A new type of coated bellows for semiconductor waste gas treatment equipment

Abstract

The utility model provides a novel coated bellows for semiconductor waste gas treatment equipment, including: a bellows assembly, a filter assembly is arranged inside the bellows assembly, a first connecting block is connected to the inner surface of the bellows assembly, a filter plate is movably connected to the outer surface of the first connecting block, a transmission cleaning assembly is arranged on the surface of the first connecting block, an impurity storage assembly is arranged on the outer surface of the bellows assembly at the bottom of the filter plate, and a manual rotation assembly is arranged inside the bellows assembly. The novel coated bellows for semiconductor waste gas treatment equipment provided by the utility model can filter the waste gas through the filter assembly, while the transmission cleaning assembly can drive the filter plate to rotate and clean the impurities on the surface of the filter plate, and the impurities are collected through the impurity storage assembly for easy cleaning, a manual rotation assembly is arranged at the right end of the filter plate, and the filter plate and the transmission cleaning assembly can also be manually rotated to clean the impurities, without the need to regularly disassemble the filter plate for cleaning.

Description

Technical Field

[0001] The utility model relates to the field of bellows production, in particular to a novel coated bellows for semiconductor waste gas treatment equipment. Background Art

[0002] Bellows refers to a tubular elastic sensitive element connected by foldable corrugated sheets along the folding and stretching direction. Bellows are widely used in instruments and meters, and their main use is as a measuring element of pressure measuring instruments to convert pressure into displacement or force.

[0003] The patent application with prior art publication number CN217874612U has positioning grooves opened on the inner sides of the upper end plate and the lower end plate to facilitate quick disassembly and assembly of the fixing plate and the fiber filter element. It has a simple structure and can efficiently filter and purify the exhaust gas. However, it requires the staff to regularly disassemble the bellows for cleaning, which is time-consuming and labor-intensive.

[0004] Therefore, it is necessary to provide a new type of coated bellows for semiconductor waste gas treatment equipment to solve the above technical problems. Utility Model Content

[0005] The utility model provides a novel coated bellows for semiconductor waste gas treatment equipment, which solves the problem that the existing bellows need to be regularly disassembled to clean the filter element.

[0006] In order to solve the above technical problems, the utility model provides a novel coated bellows for semiconductor waste gas treatment equipment, comprising: a bellows assembly, a filter assembly is arranged inside the bellows assembly, the filter assembly comprises a first connecting block, the first connecting block is connected to the inner surface of the bellows assembly, and a filter plate is movably connected to the outer surface of the first connecting block;

[0007] A transmission cleaning component, the transmission cleaning component is arranged on the surface of the first connecting block;

[0008] An impurity storage assembly, the impurity storage assembly being arranged on the outer surface of the bellows assembly at the bottom of the filter plate;

[0009] A manual rotating assembly is arranged inside the bellows assembly.

[0010] Preferably, the bellows assembly comprises a pipe, and both ends of the pipe are fixedly connected with connectors.

[0011] Preferably, the transmission cleaning assembly includes a first transmission belt, the first transmission belt is fixedly connected to the left end of the filter plate, and the first transmission belt is movably installed inside the first connecting block.

[0012] Preferably, the left end of the top of the first transmission belt is fixedly connected with a rotating fan, the right end of the bottom of the first transmission belt is fixedly connected with a rotating brush, and the rotating brush is movably connected to the surface of the left end of the filter plate.

[0013] Preferably, the impurity storage assembly comprises a storage bin, the storage bin is fixedly connected to the outer surface of the bottom of the connector, and a drain valve is fixedly connected to the bottom of the storage bin.

[0014] Preferably, the manual rotation assembly comprises a second connecting block, the second connecting block is fixedly connected to the inner surface of the connecting head at the right end of the filter plate, and a second transmission belt is movably installed inside the second connecting block.

[0015] Preferably, the left end of the bottom of the second transmission belt is fixedly connected to the surface of the right end of the filter plate, the left end of the top of the second transmission belt is fixedly connected to a bevel gear set, and the top of the bevel gear set is fixedly connected to a rotating ring.

[0016] Compared with the related art, the novel coated bellows for semiconductor waste gas treatment equipment provided by the utility model has the following beneficial effects:

[0017] The utility model provides a novel coated bellows for semiconductor waste gas treatment equipment, which can filter the waste gas through the filter assembly, and the transmission cleaning assembly can drive the filter plate to rotate and clean the impurities on the surface of the filter plate, and the impurities are collected by the impurity storage assembly for easy cleaning. A manual rotating assembly is arranged at the right end of the filter plate, and the filter plate and the transmission cleaning assembly can also be manually rotated to clean the impurities, and there is no need to regularly disassemble the filter plate from the inside of the bellows assembly for cleaning, which saves time and effort. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic structural diagram of a preferred embodiment of a novel coated bellows for semiconductor waste gas treatment equipment provided by the utility model;

[0019] Figure 2 for Figure 1 The front cross-sectional structural schematic diagram shown;

[0020] Figure 3 for Figure 2 An enlarged schematic diagram of part A is shown.

