A 160kV open-tube Jima card placement bracket
By designing a 160kV open-tube Jima card placement bracket, the parallelism between the Jima card and the target surface is automatically adjusted using the spring adjustment structure, the problem of the Jima card and the target surface is solved, the approximation of the distance between the lithography line and the target surface is improved, and the image accuracy is significantly improved.
Patent Information
- Application Number
- CN202420582475.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-25
- Publication Date
- 2025-04-04
- Estimated Expiration
- 2034-03-25
AI Technical Summary
The existing Jima card installation is relatively rigid and difficult to adjust, resulting in the Jima card not parallel to the target surface when debugging the 160kV tube light source, resulting in a long distance between the lithography line of the observation object and the target surface and blurred images.
A 160kV open-tube Jima card placement bracket is designed, and the structure of a mounting base, a first adjustment part and a second adjustment part is adopted. The fit between the Jima card and the target surface is adjusted through a spring, and the compression amount is automatically adjusted by the spring of the second adjustment part to ensure parallel fit between the target surface and the Jima card.
By automatically adjusting the compression amount, the parallel fit between the target surface and the Jima card is ensured, which improves the approximation of the distance between the lithographic lines and the target surface, making the observed image accuracy higher.
Smart Images
Figure CN222717803U_ABST
Abstract
Description
Technical Field
[0001] The utility model discloses a resolution test card placing bracket, belongs to the technical field, and specifically relates to a 160kV open-tube Jima card placing bracket. Background Art
[0002] In existing instruments, the installation of the Jima card is rather rigid, relying only on the sheet metal structure for fixing, which is not convenient for adjustment and difficult to solve the angle problem. When debugging the 160kV open-tube light source, there is a problem that the Jima card is not parallel to the target surface, resulting in a long distance between the observed object's photolithography line and the target surface, and the final image is blurred. Utility Model Content
[0003] Purpose of the utility model: to provide a 160kV open-tube Jima card placement bracket to solve the above-mentioned problem that the Jima card is not parallel to the target surface.
[0004] Technical solution: A 160kV open-tube Jima card placement bracket, with a mounting base, a first adjustment part, and a second adjustment part;
[0005] The first adjustment part is installed on the installation base, and the second adjustment part is installed on the first adjustment part. The first adjustment part and the second adjustment part both use springs to adjust the fit between the Jima card and the target surface.
[0006] When the Jima card is fitted to the target surface, when the spring stress in the second adjustment part is greater than the spring stress in the first adjustment part, the first adjustment part compresses the spring and moves backward to relieve part of the stress;
[0007] When the force is uniform, the compression amount of the springs in the second adjustment part is the same, that is, the target surface is parallel to the Jima card; when the force is uneven, the springs in the second adjustment part with greater force will be compressed more, and those with less force will be compressed less, that is, the parallel fit of the target surface and the Jima card is ensured by automatically adjusting the compression amount.
[0008] In a further embodiment, when the spring in the second adjustment part is fully compressed and the target surface is still not parallel to the Jima card, the position of the mounting base is adjusted to adjust the margin.
[0009] In a further embodiment, the second adjusting portion is mounted on the first adjusting portion by bending sheet metal.
[0010] In a further embodiment, the first adjustment part includes: two fixed side panels, fixedly mounted on two corresponding side edges of the mounting base; an optical axis, fixedly connected between the two fixed side panels; a slider, sleeved on the optical axis; a first spring, sleeved on the optical axis and located between the slider and one of the fixed side panels; and one end face of the bent sheet metal is fixedly mounted on the slider.
[0011] In a further embodiment, the second adjusting part includes: a limit frame fixedly mounted on the other end surface of the bent sheet metal; a clamp embedded in the limit frame; and a second spring is provided between the limit frame and the clamp.
[0012] In a further embodiment, four notches are provided at four corners of the lower surface of the mounting base for mounting two fixed side panels.
[0013] In a further embodiment, the fixed side plate is provided with a mounting hole for mounting an optical axis, two optical axes are provided, and the optical axes are fixedly mounted on the two fixed side plates by screws;
[0014] The slider and the first spring are each provided with two, and the bent sheet metal is fixedly mounted on the two sliders.
[0015] In a further embodiment, the limiting frame is provided with a groove, and the groove is connected to the clamp by screws.
