Evaporation material cleaning equipment

Abstract

The embodiment of the utility model provides evaporation material cleaning equipment. The evaporation material cleaning equipment comprises a shell, a vacuum pump and a cleaning device, wherein a negative pressure cavity is formed in the shell; the material placing table is arranged in the negative pressure cavity, a through hole is formed in the material placing table, and the material placing table is used for placing materials to be cleaned; the dry ice device is arranged in the shell; the dry ice spray head is connected with the dry ice device, and the dry ice spray head is arranged corresponding to the material placing table; and the moving assembly is arranged in the shell, the dry ice spray head is connected with the moving assembly, and the moving assembly can drive the dry ice spray head to move relative to the material placing table so as to clean the to-be-cleaned materials on the material placing table. According to the evaporation material cleaning equipment provided by the embodiment of the invention, the to-be-cleaned material on the material placing table can be cleaned through dry ice, so that the influence on the evaporation process is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a vapor deposition material cleaning device. Background Art

[0002] At present, in the process of evaporation film formation of OLED devices by evaporation, the organic material in the vacuum chamber is heated to sublime or melt and vaporize into material vapor, which is deposited on the glass substrate through the hollow area of ​​the metal mask. In this process, the film of evaporation material accumulated on the plating pot where the wafer is placed and the surrounding anti-fog board and other evaporation materials becomes thicker and thicker, which has an adverse effect on the atmosphere of the chamber, and there is a risk of the film falling off if it is too thick.

[0003] Therefore, there is an urgent need to develop a vapor deposition material cleaning device to regularly clean and regenerate the vapor deposition material, so as to improve the utilization rate of the vapor deposition material and reduce the impact on the vapor deposition process. Utility Model Content

[0004] Therefore, in order to overcome at least some of the defects and shortcomings in the prior art, an embodiment of the utility model provides a vapor deposition material cleaning device to clean the vapor deposition material to reduce the impact on the vapor deposition process.

[0005] Specifically, on the one hand, an embodiment of the utility model provides a vapor deposition material cleaning device, comprising: a shell, a negative pressure cavity is formed in the shell; a material placement table, arranged in the negative pressure cavity, the material placement table is provided with a through hole, and the material placement table is used to place the material to be cleaned; a dry ice device, arranged in the shell; a dry ice spray head, connected to the dry ice device, and the dry ice spray head is arranged corresponding to the material placement table; and a moving component, arranged in the shell, the dry ice spray head is connected to the moving component, and the moving component can drive the dry ice spray head to move relative to the material placement table to clean the material to be cleaned on the material placement table.

[0006] In a specific embodiment of the present invention, the evaporation material cleaning equipment also includes: an evaporation material recovery device, which is arranged in the shell, and the material placement table is arranged on the evaporation material recovery device, and the material placement table is provided with a through hole connected to the evaporation material recovery device.

[0007] In a specific embodiment of the present utility model, the evaporation material recovery device includes: a recovery guide member, including a first opening and a second opening arranged opposite to each other, the first opening is larger than the second opening, the material placement table is arranged on the first opening, and the first opening is connected to the through hole; and a collection box, which is arranged in the shell, and the collection box is connected to the second opening.

[0008] In a specific embodiment of the utility model, the evaporation material recovery device also includes: a material collection box, which is detachably arranged in the collection box; a negative pressure fan, which is arranged in the shell; a fan duct, which is connected between the material collection box and the negative pressure fan; and a filter, which is arranged at the connection between the fan duct and the material collection box.

[0009] In a specific embodiment of the utility model, a first movable door is provided on the shell corresponding to the material placement table, and the material placement table is movably connected to the shell, so that the material placement table can slide relative to the shell and the material placement table can be replaced through the first movable door.

[0010] In a specific embodiment of the present utility model, a clamping position is provided on the material placement table corresponding to the material to be cleaned, and the clamping position is used to fix the material to be cleaned.

[0011] In a specific embodiment of the present utility model, a second movable door is provided on the shell corresponding to the collection box, the recovery guide is an eccentric structure, and the second opening is provided close to the second movable door.

[0012] In a specific embodiment of the present invention, a Teflon coating is provided on the inner wall of the recovery guide.

[0013] In a specific embodiment of the present invention, a wind knife is further provided on the inner side wall of the recovery guide member, the wind knife is provided close to the first opening, and the air outlet of the wind knife is provided toward the inner side wall.

