Furnace tube and air inlet device thereof

Abstract

The utility model relates to a furnace tube and a gas inlet device thereof, and the gas inlet device of the furnace tube comprises a gas inlet pipe which is used for transmitting reaction gas and is provided with a plurality of holes in the same side; the flow dividing assemblies are arranged on the inner wall of the gas inlet pipe in the first direction, each flow dividing assembly is internally provided with a flow dividing channel used for transmitting reaction gas, and each flow dividing channel is communicated with the hole; wherein the size length of each flow dividing assembly in the first direction has a decreasing trend, and the first direction is the direction from the bottom of the air inlet pipe to the top of the air inlet pipe. By adopting the gas inlet device provided by the invention, the problem of gas concentration difference in the reaction chamber in the furnace tube process can be effectively improved, reaction gases at the bottom, the middle and the top of the reaction chamber can have the same activation time, and the film thickness uniformity between wafers at the bottom, the middle and the top of the reaction chamber can be effectively improved; and the load effect of the furnace tube process is improved.

Description

Technical Field

[0001] The present application relates to the technical field of wafer processing equipment, and in particular to a furnace tube and an air intake device thereof. Background Art

[0002] When performing the furnace tube process, the reaction gas usually enters the furnace through the air inlet pipe and diffuses from the bottom to the top. During the diffusion of the gas from the bottom to the top, part of the gas will be consumed by the wafers at the bottom, resulting in a decrease in the gas concentration at the top, that is, there is a concentration difference between the reaction gas at the bottom and the top of the furnace. In order to reduce the impact of the gas concentration difference in the furnace on the process, it is usually necessary to increase the top temperature, but this will cause a temperature difference between the top, middle and bottom of the furnace. Utility Model Content

[0003] Based on this, it is necessary to provide a furnace tube and an air intake device thereof to address the problem of gas concentration difference between the top and bottom of the furnace tube in the related art.

[0004] In order to achieve the above object, on the one hand, the present invention provides an air intake device for a furnace tube, comprising:

[0005] An air inlet pipe, a plurality of holes are opened on the same side of the air inlet pipe, and the air inlet pipe is used to transmit the reaction gas;

[0006] A plurality of diverter components are arranged on the inner wall of the intake pipe along a first direction, each of the diverter components is provided with a diverter passage for transmitting the reaction gas, and each of the diverter passages is connected to the hole; wherein the length of each of the diverter components in the first direction has a decreasing trend, and the first direction is the direction from the intake end of the intake pipe to the top of the intake pipe.

[0007] In one embodiment, the flow dividing assembly includes a first baffle and a second baffle arranged opposite to each other, wherein:

[0008] The first partition plate and the second partition plate are respectively located on two sides of the same hole;

[0009] The bypass passage is formed between the first partition plate and the second partition plate, and the projection length of the partition plates of the first partition plate and the second partition plate projected onto the inner wall of the intake pipe in the first direction is the length of the bypass component in the first direction.

[0010] In one embodiment, the bypass passage includes an inlet branch and an outlet branch connected to each other; wherein,

[0011] The first partition plate includes a first partition arm and a second partition arm, wherein the first end of the first partition arm is connected to the inner wall of the air inlet pipe, the second end of the first partition arm is connected to the first end of the second partition arm, and the connection point between the first partition arm and the inner wall of the air inlet pipe is located on the first side of the hole; the second partition arm extends along the first direction, the first partition arm extends along the second direction to form the outlet branch between the first partition arm and the inner wall of the air inlet pipe, and the second direction intersects with the first direction;

[0012] The second partition plate is connected to the inner wall of the intake pipe, and the connection point between the second partition plate and the inner wall of the intake pipe is located on the second side of the hole; the second partition plate is bent toward the second partition arm to form the intake branch of the bypass passage with the second partition arm.

[0013] In one embodiment, among two adjacent flow diversion components, the first partition arm of one of the flow diversion components is arranged in contact with the second partition plate portion of the other flow diversion component.

[0014] In one embodiment, the second end of the first partition arm is smoothly connected to the first end of the second partition arm in an arc shape.

[0015] In one embodiment, the second partition plates in each of the diversion assemblies have the same shape.

[0016] In one embodiment, the length dimension of the second partition arm in each of the diversion components in the first direction has a decreasing trend.

