A dry cleaning device for laminated graphite boat

Abstract

The utility model discloses a laminated graphite boat dry cleaning equipment, comprising: a cleaning chamber, a boat pushing mechanism, a laminated graphite boat group and a vacuum pumping component, wherein the boat pushing mechanism is used to drive the laminated graphite boat group to enter or exit the cleaning chamber; the cleaning chamber comprises: a chamber, a discharge module, a support module and an air intake module, wherein the air intake module is arranged at the front end of the chamber to realize the process gas input into the chamber, and the rear end of the chamber is connected to the vacuum pumping component to realize the vacuum pumping in the chamber; the discharge module is arranged at the top of the chamber, and the discharge module is externally connected to a radio frequency power supply to excite the process gas in the chamber to ionize and form plasma to clean the laminated graphite boat group; the support module is arranged at the bottom of the chamber to realize the laminated graphite boat group to be fixedly placed in the chamber. The utility model has the advantages of compact structure, easy maintenance, high cleaning efficiency, etc., and is conducive to improving the equipment production capacity.

Description

Technical Field

[0001] The utility model belongs to the technical field of graphite boat dry cleaning, and in particular relates to a laminated graphite boat dry cleaning device. Background Art

[0002] Compared with graphite boat wet cleaning equipment, graphite boat dry cleaning equipment is gaining more and more attention in the photovoltaic industry due to its better cleaning effect, shorter cleaning cycle and production capacity.

[0003] At present, the cavities of graphite boat dry cleaning equipment are arranged in vertical columns. Due to the height limit of the plant, the equipment is arranged with a maximum of six cavities in the vertical direction. The layout is rigid, the intervals between the cavities are small, and maintenance is difficult, which limits the capacity increase of the equipment. The equipment uses silicon carbide paddles to carry the graphite boats. The two graphite boats to be cleaned are arranged in a straight line parallel to the silicon carbide paddles, one in front and one behind. At the same time, there is a certain gap between the two boats, and the overall length is relatively long. In order to meet the requirements for the accuracy of graphite boat placement, the speed of the silicon carbide paddle entering and exiting the cavity to place the graphite boat is generally set to be slow, which in turn affects the capacity of the equipment. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a laminated graphite boat dry cleaning device which has a compact structure, is easy to maintain, has high cleaning efficiency and is conducive to improving the production capacity of the equipment.

[0005] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0006] A laminated graphite boat dry cleaning device comprises: a cleaning chamber, a boat pushing mechanism, a laminated graphite boat group and a vacuum pumping component, wherein the boat pushing mechanism is used to drive the laminated graphite boat group to enter or exit the cleaning chamber; the cleaning chamber comprises: a chamber body, a discharge module, a support module and an air intake module, wherein the air intake module is arranged at the front end of the chamber body to input process gas into the chamber, and the rear end of the chamber body is connected to the vacuum pumping component to realize vacuum pumping in the chamber; the discharge module is arranged at the top of the chamber, and the discharge module is externally connected to a radio frequency power supply to excite the process gas in the chamber to ionize and form plasma to clean the laminated graphite boat group; the support module is arranged at the bottom of the chamber to realize that the laminated graphite boat group is fixedly placed in the chamber.

[0007] As a further improvement of the present invention, the laminated graphite boat group includes a lower graphite boat and an upper graphite boat which are stacked in a vertical direction to form an integral whole.

[0008] As a further improvement of the utility model, a boat stacking mounting block is provided at the connection between the lower graphite boat and the upper graphite boat, the upper part of the boat stacking mounting block is nested between the two boat feet of the upper graphite boat, and the lower part of the boat stacking mounting block is connected to the top of the lower graphite boat to achieve stacking of the upper graphite boat on the lower graphite boat.

[0009] As a further improvement of the utility model, the stacking boat mounting block is made of insulating material.

[0010] As a further improvement of the utility model, the stacking boat mounting block is made of ceramic material.

[0011] As a further improvement of the utility model, the boat pushing mechanism includes a silicon carbide paddle and a boat pushing module, one end of the silicon carbide paddle is connected to the boat pushing module, and the other end of the silicon carbide paddle is used to carry the laminated graphite boat group; under the drive of the boat pushing module, the silicon carbide paddle drives the laminated graphite boat group to automatically enter and exit the cleaning chamber.

