A silicon powder filter backflush system

Abstract

The utility model discloses a back-blowing system for a silicon powder filter, which relates to the technical field of filters, and includes a cylinder, a head, a back-blowing air inlet pipe, a back-blowing nozzle group, a support, a tube sheet and a filter element group; the head is mounted above the cylinder, the back-blowing air inlet pipe is fixedly mounted on the cylinder, the back-blowing air inlet pipe passes horizontally through the cylinder and extends downward in the cylinder, and is connected to the back-blowing nozzle group at its end, the end of the back-blowing nozzle group is fixedly mounted on the tube sheet below it through a support, a filter element group is mounted on the tube sheet, and the filter element hole at the top of the filter element group faces the nozzle opening at the bottom of the back-blowing nozzle group. The back-blowing system for a silicon powder filter provided by the utility model fixes the back-blowing air inlet pipe on the cylinder, so that when installing, it is very convenient to check whether the back-blowing nozzle is aligned with the filter element hole of the tube sheet, and the assembly accuracy of the back-blowing nozzle and the filter element hole of the tube sheet is improved, thereby ensuring that the back-blowing effect of the silicon powder filter meets the design.

Description

Technical Field

[0001] The utility model relates to the technical field of filters, and more specifically to a silicon powder filter back-flushing system. Background Art

[0002] In the production process of polysilicon, the dusty process gas is generally treated through a silicon powder filter. The silicon powder in the process gas can be filtered out and collected through the silicon powder filter. Among them, the backflush system is an important part of the filter. Its function is to backflush the filter element, clean the silicon powder in the filter element, and make the silicon powder fall from the filter element from top to bottom into the lower cavity and be discharged through the silicon powder outlet, thereby realizing the regeneration of the filter element function and long-term use.

[0003] In the prior art, the conventional back-flushing system of the filter equipment used in the high-purity silicon system is pre-arranged and fixed on the equipment head through the pipe and flange, and the head and the back-flushing system are installed on the flange of the filter equipment cylinder body by hoisting. Because the back-flushing system is pre-installed on the head, it is difficult for the back-flushing nozzle in the back-flushing system to align with the filter element hole on the tube sheet due to processing errors, assembly errors, metal material deformation (such as welding deformation), etc., resulting in poor filter back-flushing effect, and even the possibility of equipment failure and damage.

[0004] The traditional method is to calibrate the backblowing nozzle and the filter element hole. When the head is hoisted into place, people must enter the head to check and calibrate the nozzles one by one. At this time, the inside of the head is a confined space and is full of backblowing pipes. The inspection operation is very inconvenient and there are safety risks.

[0005] The traditional filter backflush system is only fixed at the head joint. Due to structural design defects, the end of the nozzle group cannot be fixed. The end nozzle group is far away from the fixed point, and the nozzle group is easily deformed, displaced, and damaged by the reaction force of the backflush airflow during backflush operation, resulting in backflush failure or even equipment damage.

[0006] In the prior art, the patent with announcement number CN220071087U discloses a silicon powder filter, which relates to the technical field of silicon powder filtering. The filter element assembly is provided with several groups, and the several groups of filter element assemblies are installed on the partition along the circumferential direction of the tank body. Each group of filter element assemblies includes several vertically arranged filter elements; the outlet ends of the several back-blowing branches of the back-blowing assembly are respectively located above the top outlets of the several filter elements, and the several filter elements of the filter element assembly are back-blown, that is, each filter element has its own independent back-blowing branch, and the back-blowing gas in the back-blowing branch flows from top to bottom in the filter element, cleans the silicon powder in the filter element, and makes the silicon powder fall from the filter element from top to bottom into the lower cavity, and is discharged through the silicon powder outlet, and the silicon powder in each filter element is cleaned in all directions to prevent the filter element from being blocked. The back-blowing assembly is provided with several groups and is respectively connected to several groups of filter element assemblies. When it is necessary to clean the silicon powder of the tank filter element assembly, the filter element assemblies can be cleaned one by one, and other uncleaned filter element assemblies filter the silicon powder normally.

[0007] The silicon powder filter disclosed in the above patent also has the above-mentioned problems such as backflush system, head installation, and nozzle group end fixation. Utility Model Content

[0008] In order to overcome the defects existing in the above-mentioned prior art, the purpose of the utility model is to provide a silicon powder filter backflushing system to solve the problems existing in the above-mentioned prior art such as the backflushing system and the head installation, the nozzle group end fixation, etc. The utility model circumvents the backflushing system layout and improves and optimizes the fixed connection method.