[0021] Numbers in the figure: 1, bellows assembly, 11, pipe, 12, connector,

[0022] 2. Filter assembly, 21. First connecting block, 22. Filter plate,

[0023] 3. Transmission cleaning assembly, 31. First transmission belt, 32. Rotating fan, 33. Rotating brush,

[0024] 4. Impurity storage component, 41. Storage bin, 42. Drain valve,

[0025] 5. Manual rotating assembly, 51. Second connecting block, 52. Second transmission belt, 53. Bevel gear set, 54. Rotating ring. DETAILED DESCRIPTION

[0026] The utility model is further described below in conjunction with the accompanying drawings and implementation modes.

[0027] Please refer to Figure 1 , Figure 2 and Figure 3 ,in, Figure 1 A schematic structural diagram of a preferred embodiment of a novel coated bellows for semiconductor waste gas treatment equipment provided by the utility model; Figure 2 for Figure 1 The front cross-sectional structural schematic diagram shown; Figure 3 for Figure 2 A schematic diagram of the enlarged portion A shown in FIG. A novel coated bellows for semiconductor waste gas treatment equipment comprises: a bellows assembly 1, a filter assembly 2 is arranged inside the bellows assembly 1, and the filter assembly 2 comprises a first connection block 21, the first connection block 21 is connected to the inner surface of the bellows assembly 1, and a filter plate 22 is movably connected to the outer surface of the first connection block 21;

[0028] A transmission cleaning component 3, wherein the transmission cleaning component 3 is arranged on the surface of the first connecting block 21;

[0029] An impurity storage assembly 4, wherein the impurity storage assembly 4 is arranged on the outer surface of the bellows assembly 1 at the bottom of the filter plate 22;

[0030] A manual rotating assembly 5 is arranged inside the bellows assembly 1 .

[0031] The first connecting block 21 is fixedly connected to the inner surface of the left end bellows assembly 1, and a rotating block is fixedly connected to the center of the left end of the filter plate 22, which is rotatably embedded in the interior of the first connecting block 21. The function of the transmission cleaning assembly 3 is to drive the filter plate 22 to rotate while cleaning impurities on the surface of the filter plate 22. The function of the impurity storage assembly 4 is to store impurities while facilitating cleaning. The function of the manual rotating assembly 5 is to facilitate manual cleaning of impurities on the surface of the filter plate 22.

[0032] The bellows assembly 1 comprises a pipe 11 , and connectors 12 are fixedly connected to both ends of the pipe 11 .

[0033] There are two connectors 12 for connection with other pipelines and equipment, and they are fixedly connected to the left and right ends of the pipeline 11 , respectively. The filter component 2 is arranged inside the left end connector 12 .

[0034] The transmission cleaning assembly 3 includes a first transmission belt 31 , which is fixedly connected to the left end of the filter plate 22 , and is movably installed inside the first connection block 21 .

[0035] The first transmission belt 31 is composed of two gears meshingly connected by a gear belt, wherein one gear is fixedly connected to the rotating block at the left end of the filter plate 22, the rotating fan 32 is fixedly connected to the left end of the gear, and the rotating brush 33 is fixedly connected to the right end of the bottom gear, and the right end is connected to the surface of the filter plate 22.

[0036] A rotating fan 32 is fixedly connected to the left end of the top of the first transmission belt 31 , and a rotating brush 33 is fixedly connected to the right end of the bottom of the first transmission belt 31 . The rotating brush 33 is movably connected to the surface of the left end of the filter plate 22 .

[0037] When the exhaust gas passes through the interior of the left end connector 12, the rotating fan 32 is driven to rotate, and the rotating fan 32 drives the first transmission belt 31 to engage the transmission while driving the filter plate 22 and the rotating brush 33 to rotate. When the surface of the filter plate 22 passes through the rotating brush 33, the rotating brush 33 rotates to brush off the impurities on its surface.

[0038] The impurity storage assembly 4 includes a storage bin 41 , which is fixedly connected to the outer surface of the bottom of the connector 12 , and a drain valve 42 is fixedly connected to the bottom of the storage bin 41 .

[0039] A hole is formed on the surface of the connector 12 at the bottom of the filter plate 22, and a storage bin 41 is fixedly connected to the outer surface of the connector 12 at the bottom of the hole. Impurities brushed off by the rotating brush 33 fall into the storage bin 41 through the hole for storage. When a certain volume of impurities is accumulated inside the storage bin 41, the drain valve 42 can be opened to discharge the impurities.

[0040] The manual rotating assembly 5 comprises a second connecting block 51 , which is fixedly connected to the inner surface of the connecting head 12 at the right end of the filter plate 22 , and a second transmission belt 52 is movably installed inside the second connecting block 51 .

