Vapor deposition mask plate
By designing heat conducting parts and heat dissipation mechanisms in the evaporation mask, the problem of poor heat dissipation effect in the prior art is solved, more efficient heat dissipation and coating cooling are achieved, and coating efficiency is improved.
Patent Information
- Application Number
- CN202421053360.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-15
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2034-05-15
AI Technical Summary
The existing evaporated mask has poor heat dissipation effect, which makes it difficult to dissipate heat in time, which can easily lead to burning and damage to the mask, and the coating cooling speed is slow and the coating efficiency is low.
An evaporation mask plate including a template body, a heat sink, a heat conductor and a heat dissipation mechanism is designed. The heat conducting member leads and dissipates heat through the heat conducting rod and heat dissipation pipe. The heat dissipation mechanism forms wind force through the air blades and the driving motor to promote the dissipation of heat.
It effectively improves the heat dissipation effect of the mask, avoids burning due to excessive heat accumulation, and accelerates the cooling process of the coating and improves the coating efficiency.
Smart Images
Figure CN222665978U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of electronic components, in particular to an evaporation mask. Background Art
[0002] The evaporation mask is a tool used to manufacture electronic components. The materials used are usually high-precision silicon wafers, quartz glass or MgF2. Its main function is to control the transmission and reflection of light and ensure the uniformity of the metal film. In order to ensure the good performance of the product, the size of the evaporation mask is also very important. Generally speaking, the size of the evaporation mask needs to take into account multiple factors, including the thickness of the coating layer, the process flow and the focusing accuracy.
[0003] When the evaporation mask is coated, a lot of heat will be generated inside it. However, the existing evaporation mask generally only relies on its own outer surface for natural heat dissipation, which has a poor heat dissipation effect, making it difficult to dissipate the heat in time. The mask is easily burned due to excessive heat accumulation, and the cooling speed of the formed coating is also slow, resulting in low coating efficiency of the mask. To this end, we provide an evaporation mask. Utility Model Content
[0004] 1. Technical issues to be solved
[0005] In view of the deficiencies of the prior art, the utility model provides a vapor deposition mask plate, which solves the problem that the heat dissipation effect of the current vapor deposition mask plate is very poor.
[0006] (II) Technical solution
[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vapor deposition mask template, comprising a template body, a plurality of mold cavities are evenly opened on the top of the template body, a heat dissipation cover is provided on the outer ring of the template body, a heat dissipation mechanism is provided on the front of the inner cavity of the heat dissipation cover, a plurality of heat-conducting parts are evenly arranged on the left and right sides of the template body, the heat-conducting parts are located in the inner cavity of the heat dissipation cover, and a drive motor is fixedly installed on the right side of the heat dissipation cover.
[0008] Preferably, the inner circle and the back side of the heat dissipation cover are both open, the inner circle of the heat dissipation cover is in contact with the outer wall of the template body, and a plurality of through holes are evenly formed on the bottom of the heat dissipation cover.
[0009] Preferably, the heat dissipation mechanism includes a rotating shaft, the left side of the rotating shaft is rotatably connected to the left side of the inner wall of the heat dissipation cover, the right side of the rotating shaft passes through the right side of the inner wall of the heat dissipation cover, and the outer ring of the rotating shaft is evenly provided with multiple fan blades.
[0010] Preferably, the heat conducting member comprises a heat conducting rod, the heat conducting rod is fixed to the outer wall of the template body, and a heat dissipation pipe is arranged on a side of the heat conducting rod away from the template body.
[0011] Preferably, the right side of the rotating shaft is fixedly connected to the left side of the output shaft of the driving motor, and the fan blade is in an arc shape.
[0012] Preferably, the heat dissipation pipe is opened at one side away from the template body, and a plurality of heat dissipation holes are evenly formed on the outer ring of the heat dissipation pipe.
[0013] (III) Beneficial effects
[0014] The utility model provides a vapor deposition mask having the following beneficial effects:
[0015] 1. When the mask is in use, the template body will generate a lot of heat during coating. The heat conducting rod can conduct the heat of the mask and dissipate it into the heat dissipation cover through the heat dissipation holes of the heat dissipation pipe.
[0016] 2. When the mask is being coated, the driving motor can drive the fan blades to rotate rapidly through the rotating shaft. The rotation direction of the fan blades is from back to front, which can form forward wind force, and the air in the heat dissipation cover can be discharged from the back opening. At the same time, the heat derived from the heat-conducting part can be taken away in time, and the heat generated by the template body during coating can be dissipated to the outside air in time, which can not only prevent the mask from burning due to excessive heat accumulation, but also quickly cool the coating to improve the coating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model;
[0018] Figure 2 It is a schematic diagram of the structure of the template body and the heat conducting member of the utility model;
[0019] Figure 3 This is a schematic diagram of the structure of the heat dissipation cover and its internal components of the utility model;
[0020] Figure 4 It is a structural schematic diagram of the heat dissipation mechanism of the utility model;
[0021] Figure 5 It is a schematic structural diagram of the heat conducting element of the utility model.
