A rapid detection device for mechanical sensor chip

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By designing a mechanical sensor chip rapid detection device including a power device, a detection force sensor structure and a chip detection sheet, the problem of long detection time and high cost in mass production of quartz resonant mechanical sensors is solved, and fast and accurate force and frequency detection is achieved, reducing production costs.

CN222704225UActive Publication Date: 2025-04-01TAIJING (NINGBO) ELECTRONICS CO LTD

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Patent Information

Application Number: CN202421489499.2
Authority / Receiving Office: CN · China
Patent Type: Utility models(China)
Current Assignee / Owner
Filing Date: 2024-06-27
Publication Date: 2025-04-01
Estimated Expiration: 2034-06-27

AI Technical Summary

Technical Problem

In the mass production process of quartz resonant mechanical sensors, it is necessary to simultaneously detect the relationship between the magnitude of the force value and the change in frequency, resulting in a long detection time and high cost, making it difficult to meet the needs of rapid detection.

Method used

A rapid detection device for mechanical sensor chips is designed, including a power device, a detection force sensor structure and a chip detection plate. The force is applied through the power device to detect the detection force and frequency changes of the force sensor structure. The chip detection plate contacts the sensor chip for electrical conduction, achieving rapid detection.

Benefits of technology

It realizes fast and accurate detection of mechanical sensor chips, reduces the testing time cost in the industrial mass production of sensors, saves product production costs, and improves detection accuracy and response speed.

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Abstract

The utility model relates to a mechanical sensor chip rapid detection device, including a device base, a slider and a power device for driving the slider to slide horizontally are installed on one side of the upper end of the device base, a detection force sensor structure is installed on the upper end of the slider, a boss is provided on the other side of the upper end of the device base, a placement groove is provided on the upper side of the boss close to the slider, a bracket is installed on the upper end of the boss, the bracket is in an inverted L shape, a lifting seat that slides up and down is installed on the inner side of the bracket, a lifting cylinder connected to the lifting seat is vertically installed on the upper end of the bracket, and a chip detection piece is installed on the lower end of the lifting seat. The utility model has the advantages of simple structure, high test accuracy, short test time, reducing the test time cost in the industrial mass production of sensors, and saving product production costs.

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Description

Technical Field

[0001] The utility model relates to the technical field of mechanical sensor chip detection, in particular to a mechanical sensor chip rapid detection device. Background Art

[0002] The development of industrial automation and intelligence has led to the flourishing of the sensor industry, among which the technical development of mechanical sensors is particularly prominent. Taking strain gauge mechanical sensors as an example, metal or semiconductor materials are used as the sensing core material. When external force is applied to them, their resistance value changes. Therefore, external mechanical detection can be performed through the linear relationship of the change in resistance value, in order to develop new sensors with higher sensitivity, accuracy, range, and fast response characteristics.

[0003] A quartz resonant crystal is used as the sensitive unit of a mechanical sensor. When its oscillation frequency is subjected to an external force, the frequency change can be used as its detection value. It has better physical properties and can replace traditional strain gauge mechanical sensors. However, in the mass production process of quartz resonant mechanical sensors, the sensor sensitive unit must be tested for both force and frequency as a requirement for its shipment quality. For mass production testing of quartz resonant mechanical sensors, it is necessary to simultaneously detect the relationship between the force value and the frequency change. This is difficult for targets that require a large number of tests in a short period of time, so a simpler and more convenient device is needed to achieve its mass production requirements. Summary of the invention

[0004] The technical problem to be solved by the utility model is to provide a mechanical sensor chip rapid detection device, which has the advantages of simple structure, high test accuracy, short test time, reduced test time cost in industrial mass production of sensors, and saving product production costs.