[0014] In a specific embodiment of the present utility model, a reducing hose is also connected between the fan duct and the material collection box, the reducing hose has a first end and a second end opposite to each other, the size of the first end is larger than the size of the second end, the first end is connected to the material collection box, and the second end is connected to the fan duct.

[0015] In a specific embodiment of the utility model, an operation port is provided on the shell; the evaporation material cleaning equipment also includes: a handheld spray gun, which is arranged in the shell and connected to the dry ice device; and antifreeze gloves, which are connected to the operation port.

[0016] In a specific embodiment of the present utility model, an anti-collision sensor is further provided in the shell near the operating port, and the anti-collision sensor is used to control the evaporation material cleaning device to stop working when sensing that the user operates the handheld spray gun.

[0017] In a specific embodiment of the present invention, the moving component includes a mechanical arm, the mechanical arm is connected to the shell, the dry ice spray head is connected to one end of the mechanical arm close to the material placement table, and the mechanical arm can drive the dry ice spray head to move relative to the material placement table.

[0018] In a specific embodiment of the present utility model, the moving component includes: a guide track connected to the shell; a moving part slidably connected to the guide track, the dry ice spray head is connected to one end of the moving part close to the material placement table, and the moving part can drive the dry ice spray head to move along the guide track.

[0019] In a specific embodiment of the present invention, the vapor deposition material cleaning equipment further includes: a control device, which is arranged in the shell and electrically connected to the moving component; and a control structure, which is arranged on the shell and electrically connected to the control device.

[0020] In a specific embodiment of the utility model, the top of the shell is provided with: a carbon dioxide sensor and / or an oxygen sensor for detecting the carbon dioxide content; and an early warning device for issuing an early warning when the carbon dioxide content exceeds the standard.

[0021] In a specific embodiment of the present invention, a visual window is provided on the shell; and / or a third movable door is provided on the shell corresponding to the dry ice device.

[0022] From the above, it can be seen that the embodiment of the utility model arranges a dry ice device and a moving component in the shell, and the dry ice nozzle on the moving component moves relative to the material placement table, and sprays dry ice to clean the material to be cleaned on the material placement table. In the negative pressure cavity, the dry ice nozzle can quickly sublimate into gaseous carbon dioxide after spraying. The thin film of the evaporated material on the evaporated material is cleaned with dry ice, so that the evaporated material can be reused, thereby improving the utilization rate of the evaporated material. By cleaning the thin film of the evaporated material, the impact on the evaporation process is also reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1A and Figure 1B A schematic diagram of the structure of a vapor deposition material cleaning device provided in an embodiment of the utility model;

[0025] Figure 2A and Figure 2B for Figure 1A Schematic diagram of the exploded structure of the evaporation material cleaning equipment.

[0026] Figure 3A and Figure 3B This is a schematic diagram of the structure of the material placement table in the evaporation material cleaning equipment.

[0027] Figure 4 for Figure 2A Schematic diagram of the decomposed structure of the evaporation material recovery component.

[0028] Figure 5 This is a schematic diagram of the exploded structure of another evaporation material recovery component.

[0029] Figure 6 for Figure 5 Schematic diagram of the structure of the recovery guide piece.

[0030] Figure 7 for Figure 2A Schematic diagram of the structure of the robotic arm in the evaporation material cleaning equipment.

[0031] Figure 8 for Figure 2B Schematic diagram of the structure of the middle slide.

[0032]

Main component number

[0033] 10. Evaporation material cleaning equipment; 100. Shell; 101. First movable door; 102. Visual window; 103. Operation port; 104. Roller; 105. Second movable door; 106. Third movable door; 110. Anti-collision sensor; 120. Carbon dioxide sensor; 130. Lighting lamp; 200. Material placement table; 201. Through hole; 202. Positioning; 203. Handle; 300. Dry ice device; 400. Evaporation material recovery device; 410. Recovery guide; 411. First opening; 412. Second opening; 413. Wind knife; 420. Fan pipe duct; 430, negative pressure fan; 440, collection box; 450, material collection box; 460, filter; 470, variable diameter hose; 471, first end; 472, second end; 510, slide; 511, guide track; 512, moving part; 520, mechanical arm; 521, base; 522, first connecting shaft; 523, first shaft arm; 524, second connecting shaft; 525, second shaft arm; 526, third shaft arm; 530, dry ice spray head; 600, antifreeze gloves; 700, handheld spray gun; 810, control structure; 820, control device; 900, indicator light. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only some embodiments of the utility model, not all embodiments. Based on the embodiments described in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work belong to the protection scope of the utility model.

