Sliding sheet alarm device of silicon epitaxy equipment

Abstract

The utility model provides a slip sheet alarm device for silicon epitaxy equipment, which belongs to the technical field of semiconductor processing equipment, is mounted at the top of a cavity module and comprises a bottom plate, a support and at least three adjusting structures. The bottom plate is connected to the top of the chamber module; the support is located above the bottom plate, and one end of the support is bent. The bent part of the bracket is connected with a laser probe; the at least three adjusting structures are arranged on the bracket; each adjusting structure is connected with the bottom plate; wherein each adjusting structure can stretch out and draw back in the axis direction of the adjusting structure, and each adjusting structure can be obliquely arranged on the support; when the base is adjusted and the base is inclined, the reflecting plate is also inclined; at the moment, by adjusting the length and the angle of each adjusting structure, the bracket and the reflecting plate can be in a parallel state, so that the laser probe on the bracket can be conveniently and vertically emitted to the reflecting plate; in the actual production process, the situation of false alarm can be reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor processing equipment, and in particular relates to a slide alarm device for silicon epitaxial equipment. Background Art

[0002] like Figure 1 As shown, the slide alarm laser probe 2 on the chamber module 1 of the silicon epitaxial equipment is used to detect whether the material 4 protrudes from the working platform 3. The machine design laser probe 2 is installed on the bracket above the chamber, and the bracket is fixed in position with two screws. The bracket is aligned with the reflector 12 on the base 11, so that the laser probe 2 receives the signal. The laser probe 2 emits a light signal that is reflected back by the reflector 12. The laser probe 2 receives the light signal and the equipment has no alarm, otherwise the equipment alarms.

[0003] In the prior art, the position of the mounting bracket of the laser probe 2 is fixed; the reflector 12 and the base 11 are an integrated structure, and the base 11 can adjust the degree of inclination, so the reflector 12 will also tilt accordingly; after the reflector 12 is tilted, the laser probe 2 cannot be vertically directed to the reflector 12, which is prone to false alarms during the production process. Utility Model Content

[0004] The utility model provides a slide alarm device for silicon epitaxial equipment, aiming to solve the technical problem in the prior art that when the reflector is tilted, the laser probe cannot be vertically projected toward the reflector.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A silicon epitaxial device slide alarm device is provided, which is installed on the top of a chamber module and includes:

[0007] a base plate connected to the top of the chamber module;

[0008] A bracket is located above the bottom plate, and one end of the bracket is bent; the bent portion of the bracket is used to connect the laser probe;

[0009] At least three adjustment structures are arranged on the bracket; each of the adjustment structures is connected to the base plate; wherein each of the adjustment structures can be telescoped along its axial direction, and each of the adjustment structures can be arranged on the bracket at an angle.

[0010] In a possible implementation, each of the adjustment structures includes:

[0011] A telescopic rod, the telescopic end of which is against the bottom plate; the fixed part of the telescopic rod is connected to the bracket;

[0012] The spring is located between the bottom plate and the bracket and is sleeved on the telescopic rod; the bottom end of the spring is connected to the bottom plate, and the top end of the spring is connected to the bracket.

[0013] In a possible implementation, each of the adjustment structures includes:

[0014] A micrometer differential head is connected to the bracket; a measuring end of the micrometer differential head abuts against the bottom plate;

[0015] The spring is located between the base plate and the bracket and is sleeved on the micrometer differential head; two ends of the spring are respectively connected to the base plate and the bracket.

[0016] In a possible implementation, the micrometer differential head is welded to the bracket, and a measuring end of the micrometer differential head has an arc surface.

[0017] In a possible implementation, the telescopic rod includes:

[0018] A fixed sleeve, fixed on the bracket;

[0019] A screw rod is rotatably disposed in the fixed sleeve; one end of the screw rod passes through the fixed sleeve, and the passing end of the screw rod is a telescopic end;

[0020] A nut is rotatably arranged on the fixed sleeve; the screw rod and the fixed sleeve are relatively fixed along their axial direction, and the nut is threadably matched with the screw rod;

[0021] The inner peripheral wall of the fixed sleeve is provided with a guide groove arranged along its axial direction, and the screw rod is provided with a guide component which is slidably matched with the guide groove, and the guide component is used to limit the rotation of the screw rod.

[0022] In a possible implementation, the guide component includes a guide ring and a guide protrusion, the guide protrusion is fixed on the guide ring, the guide ring is sleeved on the screw rod and fixed by a top screw; the guide protrusion is slidably matched with the guide groove.