[0009] In order to achieve the above objectives, the technical solution adopted by the utility model is:

[0010] A back-blowing system for a silicon powder filter comprises a cylinder, a head, a back-blowing air inlet pipe, a back-blowing nozzle group, a support member, a tube sheet and a filter element group;

[0011] The head is assembled above the cylinder, the back-blowing air inlet pipe is fixedly mounted on the cylinder, the back-blowing air inlet pipe horizontally passes through the cylinder and extends downward inside the cylinder, and is connected to the back-blowing nozzle group at its end, the end of the back-blowing nozzle group is fixedly mounted on the tube sheet below it through a support, a filter element group is mounted on the tube sheet, and the filter element hole at the top of the filter element group faces the nozzle opening at the bottom of the back-blowing nozzle group.

[0012] Preferably, the inner wall of the cylinder is provided with a tube sheet support ring, and the tube sheet is installed on the tube sheet support ring.

[0013] Preferably, the back-blowing air inlet pipe includes an inner-cylinder air inlet pipe, an outer-cylinder air inlet pipe and a forged flange, wherein the forged flange is installed on the side wall of the cylinder, the inner end of the forged flange is connected to the air inlet end flange of the inner-cylinder air inlet pipe, and the outer end is connected to the air outlet end of the outer-cylinder air inlet pipe.

[0014] Preferably, the forging flange is welded to the side wall of the cylinder.

[0015] Preferably, the support member is L-shaped, one end plate of which is welded to the back-blowing nozzle group, and the other end plate is fixed to the tube sheet by bolts.

[0016] Preferably, the support members are symmetrically arranged on the back-blowing nozzle group.

[0017] Preferably, a gas outlet is provided at the top of the head.

[0018] Preferably, the filter element group includes a plurality of filter elements vertically arranged in the cylinder body, and the top ends of the plurality of filter elements are all mounted on the tube plate.

[0019] Beneficial effects of the utility model:

[0020] The silicon powder filter backblowing system provided by the utility model fixes the backblowing air inlet pipe on the cylinder body, so that during installation, it is very convenient to check whether the backblowing nozzle is aligned with the tube plate filter element hole, thereby improving the assembly accuracy of the backblowing nozzle and the tube plate filter element hole, thereby ensuring that the backblowing effect of the silicon powder filter meets the design.

[0021] The utility model provides a back-blowing system for a silicon powder filter, in which the end of the back-blowing nozzle group is fixedly mounted on a tube plate therebelow by a support, and the back-blowing nozzle group end is fixedly mounted to make the back-blowing nozzle group more stable, thereby improving the operating stability of the silicon powder filter and increasing the operating cycle of the equipment.

[0022] The utility model provides a silicon powder filter backflush system, in which the backflush pipe is optimized from a pipe flange to a forged flange connection, thereby saving the internal space of the cylinder and satisfying the requirement that the equipment tube sheet can be disassembled for maintenance.

[0023] The utility model provides a silicon powder filter back-flushing system, wherein a gas outlet is arranged on the top of the head, and the gas outlet is arranged on the top of the head, thereby reducing the length of the straight cylinder section of the head and saving investment costs.

[0024] The silicon powder filter backflush system provided by the utility model has a structural form that is easy to install, intuitive, and more efficient; compared with other designs that meet the same functions, the diameter of the equipment cylinder can be reduced to make the equipment miniaturized; compared with other equipment that meets the same functions, the investment cost of equipment production and manufacturing is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic diagram of the back-flushing system of the silicon powder filter of the utility model;

[0026] Figure 2 This is a schematic diagram of the forging flange of the utility model;

[0027] Figure 3This is a schematic diagram of the back-blowing nozzle assembly of the utility model;

[0028] Reference numerals:

[0029] 1. Cylinder body; 2. Head; 3. Back-blowing air inlet pipe; 4. Back-blowing nozzle assembly; 5. Support; 6. Tube sheet; 7. Filter element assembly; 8. Tube sheet support ring; 9. Inlet pipe inside the cylinder; 10. Inlet pipe outside the cylinder; 11. Forging flange; 12. Gas outlet. DETAILED DESCRIPTION

[0030] The concept, specific structure and technical effects of the present invention will be clearly and completely described below in combination with the embodiments and drawings to fully understand the purpose, features and effects of the present invention.