[0035] It should be noted that all directional indications (such as up, down, left, right, front, back, top, bottom) in the embodiments of the utility model are only used to explain the relative position relationship, movement, etc. between the components under a certain specific posture (as shown in the drawings). If the specific posture changes, the directional indication will also change accordingly. In addition, the term "vertical" involved in the utility model embodiments and claims means that the angle between the two elements is 90° or there is a deviation of -5° to +5°, and the term "parallel" involved means that the angle between the two elements is 0° or there is a deviation of -5° to +5°.

[0036] In the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features.

[0037] See also Figure 1A , Figure 1B , Figure 2A and Figure 2B The embodiment of the utility model provides a vapor deposition material cleaning device 10, which may include, for example: a shell 100, a material placement table 200, a dry ice device 300, a dry ice nozzle 530 and a moving component.

[0038] In the process of preparing OLED devices by evaporation, the organic material in the vacuum chamber is heated to sublime or melt and vaporize into material vapor, which is deposited on the glass substrate through the hollow area of ​​the metal mask. In this process, the film of evaporation material accumulated on the plating pot where the wafer is placed and the surrounding anti-adhesion plate and other evaporation materials becomes thicker and thicker, which has an adverse effect on the atmosphere of the cavity, and there is a risk of the film falling off if it is too thick. The evaporation materials such as the plating pot and the anti-adhesion plate can be removed from the evaporation equipment and placed in the evaporation material cleaning equipment 10 provided in this embodiment for cleaning, and can be reused after cleaning.

[0039] Specifically, the shell 100 can be, for example, a frame constructed of aluminum profiles, and the shell can be formed by enclosing aluminum-plastic panels. The shell 100 can also be, for example, enclosed by square steel and stainless steel plates. In addition, a sealed space can be formed inside the shell 100, so that the working dust inside the shell 100 will not disperse. The sealed space can be realized by, for example, using a sealing ring on the shell 100 to improve the sealing of the shell 100; a negative pressure cavity is also formed inside the shell 100. During operation, the sealed space inside the shell 100 can be realized by, for example, a negative pressure blower. The shell 100 can also be, for example, a double-layer structure, or sound insulation cotton can be set on the side wall of the shell 100 to improve the sound insulation effect of the evaporation material cleaning equipment 10.

[0040] The material placement table 200 is arranged in the negative pressure chamber and is used to place the material to be cleaned. The material to be cleaned may be, for example, a contaminated anti-fouling plate or a crucible, a cover plate or other evaporation material. The evaporation material that is contaminated by the evaporation material during the evaporation process is the material to be cleaned. During cleaning, the material to be cleaned is placed on the material placement table 200.

[0041] The dry ice device 300 can be, for example, a dry ice machine for preparing dry ice, and the type and size of the dry ice machine can be set according to specific needs. The dry ice spray head 530 is connected to the dry ice device 300, and the movable component is arranged in the housing 100, and the dry ice spray head 530 is arranged on the movable component. The dry ice spray head 530 corresponds to the material placement table 200, and the movable component can drive the dry ice spray head 530 to run relative to the material placement table 200 to clean the materials to be cleaned on the material placement table 200. The dry ice spray head 530 can spray dry ice on the materials to be cleaned on the material placement table 200 through the drive of the movable component. The dry ice can blow down the organic vapor deposition material on the materials to be cleaned, and in the negative pressure cavity, the dry ice can be quickly sublimated into gaseous carbon dioxide after spraying, and there is no pollution to the vapor deposition material and the organic vapor deposition material. Through such a setting, the vapor deposition material can be cleaned, the utilization rate of the vapor deposition material can be improved, and the impact on the vapor deposition process can be reduced.

[0042] Furthermore, the evaporation material cleaning device 10 may, for example, further include an evaporation material recovery device 400, the evaporation material recovery device 400 is disposed in the housing 100, and the material placement table 200 is disposed on the evaporation material recovery device 400. Figure 3A, the material placement table 200 is provided with a through hole 201 connected to the evaporation material recovery device 400. The surface area of ​​the material placement table 200 may be, for example, larger than the placement area of ​​the material to be cleaned, that is, the through hole 201 may be, for example, located around the material to be cleaned, so that the washed evaporation material can fall through the through hole 201 to the evaporation material recovery device 400, so that the evaporation material can be recycled and reused, reducing the waste of evaporation materials and reducing costs. In addition, since dry ice quickly sublimates into gaseous carbon dioxide in the negative pressure chamber, it will not cause pollution to the evaporation material during the flushing process, and the recovery rate of the evaporation material can be improved. In some embodiments of the present embodiment, the material placement table 200 may be, for example, a mesh structure. In other embodiments, the material placement table 200 may be, for example, provided with a plurality of through holes 201, and the size, shape and position of the through holes 201 may be set according to actual needs.