[0012] As a further improvement of the present invention, the vacuum pumping assembly includes a vacuum pipe and a dry pump, and the tail end of the cavity is connected to the dry pump through the vacuum pipe to achieve vacuum pumping in the cavity.

[0013] As a further improvement of the utility model, it also includes a frame, and a plurality of the cleaning chambers are arranged in the frame to achieve batch cleaning of the laminated graphite boat group.

[0014] As a further improvement of the utility model, the plurality of cleaning chambers are arranged in four layers and two rows in the frame.

[0015] As a further improvement of the utility model, the plurality of cleaning chambers are arranged in two layers and four rows in the frame.

[0016] Compared with the prior art, the advantages of the utility model are:

[0017] The laminated graphite boat dry cleaning equipment of the utility model adopts a laminated graphite boat for the cleaning process. That is, when the cleaning process is carried out, the graphite boats are cleaned in the form of stacking one up and one down, which effectively reduces the internal empty volume of the process chamber of the cleaning equipment, reduces the process cycle time, and improves the equipment capacity. At the same time, the use of a laminated graphite boat structure is also conducive to shortening the length of the silicon carbide paddle for taking and placing the graphite boat, which is convenient for equipment maintenance, and also shortens the time for the silicon carbide paddle to enter and exit the cavity to take and place the graphite boat, reducing the non-process time of the graphite boat in the equipment, thereby improving the equipment capacity. Furthermore, the distribution of the equipment process chamber adopts a multi-layer and multi-column array arrangement, which can effectively improve the equipment capacity, and at the same time provide a variety of solutions for factories of different sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1It is a schematic diagram of the structural principle of the laminated graphite boat dry cleaning equipment in a specific embodiment of the utility model.

[0019] Figure 2 It is a schematic diagram of the structural principle of a laminated graphite boat in a specific embodiment of the utility model.

[0020] Figure 3 It is a schematic diagram of the layout principle of an array-type laminated graphite boat dry cleaning device in a specific embodiment of the utility model.

[0021] Figure 4 It is a schematic diagram of the layout principle of another array-type laminated graphite boat dry cleaning equipment in a specific embodiment of the utility model.

[0022] Legend: 1. Frame; 2. Cleaning chamber; 21. Chamber; 22. Discharge module; 23. Support module; 24. Air intake module; 3. Boat pusher mechanism; 31. Silicon carbide paddle; 32. Boat pusher module; 4. Laminated graphite boat assembly; 41. Lower graphite boat; 42. Upper graphite boat; 43. Boat foot; 5. Laminated boat mounting block; 6. Vacuum pipe; 7. Dry pump. DETAILED DESCRIPTION

[0023] The present invention is further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0024] Example

[0025] like Figures 1 to 3 As shown, the laminated graphite boat dry cleaning equipment of the utility model comprises: a cleaning chamber 2, a boat pushing mechanism 3, a laminated graphite boat group 4 and a vacuum pumping assembly; the boat pushing mechanism 3 is used to drive the laminated graphite boat group 4 to enter or exit the cleaning chamber 2. The cleaning chamber 2 comprises: a chamber 21, a discharge module 22, a support module 23 and an air intake module 24, the air intake module 24 is arranged at the front end of the chamber 21 to realize the input of process gas into the chamber 21, and the rear end of the chamber 21 is connected to the vacuum pumping assembly to realize the vacuum pumping in the chamber 21. By adopting an air intake system with front-end air intake and rear-end air exhaust in the chamber 21, the cleaning gas is distributed from right to left in the chamber 21, realizing the uniform distribution of the cleaning gas in the chamber, thereby realizing the uniform distribution of high-energy plasma in the chamber, which is beneficial to improving the cleaning efficiency and cleaning quality of the laminated graphite boat group 4. The discharge module 22 is arranged at the top of the cavity 21, and the discharge module 22 is externally connected to a radio frequency power source, and is used to excite the process gas in the cavity 21 to ionize and form plasma to clean the laminated graphite boat group 4. The support module 23 is arranged at the bottom of the cavity 21, and is used to realize that the laminated graphite boat group 4 is fixedly placed in the cavity 21.

