A high-purity liquefied gas supply equipment

Abstract

The utility model discloses a high-purity liquefied gas supply device, including: a cabinet, a control box and a valve panel; a knock-out hole is provided on the top of the cabinet; the control box is arranged on the top of the cabinet, and a control panel is arranged on the surface of the control box; the valve panel is arranged inside the cabinet; a purge pipeline, a gas supply pipeline and a vacuum pipeline are arranged on the surface of the valve panel; a steel cylinder is connected to the gas inlet end of the gas supply pipeline, a heating jacket is arranged on the outside of the steel cylinder, a steel cylinder heating button is arranged on the surface of the control panel, and the steel cylinder heating button is connected to the heating jacket; the gas outlet end of the purge pipeline is respectively connected to the gas supply pipeline and the vacuum pipeline; the vacuum pipeline is connected to the gas supply pipeline. The gas supply device in the utility model has high safety, can effectively control the temperature of liquefied high-purity gas, and realize stable gas supply.

Description

Technical Field

[0001] The utility model relates to the technical field of valve box, and more specifically to a high-purity liquefied gas supply device. Background Art

[0002] Semiconductors are the core of the information technology industry and a strategic, basic and leading industry that supports economic and social development and ensures national security. Their technological level and development scale have become one of the important indicators for measuring a country's industrial competitiveness and comprehensive national strength. According to the vertical division of labor model, the semiconductor industry is divided into semiconductor design, manufacturing and packaging and testing.

[0003] Semiconductor manufacturing refers to the process of wafer manufacturing and chip production based on semiconductor design drawings. The current semiconductor industry manufacturing model is mainly foundry, that is, professional foundry manufacturers realize wafer manufacturing and chip production according to the requirements of semiconductor design companies. The wafer manufacturing process mainly includes wafer growth, wafer cleaning, thin film deposition, photoresist coating, photolithography, etching, degumming, ion implantation, thin film deposition and other links. These links all require doping gas, epitaxial gas, ion implantation gas, LED gas, photolithography gas, carrier and dilution gas and other categories.

[0004] There are more than 110 kinds of special gases used in the semiconductor industry. Special gases have extremely strict requirements in terms of purity, composition, maximum content of harmful impurities, product packaging and storage, etc., and are high-tech, high-value-added products. The existing technology does not have targeted gas supply equipment for liquefied high-purity special gases, and generally uses existing equipment for reconfiguration; and the gas supply equipment currently used requires manual operation by on-site engineers, which increases the risk of misoperation caused by human factors; the current equipment cannot control the temperature of liquefied high-purity gas and cannot be applied to a variety of semiconductor processing technologies.

[0005] Therefore, it is an urgent problem for those skilled in the art to develop a high-purity liquefied gas supply device that has high safety and can effectively control the temperature of the liquefied high-purity gas. Utility Model Content

[0006] In view of this, the utility model provides a high-purity liquefied gas supply device which has high safety and can effectively control the temperature of the liquefied high-purity gas.

[0007] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0008] A high-purity liquefied gas supply device, comprising:

[0009] A cabinet body, wherein a plurality of knock-out holes are provided on the top of the cabinet body;

[0010] A control box, which is arranged on the top of the cabinet, and a control panel is arranged on the surface of the control box;

[0011] A valve panel, wherein the valve panel is arranged inside the cabinet; a purge pipeline, an air supply pipeline and a vacuum pipeline are arranged on the surface of the valve panel; the air inlet end of the air supply pipeline is connected to a steel cylinder, a heating jacket is arranged on the outside of the steel cylinder, a steel cylinder heating button is arranged on the surface of the control panel, and the steel cylinder heating button is connected to the heating jacket; the air outlet end of the purge pipeline is respectively connected to the air supply pipeline and the vacuum pipeline through a three-way joint; the vacuum pipeline is connected to the air supply pipeline; the air outlet end of the air supply pipeline is connected to the knock-out hole; the air inlet end and the air outlet end of the vacuum pipeline are both connected to the knock-out hole; the air inlet end of the purge pipeline is connected to the knock-out hole.