[0043] See also Figure 1B The housing 100 may be provided with a first movable door 101, for example, corresponding to the material placement table 200, and the first movable door 101 is movably connected to the housing 100. Specifically, the first movable door 101 may be provided with a first movable door 101, for example, Figure 1B The shell 100 is connected in the manner of a telescopic cylinder as shown, so that the first movable door 101 can be flipped up to open or closed downward relative to the shell 100. Of course, the first movable door 101 can also be connected to the shell 100, for example, by means of a hinge, and the present embodiment is not limited to this. The material placement table 200 and the shell 100 can be, for example, movably connected, so that the material placement table 200 can slide relative to the shell 100, and the material placement table 200 can be replaced through the first movable door 101. In the present embodiment, the material placement table 200 can be, for example, slidably connected to the shell 100, and can be detachably connected. When replacing the material placement table 200, the material placement table 200 can be, for example, slid out, and then the material placement table 200 can be removed and replaced with a new material placement table 200. For example, materials to be cleaned can be placed in advance on different material placement tables 200. In this way, the materials to be cleaned can be easily replaced, thereby improving work efficiency. See Figure 3B , the edge of the material placement table 200 may be provided with a handle 203, for example. The provision of the handle 203 can facilitate the user to move the material placement table 200 through the handle 203. In one implementation of this embodiment, a slide rail may be provided in the housing 100, and a slider is provided on the material placement table 200 corresponding to the slide rail. The material placement table 200 is slidably connected to the housing 100 through the cooperation of the slide rail and the slider. Of course, the slide rail may also be a chain slide rail, for example, and this embodiment is not limited thereto. A limiting portion may be provided at one end of the material placement table 200, for example. When the material placement table 200 slides out, the limiting portion can prevent the material placement table 200 from falling.

[0044] Further, see Figure 3B , a clamping position 202 is provided on the material placement table 200 corresponding to the material to be cleaned, and the clamping position 202 is used to fix the material to be cleaned. The material to be cleaned may include, for example, different types, different sizes, different shapes, etc., and the clamping position 202 may be provided, for example, according to the size and shape of the material to be cleaned, so as to facilitate the fixation of different materials to be cleaned and avoid the displacement of the materials to be cleaned during dry ice cleaning. For example, a material identification may also be provided on the material placement table 200 to identify the placement position of the material to be cleaned, so as to facilitate the user to accurately place different materials to be cleaned, further improve the stability of the material to be cleaned, and avoid the displacement of the material to be cleaned during dry ice cleaning.

[0045] See also Figure 4 , the evaporation material recovery device 400 may, for example, include a recovery guide 410 and a collection box 440. The recovery guide 410 may, for example, include a first opening 411 and a second opening 412 that are arranged opposite to each other, and the first opening 411 is larger than the second opening 412, the side wall connecting the first opening 411 and the second opening 412 is inclined toward the second opening 412, and the first opening 411 is connected to the through hole 201. The recovery guide 410 may, for example, be funnel-shaped, and may specifically be, for example, a circular funnel, a square funnel, etc., but the present embodiment is not limited thereto. The collection box 440 is disposed in the housing 100, and the collection box 440 is connected to the second opening 412, and the collection box 440 may, for example, be disposed below the recovery guide 410. The evaporation material washed off the material to be cleaned enters the collection box 440 through the through hole 201, the first opening 411, and the second opening 412 in sequence, so that the evaporation material can be recovered and the waste of the evaporation material can be reduced. By setting the recovery guide 410, the flow can be guided. In one implementation of this embodiment, a Teflon coating is provided on the inner wall of the recovery guide 410. The Teflon coating has excellent corrosion resistance, can prevent static electricity, and can reduce the friction between the inner wall and the evaporated material, thereby accelerating the collection of the evaporated material. In this embodiment, the recovery guide 410 can be, for example, one, or two, of course, it can also be, for example, multiple, and can be set according to actual needs.