[0005] The technical solution adopted by the utility model to solve its technical problems is: to provide a mechanical sensor chip rapid detection device, including a device base, a slider and a power device for driving the slider to slide horizontally are installed on one side of the upper end of the device base, a detection force sensor structure is installed on the upper end of the slider, a boss is provided on the other side of the upper end of the device base, a placement groove is provided on the upper side of the boss close to the slider, a bracket is installed on the upper end of the boss, the bracket is in an inverted L shape, a lifting seat that slides up and down is installed on the inner side of the bracket, a lifting cylinder connected to the lifting seat is vertically installed on the upper end of the bracket, and a chip detection piece is installed on the lower end of the lifting seat.

[0006] As a supplement to the technical solution described in the utility model, the power device includes a power motor and a transverse slide rail. The power motor is installed on one side of the upper end of the device base. The upper end of the device base is located between the boss and the power motor and two transverse slide rails are arranged in parallel. The slider slides along the transverse slide rail. The upper end of the device base is located between the two transverse slide rails and a screw is arranged in parallel. One end of the screw is connected to the output shaft of the power motor, and the lower part of the slider is threadedly connected to the screw.

[0007] As a supplement to the technical solution described in the utility model, a motor fixing seat is installed on one side of the upper end of the device base, the power motor is fixed on the outside of the motor fixing seat, the two ends of the screw are respectively rotatably connected to the boss and the motor fixing seat, and the output shaft of the power motor passes through the motor fixing seat and is connected to the screw.

[0008] As a supplement to the technical solution described in the utility model, a top ball is installed at one end of the detection force sensor structure.

[0009] As a supplement to the technical solution described in the utility model, a detection point is arranged on the chip detection sheet, and the detection point is used to contact with the electrode on the mechanical sensor chip to perform detection work.

[0010] As a supplement to the technical solution described in the utility model, a vertical slide rail is installed on the inner side of the bracket, and the lifting seat slides up and down along the vertical slide rail.

[0011] As a supplement to the technical solution described in the utility model, a force sensor fixing seat is installed on the upper end of the sliding block, and a force sensor structure for detection is fixed on one end of the force sensor fixing seat.

[0012] As a supplement to the technical solution described in the utility model, the detection force sensor structure is an S-shaped structure, and a mechanical sensing sensitive unit is installed inside the detection force sensor structure.

[0013] Beneficial effects: The utility model relates to a mechanical sensor chip rapid detection device, which uses a chip detection sheet and a detection force sensor structure as a calibration device, applies force to the mechanical sensor chip in the horizontal direction with a power device, and can simultaneously detect force and frequency of the mechanical sensor chip, thereby confirming the physical parameters of the mechanical sensor chip as a judgment of its product quality. The utility model has the advantages of simple structure, high test accuracy, short test time, reduced test time cost in industrial mass production of sensors, and saved product production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural schematic diagram of the utility model;

[0015] Figure 2 It is a schematic diagram of the structure of the utility model after removing the device base and the power device;

[0016] Figure 3 It is a structural schematic diagram of the mechanical sensor chip, the chip detection sheet, the detection force sensor structure and the top ball described in the utility model.

[0017] Illustration: 101, device base, 102, power motor, 103, motor fixing seat, 104, horizontal slide rail, 105, slider, 106, boss, 107, placement groove, 108, screw, 201, force sensor fixing seat, 202, force sensor structure for detection, 203, top ball, 204, mechanical sensor chip, 205, chip detection piece, 206, lifting seat, 207, vertical slide rail, 208, lifting cylinder, 209, bracket. DETAILED DESCRIPTION

[0018] The present invention is further described below in conjunction with specific embodiments. It should be understood that these embodiments are only used to illustrate the present invention and are not used to limit the scope of the present invention. In addition, it should be understood that after reading the content taught by the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms also fall within the scope defined by the claims attached to this application.

[0019] The embodiment of the utility model relates to a mechanical sensor chip rapid detection device, such as Figure 1-3 As shown, it includes a device base 101, a slider 105 and a power device for driving the slider 105 to slide horizontally are installed on one side of the upper end of the device base 101, a detection force sensor structure 202 is installed on the upper end of the slider 105, a boss 106 is provided on the other side of the upper end of the device base 101, a placement groove 107 is provided on the upper side of the boss 106 close to the slider 105, a bracket 209 is installed on the upper end of the boss 106, the bracket 209 is in an inverted L shape, a lifting seat 206 that slides up and down is installed on the inner side of the bracket 209, a lifting cylinder 208 connected to the lifting seat 206 is vertically installed on the upper end of the bracket 209, and a chip detection piece 205 is installed on the lower end of the lifting seat 206.