[0012] The beneficial effect of adopting the above technical solution is that in the utility model, a heating jacket is arranged on the outside of the steel cylinder, which can heat the steel cylinder and increase the evaporation amount of liquid gas, and the heating temperature of the steel cylinder can also be controlled by the steel cylinder heating button.

[0013] Preferably, a heating wire is wound around the outside of the gas supply pipeline, a pipeline heating button is provided on the control panel, and the heating wire is connected to the pipeline heating button. The heating wire can heat the pipeline of the gas supply pipeline, which can prevent the gas from liquefying due to too low temperature and ensure the gas transmission process.

[0014] Preferably, the gas supply pipeline is provided with a first gas supply branch and a second gas supply branch; the gas outlet ends of the first gas supply branch and the second gas supply branch are commonly connected to an overcurrent protector, the gas outlet end of the overcurrent protector is connected to a pipeline filter, and the gas outlet end of the pipeline filter is connected to a first diaphragm valve. The overcurrent protector can perform overcurrent protection on the gas flow rate in the gas supply pipeline to prevent the gas flow rate from exceeding the upper limit value required by the specification; the pipeline filter can filter the gas in the pipeline.

[0015] Preferably, the first air supply branch and the second air supply branch have the same structure, and the air inlet end thereof is connected to a steel cylinder, and the air outlet end of the steel cylinder is respectively connected to the first pressure sensor and the first pneumatic diaphragm valve through a three-way joint; the air outlet end of the first pneumatic diaphragm valve is connected to a pressure regulating valve, and the air outlet end of the pressure regulating valve is respectively connected to the second pressure sensor and the second pneumatic diaphragm valve through a three-way joint; the air outlet end of the second pneumatic diaphragm valve is connected to a second diaphragm valve, and the second diaphragm valves of the first air supply branch and the second air supply branch are both connected to the air inlet end of the overcurrent protector. The first air supply branch and the second air supply branch can supply air alternately, thereby achieving uninterrupted air supply.

[0016] Preferably, the air inlet of the purge pipeline is connected to a first pneumatic micro-leakage valve, the air outlet of the first pneumatic micro-leakage valve is respectively connected to a third pressure sensor, a first check valve and a second check valve; the air outlet of the first check valve is connected to a third pneumatic diaphragm valve; the second check valve is connected to a fourth pneumatic diaphragm valve. By continuously introducing high-purity gas into the purge pipeline, the air or other gas in the pipeline can be discharged, making the pipeline purer.

[0017] Preferably, the air inlet end of the vacuum pipeline is connected to a second pneumatic micro-leakage valve, the air outlet end of the second pneumatic micro-leakage valve is connected to a third check valve, the air outlet end of the third check valve is connected to a vacuum generator, the air outlet end of the vacuum generator is connected to the knock-off hole, and the vacuum generator is also connected to the third diaphragm valve; the air outlet end of the third diaphragm valve is also connected to a fifth pneumatic diaphragm valve, a sixth pneumatic diaphragm valve, a seventh pneumatic diaphragm valve, a fourth pressure sensor, an eighth pneumatic diaphragm valve and a fourth diaphragm valve; the fifth pneumatic diaphragm valve is respectively connected to the third pneumatic diaphragm valve and the steel cylinder of the second air supply branch through a three-way connector; the sixth pneumatic diaphragm valve is connected to the pressure regulating valve of the second air supply branch; the seventh pneumatic diaphragm valve is connected to the pressure regulating valve of the first air supply branch; the eighth pneumatic diaphragm valve is connected to the steel cylinder of the first air supply branch. The vacuum pipeline can adjust the pipeline to a negative pressure state by using the Venturi effect.

[0018] Preferably, a cabinet door is provided on the surface of the cabinet body, an inner lining door panel is provided on the cabinet door, and a metal grid explosion-proof glass is provided on the inner lining door panel; a file storage opening is provided at the bottom of the cabinet door.

[0019] Preferably, an air intake fence is provided at the bottom of the cabinet door, and an air valve is provided at the top of the cabinet body; a slope for replacing the cylinder is provided at the bottom of the cabinet body on one side of the cabinet door. The air valve continuously extracts air from the cabinet body, so that the cabinet body is in a negative pressure state, so that once a leak or fire occurs in the pipeline, the leaked gas can be directly extracted from the air valve without leaking to the outside of the cabinet body, and the fire will also spread in the low-pressure direction, and will not spread to the outside of the cabinet body, causing greater disasters.