[0046] Further, the evaporation material recovery device 400 may, for example, also include: a material collection box 450, a negative pressure fan 430, a fan duct 420 and a filter 460. The material collection box 450 is detachably arranged in the collection box 440, and the material collection box 450 may, for example, be a pull-out structure arranged in the material collection box 450, and a switch member that locks with the collection box 440 is arranged on the material collection box 450. The material collection box 450 and the collection box 440 are only provided with one door, so that the gap can be reduced to reduce noise. The negative pressure fan 430 is arranged in the housing 100, the fan duct 420 is connected between the material collection box 450 and the negative pressure fan 430, and the filter 460 is arranged at the connection between the fan duct 420 and the material collection box 450. The air inlet of the negative pressure fan 430 can be connected to the fan duct 420, and the air outlet can be connected to the outside of the housing 100. The negative pressure fan 430 sucks the sealed space of the housing 100 into a negative pressure cavity through the fan duct 420, the collection box 440, the recovery guide 410, and the through hole 201. At the same time, when the washed evaporation material is mixed with dust and other impurities and falls into the collection box 440, the negative pressure fan 430 extracts dust and other impurities out of the housing 100 through the fan duct 420, and the filter 460 filters the evaporation material and drops it into the material collection box 450. In this way, the recycled evaporation material does not contain dust and impurities, which can improve the purity of the recycled evaporation material. By setting the negative pressure fan 430, the collection of evaporation materials is accelerated. In addition, by setting a negative pressure fan 430, the negative pressure cavity and the filtering of dust on the evaporation material can be realized at the same time.

[0047] In another implementation of this embodiment, two negative pressure fans 430 may also be provided, one negative pressure fan 430 is directly connected to the sealed space to evacuate the sealed space into a negative pressure cavity, and the other negative pressure fan 430 is connected to the fan duct 420 to filter dust from the evaporation material. Of course, this embodiment is not limited to this and can be provided according to actual needs.

[0048] See also Figure 1B , Figure 5 and Figure 6, a second movable door 105 is further provided on the housing 100 corresponding to the collection box 440, the recovery guide 410 is an eccentric structure, and the second opening 412 is provided near the second movable door 105. In this embodiment, the recovery guide 410 may be, for example, one, the first opening 411 of the recovery guide 410 matches the material placement table 200, and the second opening 412 is eccentrically provided toward the second movable door 105. Of course, this embodiment does not limit the number of the recovery guide 410. By providing the second opening 412 near the second movable door 105, the evaporation material collected in the collection box 440 can be conveniently taken out through the second movable door 105. For example, an illuminating lamp 130 may be further provided near the collection box 440 in the housing 100, and the provision of the illuminating lamp 130 can facilitate the user to take the evaporation material.

[0049] See also Figure 6 , a wind knife 413 is also provided on the inner wall of the recovery guide 410, and the wind knife 413 is provided near the first opening 411, and the air outlet of the wind knife 413 is provided toward the inner wall. The number of wind knives 413 can be, for example, multiple, and can be provided according to actual needs. When cleaning the material, the wind knife 413 can, for example, work to blow the wind down along the side wall. The provision of the wind knife 413 can prevent dust and evaporated materials from adhering to the inner wall of the recovery guide 410, thereby improving the recovery rate of the evaporated materials.

[0050] See also Figure 5 A reducer hose 470 is further connected between the fan duct 420 and the material collection box 450. The reducer hose 470 has a first end 471 and a second end 472 opposite to each other. The size of the first end 471 is larger than the size of the second end 472. The first end 471 is connected to the material collection box 450, and the second end 472 is connected to the fan duct 420. The dust recovery rate can be improved by setting the reducer hose 470.

[0051] See also Figure 1A , Figure 1B , Figure 2A and Figure 2B, the evaporation material cleaning device 10 also includes: a handheld spray gun 700 and an antifreeze glove 600. The housing 100 may be provided with an operation port 103, for example, the operation port 103 may be a circular opening, the antifreeze glove 600 is connected to the operation port 103, the antifreeze glove 600 may be sealed with the operation port 103, the antifreeze glove 600 may be made of antifreeze materials such as butyl gloves and cowhide gloves, and the user may be prevented from being frostbitten by dry ice during operation. The handheld spray gun 700 may be provided in the housing 100, for example, and the handheld spray gun 700 is connected to the dry ice device 300. The user may operate the handheld spray gun 700 to spray dry ice through the antifreeze glove 600, and may manually clean the places where the moving components are not cleaned, further ensuring that the cleaning is clean and improving the cleaning quality. In this embodiment, the antifreeze glove 600 may be provided on the first movable door 101, for example. By such a setting, the size of the housing 100 may be reduced, and the structure may be made more compact, which is convenient for user operation. The first movable door 101 may be, for example, an acrylic plate, which can achieve the effect of safety and weight reduction and improve the appearance.