[0023] In a possible implementation, an adjusting sleeve is rotatably provided on the fixed sleeve, and the nut is connected to the inner circumferential wall of the adjusting sleeve; an annular limiting groove is provided on the outer circumferential wall of the fixed sleeve, and the adjusting sleeve has a threaded hole facing the annular limiting groove, and a limiting bolt is threadedly fitted on the adjusting sleeve, and one end of the limiting bolt is located in the annular limiting groove to axially limit the adjusting sleeve.

[0024] In a possible implementation, a telescopic cover is provided on the top of the adjusting sleeve, and the telescopic cover has the freedom to telescope along the axial direction of the adjusting sleeve.

[0025] In a possible implementation, in an initial state, the bracket is arranged parallel to the bottom plate, and the bent portion of the bracket is arranged perpendicular to the bracket.

[0026] The utility model provides a silicon epitaxial equipment slide alarm device. Compared with the prior art, when the base is adjusted and tilted, the reflector will also tilt. At this time, by adjusting the length and angle of each adjustment structure, the bracket and the reflector can be placed in a parallel state, thereby facilitating the laser probe on the bracket to vertically shoot toward the reflector. In the actual production process, false alarms can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the prior art;

[0028] Figure 2 A schematic diagram of a slide alarm device for silicon epitaxial equipment provided by an embodiment of the utility model;

[0029] Figure 3 A schematic diagram of an adjustment structure of a slide alarm device for silicon epitaxial equipment provided by an embodiment of the utility model;

[0030] Figure 4 A front view of a slide alarm device for silicon epitaxial equipment provided by an embodiment of the utility model;

[0031] Figure 5 for Figure 4 The enlarged schematic diagram of the middle A part;

[0032] Figure 6 A schematic diagram of an adjusting sleeve portion of a slide alarm device for silicon epitaxial equipment provided by an embodiment of the utility model;

[0033] Figure 7 for Figure 6 The enlarged schematic diagram of the middle part B;

[0034] Figure 8 A schematic diagram of a telescopic rod portion of a slide alarm device for silicon epitaxial equipment provided in an embodiment of the utility model.

[0035] Explanation of the accompanying drawings: 1. Chamber module; 11. Base; 12. Reflector; 2. Laser probe; 3. Working platform; 4. Material; 5. Bottom plate; 6. Bracket; 7. Adjustment structure; 71. Telescopic rod; 711. Fixed sleeve; 712. Screw; 713. Nut; 714. Guide groove; 715. Guide component; 716. Annular limit groove; 72. Spring; 8. Micrometer differential head; 9. Adjustment sleeve; 91. Limit bolt; 92. Connecting ring; 93. Telescopic cover. DETAILED DESCRIPTION

[0036] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0037] Please also read Figures 1 to 8 Now, a silicon epitaxial device slide alarm device provided by the utility model is described. The silicon epitaxial device slide alarm device is installed on the top of the chamber module, and includes a bottom plate 5, a bracket 6 and at least three adjustment structures 7; the bottom plate 5 is connected to the top of the chamber module 1; the bracket 6 is located above the bottom plate 5, and one end of the bracket 6 is bent; the bent part of the bracket 6 is used to connect the laser probe 2; at least three adjustment structures 7 are arranged on the bracket 6; each adjustment structure 7 is connected to the bottom plate 5; wherein each adjustment structure 7 can be extended and retracted along its axial direction, and each adjustment structure 7 can be tilted on the bracket 6.

[0038] The utility model provides a silicon epitaxial equipment slide alarm device. Compared with the prior art, when the base 11 is adjusted and the base 11 is tilted, the reflector 12 will also be tilted. At this time, by adjusting the length and angle of each adjustment structure 7, the bracket 6 and the reflector can be in a parallel state, so that the laser probe 2 on the bracket 6 can be vertically directed to the reflector 12. In the actual production process, the occurrence of false alarms can be reduced.

[0039] In some embodiments, Figures 1 to 8 As shown, each adjustment structure 7 includes a telescopic rod 71 and a spring 72; the telescopic end of the telescopic rod 71 is against the bottom plate 5; the fixed part of the telescopic rod 71 is connected to the bracket 6; the spring 72 is located between the bottom plate 5 and the bracket 6, and is sleeved on the telescopic rod 71; the bottom end of the spring 72 is connected to the bottom plate 5, and the top end of the spring 72 is connected to the bracket 6; in the initial state, the bracket 6 is arranged parallel to the bottom plate 5, and the bent part of the bracket 6 is arranged perpendicular to the bracket 6. This embodiment is described by taking three adjustment structures 7 as an example.