[0020] Preferably, the control panel is provided with a cylinder temperature meter for displaying the temperature of the cylinder and a pipeline temperature meter for displaying the temperature of the gas supply pipeline; the control panel is also provided with a display screen and an emergency stop button, and the emergency stop button is placed in a recessed shape on the surface of the control panel; the first pneumatic diaphragm valve, the second pneumatic diaphragm valve, the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, the fifth pneumatic diaphragm valve, the sixth pneumatic diaphragm valve, the seventh pneumatic diaphragm valve and the eighth pneumatic diaphragm valve are all connected to electromagnetic valves through air pipes, and the electromagnetic valves are placed inside the control panel, and the electromagnetic valves are connected to the emergency stop button. The emergency stop button can stop the cabinet from working after being activated. The emergency stop button is recessed inside the control panel to prevent the staff from accidentally operating the start and stop buttons, thereby reducing the risk of misoperation.

[0021] Preferably, a detection device is provided inside the cabinet, an alarm device is provided on the surface of the control box, and the detection device is connected to the alarm device; a differential pressure gauge is provided on the cabinet, one end of the differential pressure gauge is placed outside the cabinet, and the other end is placed inside the cabinet, and a differential pressure gauge for displaying the pressure difference is provided on the control panel. The differential pressure gauge can detect the pressure difference between the inside and outside of the cabinet, thereby facilitating the judgment of whether the inside of the cabinet is in a negative pressure state.

[0022] It can be seen from the above technical solutions that, compared with the prior art, the utility model discloses a high-purity liquefied gas supply device, which has the following beneficial effects:

[0023] (1) In the utility model, the opening and closing of the pneumatic diaphragm valve on the pipeline can be controlled by the solenoid valve and the control panel, thereby realizing the automatic switching of the first gas supply branch and the second gas supply branch, reducing the risk of human error operation, and also realizing the uninterrupted supply of gas source;

[0024] (2) By heating the cylinder and pipeline through the heating jacket and heating wire, the evaporation amount of the liquid gas source can be controlled by controlling the heating temperature to achieve a stable gas supply. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0026] Figure 1 The accompanying drawing is a schematic diagram of the structure of the gas supply equipment provided by the utility model;

[0027] Figure 2The accompanying drawing is a front view of the gas supply device provided by the utility model;

[0028] Figure 3 The accompanying drawing is a schematic diagram of the structure of the valve panel provided by the utility model;

[0029] Figure 4 The accompanying drawing is a front view of the valve panel provided by the utility model.

[0030] Among them, in the figure,

[0031] 1-Cabinet;

[0032] 11-knock-out hole; 12-cabinet door; 13-lining door panel; 14-metal grid explosion-proof glass; 15-document storage port; 16-air intake grille; 17-air valve; 18-slope;

[0033] 2-Control box;

[0034] 21- control panel; 22- cylinder heating button; 23- pipeline heating button; 24- cylinder temperature gauge; 25- pipeline temperature gauge; 26- display screen; 27- emergency stop button; 28- alarm device; 29- differential pressure gauge;

[0035] 3-Valve panel;

[0036] 4-Purge pipeline;

[0037] 41-first pneumatic micro-leakage valve; 42-third pressure sensor; 43-first check valve; 44-second check valve; 45-third pneumatic diaphragm valve; 46-fourth pneumatic diaphragm valve;

[0038] 5- Gas supply pipeline;

[0039] 51-steel cylinder; 52-first air supply branch; 53-second air supply branch; 54-overcurrent protector; 55-line filter; 56-first diaphragm valve; 57-first pressure sensor; 58-first pneumatic diaphragm valve; 59-pressure regulating valve; 510-second pressure sensor; 511-second pneumatic diaphragm valve; 512-second diaphragm valve;

[0040] 6- Vacuum pipeline;

[0041] 61-second pneumatic micro-leakage valve; 62-third check valve; 63-vacuum generator; 64-third diaphragm valve; 65-fifth pneumatic diaphragm valve; 66-sixth pneumatic diaphragm valve; 67-seventh pneumatic diaphragm valve; 68-fourth pressure sensor; 69-eighth pneumatic diaphragm valve; 610-fourth diaphragm valve;