[0031] Example 1

[0032] A silicon powder filter backflush system, such as Figure 1-Figure 3 As shown, it includes a cylinder 1, a head 2, a back-blowing air inlet pipe 3, a back-blowing nozzle group 4, a support 5, a tube sheet 6 and a filter element group 7;

[0033] The head 2 is assembled on the cylinder 1, and the back-blowing air inlet pipe 3 is fixedly mounted on the cylinder 1. The back-blowing air inlet pipe 3 passes through the cylinder 1 horizontally and extends downward in the cylinder 1. The back-blowing nozzle group 4 is connected at its end. The end of the back-blowing nozzle group 4 is fixedly mounted on the tube sheet 6 below it through a support 5. A filter element group 7 is mounted on the tube sheet 6. The filter element hole at the top of the filter element group 7 is opposite to the nozzle opening at the bottom of the back-blowing nozzle group 4.

[0034] In this embodiment, the back-blowing air inlet pipe 3 is fixedly installed on the cylinder 1, and the back-blowing system components are manufactured and pre-installed at the equipment manufacturer to ensure that the size is qualified. In this way, the back-blowing system can be installed on site before the head 2 is installed, and installed on the tube sheet 6 inside the cylinder 1. During installation, the installer can very conveniently check whether the back-blowing system nozzles are all facing the filter element holes. If deviations are found, they can be corrected in time to avoid the problem of poor back-blowing effect caused by the back-blowing nozzle and the filter element hole not being centered, or even damaging the filter element and the tube sheet, resulting in filter failure.

[0035] In addition, the end of the backblowing nozzle group 4 is fixedly mounted on the tube sheet 6 therebelow through the support 5, so that the end of the backblowing nozzle group 4 is fixed, and the backblowing nozzle group 4 is prevented from being deformed, displaced, or damaged by the reaction force.

[0036] In this embodiment, since the filter backflush system is arranged and fixed on the wall of the cylinder 1, the space above the tube sheet 6 of the equipment cylinder 1 is required to be higher, so the overall length of the equipment cylinder 1 needs to be extended by about 0.5m compared with the prior art.

[0037] Example 2

[0038] This embodiment is further described on the basis of embodiment 1. Figure 1 and 2 As shown, the inner wall of the cylinder 1 is provided with a tube sheet support ring 8, and the tube sheet 6 is installed on the tube sheet support ring 8. The back-blowing air intake pipe 3 includes an inner air intake pipe 9, an outer air intake pipe 10 and a forging flange 11. The forging flange 11 is installed on the side wall of the cylinder 1. The inner end of the forging flange 11 is connected to the air intake end flange of the inner air intake pipe 9, and the outer end is connected to the air outlet end of the outer air intake pipe 10. The forging flange 11 is welded to the side wall of the cylinder 1.

[0039] In this embodiment, the connection mode of the pipe flange of the back-blowing system is changed to the connection mode of the forged flange 11, so that the tube sheet 6 can be detached and conveniently lifted out without increasing the size of the cylinder 1. If the pipe flange connection mode of the back-blowing system of the traditional filter is used, the pipe flange is located inside the cylinder 1. To realize the detachable function of the tube sheet 6 for maintenance, under the tube sheet 6 of the same size, due to the obstruction of the upper pipe flange, the cylinder 1 and the tube sheet support ring 8 at the bottom of the tube sheet 6 need to be made larger, so that the tube sheet 6 can be lifted out during maintenance.

[0040] This embodiment cleverly changes the flange pipe into a forged flange 11, and the forged flange 11 is directly welded on the equipment barrel 1. The flange surface is basically on the same plane as the inner wall of the equipment barrel 1, and does not occupy the internal space of the barrel 1. Then the flange on the backflush pipe is directly connected to the forged flange 11, so as to achieve fixation.

[0041] like Figure 2 The forged flange 11 shown is welded directly to the equipment barrel 1 through a hole in the equipment barrel 1, and the flange surface is substantially flush with the inner wall of the barrel.

[0042] Example 3

[0043] This embodiment is further described on the basis of embodiment 2. Figure 3 As shown, the support member 5 is L-shaped, one end plate of which is welded to the back-blowing nozzle group 4, and the other end plate is fixed to the tube sheet 6 by bolts. The support member 5 is symmetrically arranged on the back-blowing nozzle group 4.