[0041] The second connecting block 51 is fixedly connected to the inner surface of the top of the pipe 11 at the right end of the filter plate 22. The second connecting block 51 is composed of two gears meshingly connected by a gear belt. The bottom gear is fixedly connected to the center of the right end of the filter plate 22. The bevel gear set 53 is composed of bevel gears meshingly connected, wherein a bevel gear is fixedly connected to the left end of the top gear in the second transmission belt 52, and the rotating ring 54 is fixedly connected to the top of another bevel gear and is movably installed on the outer surface of the top of the connector 12.

[0042] The left end of the bottom of the second transmission belt 52 is fixedly connected to the surface of the right end of the filter plate 22 , the left end of the top of the second transmission belt 52 is fixedly connected to a bevel gear set 53 , and the top of the bevel gear set 53 is fixedly connected to a rotating ring 54 .

[0043] By rotating the rotating ring 54, the two bevel gears in the bevel gear set 53 are driven to mesh, and one bevel gear then drives the top gear of the second connecting block 51 to rotate and mesh with the gear belt, and the gear belt then meshes with the bottom gear to drive it to rotate, and finally the bottom gear drives the filter plate 22 to rotate, and then the impurities on the surface of the filter plate 22 are cleaned through the transmission cleaning component 3.

[0044] The working principle of the new type of coated bellows for semiconductor waste gas treatment equipment provided by the utility model is as follows:

[0045] The exhaust gas enters the interior of the pipeline 11 from the right end of the pipeline 11, and the exhaust gas drives the rotating fan 32 to rotate, and then drives the rotating brush 33 and the filter plate 22 to rotate through the first transmission belt 31. When the surface of the filter plate 22 rotates to the surface of the rotating brush 33, the rotating brush 33 rotates to clean up the impurities on the surface of the first transmission belt 31, and the cleaned impurities fall into the interior of the storage bin 41, and then the drain valve 42 is opened to clean out the impurities inside the storage bin 41. When the exhaust gas power is insufficient, the bevel gear set 53 can also be engaged by rotating the rotating ring 54 to drive the second transmission belt 52 to rotate, and the filter plate 22 rotates, and then the rotating brush 33 is driven to rotate through the first transmission belt 31, so that the rotating brush 33 can clean the impurities on the surface of the rotating fan 32.

[0046] Compared with the related art, the novel coated bellows for semiconductor waste gas treatment equipment provided by the utility model has the following beneficial effects:

[0047] The utility model provides a novel coated bellows for semiconductor waste gas treatment equipment, wherein the waste gas can be filtered through the filter assembly 2, while the transmission cleaning assembly 3 can drive the filter plate 22 to rotate and clean the impurities on the surface of the filter plate 22, and the impurities are collected through the impurity storage assembly 4 for easy cleaning, a manual rotation assembly 5 is arranged at the right end of the filter plate 22, and the filter plate 22 and the transmission cleaning assembly 3 can also be manually rotated to clean the impurities, and there is no need to regularly disassemble the filter plate 22 from the inside of the bellows assembly 1 for cleaning, thus saving time and effort.

[0048] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A new type of coated bellows for semiconductor waste gas treatment equipment, characterized in that: include: A bellows assembly, wherein the bellows assembly comprises a pipe, both ends of the pipe are fixedly connected with connectors, a filter assembly is arranged inside the bellows assembly, and the filter assembly comprises a first connection block, the first connection block is connected to the inner surface of the bellows assembly, and a filter plate is movably connected to the outer surface of the first connection block; A transmission cleaning component, the transmission cleaning component is arranged on the surface of the first connecting block; An impurity storage assembly, the impurity storage assembly being arranged on the outer surface of the bellows assembly at the bottom of the filter plate; A manual rotating assembly is arranged inside the bellows assembly.

2. According to claim 1, a novel coated bellows for semiconductor waste gas treatment equipment is characterized in that: The transmission cleaning assembly includes a first transmission belt, the first transmission belt is fixedly connected to the left end of the filter plate, and the first transmission belt is movably installed inside the first connecting block.

3. According to claim 2, a novel coated bellows for semiconductor waste gas treatment equipment is characterized in that: The left end of the top of the first transmission belt is fixedly connected with a rotating fan, the right end of the bottom of the first transmission belt is fixedly connected with a rotating brush, and the rotating brush is movably connected to the surface of the left end of the filter plate.

4. The novel coated bellows for semiconductor waste gas treatment equipment according to claim 1, characterized in that: The impurity storage component includes a storage bin, which is fixedly connected to the outer surface of the bottom of the connector, and a drain valve is fixedly connected to the bottom of the storage bin.

5. The novel coated bellows for semiconductor waste gas treatment equipment according to claim 1, characterized in that: The manual rotation assembly comprises a second connection block, the second connection block is fixedly connected to the inner surface of the connection head at the right end of the filter plate, and a second transmission belt is movably installed inside the second connection block.

6. A novel coated bellows for semiconductor waste gas treatment equipment according to claim 5, characterized in that: The left end of the bottom of the second transmission belt is fixedly connected to the surface of the right end of the filter plate, the left end of the top of the second transmission belt is fixedly connected to a bevel gear set, and the top of the bevel gear set is fixedly connected to a rotating ring.

Images