[0042] 7- Power supply box. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0044] The utility model discloses a high-purity liquefied gas supply device, comprising:

[0045] The cabinet body 1 has a plurality of knock-out holes 11 formed on the top of the cabinet body 1;

[0046] A control box 2, which is arranged on the top of the cabinet 1, and a control panel 21 is arranged on the surface of the control box 2;

[0047] The valve panel 3 is arranged inside the cabinet 1; the surface of the valve panel 3 is provided with a purge pipeline 4, a gas supply pipeline 5 and a vacuum pipeline 6; the gas inlet end of the gas supply pipeline 5 is connected to a steel cylinder 51, and a heating jacket is arranged outside the steel cylinder 51; the surface of the control panel 21 is provided with a steel cylinder heating button 22, and the steel cylinder heating button 22 is connected to the heating jacket; the gas outlet end of the purge pipeline 4 is respectively connected to the gas supply pipeline 5 and the vacuum pipeline 6 through a three-way joint; the vacuum pipeline 6 is connected to the gas supply pipeline 5; the gas outlet end of the gas supply pipeline 5 is connected to the knock-off hole 11; the gas inlet end and the gas outlet end of the vacuum pipeline 6 are both connected to the knock-off hole 11; the gas inlet end of the purge pipeline 4 is connected to the knock-off hole 11. First, start the purge pipeline 4 to introduce high-purity gas into the pipeline, then close the purge pipeline 4 and start the vacuum pipeline 6, and perform a vacuum operation in the purge pipeline 4. After repeated operations, the pipeline is made purer. Nitrogen is introduced into the vacuum pipeline 6 at the air inlet of the second pneumatic micro-leakage valve 61, and then discharged from the air outlet of the vacuum generator 63, and the pipeline is vacuumed by using the Venturi effect.

[0048] In order to further optimize the above technical solution, a power box 7 is externally connected to the control box 2 to provide power to the control box 2 .

[0049] In order to further optimize the above technical solution, a heating wire for heating is wound around the outside of the gas supply pipeline 5, and a pipeline heating button 23 is provided on the control panel 21, and the heating wire is connected to the pipeline heating button 23. There are two pipeline heating buttons 23, cylinder heating buttons 22, pipeline temperature gauges 25, and cylinder temperature gauges 24, which respectively control the temperature of the pipelines and cylinders in the first gas supply branch 52 and the second gas supply branch 53. A temperature controller is provided in the control box 2, and the temperature controller is connected to the heating jacket, the heating wire, the pipeline heating button 23, the cylinder heating button 22, the pipeline temperature gauge 25, and the cylinder temperature gauge 24. The temperature is controlled by controlling the current passed into the heating jacket and the heating wire.

[0050] In order to further optimize the above technical solution, the air supply pipeline 5 is provided with a first air supply branch 52 and a second air supply branch 53; the air outlet ends of the first air supply branch 52 and the second air supply branch 53 are commonly connected to an overcurrent protector 54, the air outlet end of the overcurrent protector 54 is connected to a pipeline filter 55, and the air outlet end of the pipeline filter 55 is connected to a first diaphragm valve 56.

[0051] In order to further optimize the above technical solution, the first air supply branch 52 and the second air supply branch 53 have the same structure, and the air inlet end thereof is connected to the steel cylinder 51, and the air outlet end of the steel cylinder 51 is respectively connected to the first pressure sensor 57 and the first pneumatic diaphragm valve 58 through a three-way joint; the air outlet end of the first pneumatic diaphragm valve 58 is connected to the pressure regulating valve 59, and the air outlet end of the pressure regulating valve 59 is respectively connected to the second pressure sensor 510 and the second pneumatic diaphragm valve 511 through a three-way joint; the air outlet end of the second pneumatic diaphragm valve 511 is connected to the second diaphragm valve 512, and the second diaphragm valves 512 of the first air supply branch 52 and the second air supply branch 53 are both connected to the air inlet end of the overcurrent protector 54.