[0017] In one embodiment, the length dimension of the Nth flow dividing component in the first direction is d / (2 N -1 ), wherein d is the length dimension of the diverter assembly at the bottom of the intake pipe in the first direction, N is an integer greater than or equal to 1, and d is a positive number greater than 0.

[0018] In one embodiment, the number of the diversion components is M, and the number of the holes is K, wherein M=K-1, and both M and K are positive integers.

[0019] In a second aspect, the present application further provides a furnace tube, comprising: a reaction chamber and an air intake device provided by any of the above embodiments, wherein the air intake device is arranged in the reaction chamber.

[0020] The unexpected effect of the present application is that the air intake device of the furnace tube includes an air intake pipe and a flow divider component, a plurality of holes are provided on the same side of the air intake pipe, and the plurality of flow dividers are arranged on the inner wall of the air intake pipe along the first direction, and each flow divider component is provided with a flow divider passage for transmitting the reaction gas, and each flow divider passage is connected with the hole, so that after the reaction gas enters the air intake pipe, it can flow out from the holes at different positions along the flow divider passage, so that the reaction gas concentration at the bottom, middle and top of the reaction chamber is maintained within a certain range. Further, the length of each flow divider component in the first direction has a decreasing trend, that is, the path length of each flow divider passage in the first direction has a decreasing trend, so that the total path length difference of the reaction gas flowing out of different holes is very small, so that the activation time of the reaction gas flowing out of each hole to the reaction chamber is basically the same, thereby improving the uniformity of the film thickness between wafers at the bottom, middle and top of the reaction chamber, improving the load effect of the furnace tube process, and improving the utilization rate of the reaction gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the conventional technology, the drawings required for use in the embodiments or the conventional technology descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0022] Figure 1 It is a structural schematic diagram of an air intake device of a furnace tube provided in an embodiment;

[0023] Figure 2 A schematic diagram of the flow direction of the reaction gas in the gas inlet device of the furnace tube provided in one embodiment;

[0024] Figure 3 A schematic cross-sectional view of the structure of an air intake device for a furnace tube provided in an embodiment;

[0025] Figure 4 A schematic structural diagram of a flow splitter assembly cut from an air intake device of a furnace tube provided in an embodiment;

[0026] Figure 5 It is a structural schematic diagram of an air intake device of a furnace tube provided in a specific embodiment;

[0027] Figure 6 Schematic diagram of the structure of a furnace tube provided in one embodiment.

[0028] Description of reference numerals:

[0029] 100 - air inlet pipe, 110 - hole, 200 - flow diversion component, 210 - first partition plate, 211 - first partition arm, 212 - second partition arm, 220 - second partition plate, 230 - flow diversion passage, 231 - air inlet branch, 232 - air outlet branch, 610 - air inlet device, 620 - reaction chamber, 621 - inner wall, 622 - outer wall. DETAILED DESCRIPTION

[0030] In order to facilitate understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Embodiments of the present application are provided in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0032] Spatially relative terms such as "under," "beneath," "below," "under," "above," "above," and the like may be used herein to describe the relationship of an element or feature shown in the figures to other elements or features. It should be understood that, in addition to the orientations shown in the figures, spatially relative terms also include different orientations of the device in use and operation. For example, if the device in the accompanying drawings is flipped, an element or feature described as "under other elements" or "under it" or "under it" will be oriented as being "above" the other elements or features. Thus, the exemplary terms "under" and "under" may include both upper and lower orientations. In addition, the device may also include additional orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptors used herein are interpreted accordingly.

[0033] When used herein, the singular forms "a", "an", and "said / the" may also include plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "include / comprise" or "have" and the like specify the presence of stated features, wholes, steps, operations, components, parts, or combinations thereof, but do not exclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof. At the same time, in this specification, the term "and / or" includes any and all combinations of the relevant listed items.

[0034] As mentioned in the background technology, when the furnace tube process is carried out, the reaction gas enters the reaction chamber from the air inlet pipe and diffuses from the bottom to the top of the reaction chamber, which will cause a gas concentration difference in the reaction chamber. In order to compensate for the impact of low gas concentration on the reaction process, it is necessary to increase the temperature of the top of the reaction chamber, which will cause a temperature difference between the bottom and the top of the reaction chamber. In addition, when the reaction gas diffuses from the bottom to the top of the reaction chamber, the wafers at the bottom of the reaction chamber will first contact the gas, which makes the activation time of the wafers at the bottom longer and the activation time of the wafers at the top relatively short, resulting in low reaction gas utilization and poor thickness uniformity between wafers at the bottom, middle and top of the reaction chamber.