[0044] In this embodiment, the end of the back-blowing nozzle group 4 is fixed. A support member 5 is provided at the corner of the back-blowing nozzle group 4, and the support member 5 is directly welded to the back-blowing nozzle group 4, and the support member 5 is directly supported on the tube sheet 6; at the same time, an M16 internal thread hole is opened on the tube sheet 6, and the support member 5 is directly fixed to the tube sheet 6 with an M16 hexagon screw, thereby realizing the end fixation of the back-blowing nozzle group 4, and preventing the back-blowing nozzle group 4 from being deformed, displaced, and damaged by the reaction force.

[0045] like Figure 3 The backflush nozzle group 4 shown has a left end flange and Figure 2The forging flange 11 is connected to fix the blowback nozzle group 4 to the inner wall of the cylinder 1. The support member 5 of the blowback nozzle group 4 is directly supported on the tube sheet 6, and the blowback nozzle group 4 is supported and fixed on the tube sheet 6 by hexagonal bolts.

[0046] Example 4

[0047] This embodiment is further described on the basis of embodiment 3. Figure 2 As shown, a gas outlet 12 is provided at the top of the sealing head 2.

[0048] In the prior art, the gas outlet 12 is arranged on the cylinder 1. In this embodiment, the gas outlet 12 pipe is arranged on the top of the head 2, which can reduce the length of the straight cylinder 1 of the head and save investment.

[0049] like Figure 1 As shown, the filter element group 7 includes a plurality of filter elements vertically arranged in the cylinder 1 , and the top ends of the plurality of filter elements are all assembled on the tube sheet 6 .

[0050] When in use, the filtered gas flows upward through the filter element group 7, and the filter element group 7 filters the silicon powder in the gas to filter out the silicon powder.

[0051] When the filter element group 7 needs to be back-blown, the back-blowing gas enters the back-blowing nozzle group 4 through the back-blowing air inlet pipe 3, and the back-blowing nozzle group 4 back-blows the filter element group 7 to clean the silicon powder in the filter element, so that the silicon powder falls from the filter element from top to bottom into the lower cavity and is discharged through the silicon powder outlet.

[0052] The implementation methods of the present invention are described in detail above, but the present invention is not limited to the described embodiments. Those skilled in the art may make various equivalent modifications or substitutions without violating the spirit of the present invention, and these equivalents or substitutions are all included in the scope defined by the claims of the present invention.

Claims

1. A silicon powder filter backflush system, characterized in that: It comprises a cylinder (1), a head (2), a back-blowing air inlet pipe (3), a back-blowing nozzle group (4), a support member (5), a tube sheet (6) and a filter element group (7); The end cap (2) is mounted above the cylinder (1), the back-blowing air inlet pipe (3) is fixedly mounted on the cylinder (1), the back-blowing air inlet pipe (3) passes through the cylinder (1) horizontally and extends downward inside the cylinder (1), and is connected to the back-blowing nozzle group (4) at its end, the end of the back-blowing nozzle group (4) is fixedly mounted on a tube sheet (6) below it via a support member (5), a filter element group (7) is mounted on the tube sheet (6), and the filter element hole at the top end of the filter element group (7) faces the nozzle opening at the bottom end of the back-blowing nozzle group (4).

2. The silicon powder filter backflush system according to claim 1, characterized in that: The inner wall of the cylinder (1) is provided with a tube sheet support ring (8), and the tube sheet (6) is mounted on the tube sheet support ring (8).

3. The silicon powder filter backflush system according to claim 2, characterized in that: The back-blowing air intake pipe (3) comprises an inner air intake pipe (9), an outer air intake pipe (10) and a forged flange (11). The forged flange (11) is mounted on the side wall of the barrel (1). The inner end of the forged flange (11) is connected to the air intake end flange of the inner air intake pipe (9) and the outer end is connected to the air outlet end of the outer air intake pipe (10).

4. The silicon powder filter backflush system according to claim 3, characterized in that: The forged flange (11) is welded to the side wall of the cylinder (1).

5. The silicon powder filter backflush system according to claim 1, characterized in that: The support member (5) is L-shaped, one end plate of which is welded to the back-blowing nozzle group (4), and the other end plate is fixed to the tube plate (6) by bolts.

6. The silicon powder filter backflush system according to claim 5, characterized in that: The support member (5) is symmetrically arranged on the back-blowing nozzle group (4).

7. The silicon powder filter backflush system according to claim 1, characterized in that: A gas outlet (12) is provided at the top of the sealing head (2).

8. The silicon powder filter backflush system according to claim 1, characterized in that: The filter element group (7) comprises a plurality of filter elements vertically arranged in the cylinder (1), and the top ends of the plurality of filter elements are all mounted on the tube plate (6).

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