[0052] In order to further optimize the above technical solution, the air inlet end of the purge pipeline 4 is connected to the first pneumatic micro-leakage valve 41, and the air outlet end of the first pneumatic micro-leakage valve 41 is respectively connected to the third pressure sensor 42, the first check valve 43 and the second check valve 44; the air outlet end of the first check valve 43 is connected to the third pneumatic diaphragm valve 45; the second check valve 44 is connected to the fourth pneumatic diaphragm valve 46.

[0053] In order to further optimize the above technical solution, the air inlet end of the vacuum pipeline 6 is connected to the second pneumatic micro-leakage valve 61, the air outlet end of the second pneumatic micro-leakage valve 61 is connected to the third check valve 62, the air outlet end of the third check valve 62 is connected to the vacuum generator 63, the air outlet end of the vacuum generator 63 is connected to the knock-off hole 11, and the vacuum generator 63 is also connected to the third diaphragm valve 64; the air outlet end of the third diaphragm valve 64 is also connected to the fifth pneumatic diaphragm valve 65, the sixth pneumatic diaphragm valve 66, the seventh pneumatic diaphragm valve 67, the seventh pneumatic diaphragm valve 68, the seventh pneumatic diaphragm valve 69, the seventh pneumatic diaphragm valve 61, the seventh pneumatic diaphragm valve 62, the seventh pneumatic diaphragm valve 63, the seventh pneumatic diaphragm valve 64, the seventh pneumatic diaphragm valve 65, the seventh pneumatic diaphragm valve 66, the seventh pneumatic diaphragm valve 67, the seventh pneumatic diaphragm valve 68, the seventh pneumatic diaphragm valve 69 ... Diaphragm valve 67, fourth pressure sensor 68, eighth pneumatic diaphragm valve 69 and fourth diaphragm valve 610; the fifth pneumatic diaphragm valve 65 is connected to the third pneumatic diaphragm valve 45 and the steel cylinder 51 of the second air supply branch 53 through a three-way joint; the sixth pneumatic diaphragm valve 66 is connected to the pressure regulating valve 59 of the second air supply branch 53; the seventh pneumatic diaphragm valve 67 is connected to the pressure regulating valve 59 of the first air supply branch 52; the eighth pneumatic diaphragm valve 69 is connected to the steel cylinder 51 of the first air supply branch 52.

[0054] In order to further optimize the above technical solution, check valves are provided between the gas outlet ends of the sixth pneumatic diaphragm valve 66 , the seventh pneumatic diaphragm valve 67 and the third diaphragm valve 64 to prevent gas backflow.

[0055] In order to further optimize the above technical solution, a fire sprinkler head is arranged at the top of the cabinet 1, so that when a fire occurs inside the cabinet 1, the fire can be extinguished.

[0056] In order to further optimize the above technical solution, a cabinet door 12 is provided on the surface of the cabinet body 1, a lining door panel 13 is provided on the cabinet door 12, and a metal grid explosion-proof glass 14 is provided on the lining door panel 13; a file storage opening 15 is provided at the bottom of the cabinet door 12.

[0057] In order to further optimize the above technical solution, an air intake grille 16 is provided at the bottom of the cabinet door 12, and a wind valve 17 is provided at the top of the cabinet body 1; a slope 18 for replacing the cylinder is provided at the bottom of the cabinet body 1 on one side of the cabinet door 12.

[0058] In order to further optimize the above technical solution, the control panel 21 is provided with a cylinder temperature meter 24 for displaying the temperature of the cylinder 51 and a pipeline temperature meter 25 for displaying the temperature of the gas supply pipeline 5; the control panel 21 is also provided with a display screen 26 and an emergency stop button 27, and the emergency stop button 27 is placed in a recessed shape on the surface of the control panel 21; the first pneumatic diaphragm valve 58, the second pneumatic diaphragm valve 511, the third pneumatic diaphragm valve 45, the fourth pneumatic diaphragm valve 46, the fifth pneumatic diaphragm valve 65, the sixth pneumatic diaphragm valve 66, the seventh pneumatic diaphragm valve 67 and the eighth pneumatic diaphragm valve 69 are all connected to solenoid valves through air pipes, the solenoid valves are placed inside the control panel 21, and the solenoid valves are connected to the emergency stop button 27.