[0026] like Figure 2As shown, in this embodiment, the laminated graphite boat group 4 includes a lower graphite boat 41 and an upper graphite boat 42 which are stacked in a vertical direction to form an integral body.

[0027] A stacking boat mounting block 5 is provided at the connection between the lower graphite boat 41 and the upper graphite boat 42, the upper portion of the stacking boat mounting block 5 is nested between the two boat feet 43 of the upper graphite boat 42, and the lower portion of the stacking boat mounting block 5 is connected to the top of the lower graphite boat 41, so that the upper graphite boat 42 can be stacked on the lower graphite boat 41. The stacking boat mounting block 5 is provided to increase the force bearing area between the lower graphite boat 41 and the upper graphite boat 42, and to prevent the upper graphite boat 42 from crushing the lower graphite boat 41.

[0028] Furthermore, the stacking boat mounting block 5 is made of insulating material. Specifically, the stacking boat mounting block 5 is made of ceramic material. In other embodiments, the stacking boat mounting block 5 can also be made of other high-strength insulating materials, as long as the upper graphite boat 42 and the lower graphite boat 41 are firmly stacked and insulated.

[0029] like Figure 1 As shown, in this embodiment, the boat pushing mechanism 3 includes a silicon carbide paddle 31 and a boat pushing module 32, one end of the silicon carbide paddle 31 is connected to the boat pushing module 32, and the other end of the silicon carbide paddle 31 is used to carry the laminated graphite boat group 4. Driven by the boat pushing module 32, the silicon carbide paddle 31 drives the laminated graphite boat group 4 to automatically enter and exit the cleaning chamber 2.

[0030] like Figure 1 As shown, in this embodiment, the vacuum pumping assembly includes a vacuum pipe 6 and a dry pump 7 , and the tail end of the cavity 21 is connected to the dry pump 7 through the vacuum pipe 6 to achieve vacuum pumping in the cavity 21 .

[0031] like Figure 3 As shown, in this embodiment, a frame 1 is further included, and a plurality of cleaning chambers 2 are arranged in the frame 1 to realize batch cleaning of the laminated graphite boat group 4. At the same time, different solutions can be provided according to different production capacity requirements and different plant sizes.

[0032] Furthermore, a plurality of cleaning chambers 2 are arranged in four layers and two rows in the rack 1. In the mainstream 5-meter-high workshop in the existing photovoltaic cell industry, a single device can simultaneously clean 8 sets of 16 graphite boats, greatly improving the cleaning efficiency of the graphite boats.

[0033] like Figure 4 As shown, in other embodiments, multiple cleaning chambers 2 are arranged in two layers and four rows in the rack 1. The height of the equipment is greatly reduced, maintenance is convenient, and a single device can clean 8 sets of 16 graphite boats at the same time. It can be understood that the array layout of the cleaning chamber includes but is not limited to the above two, and the cleaning chamber 2 can be flexibly arranged in the rack 1 according to actual production needs.

[0034] In this embodiment, during the graphite boat dry cleaning equipment process, the laminated graphite boat group 4 to be cleaned is placed on the silicon carbide paddle 31 of the boat pushing mechanism 3, and the silicon carbide paddle 31 is driven by the boat pushing module 32 to carry the laminated graphite boat group 4 into the designated position above the support module 23 inside the cavity 21, the silicon carbide paddle 31 is lowered, the laminated graphite boat group 4 falls on the support module 23, and the silicon carbide paddle 31 is separated from the laminated graphite boat group 4 and then exits the cavity 21. The dry pump 7 starts to evacuate the cavity 21, and when the vacuum pressure reaches the process pressure, the air intake module 24 starts to introduce process gas, and the discharge module 22 starts to discharge and ionize the process gas in the cavity 21, and the ionized ion group bombards the surface of the graphite boat to achieve the effect of cleaning the graphite boat.

[0035] In this embodiment, by using a laminated graphite boat for the cleaning process, that is, when the cleaning process is performed, the graphite boat is cleaned in the form of stacking one above the other, which effectively reduces the internal empty volume of the process chamber of the cleaning equipment, reduces the process cycle time, and improves the equipment capacity. At the same time, the use of a laminated graphite boat structure is also conducive to shortening the length of the silicon carbide paddle for taking and placing the graphite boat, which is convenient for equipment maintenance, and also shortens the time for the silicon carbide paddle to enter and exit the cavity to take and place the graphite boat, reducing the non-process time of the graphite boat in the equipment, thereby improving the equipment capacity. Furthermore, the distribution of the equipment process chamber adopts a multi-layer and multi-column array layout, which can effectively improve the equipment capacity and provide a variety of solutions for factories of different sizes.