[0040] It should be noted that when adjusting the angle of the bracket 6, by adjusting the length of each telescopic rod 71, the bracket 6 can be tilted, and finally the laser probe is made perpendicular to the reflector; by arranging a spring 72 on the telescopic rod 71, the spring 72 can connect the bracket 6 and the base plate 5 on the one hand, and the spring 72 can be deformed on the other hand. When the lengths of multiple telescopic rods 71 ​​are inconsistent, the spring 72 can make up for the length difference, so the inclination of the bracket 6 can be adjusted.

[0041] In some embodiments, Figures 1 to 8 As shown, each adjustment structure 7 includes a micrometer differential head 8 and a spring 72; the micrometer differential head 8 is connected to the bracket 6; the measuring end of the micrometer differential head 8 abuts against the bottom plate 5; the spring 72 is located between the bottom plate 5 and the bracket 6, and is sleeved on the micrometer differential head 8; the two ends of the spring 72 are respectively connected to the bottom plate 5 and the bracket 6. The micrometer differential head 8 is welded to the bracket 6, and the measuring end of the micrometer differential head 8 has an arc surface.

[0042] It should be noted that the micrometer differential head 8 is connected to the bracket 6, and the measuring end is in contact with the base plate 5. When the length of the measuring end is adjusted, the inclination between the bracket 6 and the base plate 5 can be adjusted; the scale of the micrometer is convenient for the operator to know the adjustment distance.

[0043] In some embodiments, Figures 1 to 8 As shown, the telescopic rod 71 includes a fixed sleeve 711, a screw 712 and a nut 713; the fixed sleeve 711 is fixed on the bracket 6; the screw 712 is rotatably arranged in the fixed sleeve 711; one end of the screw 712 passes through the fixed sleeve 711, and the protruding end of the screw 712 is the telescopic end; the nut 713 is rotatably arranged on the fixed sleeve 711; the screw 712 and the fixed sleeve 711 are relatively fixed along their axial direction, and the nut 713 is threadedly matched with the screw 712; wherein, the inner peripheral wall of the fixed sleeve 711 is provided with a guide groove 714 arranged along its axial direction, and the screw 712 is provided with a guide component 715 that slidably matches with the guide groove 714, and the guide component 715 is used to limit the rotation of the screw 712.

[0044] It should be noted that the bracket 6 has an avoidance hole for installing the fixing sleeve 711, the fixing sleeve 711 is inserted into the avoidance hole, and the fixing sleeve 711 is fixed to the bracket 6; the screw 712 is threadedly matched with the nut 713, and one end of the screw 712 passes through the fixing sleeve 711 downward and contacts the bottom plate 5; the extension length of the screw 712 can be adjusted by rotating the nut 713, and then the inclination of the bracket 6 can be adjusted. The screw 712 is slidably matched with the guide groove 714 through the guide component 715, and when the nut 713 is rotated, the rotation of the screw 712 can be avoided, so that the screw 712 can only move in the axial direction.

[0045] In some embodiments, Figures 1 to 8 As shown, the guide component 715 includes a guide ring and a guide protrusion, the guide protrusion is fixed on the guide ring, the guide ring is sleeved on the screw 712 and fixed by a top screw; the guide protrusion is slidably matched with the guide groove 714.

[0046] It should be noted that the guide ring has a threaded hole facing the outer wall of the screw 712. Therefore, after the guide ring is put on the screw 712, the position of the guide ring can be fixed by a top screw; through the sliding cooperation between the guide protrusion and the guide groove 714, the rotation of the screw 712 can be avoided during the rotation of the nut 713.

[0047] Exemplarily, the guide protrusion may be directly fixed on 712 . The drawings of this embodiment illustrate the guide protrusion being fixed on the screw rod 712 as an example.

[0048] In some embodiments, Figures 1 to 8 As shown, an adjusting sleeve 9 is rotatably provided on the fixed sleeve 711, and a nut 713 is connected to the inner circumferential wall of the adjusting sleeve 9; an annular limiting groove 716 is provided on the outer circumferential wall of the fixed sleeve 711, and a threaded hole facing the annular limiting groove 716 is provided on the adjusting sleeve 9, and a limiting bolt 91 is threadedly fitted on the adjusting sleeve 9, and one end of the limiting bolt 91 is located in the annular limiting groove 716 to axially limit the adjusting sleeve 9.

[0049] It should be noted that, when the adjusting sleeve 9 is sleeved on the fixed sleeve 711, and the threaded hole on the adjusting sleeve 9 is aligned with the annular limiting groove 716 on the fixed sleeve 711, and then the limiting bolt 91 is rotated to insert the end of the limiting bolt 91 into the annular limiting groove 716, the limiting bolt 91 does not press against the fixed sleeve 711, so the limiting bolt 91 plays a limiting role on the adjusting sleeve 9, and prevents the adjusting sleeve 9 from separating from the fixed sleeve 711 during the rotation of the adjusting sleeve 9. By fixing the nut 713 in the adjusting sleeve 9, the nut 713 can be rotated together when the adjusting sleeve 9 is rotated.