[0059] In order to further optimize the above technical solution, a detection device is provided inside the cabinet 1, and an alarm device 28 is provided on the surface of the control box 2, and the detection device is connected to the alarm device 28; a differential pressure gauge is provided on the cabinet 1, one end of the differential pressure gauge is placed outside the cabinet 1, and the other end is placed inside the cabinet 1, and a differential pressure meter 29 for displaying the pressure difference is provided on the control panel 21.

[0060] In order to further optimize the above technical solution, the detection device includes: a flame detector, a high temperature probe, a gas leakage detector and a negative pressure switch. The flame detector, the high temperature probe and the gas leakage detector can detect the flame, temperature and gas leakage in the box respectively. The alarm device 28 is a three-color light strip, and a buzzer is also provided on the control panel 21. A controller is provided in the control box 2. If there is a flame, the temperature exceeds the preset temperature or there is a leak in the air intake pipeline, a danger signal will be sent to the controller, and a flashing red light and a buzzer will sound, which is a secondary alarm; if the negative pressure in the cabinet 1 is not enough, the negative pressure switch will send a warning signal to the controller, and the controller will control the three-color light strip to flash a yellow light and a buzzer to sound, which is a primary alarm.

[0061] In order to further optimize the above technical solution, a door lock is provided on the cabinet door 12, and a door closer is installed on the cabinet door 12, so that the cabinet door can be automatically sucked in to avoid the staff forgetting to close the cabinet door and causing safety hazards.

[0062] In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part.

[0063] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A high-purity liquefied gas supply equipment, characterized in that: include: A cabinet body (1), wherein a plurality of knock-out holes (11) are provided on the top of the cabinet body (1); A control box (2), the control box (2) being arranged on the top of the cabinet (1), and a control panel (21) being arranged on the surface of the control box (2); A valve panel (3), the valve panel (3) being arranged inside the cabinet (1); a purge pipeline (4), an air supply pipeline (5) and a vacuum pipeline (6) being arranged on the surface of the valve panel (3); a gas inlet end of the gas supply pipeline (5) being connected to a steel cylinder (51), a heating jacket being arranged on the outside of the steel cylinder (51); a steel cylinder heating button (22) being arranged on the surface of the control panel (21), the steel cylinder heating button (22) and the heating jacket being arranged on the surface of the control panel (21); The air outlet end of the purge pipeline (4) is respectively connected to the air supply pipeline (5) and the vacuum pipeline (6) through a three-way joint; the vacuum pipeline (6) is connected to the air supply pipeline (5); the air outlet end of the air supply pipeline (5) is connected to the knock-out hole (11); the air inlet end and the air outlet end of the vacuum pipeline (6) are both connected to the knock-out hole (11); the air inlet end of the purge pipeline (4) is connected to the knock-out hole (11).

2. A high-purity liquefied gas supply equipment according to claim 1, characterized in that: A heating wire for heating is wound around the outside of the gas supply pipeline (5), and a pipeline heating button (23) is provided on the control panel (21), and the heating wire is connected to the pipeline heating button (23).

3. The high-purity liquefied gas supply equipment according to claim 1, characterized in that: The air supply pipeline (5) is provided with a first air supply branch (52) and a second air supply branch (53); the air outlet ends of the first air supply branch (52) and the second air supply branch (53) are commonly connected to an overcurrent protector (54), the air outlet end of the overcurrent protector (54) is connected to a pipeline filter (55), and the air outlet end of the pipeline filter (55) is connected to a first diaphragm valve (56).

4. The high-purity liquefied gas supply equipment according to claim 3, characterized in that: The first air supply branch (52) and the second air supply branch (53) have the same structure, and their air inlet ends are connected to a steel cylinder (51), and the air outlet end of the steel cylinder (51) is respectively connected to a first pressure sensor (57) and a first pneumatic diaphragm valve (58) via a three-way joint; the air outlet end of the first pneumatic diaphragm valve (58) is connected to a pressure regulating valve (59), and the air outlet end of the pressure regulating valve (59) is respectively connected to a second pressure sensor (510) and a second pneumatic diaphragm valve (511) via a three-way joint; the air outlet end of the second pneumatic diaphragm valve (511) is connected to a second diaphragm valve (512), and the second diaphragm valves (512) of the first air supply branch (52) and the second air supply branch (53) are both connected to the air inlet end of the overcurrent protector (54).