[0036] Although the utility model is disclosed as above with preferred embodiments, it is not intended to limit the utility model. Any technician familiar with the art can use the above disclosed methods and technical contents to make many possible changes and modifications to the technical solution of the utility model without departing from the spirit and technical solution of the utility model, or modify it into an equivalent embodiment with equivalent changes. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments according to the technical essence of the utility model without departing from the content of the technical solution of the utility model still falls within the scope of protection of the technical solution of the utility model.

Claims

1. A laminated graphite boat dry cleaning device, characterized in that: include: A cleaning chamber (2), a boat pushing mechanism (3), a laminated graphite boat group (4) and a vacuum pumping assembly, wherein the boat pushing mechanism (3) is used to drive the laminated graphite boat group (4) to enter or exit the cleaning chamber (2); the cleaning chamber (2) comprises: a chamber (21), a discharge module (22), a support module (23) and an air intake module (24), wherein the air intake module (24) is arranged at the front end of the chamber (21) to input process gas into the chamber (21), and the rear end of the chamber (21) is connected to the vacuum pumping assembly to achieve vacuum pumping in the chamber (21); the discharge module (22) is arranged at the top of the chamber (21), and the discharge module (22) is externally connected to a radio frequency power source to excite the process gas in the chamber (21) to ionize and form plasma to clean the laminated graphite boat group (4); the support module (23) is arranged at the bottom of the chamber (21) to achieve fixed placement of the laminated graphite boat group (4) in the chamber (21).

2. The dry cleaning equipment for laminated graphite boat according to claim 1, characterized in that: The stacked graphite boat group (4) comprises a lower graphite boat (41) and an upper graphite boat (42) which are stacked in a vertical direction to form a whole.

3. The dry cleaning equipment for laminated graphite boat according to claim 2, characterized in that: A boat stacking mounting block (5) is provided at the connection between the lower graphite boat (41) and the upper graphite boat (42); the upper portion of the boat stacking mounting block (5) is nested between two boat feet (43) of the upper graphite boat (42); and the lower portion of the boat stacking mounting block (5) is connected to the top of the lower graphite boat (41), so that the upper graphite boat (42) can be stacked on the lower graphite boat (41).

4. The dry cleaning equipment for laminated graphite boat according to claim 3, characterized in that: The boat stacking mounting block (5) is made of insulating material.

5. The dry cleaning equipment for laminated graphite boat according to claim 4, characterized in that: The stacking boat mounting block (5) is made of ceramic material.

6. The dry cleaning equipment for laminated graphite boat according to claim 3, characterized in that: The boat pushing mechanism (3) comprises a silicon carbide paddle (31) and a boat pushing module (32); one end of the silicon carbide paddle (31) is connected to the boat pushing module (32), and the other end of the silicon carbide paddle (31) is used to carry the laminated graphite boat group (4); under the drive of the boat pushing module (32), the silicon carbide paddle (31) drives the laminated graphite boat group (4) to automatically enter and exit the cleaning chamber (2).

7. The dry cleaning equipment for laminated graphite boat according to claim 3, characterized in that: The vacuum pumping assembly comprises a vacuum pipe (6) and a dry pump (7), and the rear end of the cavity (21) is connected to the dry pump (7) via the vacuum pipe (6) to achieve vacuum pumping in the cavity (21).

8. The dry cleaning equipment for laminated graphite boat according to any one of claims 1 to 7, characterized in that: It also comprises a frame (1), in which a plurality of cleaning chambers (2) are arranged, so as to realize batch cleaning of the laminated graphite boat group (4).

9. The dry cleaning equipment for laminated graphite boat according to claim 8, characterized in that: The plurality of cleaning chambers (2) are arranged in four layers and two rows in the frame (1).

10. The dry cleaning equipment for laminated graphite boat according to claim 8, characterized in that: The plurality of cleaning chambers (2) are arranged in two layers and four rows in the frame (1).

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