the ion source is the core component of the argon ion polisher. The ion source converts argon molecules into ions and accelerates the ions to high speed. The ion beam is focused on the sample surface through the accelerator tube and focusing lens to achieve surface imaging, removal and processing. At the same time, the argon ion polisher is also equipped with a rotating sample stage, which effectively ensures the uniform polishing of the sample surface.

[0005] However, for argon ion polishers, argon ion guns are all fixed structures. In order to increase the coverage range, the workbench is configured to be adjustable, but the existing adjustment structure has limited adjustment amplitude and a small adjustment range. Based on this, it is necessary to study an argon ion automatic polishing equipment. Utility Model Content

[0006] In view of this, the purpose of the utility model is to provide an argon ion automatic polishing device, which effectively solves the problems of small adjustment range and limited adjustment amplitude of the workbench of the existing argon ion polishing instrument.

[0007] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: an argon ion automatic polishing equipment, including a shell, an argon ion gun, a workbench and an adjustment mechanism; an argon ion gun is fixed in the middle of the shell, and a loading area and a unloading area are respectively arranged on both sides of the shell, and the loading area and the unloading area are respectively provided with a loading port and a unloading port;

[0008] The adjustment mechanism includes a translation assembly, a clamping assembly and a rotating assembly; the translation assembly includes a positioning rod, a gear, a rack and a translation seat; the positioning rod is fixed in the housing in the transverse direction, a positioning sleeve is arranged on the translation seat, the positioning sleeve is sleeved on the positioning rod, the rack is fixed at the bottom of the translation seat and meshes with the gear, and the gear is connected to the translation motor in a transmission manner;

[0009] The clamping assembly includes a support plate, a reverse threaded screw, a clamping seat and a guide rod; support plates are arranged on both sides of the translation seat, and a guide rod is fixed between the support plates; the clamping seat is symmetrically distributed on both sides with the argon ion gun as the center, and is slidably sleeved on the guide rod; a screw sleeve is arranged on the clamping seat, the reverse threaded screw is rotatably arranged on the support plate, and its two reverse thread sections are respectively threadedly connected with the screw sleeves on the clamping seats on both sides, and a driving motor is arranged at the end of the reverse threaded screw;

[0010] The rotating assembly includes a rotating shaft, a clamping plate and a rotating motor. The rotating shaft is rotatably arranged on a clamping seat, and a clamping plate is arranged at the end thereof. The rotating shaft is provided with a driven gear. The rotating motor is fixed on the clamping seat, and a driving gear meshing with the driven gear is arranged on its rotating shaft.

[0011] The workbench comprises a left base and a right base, which are respectively fixed on the inner sides of the clamping plates on both sides and constitute the main body of the workbench.

[0012] Furthermore, an upwardly protruding installation area is provided in the middle of the shell, the argon ion gun is arranged in the installation area, and the loading area and the unloading area are distributed on both sides of the installation area.

[0013] Furthermore, a positioning assembly is arranged between the two clamping plates, and the positioning assembly includes a sleeve rod and a sleeve. The sleeve rod and the sleeve are slidably sleeved together and are distributed and fixed on the two clamping plates.

[0014] Furthermore, the translation motor is fixed to the middle area of ​​the housing through a bracket.

[0015] Furthermore, a door is arranged on the front side of the shell, and supporting legs are arranged on the bottom.

[0016] The beneficial effects of the above technical solution are: the utility model has a compact structure, is easy to operate, can achieve efficient and high-precision automatic polishing, is suitable for polishing the surfaces of various materials, and is particularly suitable for the field of high-precision manufacturing.

[0017] In order to improve the adjustment range of the workbench, the utility model provides an adjustment mechanism, which includes a translation component, a clamping component and a rotating component, wherein the moving component can realize a translation structure, which can change the horizontal position of the workbench, which is not only reflected in the position transfer of the loading area, the working area and the unloading area, but also can change the position of the workbench laterally during the polishing process to improve the coverage range; the clamping component can provide clamping force to facilitate the workpiece (with a placement seat) to be placed therein, and clamped to ensure the stable placement of the workpiece; the rotating component can change the angle of the workpiece and has a better polishing coverage range.

[0018] The utility model provides an argon plasma automatic polishing device, which realizes accurate positioning, clamping and rotation of a workbench through a translation component, a clamping component and a rotating component of an adjustment mechanism, so that the argon ion gun can accurately align with the material on the workbench for polishing, thereby improving the polishing accuracy and efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the implementation structure of the utility model;

[0020] Figure 2 It is a schematic diagram of the implementation structure of the regulating mechanism;

[0021] Figure 3 It is a schematic diagram of the implementation structure of the clamping seat.