[0035] Based on this, the present application proposes an air intake device for a furnace tube, which can reduce the gas concentration difference in the reaction chamber, thereby effectively alleviating problems such as temperature difference and activation time difference caused by the gas concentration difference.

[0036] like Figure 1 As shown, the air intake device of the furnace tube includes an air intake pipe 100 and a plurality of flow dividing components 200 .

[0037] In the embodiment of the present application, the direction from the air inlet end of the air inlet pipe to the top of the air inlet pipe is taken as the first direction, that is, Figure 1 The OY direction indicates a first direction.

[0038] A plurality of holes 110 are provided on the same side of the air inlet pipe 100. In order to avoid different flow rates of reaction gas flowing out of the reaction chamber due to different hole diameters, which may affect the gas concentration at different heights in the reaction chamber, the diameters of the plurality of holes may be the same. The air inlet pipe 100 is used to transmit reaction gas. It is understood that when the furnace tube process is performed, the reaction gas enters the reaction chamber of the furnace tube through the air inlet pipe 100 and undergoes an activation reaction with the wafer. The length of the air inlet pipe 100 may be set to be greater than or equal to the height of the wafer at the top of the reaction chamber.

[0039] A plurality of flow dividers 200 are arranged along the first direction on the inner wall of the air inlet pipe 100, and each flow divider 200 is provided with a flow divider passage for transmitting the reaction gas, and each flow divider passage is connected to a hole. After the reaction gas enters the air inlet pipe from the bottom of the air inlet pipe 100, it flows out from different holes 110 along the flow divider passages formed by the flow divider 200 to the reaction chamber to react with the wafer.

[0040] It should be noted that the diameter of the air intake pipe is very small, and the projection length of the diverter assembly in the direction perpendicular to the first direction can be ignored. Therefore, the lengths involved in the embodiments of the present application are all the projection lengths of the main body involved in the first direction.

[0041] The length of each flow diversion component 200 in the first direction has a decreasing trend. The length of each flow diversion component 200 in the first direction is the projection length of each flow diversion component in the OY direction. Figure 2 As shown, the dotted arrow indicates the flow direction of the reaction gas flowing to the reaction chamber through the air inlet pipe 100. It can be understood that the reaction gas flowing out from the hole at the bottom of the air inlet pipe needs to pass through a longer path length of the branch flow path, so that the difference in the total path length of the reaction gas flowing out from the hole at the bottom of the air inlet pipe and the reaction gas flowing out from the top of the air inlet pipe is very small, that is, the time it takes for the reaction gas to flow out from different holes after entering the air inlet pipe is basically the same, so that the activation time of the reaction gas is basically the same.

[0042] In the embodiment of the present application, the air intake device of the furnace tube includes an air intake pipe and a flow divider assembly, a plurality of holes are provided on the same side of the air intake pipe, a plurality of flow dividers are arranged on the inner wall of the air intake pipe along the first direction, and each flow divider assembly is provided with a flow divider passage for transmitting the reaction gas, each flow divider passage is connected with the hole, so that after the reaction gas enters the air intake pipe, it can flow out from different holes along the flow divider passage, so that the reaction gas concentration at the bottom, middle and top of the reaction chamber is the same. Further, the length of each flow divider assembly in the first direction has a decreasing trend, that is, the path length of each flow divider passage in the first direction has a decreasing trend, and the total path length difference of the reaction gas flowing out from different holes is very small, so that the activation time of each reaction gas is basically the same, thereby improving the uniformity of the film thickness between wafers at the bottom, middle and top of the reaction chamber, improving the load effect of the furnace tube process, and improving the utilization rate of the reaction gas.

[0043] In one embodiment, the length dimension of each Nth flow dividing component in the first direction is d / (2 N-1 ), wherein d is the length dimension of the diverter assembly at the bottom of the intake pipe in the first direction, N is an integer greater than or equal to 1, and d is a positive number greater than 0.

[0044] Taking the position of the first hole at the bottom of the air inlet pipe as the reference point, the total path that the reaction gas needs to pass through from different holes is 2d in the first direction. For example, if the number of diverter components is two and the number of holes is three, then in the first direction, the length of the first diverter component is d, the length of the second diverter component is d / 2, the reaction gas flowing out of the first hole passes through a path length of d+d=2d, the reaction gas flowing out of the second hole passes through a path length of d+d / 2+d / 2=2d, and the reaction gas flowing out of the third hole passes through a path length of d+d / 2+d / 2=2d.