[0016] In a further embodiment, the bent sheet metal is bent at 90 degrees.
[0017] In a further embodiment, a countersunk slot is formed on the mounting base.
[0018] Beneficial effect: The utility model controls the parallelism between the Jima card and the target surface through the clamp and the spring, and tries to ensure the fit between the two, so that the distance between the photoetching line and the target surface is close enough, so that we can observe the image with higher accuracy. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 It is a schematic diagram of the first adjusting part of the utility model.
[0020] Figure 2 It is a schematic diagram of the second adjusting part of the utility model.
[0021] Figure 3 It is a schematic diagram of the utility model.
[0022] Figure numerals: Jima card 1, clamp 2, limit frame 3, bent sheet metal 4, mounting base 5, fixed side plate 6, optical axis 7, first spring 8, M3 screw 9, slider 10, second spring 11, M2 screw 12. DETAILED DESCRIPTION
[0023] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0024] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.
[0025] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. In addition, the technical features involved in the different embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.
[0026] A 160kV open-tube Jima card placement bracket comprises: a mounting base 5, a first adjustment part and a second adjustment part;
[0027] The first adjusting part is installed on the mounting base 5, and the second adjusting part is installed on the first adjusting part. Both the first adjusting part and the second adjusting part use springs to adjust the fit between the Jima card 1 and the target surface.
[0028] When the Jima card 1 is fitted to the target surface, when the spring stress in the second adjustment part is greater than the spring stress in the first adjustment part, the first adjustment part compresses the spring and moves backward to relieve part of the stress;
[0029] When the force is uniform, the compression amount of the springs in the second adjustment part is the same, that is, the target surface is parallel to the Jima card 1; when the force is uneven, the springs in the second adjustment part with greater force will have greater compression, and those with less force will have less compression, that is, the parallel fit of the target surface and the Jima card 1 is ensured by automatically adjusting the compression amount.
[0030] In one embodiment, Figures 1 to 3 As shown, when the spring in the second adjustment part is fully compressed and the target surface is still not parallel to the Jima card 1, the position of the mounting base is adjusted to adjust the margin.
[0031] In one embodiment, Figures 1 to 3 As shown, the second adjusting portion is installed on the first adjusting portion by bending the sheet metal 4.
[0032] In one embodiment, Figures 1 to 3 As shown, the first adjustment part includes: two fixed side panels 6 are fixedly installed on two corresponding sides of the mounting base 5; an optical axis 7 is fixedly connected between the two fixed side panels 6; a slider 10 is sleeved on the optical axis 7; a first spring 8 is sleeved on the optical axis 7 and located between the slider 10 and one of the fixed side panels 6; one end face of the bent sheet metal 4 is fixedly installed on the slider 10.
[0033] In one embodiment, Figures 1 to 3 As shown, the second adjustment part includes: a limit frame 3, fixedly installed on the other end surface of the bent sheet metal 4; a clamp 2, embedded in the limit frame 3; a second spring 11 is provided between the limit frame 3 and the clamp 2, and four second springs 11 are provided, and are respectively arranged between the limit frame 3 and the four corners of the clamp 2.
[0034] In one embodiment, Figures 1 to 3 As shown, four notches are provided at the four corners of the lower surface of the mounting base 5 for mounting two fixed side panels 6 .
[0035] In one embodiment, Figures 1 to 3 As shown, the fixed side plate 6 has a mounting hole for mounting the optical axis 7. Two optical axes 7 are provided. The optical axis 7 is fixedly mounted on the two fixed side plates 6 by M3 screws 9;
[0036] The slider 10 and the first spring 8 are both provided in pairs, and the bent sheet metal 4 is fixedly mounted on the two sliders 10 .
[0037] In one embodiment, Figures 1 to 3 As shown, the limiting frame 3 is provided with a groove, and the groove is connected to the clamp 2 via an M2 screw 12.
[0038] In one embodiment, Figures 1 to 3 As shown, the bent sheet metal 4 is bent at 90 degrees.
[0039] In one embodiment, Figures 1 to 3 As shown, the mounting base 5 is provided with countersunk slots for installation and adjustment.