[0050] In addition, a connecting ring 92 is fixed in the adjusting sleeve 9, a through hole is provided on the connecting ring 92, a threaded hole communicating with the through hole of the connecting ring 92 is provided on the nut, and the nut and the connecting ring 92 are fixed by bolts.

[0051] In some embodiments, Figures 1 to 8 As shown, the top of the adjusting sleeve 9 is provided with a telescopic cover 93 , and the telescopic cover 93 has the freedom to telescope along the axial direction of the adjusting sleeve 9 .

[0052] It should be noted that, by providing the telescopic cover 93 on the top of the adjusting sleeve 9, the screw rod 712 can be protected, and when the screw rod 712 pushes the telescopic cover 93, the telescopic cover 93 can achieve the purpose of telescoping.

[0053] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A silicon epitaxial equipment slide alarm device, installed on the top of the chamber module, characterized in that: include: a base plate connected to the top of the chamber module; A bracket is located above the bottom plate, and one end of the bracket is bent; the bent portion of the bracket is used to connect the laser probe; At least three adjustment structures are arranged on the bracket; each of the adjustment structures is connected to the base plate; wherein each of the adjustment structures can be telescoped along its axial direction, and each of the adjustment structures can be arranged on the bracket at an angle.

2. A silicon epitaxial equipment slide alarm device as claimed in claim 1, characterized in that: Each of the regulatory structures comprises: A telescopic rod, the telescopic end of which is against the bottom plate; the fixed part of the telescopic rod is connected to the bracket; The spring is located between the bottom plate and the bracket and is sleeved on the telescopic rod; the bottom end of the spring is connected to the bottom plate, and the top end of the spring is connected to the bracket.

3. A silicon epitaxial equipment slide alarm device as claimed in claim 1, characterized in that: Each of the regulatory structures comprises: A micrometer differential head is connected to the bracket; a measuring end of the micrometer differential head abuts against the bottom plate; The spring is located between the base plate and the bracket and is sleeved on the micrometer differential head; two ends of the spring are respectively connected to the base plate and the bracket.

4. A silicon epitaxial equipment slide alarm device as claimed in claim 3, characterized in that: The micrometer differential head is welded on the bracket, and the measuring end of the micrometer differential head has an arc surface.

5. A silicon epitaxial equipment slide alarm device as claimed in claim 2, characterized in that: The telescopic rod comprises: A fixed sleeve, fixed on the bracket; A screw rod is rotatably disposed in the fixed sleeve; one end of the screw rod passes through the fixed sleeve, and the passing end of the screw rod is a telescopic end; A nut is rotatably arranged on the fixed sleeve; the screw rod and the fixed sleeve are relatively fixed along their axial direction, and the nut is threadably matched with the screw rod; The inner peripheral wall of the fixed sleeve is provided with a guide groove arranged along its axial direction, and the screw rod is provided with a guide component which is slidably matched with the guide groove, and the guide component is used to limit the rotation of the screw rod.

6. A silicon epitaxial equipment slide alarm device as claimed in claim 5, characterized in that: The guide component comprises a guide ring and a guide protrusion, wherein the guide protrusion is fixed on the guide ring, and the guide ring is sleeved on the screw rod and fixed by a top screw; the guide protrusion is slidably matched with the guide groove.

7. A silicon epitaxial equipment slide alarm device as claimed in claim 5, characterized in that: An adjusting sleeve is rotatably provided on the fixed sleeve, and the nut is connected to the inner circumferential wall of the adjusting sleeve; an annular limiting groove is provided on the outer circumferential wall of the fixed sleeve, and the adjusting sleeve has a threaded hole facing the annular limiting groove, and the adjusting sleeve is threadedly fitted with a limiting bolt, and one end of the limiting bolt is located in the annular limiting groove to axially limit the adjusting sleeve.

8. A silicon epitaxial equipment slide alarm device as claimed in claim 7, characterized in that: The top of the adjusting sleeve is provided with a telescopic cover, and the telescopic cover has the freedom to telescope along the axial direction of the adjusting sleeve.

9. A silicon epitaxial equipment slide alarm device as claimed in claim 1, characterized in that: In an initial state, the bracket is arranged parallel to the bottom plate, and the bent portion of the bracket is arranged perpendicular to the bracket.

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