[0020] The power device includes a power motor 102 and a transverse slide rail 104. The power motor 102 is installed on one side of the upper end of the device base 101. The upper end of the device base 101 is located between the boss 106 and the power motor 102, and two transverse slide rails 104 are arranged in parallel. The slider 105 slides along the transverse slide rail 104. The upper end of the device base 101 is located between the two transverse slide rails 104, and a screw 108 is arranged in parallel. One end of the screw 108 is connected to the output shaft of the power motor 102, and the lower part of the slider 105 is threadedly connected to the screw 108; the screw 108 is controlled to rotate by the power motor 102, and the slider 105 will slide back and forth horizontally as the screw 108 rotates.

[0021] A vertical slide rail 207 is installed inside the bracket 209 , and the lifting seat 206 slides up and down along the vertical slide rail 207 .

[0022] The movement directions of the transverse slide rail 104 and the slider 105 are perpendicular to the movement directions of the vertical slide rail 207 and the lifting seat 206 .

[0023] A motor fixing seat 103 is installed on one side of the upper end of the device base 101, the power motor 102 is fixed on the outside of the motor fixing seat 103, the two ends of the screw 108 are rotatably connected to the boss 106 and the motor fixing seat 103 respectively, and the output shaft of the power motor 102 passes through the motor fixing seat 103 and is connected to the screw 108.

[0024] A top ball 203 is installed at one end of the detection force sensor structure 202, and the top ball 203 can concentrate the force energy during detection and transmit it to the detection force sensor structure 202. The top ball 203 is a high-rigidity spherical structure, which can concentrate the force energy at the top of the sphere.

[0025] The chip detection sheet 205 is provided with detection points, which are used to contact the electrodes on the mechanical sensor chip 204 for detection.

[0026] A force sensor fixing seat 201 is installed at the upper end of the sliding block 105 , and a force sensor structure 202 for detection is fixed at one end of the force sensor fixing seat 201 .

[0027] The detection force sensor structure 202 is an S-shaped structure, and a mechanical sensing sensitive unit is installed inside the detection force sensor structure 202; the mechanical sensing sensitive unit can be a resistive component, a capacitive component, or the like.

[0028] The mechanical sensor chip 204 is a resonant mechanical sensor, which contains a quartz chip and can provide frequency signals for mechanical sensing.

[0029] The mechanical sensor chip 204 is placed on the placement groove 107 (i.e., the detection position). The mechanical sensor chip 204 is a quartz resonant mechanical sensor chip. When it is subjected to force, the oscillation frequency changes for detection. It mainly provides a frequency signal with an accuracy of up to one ten-thousandth and a response time of milliseconds. In order to achieve rapid detection and large-scale detection in a short period of time, another high-precision force sensor (i.e., the detection force sensor structure 202) is used as a detection calibration method to complete it.

[0030] The mass-produced mechanical sensor chip 204 is placed on the placement groove 107, and then the lifting cylinder 208 is started. The lifting cylinder 208 controls the lifting seat 206 and the chip detection plate 205 to move downward together, so that the detection point on the chip detection plate 205 is in contact with the electrode on the mechanical sensor chip 204 for electrical conduction, providing power and frequency, voltage, current and other signal connections, and then controlling the screw 108 to rotate through the power motor 102, so that the slider 105 slides toward the boss 106. The slider 105 carries the detection force sensor structure 202 and the top ball 203 to apply force to the mechanical sensor chip 204, causing the frequency of the mechanical sensor chip 204 to change, and then the force is detected by detecting the change in frequency.

