Ultra-high purity graphite electrodes for semiconductors

Abstract

The utility model belongs to the technical field of graphite electrodes, and specifically relates to an ultra-high purity graphite electrode for semiconductors, comprising an electrode main body, one end of the electrode main body is provided with a docking joint, the other end of the electrode main body is provided with a docking hole, the surface of the electrode main body is evenly sleeved with protective rings, a connecting plate is horizontally connected between a plurality of the protective rings, two connecting plates are symmetrically arranged on both sides of the electrode main body, end caps are sleeved at both ends of the electrode main body, extension rods are symmetrically arranged on one side where the two end caps are close to each other, corresponding protective rings are arranged on the surface of the graphite electrode, and end caps at the ends are provided to protect the graphite electrode to prevent damage during transportation, rubber pads adapted to the motor docking joint and the docking hole are arranged inside the two end caps, so as to improve the overall protective effect of the electrode, and at the same time, the end caps at both ends can be pushed inwards during installation and are limited in real time to ensure close fit with the electrode after installation.

Description

Technical Field

[0001] The utility model belongs to the technical field of graphite electrodes, and in particular relates to ultra-high purity graphite electrodes for semiconductors. Background Art

[0002] Ultra-high purity graphite refers to graphite with a carbon content of >99.99%. It is widely used in advanced refractory materials and coatings in the metallurgical industry, stabilizers for pyrotechnic materials in the military industry, pencil leads in the light industry, carbon brushes in the electrical industry, electrodes in the battery industry, etc., among which graphite electrode pumps are mostly used in the field of metal smelting.

[0003] Graphite electrodes are cylindrical and are made from graphite powder that is mixed and pressed into shape, then calcined at high temperatures, and machined to meet specified requirements. However, due to the material properties of graphite, graphite electrodes are relatively fragile and can be damaged due to improper operation during transportation or installation. Utility Model Content

[0004] In view of the problems existing in the prior art, the purpose of the utility model is to provide an ultra-high purity graphite electrode for semiconductors, which can be achieved by arranging a corresponding protective ring on the surface of the graphite electrode and an end cap at the end to protect the graphite electrode and prevent it from being damaged during transportation.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] An ultra-high purity graphite electrode for semiconductors comprises an electrode body, one end of which is provided with a docking joint, the other end of which is provided with a docking hole, the surface of the electrode body is evenly sleeved with protective rings, a connecting plate is horizontally connected between the plurality of the protective rings, two connecting plates are symmetrically arranged on both sides of the electrode body, end caps are sleeved at both ends of the electrode body, extension rods are symmetrically arranged on the sides where the two end caps are close to each other, sliding grooves are provided on the outer sides of both ends of the connecting plates, the end of the extension rod away from the end cap slides on the inner side of the sliding groove, the inner side of the sliding groove is evenly provided with clamping grooves, the inner surface of the end of the extension rod away from the end cap is provided with a wedge-shaped clamping head, and the wedge-shaped clamping head and the clamping groove are adapted to each other.

[0007] Furthermore, a seesaw is provided at one end of the extension rod away from the end cap.

[0008] Furthermore, a buffer piece is glued to the inner side of the protective ring.

[0009] Furthermore, a protective pad A is disposed on the inner side of one of the end caps, and the inner side of the protective pad A is adapted to the docking joint, and a protective pad B is disposed on the inner side of the other end cap.

[0010] Furthermore, a plug is provided at the inner center of the protective pad B, and the plug is placed inside the docking hole.

[0011] Compared with the prior art, the beneficial effects of the utility model are as follows: corresponding protective rings are arranged on the surface of the graphite electrode, and end caps are arranged at the ends to protect the graphite electrode and prevent damage during transportation; rubber pads that are compatible with the motor docking joints and docking holes are arranged inside the two end caps to improve the overall protective effect of the electrode; at the same time, the end caps at both ends can be pushed inward during installation and limited in real time to ensure a close fit with the electrode after installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0013] Figure 2 This is a schematic diagram of the three-dimensional structure of the end cap of the utility model;

[0014] Figure 3 It is a schematic diagram of the longitudinal top-sectional structure of the utility model;

[0015] Figure 4 For the utility model Figure 3 Schematic diagram of the enlarged structure of area A.

[0016] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0017] 1. Electrode body; 101. Butt joint; 102. Butt hole; 2. End cap; 3. Protective ring; 301. Buffer; 4. Protective pad A; 5. Protective pad B; 6. Plug; 7. Connecting plate; 8. Extension rod; 9. Rocker; 10. Wedge-shaped clamp; 11. Slide groove; 12. Clamp groove. DETAILED DESCRIPTION

[0018] In order to make the purpose and advantages of the utility model more clear, the utility model is specifically described in combination with the following embodiments. It should be understood that the following text is only used to describe one or several specific implementations of the utility model, and does not strictly limit the protection scope of the specific request of the utility model.