[0045] Optionally, if the number of diversion components is three and the number of holes is four, then in the first direction, the length dimension of the first diversion component is d, the length dimension of the second diversion component is d / 2, and the length dimension of the third diversion component is d / 4. The reaction gas flowing out of the first hole passes through a path length of d+d=2d, the reaction gas flowing out of the second hole passes through a path length of d+d / 2+d / 2=2d, the reaction gas flowing out of the third hole passes through a path length of d+d / 2+d / 4+d / 4=2d, and the reaction gas flowing out of the fourth hole passes through a path length of d+d / 2+d / 4+d / 4=2d.

[0046] In the embodiment of the present application, the length dimension of the Nth flow dividing component in the first direction is d / (2 N-1 ), so that the total path that the reaction gas needs to pass through to flow out from different holes has a length dimension of 2d in the first direction, so that the time required for the reaction gas to flow out from each hole to the reaction chamber is basically the same, which can ensure that the activation time of the reaction gas in the entire reaction chamber is basically the same, improve the uniformity of the film thickness between wafers at the bottom, middle and top of the reaction chamber, improve the load effect of the furnace tube process, and improve the utilization rate of the reaction gas.

[0047] In one embodiment, Figure 3 As shown, the flow dividing assembly 200 includes a first partition plate 210 and a second partition plate 220 which are arranged opposite to each other. The first partition plate 210 and the second partition plate 220 are respectively located on two sides of the same hole 110 , and a flow dividing passage 230 is formed between the first partition plate 210 and the second partition plate 220 . Figure 3 The dashed arrows in the middle indicate the flow path of the reaction gas in the bypass passage 230. The projection length of the first partition 210 and the second partition 220 onto the inner wall of the intake pipe in the first direction is the length of the bypass assembly 200 in the first direction. Figure 3 In the figure, the projection length of the first baffle 210 onto the inner wall of the intake pipe in the first direction is x1=ba, and the projection length of the second baffle 220 onto the inner wall of the intake pipe in the first direction is x2=ec. Then the length of the diverter assembly 200 in the first direction is x=ea.

[0048] For further information, see Figure 3 and Figure 4 The bypass passage 230 includes an air inlet branch 231 and an air outlet branch 232 that are connected.

[0049] The first partition plate 210 includes a first partition arm 211 and a second partition arm 212. The first end of the first partition arm 211 is connected to the inner wall of the air inlet pipe, the second end of the first partition arm 211 is connected to the first end of the second partition arm 212, and the connection point between the first partition arm 211 and the inner wall of the air inlet pipe is located on the first side of the hole 110. The second partition arm 212 extends along the first direction, and the first partition arm 211 extends along the second direction to form an outlet branch 232 between the inner wall of the air inlet pipe. The second direction intersects with the first direction. The second partition plate 220 is connected to the inner wall of the air inlet pipe, and the connection point between the second partition plate 220 and the inner wall of the air inlet pipe is the second side of the hole 110. The second partition plate 220 is bent toward the second partition arm 212, and forms an air inlet branch 231 of a shunt passage with the second partition arm 212. It can be understood that after the reaction gas flows into the air inlet pipe, it will pass through the air inlet branch 231 and the air outlet branch 232 in sequence and then flow out from the hole 110 into the reaction chamber.

[0050] In one embodiment, please refer to Figure 4 The second end of the first partition arm 211 is smoothly connected to the first end of the second partition arm 212 in an arc shape.

[0051] Optionally, the second end of the first partition arm and the first end of the second partition arm may also be connected in a relatively sharp connection manner such as an acute angle, a right angle or an obtuse angle.

[0052] In one embodiment, the second partitions of each flow dividing assembly have the same shape. The second partitions of each flow dividing assembly can be arranged in a horizontal "L" shape.

[0053] In one embodiment, the length dimension of the second partition arm of each flow dividing component in the first direction has a decreasing trend. It can be understood that in the first direction, the path length of each outlet branch decreases.