[0052] See also Figure 1B An anti-collision sensor 110 is also provided in the housing 100 near the operation port 103. The anti-collision sensor 110 is used to control the evaporation material cleaning device 10 to stop working when sensing that the user operates the handheld spray gun. When the evaporation material cleaning device 10 is working, the anti-collision sensor 110 detects that the user operates the handheld spray gun, and the evaporation material cleaning device 10 stops working, thereby avoiding accidental injuries and improving safety.

[0053] See also Figure 7The moving assembly may include a mechanical arm 520, for example. The mechanical arm 520 may be connected to the housing 100, and may be installed on the top of the housing 100. The dry ice spray head 530 is connected to one end of the mechanical arm 520 close to the material placement table 200. The mechanical arm 520 may be a six-dimensional mechanical arm, for example, and may include a base 521, a first connecting shaft 522, a first shaft arm 523, a second connecting shaft 524, a second shaft arm 525, and a third shaft arm 526. The base 521 may be fixedly connected to the top of the housing 100, the first connecting shaft 522 is rotatably connected to the base 521, the first shaft arm 523 is rotatably connected to the first connecting shaft 522, the second connecting shaft 524 is rotatably connected between the first shaft arm 523 and the second shaft arm 525, and the third shaft arm 526 is rotatably connected to the second shaft arm 525. The dry ice spray head 530 can be connected to the third shaft arm 526, for example, and the dry ice spray head 530 can be moved under the drive of the third shaft arm 526 to clean the material to be cleaned. Of course, the specific structure of the mechanical arm 520 can also be set according to actual needs, and the mechanical arm 520 is not limited to being fixed on the top of the shell 100, but can also be connected to the side wall, and this embodiment is not limited to this. Through the setting of the mechanical arm 520, the movement trajectory of the dry ice spray head 530 can be made richer, and the material to be cleaned can be cleaned at multiple angles, further improving the cleaning effect.

[0054] See also Figure 8 , the moving component can also be, for example, a slide 510, which can specifically include, for example, a guide track 511 and a moving part 512. The guide track 511 can be, for example, arranged in the housing 100 and fixedly connected to the housing 100. The guide track 511 can, for example, include an X-axis guide track, a Y-axis guide track, and a Z-axis guide track. The moving part 512 is slidably connected to the guide track 511. The moving part 512 can, for example, reciprocate along the X-axis, the Y-axis, and the Z-axis under the guidance of the guide track 511. The dry ice spray head 530 is connected to one end of the moving part 512 close to the material placement table 200, so that the moving part 512 can drive the dry ice spray head 530 to move along the guide track 511 to clean the material to be cleaned. Through the setting of the slide 510, the moving trajectory of the dry ice spray head 530 can be controlled according to different materials to be cleaned, and the materials to be cleaned can be cleaned at multiple angles, further improving the cleaning effect.

[0055] See also Figure 2A and Figure 2B, the evaporation material cleaning device 10 may, for example, further include a control device 820 and a control structure 810. The control device 820 may, for example, be a processor, the control device 820 is disposed in the housing 100, the control device 820 is electrically connected to the mobile component, and the control device 820 may also, for example, be electrically connected to the dry ice device 300. The control structure 810 may, for example, be a touch screen, a control button, etc. The control structure 810 may, for example, be disposed on the housing 100, and specifically may, for example, be disposed on the outer surface of the housing 100, and the user may control it through the control structure 810, and the control structure 810 controls the mobile component, the dry ice device 300, etc. through the control device 820. For example, the user may set the moving path of the dry ice nozzle 530 according to different materials to be cleaned through the control structure, and control the dry ice device 300 to be turned on or off, or adjust the amount of dry ice spray. Through the setting of the control structure 810 and the control device 820, operations such as the cleaning path may be intelligently controlled, further improving work efficiency. In one implementation of the present embodiment, a wire cover may be installed on the housing 100, and the wires may be placed inside the wire cover during routing, so that the wires are arranged more neatly and beautifully, and will not be bumped during use, thereby further improving safety.