[0022] Figure markings: 1-shell, 2-loading port, 3-unloading port, 4-installation area, 5-argon ion gun, 6-support leg, 7-positioning rod, 8-translation seat, 9-positioning sleeve, 10-rack, 11-gear, 12-support plate, 13-reverse threaded screw, 14-sleeve, 15-drive motor, 16-guide rod, 17-clamping seat, 18-rotating shaft, 19-clamping plate, 20-driven gear, 21-driving gear, 22-rotating motor, 23-left pedestal, 24-right pedestal, 25-sleeve, 26-sleeve rod. DETAILED DESCRIPTION

[0023] The utility model is further described in detail below with reference to the accompanying drawings and specific implementation methods:

[0024] Embodiment 1, this embodiment aims to provide an argon ion automatic polishing equipment, which is mainly used for argon ion polishing machine. Compared with traditional mechanical polishing and chemical polishing methods, argon ion polishing instrument has many advantages. First, hydrogen ion polishing instrument does not require any chemical reagents, and can perform efficient, clean and lossless surface polishing while reducing environmental pollution. Secondly, argon ion polishing instrument can realize polishing and imaging of extremely small surface areas with extremely high accuracy and resolution. Thirdly, argon ion polishing instrument can perform surface regulation and processing without changing the structure and properties of the sample, and has extremely high controllability and stability.

[0025] like Figure 1-3 As shown in the figure, an argon plasma automatic polishing equipment comprises a shell 1, an argon ion gun 5, a workbench and an adjustment mechanism; the function of the shell 1 in this embodiment is to provide a sealed environment and provide an installation node for the internal structure; in the specific structure, an opening is arranged on the front side of the shell 1, and supporting legs 6 are arranged on the bottom to facilitate the maintenance and overhaul of the equipment, an argon ion gun 5 is fixed to the middle part of the shell 1, and a loading area and a unloading area are arranged on both sides thereof, and a loading port 2 and a unloading port 3 are arranged in the loading area and the unloading area respectively; in the specific structure, an upwardly protruding installation area 4 is arranged in the middle part of the shell 1, and the argon ion gun 5 is arranged in the installation area 4, and the loading area and the unloading area are distributed on both sides of the installation area 4. This layout makes the overall structure of the equipment more reasonable, the space utilization rate is higher, the structure is compact, the footprint is small, and it is convenient for installation and layout.

[0026] The adjusting mechanism includes a translation component, a clamping component and a rotating component. The position of the workbench is changed by the adjusting mechanism. In the specific structure, the translation component includes a positioning rod 7, a gear 11, a rack 10 and a translation seat 8; the positioning rod 7 is fixed in the shell 1 in the transverse direction, and a positioning sleeve is arranged on the translation seat, and the positioning sleeve is sleeved on the positioning rod 7. The rack 10 is fixed at the bottom of the translation seat 8 and meshes with the gear 11, and the gear 11 is connected to the translation motor by transmission; wherein the translation motor is fixed to the middle area of ​​the shell 1 through a bracket, and the moving component can realize a translation structure, which can change the horizontal position of the workbench, which is not only reflected in the position transfer of the loading area, the working area and the unloading area, but also can change the position of the workbench in the transverse direction during the polishing process to improve the coverage range.

[0027] The clamping assembly includes a support plate 12, a reverse-threaded screw 13, a clamping seat 17 and a guide rod 16; support plates 12 are arranged on both sides of the translation seat 8, and a guide rod 16 is fixed between the support plates 12. The clamping seat 17 is symmetrically distributed on both sides with the argon ion gun 5 as the center, and is slidably sleeved on the guide rod 16. When working, this structure can always move inward or outward synchronously with the argon ion gun 5 as the center to ensure that the workpiece is directly below the argon ion gun 5. A screw sleeve 14 is arranged on the clamping seat 17, and the reverse-threaded screw 13 is rotatably arranged on the support plate 12, and its two reverse-threaded sections are respectively threadedly connected with the screw sleeves on the clamping seats 17 on both sides, and a driving motor 15 is arranged at the end of the reverse-threaded screw 13; the clamping assembly can provide clamping force, which is convenient for the workpiece (with a placement seat) to be placed therein and clamped to ensure the stable placement of the workpiece.