5. The high-purity liquefied gas supply equipment according to claim 4, characterized in that: The air inlet end of the purge pipeline (4) is connected to a first pneumatic micro-leakage valve (41); the air outlet end of the first pneumatic micro-leakage valve (41) is respectively connected to a third pressure sensor (42), a first check valve (43) and a second check valve (44); the air outlet end of the first check valve (43) is connected to a third pneumatic diaphragm valve (45); and the second check valve (44) is connected to a fourth pneumatic diaphragm valve (46).

6. The high-purity liquefied gas supply equipment according to claim 5, characterized in that: The air inlet end of the vacuum pipeline (6) is connected to a second pneumatic micro-leakage valve (61), the air outlet end of the second pneumatic micro-leakage valve (61) is connected to a third check valve (62), the air outlet end of the third check valve (62) is connected to a vacuum generator (63), the air outlet end of the vacuum generator (63) is in communication with the knock-out hole (11), and the vacuum generator (63) is simultaneously connected to a third diaphragm valve (64); the air outlet end of the third diaphragm valve (64) is simultaneously connected to a fifth pneumatic diaphragm valve (65), a sixth pneumatic diaphragm valve (66), a seventh pneumatic diaphragm valve (67), a fourth pneumatic diaphragm valve (68), and a fifth pneumatic diaphragm valve (69). A force sensor (68), an eighth pneumatic diaphragm valve (69) and a fourth diaphragm valve (610); the fifth pneumatic diaphragm valve (65) is respectively connected to the third pneumatic diaphragm valve (45) and the steel cylinder (51) of the second air supply branch (53) through a three-way joint; the sixth pneumatic diaphragm valve (66) is connected to the pressure regulating valve (59) of the second air supply branch (53); the seventh pneumatic diaphragm valve (67) is connected to the pressure regulating valve (59) of the first air supply branch (52); the eighth pneumatic diaphragm valve (69) is connected to the steel cylinder (51) of the first air supply branch (52).

7. The high-purity liquefied gas supply equipment according to claim 1, characterized in that: A cabinet door (12) is arranged on the surface of the cabinet body (1), an inner lining door panel (13) is arranged on the cabinet door (12), and a metal grid explosion-proof glass (14) is arranged on the inner lining door panel (13); a file storage opening (15) is arranged at the bottom of the cabinet door (12).

8. The high-purity liquefied gas supply equipment according to claim 7, characterized in that: An air intake grille (16) is provided at the bottom of the cabinet door (12), and a wind valve (17) is provided at the top of the cabinet body (1); a slope (18) for replacing a steel cylinder is provided at the bottom of the cabinet body (1) on one side of the cabinet door (12).

9. The high-purity liquefied gas supply equipment according to claim 6, characterized in that: The control panel (21) is provided with a cylinder temperature meter (24) for displaying the temperature of the cylinder (51) and a pipeline temperature meter (25) for displaying the temperature of the gas supply pipeline (5); the control panel (21) is also provided with a display screen (26) and an emergency stop button (27), and the emergency stop button (27) is placed in a recessed shape on the surface of the control panel (21); the first pneumatic diaphragm valve (58), the second pneumatic diaphragm valve (511), the third pneumatic diaphragm valve (45), the fourth pneumatic diaphragm valve (46), the fifth pneumatic diaphragm valve (65), the sixth pneumatic diaphragm valve (66), the seventh pneumatic diaphragm valve (67) and the eighth pneumatic diaphragm valve (69) are all connected to electromagnetic valves through air pipes, and the electromagnetic valves are placed inside the control panel (21), and the electromagnetic valves are connected to the emergency stop button (27).

10. The high-purity liquefied gas supply equipment according to claim 1, characterized in that: A detection device is arranged inside the cabinet (1), an alarm device (28) is arranged on the surface of the control box (2), and the detection device is connected to the alarm device (28); a differential pressure gauge is arranged on the cabinet (1), one end of the differential pressure gauge is arranged outside the cabinet (1), and the other end is arranged inside the cabinet (1); a differential pressure meter (29) for displaying differential pressure is arranged on the control panel (21).

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