[0031] During the force application process, a high-precision detection force sensor structure 202 is installed as a force calibration comparison, so that the accuracy of each detection in the process is significantly improved. At the same time, the practical device has the advantages of fast response time, high measurement accuracy, and high stability.

[0032] The device base 101 is the main body of the whole device. The top ball 203 at the end of the detection force sensor structure 202 contacts the mechanical sensor chip 204. At the same time, the top ball 203 concentrates the force energy at the end, which has the effect of concentrating the force energy. The S-shaped structure of the detection force sensor structure 202 will amplify the force energy through the lever effect and provide it to the internal mechanical sensing sensitive unit for force energy detection. The contact point between the top ball 203 and the mechanical sensor chip 204 is the force sensing point of the mechanical sensor chip 204.

[0033] In the description of the present utility model, it needs to be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction, and therefore cannot be understood as limiting the scope of protection of the present utility model; the directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0034] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" may include both "above" and "below". The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0035] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the utility model.

[0036] The above is a detailed introduction to a mechanical sensor chip rapid detection device provided by the present application. Specific examples are used in this article to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the method of the present application and its core idea; at the same time, for general technicians in this field, according to the ideas of the present application, there will be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as a limitation on the present application.

Claims

1. A mechanical sensor chip rapid detection device, comprising a device base (101), characterized in that: A slider (105) and a power device for driving the slider (105) to slide horizontally are installed on one side of the upper end of the device base (101); a detection force sensor structure (202) is installed on the upper end of the slider (105); a boss (106) is provided on the other side of the upper end of the device base (101); a placement groove (107) is provided on the upper part of the boss (106) near the slider (105); a bracket (209) is installed on the upper end of the boss (106); the bracket (209) is in an inverted L shape; a lifting seat (206) that slides up and down is installed on the inner side of the bracket (209); a lifting cylinder (208) connected to the lifting seat (206) is vertically installed on the upper end of the bracket (209); and a chip detection sheet (205) is installed on the lower end of the lifting seat (206).

2. A mechanical sensor chip rapid detection device according to claim 1, characterized in that: The power device comprises a power motor (102) and a transverse slide rail (104); the power motor (102) is installed on one side of the upper end of the device base (101); the upper end of the device base (101) is located between the boss (106) and the power motor (102) and has two transverse slide rails (104) arranged in parallel; the slider (105) slides along the transverse slide rails (104); the upper end of the device base (101) is located between the two transverse slide rails (104) and has a screw rod (108) arranged in parallel; one end of the screw rod (108) is connected to the output shaft of the power motor (102); and the lower part of the slider (105) is threadedly connected to the screw rod (108).

3. A mechanical sensor chip rapid detection device according to claim 2, characterized in that: A motor fixing seat (103) is installed on one side of the upper end of the device base (101); the power motor (102) is fixed on the outside of the motor fixing seat (103); the two ends of the screw rod (108) are rotatably connected to the boss (106) and the motor fixing seat (103) respectively; and the output shaft of the power motor (102) passes through the motor fixing seat (103) and is connected to the screw rod (108).

4. A mechanical sensor chip rapid detection device according to claim 1, characterized in that: A top ball (203) is installed at one end of the detection force sensor structure (202).

5. A mechanical sensor chip rapid detection device according to claim 1, characterized in that: The chip detection sheet (205) is provided with detection points, which are used to contact electrodes on the mechanical sensor chip (204) to perform detection work.

6. A mechanical sensor chip rapid detection device according to claim 1, characterized in that: A vertical slide rail (207) is installed on the inner side of the bracket (209), and the lifting seat (206) slides up and down along the vertical slide rail (207).

7. A mechanical sensor chip rapid detection device according to claim 1, characterized in that: A force sensor fixing seat (201) is installed on the upper end of the sliding block (105), and a force sensor structure (202) for detection is fixed on one end of the force sensor fixing seat (201).

8. The mechanical sensor chip rapid detection device according to claim 1, characterized in that: The detection force sensor structure (202) is an S-shaped structure, and a mechanical sensing sensitive unit is installed inside the detection force sensor structure (202).