[0054] In one embodiment, in two adjacent flow diverter assemblies, the first partition arm of one flow diverter assembly is arranged in contact with the second partition plate portion of the other flow diverter assembly. It can be understood that in two adjacent flow diverter assemblies, the connection point of the second partition arm of one flow diverter assembly to the inner wall of the air inlet pipe and the connection point of the second partition plate of the other flow diverter assembly to the inner wall of the air inlet pipe are at the same position.

[0055] In one embodiment, the number of the shunt components is M, the number of the holes is K, and M=K-1. Wherein, M and K are both positive integers. It can be understood that the number of holes is always one more than the number of the shunt components.

[0056] In order to better illustrate the specific structure of the air intake device of the furnace tube of the present application, a more specific embodiment is listed.

[0057] like Figure 5As shown, the air intake device includes an air intake pipe 100 and three flow dividing components 200. Four holes 110 are arranged on the air intake pipe 100. Each flow dividing component 200 is provided with a set of opposite first baffles 210 and second baffles 220, and the first baffles 210 and the second baffles 220 constitute a flow dividing passage. Figure 5 In the air inlet pipe 100, the solid arrow indicates the flow direction of the reaction gas on the main passage in the air inlet pipe 100, and the dotted arrow indicates the flow direction of the reaction gas on the bypass passage formed by the bypass assembly 200. Assuming that the path length of the bypass passage formed by the first bypass assembly along the first direction, i.e., the OY direction, is d, then in this direction, the path length of the bypass passage formed by the second bypass assembly is d / 2, and the path length of the bypass passage formed by the third bypass assembly is d / 4. l indicates the height from the bottom of the air inlet pipe to the first hole.

[0058] When the air intake device is used to carry out a furnace tube process, the reaction gas flows in from the bottom of the air intake pipe 100, and the total path length required to flow out from the first hole is (l+d+d), the total path length required to flow out from the second hole is (l+d+d / 2+d / 2), the total path length required to flow out from the third hole is (l+d+d / 2+d / 4+d / 4), and the total path length required to flow out from the fourth hole is (l+d+d / 2+d / 4+d / 4), that is, the total path length required for the reaction gas to flow out from any hole is (l+2d).

[0059] In the embodiment of the present application, the air intake device of the furnace tube includes an air intake pipe and three flow dividers. Four holes are arranged on the air intake pipe, so that the gas concentrations at the bottom, middle and top of the reaction chamber can be the same, which can effectively improve the problem of concentration difference of the gas in the reaction chamber. Each flow divider is provided with a set of relative first baffles and second baffles, and the first baffles and the second baffles constitute a flow divider path, and the total path length that the reaction gas needs to go through when flowing out from any hole is (l+2d), so that the reaction gas flowing to the reaction chamber has the same heating time, that is, the activation reaction time is the same, which improves the uniformity of the film thickness between wafers at the bottom, middle and top of the reaction chamber, improves the load effect of the furnace tube process, and also improves the utilization rate of the reaction gas.

[0060] In one embodiment, Figure 6 As shown, the present application also provides a furnace tube, including a reaction chamber 620 and an air inlet device 610. The inner wall 621 and the top of the outer wall 622 of the reaction chamber 620 are not connected, and the inner wall 621 and the outer wall 622 of the reaction chamber form a gas outlet passage, and the reacted gas can flow out of the reaction chamber from the gas outlet passage.

[0061] The air intake device 610 is disposed in the reaction chamber. The air intake device 610 includes an air intake pipe and a plurality of flow dividers. A plurality of holes are provided on the same side of the air intake pipe, and the plurality of flow dividers are arranged on the inner wall of the air intake pipe along the first direction. Each flow divider is provided with a flow divider passage for transmitting the reaction gas, and each flow divider passage is connected to the hole. In addition, the length of each flow divider in the first direction has a decreasing trend.

[0062] In an embodiment of the present application, the furnace tube includes a reaction chamber and an air intake device, and the air intake device is arranged in the reaction chamber. When the furnace tube process is performed, the reaction gas can enter the reaction chamber through a plurality of holes arranged on the air intake device, and react with the wafers in the reaction chamber, which can effectively improve the gas concentration difference in the reaction chamber. In addition, since the total path length experienced by the reaction gas when entering the reaction chamber through the air intake device is basically the same, the activation time of the reaction gas entering the reaction chamber is also basically the same, which can effectively improve the uniformity of the film thickness between wafers at the bottom, middle and top of the reaction chamber, thereby improving the load effect of the furnace tube process.