[0019] Please refer to Figure 1-Figure 4As shown, an ultra-high purity graphite electrode for semiconductors includes an electrode body 1, one end of the electrode body 1 is provided with a docking joint 101, and the other end of the electrode body 1 is provided with a docking hole 102, so as to facilitate the installation of the electrode body 1 when in use, a protective ring 3 is evenly sleeved on the surface of the electrode body 1, and a connecting plate 7 is horizontally connected between multiple protective rings 3, and multiple protective rings 3 are fixed by two connecting plates 7 so that the two form a whole, and a buffer 301 is glued to the inner side of the protective ring 3 to better play a buffering role, and the two connecting plates 7 are symmetrically arranged on both sides of the electrode body 1, and end caps 2 are sleeved at both ends of the electrode body 1, and the two end caps 2 can Both ends of the electrode body 1 are covered and protected to facilitate installation and disassembly. Extension rods 8 are symmetrically arranged on the side where the two end caps 2 are close to each other. Slide grooves 11 are provided on the outer sides of both ends of the connecting plate 7. The end of the extension rod 8 away from the end cap 2 slides on the inner side of the slide groove 11 so that the end cap 2 can only slide axially. Slots 12 are evenly provided on the inner side of the slide groove 11. A wedge-shaped clamp 10 is provided on the inner surface of the end of the extension rod 8 away from the end cap 2. The wedge-shaped clamp 10 and the clamp groove 12 are adapted to each other. The matching direction of the two ensures that when the end cap 2 is pushed close to the center position, real-time limiting can be obtained, and the extension rod 8 can be slightly deformed.

[0020] Please refer to Figure 4 As shown, a rocker plate 9 is provided at one end of the extension rod 8 away from the end cap 2 . When disassembling, the outer rocker plate 9 can be tilted to drive the end of the extension rod 8 to tilt outward, so that the wedge-shaped clamping head 10 no longer cooperates with the clamping slot 12 .

[0021] Please refer to Figure 3 As shown, a protective pad A4 is provided on the inner side of one end cap 2, and the inner side of the protective pad A4 is adapted to the docking joint 101, wherein a protective pad B5 is provided on the inner side of the other end cap 2, and a plug 6 is provided at the inner center of the protective pad B5, and the plug 6 is placed on the inner side of the docking hole 102 to better protect the two ends of the electrode body 1.

[0022] Example 2

[0023] The electrode body, butt joint, end cap, protective ring, protective pad A, protective pad B, plug, connecting plate, extension rod, seesaw, wedge-shaped clamp, etc. in the ultra-high purity graphite electrode for semiconductor are all made of ultra-high purity graphite for semiconductor. According to the "Guidelines for the First Batch Application Demonstration of Key New Materials (2024 Edition)", the ultra-high purity graphite for semiconductor has an ash content of <5ppm; B, A1, Fe content ≤0.01ppm; resistivity (uQ:m) 11-15.

[0024] The working principle of the utility model is as follows: the electrode body 1 is placed horizontally, and the stability of the electrode body 1 is maintained by at least two supporting points at the bottom, and then the connector of the protective ring 3 and the connecting plate 7 is sleeved on the surface of the electrode body 1, and adjusted to be placed in the middle position of the electrode body 1, and then the end cap 2 with the protective pad A4 is installed at one end of the docking joint 101, and the other end cap 2 with the protective pad B5 is installed at the other end of the electrode body 1, so that the protective pad A4 protects the docking joint 101, and the plug 6 at the other end is placed inside the docking hole 102 to improve the protection effect. When installing the end cap 2, the extension rod 8 is allowed to enter the inside of the slide groove 11. When pushing the end cap 2, the installation is achieved through the cooperation of the wedge-shaped clamp 10 and the clamping groove 12 to prevent the end cap 2 from falling off. On the contrary, when disassembly is required, the rocker plate 9 can be pried by the rocker rod to deform the end of the extension rod 8 outward, and then the wedge-shaped clamp 10 on its inner side does not cooperate with the clamping groove 12 to facilitate disassembly.

[0025] The above is only a preferred embodiment of the present invention. It should be noted that, for ordinary technicians in the technical field, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to the conventional means in the field unless otherwise specified and limited.

Claims

1. An ultra-high purity graphite electrode for semiconductor, comprising an electrode body (1), wherein one end of the electrode body (1) is provided with a docking joint (101), and the other end of the electrode body (1) is provided with a docking hole (102), characterized in that: The surface of the electrode body (1) is evenly sleeved with protective rings (3), and a connecting plate (7) is transversely connected between the plurality of protective rings (3). The two connecting plates (7) are symmetrically arranged on both sides of the electrode body (1). The two ends of the electrode body (1) are sleeved with end caps (2), and the two end caps (2) are symmetrically arranged with extension rods (8) on the side close to each other. Slide grooves (11) are provided on the outer sides of both ends of the connecting plates (7), and the end of the extension rod (8) away from the end cap (2) slides on the inner side of the slide groove (11). The inner side of the slide groove (11) is evenly sleeved with connecting plates (7), and the inner side surface of the end of the extension rod (8) away from the end cap (2) is provided with a wedge-shaped clamp (10), and the wedge-shaped clamp (10) and the clamp groove (12) are mutually adapted.

2. The ultra-high purity graphite electrode for semiconductor according to claim 1, characterized in that: A seesaw plate (9) is provided at one end of the extension rod (8) that is away from the end cap (2).

3. The ultra-high purity graphite electrode for semiconductor according to claim 1, characterized in that: A buffer component (301) is glued to the inner side of the protective ring (3).

4. The ultra-high purity graphite electrode for semiconductor according to claim 1, characterized in that: A protective pad A (4) is arranged on the inner side of one of the end caps (2), and the inner side of the protective pad A (4) is adapted to the docking joint (101), and a protective pad B (5) is arranged on the inner side of the other end cap (2).

5. The ultra-high purity graphite electrode for semiconductor according to claim 4, characterized in that: A plug (6) is provided at the inner center of the protective pad B (5), and the plug (6) is placed inside the docking hole (102).

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