[0028] The rotating assembly includes a rotating shaft 18, a clamping plate 19 and a rotating motor 22. The rotating shaft 18 is rotatably set on the clamping seat 17, and a clamping plate 19 is set at its end. The rotating shaft 18 is provided with a driven gear 20. The rotating motor 22 is fixed on the clamping seat 17, and a driving gear 21 meshing with the driven gear 20 is set on its rotating shaft; the rotating assembly can change the angle of the workpiece and has a good polishing coverage range. In order to simplify the structure, this embodiment is provided with a positioning assembly between the two clamping plates. The positioning assembly includes a sleeve rod 26 and a sleeve 25. The sleeve rod 26 and the sleeve 25 are slidably mounted together and distributed and fixed on the two clamping plates. Through this structure, not only the distance between the clamping plates can be adjusted, but also linkage can be achieved; the workbench includes a left base and a right base, and the left base and the right base are respectively fixed on the inner sides of the clamping plates on both sides and constitute the main body of the workbench.

[0029] The equipment is easy to operate and use. By controlling the translation motor, drive motor and rotation motor, the operator can easily adjust and polish the workbench. This simple and intuitive operation method reduces the difficulty of operation and improves work efficiency, making the equipment more suitable for large-scale and high-efficiency production environments.

[0030] In this embodiment, the argon plasma automatic polishing equipment can achieve precise adjustment of the workbench by designing a unique adjustment mechanism. The coordinated work of the translation component, the clamping component and the rotation component enables the equipment to fine-tune the workbench in multiple dimensions such as horizontal, vertical and rotation, thereby ensuring that the argon ion gun 5 can accurately align the material on the workbench for polishing. This precise adjustment capability greatly improves the polishing accuracy, allowing the equipment to meet the needs of the high-precision manufacturing field. The equipment is suitable for polishing the surfaces of various materials, realizes precise adjustment and efficient polishing of the workbench, is easy to operate, compact in structure, and has a wide range of applications, providing an efficient and reliable polishing solution for the high-precision manufacturing field.

[0031] The above-mentioned implementation methods of the utility model do not constitute a limitation on the protection scope of the utility model. The basic concept of the utility model is to achieve accurate positioning, clamping and rotation of the workbench through the translation component, clamping component and rotating component of the adjustment mechanism, so that the argon ion gun can accurately align the material on the workbench for polishing. Any modification, equivalent substitution and improvement made within the spirit and principle of the utility model shall be included in the protection scope of the claims of the utility model.

Claims

1. An argon plasma automatic polishing device, characterized in that: It comprises a shell, an argon ion gun, a workbench and an adjustment mechanism; the argon ion gun is fixed in the middle of the shell, and a loading area and a unloading area are respectively arranged on both sides of the shell, and the loading area and the unloading area are respectively provided with a loading port and a unloading port; The adjustment mechanism includes a translation assembly, a clamping assembly and a rotating assembly; the translation assembly includes a positioning rod, a gear, a rack and a translation seat; the positioning rod is fixed in the housing in the transverse direction, a positioning sleeve is arranged on the translation seat, the positioning sleeve is sleeved on the positioning rod, the rack is fixed at the bottom of the translation seat and meshes with the gear, and the gear is connected to the translation motor in a transmission manner; The clamping assembly includes a support plate, a reverse threaded screw, a clamping seat and a guide rod; support plates are arranged on both sides of the translation seat, and a guide rod is fixed between the support plates; the clamping seat is symmetrically distributed on both sides with the argon ion gun as the center, and is slidably sleeved on the guide rod; a screw sleeve is arranged on the clamping seat, the reverse threaded screw is rotatably arranged on the support plate, and its two reverse thread sections are respectively threadedly connected with the screw sleeves on the clamping seats on both sides, and a driving motor is arranged at the end of the reverse threaded screw; The rotating assembly includes a rotating shaft, a clamping plate and a rotating motor. The rotating shaft is rotatably arranged on a clamping seat, and a clamping plate is arranged at the end thereof. The rotating shaft is provided with a driven gear. The rotating motor is fixed on the clamping seat, and a driving gear meshing with the driven gear is arranged on its rotating shaft. The workbench comprises a left base and a right base, which are respectively fixed on the inner sides of the clamping plates on both sides and constitute the main body of the workbench.

2. The argon plasma automatic polishing equipment according to claim 1, characterized in that: A positioning assembly is arranged between the two clamping plates. The positioning assembly comprises a sleeve rod and a sleeve. The sleeve rod and the sleeve are slidably sleeved together and are distributed and fixed on the two clamping plates.

3. The argon plasma automatic polishing equipment according to claim 1, characterized in that: The translation motor is fixed to the middle area of ​​the housing through a bracket.

4. The argon plasma automatic polishing equipment according to claim 1, characterized in that: An upwardly protruding installation area is arranged in the middle of the shell, the argon ion gun is arranged in the installation area, and the loading area and the unloading area are distributed on both sides of the installation area.

5. The argon plasma automatic polishing equipment according to any one of claims 1 to 4, characterized in that: The front side of the shell is provided with an opening door, and the bottom is provided with supporting legs.

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