[0063] In summary, the unexpected effect of the present application is: by setting an air intake device including an air intake pipe and a flow divider component, and providing a plurality of holes on the same side of the air intake pipe, the plurality of flow dividers are arranged on the inner wall of the air intake pipe along the first direction, and each flow divider component is provided with a flow divider passage for transmitting the reaction gas, and each flow divider passage is connected with the hole, so that after the reaction gas enters the air intake pipe, it can flow out from different holes along the flow divider passage, so that the reaction gas concentration at the bottom, middle and top of the reaction chamber is maintained within a certain range. Further, the length of each flow divider component in the first direction has a decreasing trend, that is, the path length of each flow divider passage in the first direction has a decreasing trend, so that the total path length difference of the reaction gas flowing out of different holes is very small, so that the activation time of the reaction gas flowing out of each hole to the reaction chamber is basically the same, thereby improving the uniformity of the film thickness between wafers at the bottom, middle and top of the reaction chamber, improving the load effect of the furnace tube process, and improving the utilization rate of the reaction gas.

[0064] In the description of this specification, the description with reference to the terms "some embodiments", "other embodiments", "ideal embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example.

[0065] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features of the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0066] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. An air intake device for a furnace tube, characterized in that: include: An air inlet pipe, a plurality of holes are opened on the same side of the air inlet pipe, and the air inlet pipe is used to transmit the reaction gas; A plurality of diverter components are arranged along a first direction on the inner wall of the intake pipe, each of the diverter components is provided with a diverter passage for transmitting the reaction gas, and each of the diverter passages is connected to the hole; wherein the length of each of the diverter components in the first direction has a decreasing trend, and the first direction is the direction from the intake end at the bottom of the intake pipe to the top of the intake pipe.

2. The air intake device of the furnace tube according to claim 1, characterized in that: The flow dividing assembly comprises a first baffle and a second baffle arranged opposite to each other, wherein: The first partition plate and the second partition plate are respectively located on two sides of the same hole; The bypass passage is formed between the first partition plate and the second partition plate, and the projection length of the partition plates of the first partition plate and the second partition plate projected onto the inner wall of the intake pipe in the first direction is the length of the bypass component in the first direction.

3. The air intake device of the furnace tube according to claim 2, characterized in that: The branch flow path includes an inlet branch and an outlet branch connected to each other; wherein, The first partition plate includes a first partition arm and a second partition arm, wherein the first end of the first partition arm is connected to the inner wall of the air inlet pipe, the second end of the first partition arm is connected to the first end of the second partition arm, and the connection point between the first partition arm and the inner wall of the air inlet pipe is located on the first side of the hole; the second partition arm extends along the first direction, the first partition arm extends along the second direction to form the outlet branch between the first partition arm and the inner wall of the air inlet pipe, and the second direction intersects with the first direction; The second partition plate is connected to the inner wall of the intake pipe, and the connection point between the second partition plate and the inner wall of the intake pipe is located on the second side of the hole; the second partition plate is bent toward the second partition arm to form the intake branch of the bypass passage with the second partition arm.

4. The air intake device for a furnace tube according to claim 3, characterized in that: Among two adjacent flow-dividing components, the first partition arm of one of the flow-dividing components is arranged in contact with the second partition plate portion of the other flow-dividing component.

5. The air intake device of the furnace tube according to claim 3, characterized in that: The second end of the first partition arm is smoothly connected to the first end of the second partition arm in an arc.

6. The air intake device of the furnace tube according to claim 3, characterized in that: The second partitions in each of the diversion components have the same shape.

7. The air intake device of the furnace tube according to claim 3, characterized in that: The length dimension of the second partition arm in each of the diversion components in the first direction has a decreasing trend.

8. The air intake device of the furnace tube according to claim 1, characterized in that: The length dimension of the Nth flow dividing component in the first direction is d / (2 N-1 ), wherein d is the length dimension of the diverter assembly at the bottom of the intake pipe in the first direction, N is an integer greater than or equal to 1, and d is a positive number greater than 0.

9. The air intake device of the furnace tube according to claim 1, characterized in that: The number of the diversion components is M, and the number of the holes is K, wherein M=K-1, and both M and K are positive integers.

10. A furnace tube, characterized in that: include: A reaction chamber and an air intake device as described in any one of claims 1 to 8, wherein the air intake device is arranged in the reaction chamber.

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