[0040] Working principle: Figures 1 to 3 As shown, when in use, the target surface (on the 160kV open source light tube) contacts the surface of the Jima card 1 (when the force is uniform, the compression amount of the second short spring is the same, that is, the target surface is parallel to the Jima card 1; when the force is uneven, the second spring 11 with a large force will be compressed to a large extent, and the compression amount with a small force will be small, that is, the parallel fit of the target surface and the Jima card 1 is ensured by automatically adjusting the compression amount; when the four second springs 11 are fully compressed and the target surface and the Jima card 1 are still not parallel to each other, it is necessary to adjust the position of the mounting base plate 5 to ensure the adjustment margin of this design.), so that the clamp 2 compresses the second spring 11 (as shown in Figure (2)) and embeds it into the limit frame 3. When the stress of the four second springs 11 is greater than the stress of the two first springs 8, the limit frame 3 drives the two sliders 10 to compress the two long springs 8 by bending the sheet metal 4, thereby relieving part of the stress. Even if the four second springs 11 reach the compression limit, the safety of the Jima card 1 can be ensured by compressing the first spring 8.
[0041] When the force is uniform, the compression amount of the four second springs is the same, that is, the target surface is parallel to the Jima card 1; when the force is uneven, the second spring 11 with a large force will be compressed to a large extent, and the compression amount with a small force will be small, that is, the parallel fit of the target surface and the Jima card 1 is ensured by automatically adjusting the compression amount; when the four second springs are fully compressed and the target surface and the Jima card 1 are still not parallel to each other, it is necessary to adjust the position of the mounting base to ensure the adjustment margin of this design.
[0042] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention of the utility model.
Claims
1. A 160kV open-tube Jima card placement bracket, characterized in that: include: A mounting base, a first adjusting portion, and a second adjusting portion; The first adjustment part is installed on the installation base, and the second adjustment part is installed on the first adjustment part. The first adjustment part and the second adjustment part both use springs to adjust the fit between the Jima card and the target surface. When the Jima card is fitted to the target surface, when the spring stress in the second adjustment part is greater than the spring stress in the first adjustment part, the first adjustment part compresses the spring and moves backward to relieve part of the stress; When the force is uniform, the compression amount of the springs in the second adjustment part is the same, that is, the target surface is parallel to the Jima card; when the force is uneven, the springs in the second adjustment part with greater force will be compressed more, and those with less force will be compressed less, that is, the parallel fit of the target surface and the Jima card is ensured by automatically adjusting the compression amount.
2. A 160kV open-tube Jima card placement bracket according to claim 1, characterized in that: When the spring in the second adjustment part is completely compressed and the target surface is still not parallel to the Jima card, the position of the mounting base is adjusted to adjust the margin.
3. A 160kV open-tube Jima card placement bracket according to claim 1, characterized in that: The second adjusting portion is installed on the first adjusting portion by bending sheet metal.
4. A 160kV open-tube Jima card placement bracket according to claim 3, characterized in that: The first adjustment part includes: two fixed side plates, which are fixedly installed on two corresponding sides of the mounting base; an optical axis, which is fixedly connected between the two fixed side plates; a slider, which is sleeved on the optical axis; a first spring, which is sleeved on the optical axis and located between the slider and one of the fixed side plates; and one end face of the bent sheet metal is fixedly installed on the slider.
5. A 160kV open-tube Jima card placement bracket according to claim 3, characterized in that: The second adjusting part includes: a limiting frame fixedly mounted on the other end surface of the bent sheet metal; a clamp embedded in the limiting frame; and a second spring is arranged between the limiting frame and the clamp.
6. A 160kV open-tube Jima card placement bracket according to claim 1, characterized in that: Four notches are provided at four corners of the lower surface of the mounting base for mounting two fixed side panels.
7. A 160kV open-tube Jima card placement bracket according to claim 4, characterized in that: The fixed side plate is provided with a mounting hole for mounting an optical axis, two optical axes are provided, and the optical axes are fixedly mounted on the two fixed side plates by screws; The slider and the first spring are each provided with two, and the bent sheet metal is fixedly mounted on the two sliders.
8. A 160kV open-tube Jima card placement bracket according to claim 5, characterized in that: The limiting frame is provided with a groove, and the groove is connected to the clamp by screws.
9. A 160kV open-tube Jima card placement bracket according to claim 3, characterized in that: The bent sheet metal is bent at 90 degrees.
10. A 160kV open-tube Jima card placement bracket according to claim 1, characterized in that: The mounting base is provided with a countersunk slot hole.