[0022] In the figure: 1. template body; 11. mold cavity; 2. heat dissipation cover; 21. through hole; 3. heat dissipation mechanism; 31. rotating shaft; 32. fan blade; 4. heat conducting member; 41. heat rod; 42. heat dissipation pipe; 421. heat dissipation hole; 5. drive motor. DETAILED DESCRIPTION
[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0024] like Figure 1-5 As shown, the utility model provides a technical solution: a vapor deposition mask template, comprising a template body 1, a plurality of mold cavities 11 are evenly opened on the top of the template body 1, and a heat dissipation cover 2 is provided on the outer ring of the template body 1. When in use, the mask template is placed in an evaporation device, and then the coating material can be poured into the mold cavity 11 to form a coating.
[0025] The inner circle and the back side of the heat dissipation cover 2 are both open, the inner circle of the heat dissipation cover 2 is in contact with the outer wall of the template body 1 , and a plurality of through holes 21 are evenly formed on the bottom of the heat dissipation cover 2 .
[0026] Specifically, a plurality of heat-conducting parts 4 are evenly spaced on the left and right sides of the template body 1, and the heat-conducting parts 4 are located in the inner cavity of the heat dissipation cover 2. The heat-conducting parts 4 include a heat-conducting rod 41, and the heat-conducting rod 41 is fixed to the outer wall of the template body 1. A heat dissipation pipe 42 is arranged on the side of the heat-conducting rod 41 away from the template body 1, and the heat dissipation pipe 42 is opened on the side away from the template body 1, and a plurality of heat dissipation holes 421 are evenly opened on the outer circle of the heat dissipation pipe 42.
[0027] During specific use, the template body 1 generates a large amount of heat during film coating, and the heat-conducting rod 41 can conduct the heat of the mask plate and dissipate it into the heat dissipation cover 2 through the heat dissipation holes 421 of the heat dissipation pipe 42 .
[0028] Furthermore, a heat dissipation mechanism 3 is arranged on the front side of the inner cavity of the heat dissipation cover 2, and the heat dissipation mechanism 3 includes a rotating shaft 31. The left side of the rotating shaft 31 is rotatably connected to the left side of the inner wall of the heat dissipation cover 2. The rotating shaft 31 can be rotatably connected to the inner wall of the heat dissipation cover 2 through a bearing. The right side of the rotating shaft 31 passes through the right side of the inner wall of the heat dissipation cover 2. The outer ring of the rotating shaft 31 is evenly provided with a plurality of fan blades 32. The fan blades 32 are in an arc shape. When the arc-shaped fan blades 32 rotate, it is convenient to form a certain wind force.
[0029] Furthermore, a driving motor 5 is fixedly installed on the right side of the heat dissipation cover 2, and the right side of the rotating shaft 31 is fixedly connected to the left side of the output shaft of the driving motor 5. When the driving motor 5 is turned on, it can drive the rotating shaft 31 to rotate.
[0030] During specific use, when the mask is coated, the drive motor 5 is turned on, and its output shaft can drive the fan blades 32 to rotate rapidly through the rotating shaft 31. The rotation direction of the fan blades 32 is from back to front, which can form a forward wind force, and the air in the heat dissipation cover 2 can be discharged from the back opening. At the same time, the outside air can enter the heat dissipation cover 2 through the through hole 21 to supplement the internal air pressure. In this way, the heat derived from the heat conductor 4 can be taken away in time, and the heat generated by the template body 1 during coating can be dissipated to the outside air in time, which can not only prevent the mask from being burned due to excessive heat accumulation, but also quickly cool the coating to improve the coating efficiency.
[0031] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.
[0032] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A vapor deposition mask, comprising a template body (1), characterized in that: The top of the template body (1) is evenly provided with a plurality of mold cavities (11); the outer ring of the template body (1) is provided with a heat dissipation cover (2); a heat dissipation mechanism (3) is provided on the front of the inner cavity of the heat dissipation cover (2); a plurality of heat conducting members (4) are evenly provided on the left and right sides of the template body (1); the heat conducting members (4) are located in the inner cavity of the heat dissipation cover (2); and a driving motor (5) is fixedly installed on the right side of the heat dissipation cover (2).
2. The evaporation mask according to claim 1, characterized in that: The inner circle and the back side of the heat dissipation cover (2) are both open, the inner circle of the heat dissipation cover (2) is in contact with the outer wall of the template body (1), and the bottom of the heat dissipation cover (2) is evenly provided with a plurality of through holes (21).
3. The evaporation mask according to claim 1, characterized in that: The heat dissipation mechanism (3) comprises a rotating shaft (31), the left side of the rotating shaft (31) is rotatably connected to the left side of the inner wall of the heat dissipation cover (2), the right side of the rotating shaft (31) penetrates the right side of the inner wall of the heat dissipation cover (2), and the outer ring of the rotating shaft (31) is evenly provided with a plurality of fan blades (32).
4. The evaporation mask according to claim 1, characterized in that: The heat conducting member (4) comprises a heat conducting rod (41), the heat conducting rod (41) is fixed to the outer wall of the template body (1), and a heat dissipation pipe (42) is arranged on a side of the heat conducting rod (41) away from the template body (1).
5. The evaporation mask according to claim 3, characterized in that: The right side of the rotating shaft (31) is fixedly connected to the left side of the output shaft of the driving motor (5), and the fan blade (32) is in an arc shape.
6. The evaporation mask according to claim 4, characterized in that: The heat dissipation pipe (42) is opened at one side away from the template body (1), and a plurality of heat dissipation holes (421) are evenly arranged on the outer ring of the heat dissipation pipe (42).