[0056] See also Figure 1B The top of the housing 100 may be provided with a carbon dioxide sensor 120, and / or an oxygen sensor and an early warning device, for example. The carbon dioxide sensor 120 is used to detect the carbon dioxide content in the air, and the oxygen sensor may be used to detect the oxygen content in the air, so as to reflect the carbon dioxide content. When it is detected that the carbon dioxide content in the air exceeds the standard or the oxygen content is too low, the early warning device issues an early warning. The early warning device may be, for example, a warning light, a sound, etc., but the present embodiment is not limited thereto. Through such a setting, it is possible to avoid harm to the operator when the carbon dioxide in the air is too high, thereby improving safety.

[0057] The housing 100 may also be provided with a visual window 102, for example. The position of the visual window 102 may be set according to actual needs, so that the negative pressure cavity can be easily seen. The visual window 102 may be, for example, glass, a transparent acrylic plate, etc., but this is not the case in this embodiment. Through the setting of the visual window 102, it is convenient for the user to see the internal cleaning situation. The housing 100 is provided with a third movable door 106 corresponding to the dry ice device 300 and the material collection box 450. Through the setting of the third movable door 106, it is convenient for the dry ice device 300 to replenish dry ice through the third movable door 106. For example, a lighting lamp may be further provided near the dry ice device 300 in the housing 100 to facilitate the replenishment of dry ice. In this embodiment, the housing 100 is also provided with a movable door corresponding to the control device 820 and the negative pressure fan 430 to inspect and maintain the control device 820 and the negative pressure fan 430. In a specific implementation of the present embodiment, the movable door may be, for example, a movable door provided corresponding to the material placement table 200, the dry ice device 300 and the material collection box 450, or a plurality of movable doors may be provided corresponding to the material placement table 200, the dry ice device 300 and the material collection box 450, respectively. The movable door may be opened by rotation, or may be opened up and down by a cylinder, for example. The specific arrangement may be made according to actual needs, and the present embodiment is not limited thereto. Furthermore, a PVC film may be provided on the inner side wall of the housing 100, for example. The PVC film may be provided to prevent static electricity, and may also be replaced to play a cleaning role. Specifically, the PVC film may be attached to the inner side wall of the housing 100, for example, by Velcro, and the Velcro may make the PVC film be attached more smoothly and firmly. The position of the PVC film may be, for example, on the side wall above the corresponding material placement table, and of course, the present embodiment is not limited thereto.

[0058] See also Figure 2A and Figure 2B , the evaporation material cleaning device 10 may, for example, further include an indicator light 900, the indicator light 900 may, for example, be connected to the control device 820, the indicator light 900 may, for example, be arranged on the outside of the housing 100, the indicator light 900 may, for example, be a three-color light, and the indicator light 900 may, for example, be controlled to display different colors according to different working states. By setting the indicator light 900, different working states of the evaporation material cleaning device 10 may be displayed, so that the user can clearly understand the working state of the evaporation material cleaning device 10 and perform corresponding operations. Referring again to FIG. 1 , the bottom of the housing 100 may, for example, be further provided with a roller 104, and the roller 104 may, for example, be a Forma wheel. Of course, the present embodiment is not limited thereto. By setting the roller 104, the movement of the evaporation material cleaning device 10 may be facilitated.

[0059] Of course, the evaporation material cleaning device 10 may further include necessary components such as a power supply and a circuit board, which are not described in detail in this embodiment.

[0060] In summary, the evaporation material cleaning equipment 10 provided in the embodiment of the utility model can spray dry ice on the material to be cleaned on the material placement table 200 through the dry ice nozzle 530, and the dry ice nozzle 530 can move through the cleaning component, and the dry ice can make the organic evaporation material on the material to be cleaned be blown off, and in the negative pressure chamber, the dry ice can be quickly sublimated into gaseous carbon dioxide after spraying, and there is no pollution to the evaporation material and the organic evaporation material. Through such a setting, the evaporation material can be cleaned, the utilization rate of the evaporation material can be improved, and the impact on the evaporation process can be reduced. In addition, through the setting of the evaporation material recovery device 400, the evaporation material can be recycled and reused, reducing the waste of evaporation materials and reducing costs.

[0061] In addition, it can be understood that the aforementioned embodiments are merely illustrative descriptions of the present invention. Under the premise that the technical features do not conflict, the structures do not contradict, and the purpose of the present invention is not violated, the technical solutions of the various embodiments can be arbitrarily combined and used in combination.

[0062] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A vapor deposition material cleaning device, characterized in that: include: A shell having a negative pressure cavity formed therein; A material placement table is arranged in the negative pressure cavity, the material placement table is provided with a through hole, and the material placement table is used to place the material to be cleaned; A dry ice device is disposed in the shell; a dry ice nozzle is connected to the dry ice device and is disposed corresponding to the material placement table; as well as A moving component is arranged in the shell, and the dry ice spray head is connected to the moving component. The moving component can drive the dry ice spray head to move relative to the material placement table to clean the material to be cleaned on the material placement table.

2. The evaporation material cleaning device according to claim 1, characterized in that: Also includes: The evaporation material recovery device comprises: A recovery guide member, comprising a first opening and a second opening arranged opposite to each other, wherein the first opening is larger than the second opening, the material placement platform is arranged on the first opening, and the first opening is communicated with the through hole; as well as A collection box is disposed in the shell, and the collection box is connected to the second opening.

3. The evaporation material cleaning device according to claim 2, characterized in that: The evaporation material recovery device also includes: A material collection box, detachably disposed in the collection box; A negative pressure fan is arranged in the housing; A fan duct is connected between the material collection box and the negative pressure fan; The filter screen is arranged at the connection between the fan duct and the material collection box.

4. The evaporation material cleaning device according to claim 1, characterized in that: A first movable door is provided on the shell corresponding to the material placement table, and the material placement table is movably connected to the shell, so that the material placement table can slide relative to the shell and the material placement table can be replaced through the first movable door.

5. The evaporation material cleaning device according to claim 1 or 4, characterized in that: The material placement table is provided with a clamping position corresponding to the material to be cleaned, and the clamping position is used to fix the material to be cleaned.

6. The evaporation material cleaning device according to claim 2, characterized in that: A second movable door is arranged on the shell corresponding to the collection box, the recovery guide is an eccentric structure, and the second opening is arranged close to the second movable door.

7. The evaporation material cleaning device according to claim 2, characterized in that: The inner wall of the recovery guide is provided with a Teflon coating.

8. The evaporation material cleaning device according to claim 2, characterized in that: A wind knife is also arranged on the inner side wall of the recovery guide member. The wind knife is arranged close to the first opening, and the air outlet of the wind knife is arranged toward the inner side wall.

9. The evaporation material cleaning device according to claim 3, characterized in that: A reducing hose is also connected between the fan duct and the material collection box. The reducing hose has a first end and a second end opposite to each other. The size of the first end is larger than that of the second end. The first end is connected to the material collection box, and the second end is connected to the fan duct.

10. The evaporation material cleaning device according to claim 1, characterized in that: The housing is provided with an operation port; The evaporation material cleaning equipment also includes: A handheld spray gun, disposed in the housing, the handheld spray gun being connected to the dry ice device; and Antifreeze gloves are connected to the operation port.

11. The evaporation material cleaning device according to claim 10, characterized in that: An anti-collision sensor is also provided in the shell near the operation port, and the anti-collision sensor is used to control the evaporation material cleaning device to stop working when sensing that the user is operating the handheld spray gun.

12. The evaporation material cleaning device according to claim 1, characterized in that: The moving component includes a mechanical arm, which is connected to the shell. The dry ice spray head is connected to one end of the mechanical arm close to the material placement table. The mechanical arm can drive the dry ice spray head to move relative to the material placement table.

13. The evaporation material cleaning device according to claim 1, characterized in that: The mobile assembly comprises: A guide rail connected to the housing; The moving part is slidably connected to the guide track, and the dry ice spray head is connected to one end of the moving part close to the material placement table. The moving part can drive the dry ice spray head to move along the guide track.

14. The evaporation material cleaning device according to claim 1, characterized in that: Also includes: A control device, disposed in the housing and electrically connected to the moving assembly; The control structure is arranged on the housing, and the control structure is electrically connected to the control device.

15. The evaporation material cleaning device according to claim 1, characterized in that: The top of the housing is provided with: Carbon dioxide sensor and / or oxygen sensor to detect carbon dioxide levels; and The early warning device is used to issue an early warning when the carbon dioxide content exceeds the standard.

16. The evaporation material cleaning device according to claim 1, characterized in that: The shell is provided with a visual window; and / or, the shell is provided with a third movable door corresponding to the dry ice device.

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