Electrostatic chuck assembly disassembly device

Abstract

The utility model provides an electrostatic chuck assembly disassembly device, which includes a first workpiece and a second workpiece, the first workpiece is used for disassembling a base in the electrostatic chuck assembly, and the second workpiece is used for disassembling a ceramic insulating disk in the electrostatic chuck assembly, the first workpiece supports the ceramic insulating disk through a first positioning member, pushes the first bottom plate upward, and the first bottom plate drives the base to move upward, thereby realizing separation of the base from the ceramic insulating disk, the second workpiece supports the electrostatic chuck through a second positioning member, pushes the second bottom plate upward, and the second bottom plate drives the ceramic insulating disk to move upward, thereby realizing separation of the ceramic insulating disk from the electrostatic chuck; by respectively arranging a first protective cover and a second protective cover on the first positioning member and a second positioning member, and respectively arranging a first protective pad and a second protective pad on the first bottom plate and the second bottom plate, the damage of the ceramic insulating disk or the dielectric layer of the electrostatic chuck due to collision during the disassembly process is effectively avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductors, and in particular relates to a disassembly device for an electrostatic chuck assembly. Background Art

[0002] In the semiconductor production process, an electrostatic chuck (ESC) is used to adsorb and fix the wafer so that the wafer will not move or misalign during the process. In the process chamber, the electrostatic chuck is installed at the bottom of the process chamber through an electrostatic chuck assembly. The electrostatic chuck assembly includes a base and a ceramic insulating disk. When assembled, bolts pass through the base, the ceramic insulating disk and the electrostatic chuck in sequence so that the electrostatic chuck assembly is tightly connected to the electrostatic chuck, wherein a sealing ring is respectively provided between the base and the ceramic insulating disk, and between the ceramic insulating disk and the electrostatic chuck. When the electrostatic chuck assembly is regularly maintained, the electrostatic chuck assembly needs to be removed from the electrostatic chuck for maintenance. The electrostatic chuck assembly is in the process chamber, and due to being in a high ambient temperature for a long time, the sealing ring adheres, which causes the electrostatic chuck assembly to be difficult to disengage during the disassembly process. At present, there is no relevant disassembly tool in the process of separating the electrostatic chuck assembly from the electrostatic chuck, which makes it very inconvenient for workers to operate, and often causes damage to the dielectric layer of the electrostatic chuck or the ceramic insulating disk. Utility Model Content

[0003] Based on the technical problems existing in the prior art, the utility model provides an electrostatic chuck assembly disassembly device to solve the problem that the electrostatic chuck assembly is difficult to disassemble and easy to be damaged.

[0004] In order to achieve the above-mentioned purpose, the utility model provides an electrostatic chuck assembly disassembly device, including a first workpiece and a second workpiece, the first workpiece is used for disassembling the base in the electrostatic chuck assembly, and the second workpiece is used for disassembling the ceramic insulating disk in the electrostatic chuck assembly; the first workpiece includes a first support, a first upper plate and a first bottom plate, the first bottom plate and the first upper plate are spaced apart at both ends of the first support, the first upper plate is movably connected with a first positioning member, the first positioning member is used to support the ceramic insulating disk, the first bottom plate is used to abut against the top surface of the base, the first positioning member is wrapped with a first protective cover, and a first protective pad is provided on the side where the first bottom plate abuts against the base; the second workpiece includes a second support, a second upper plate and a second bottom plate, the second bottom plate and the second upper plate are spaced apart at both ends of the second support, the second upper plate is movably connected with a second positioning member, the second positioning member is used to support the electrostatic chuck, the second bottom plate is used to abut against the top surface of the ceramic insulating disk, the second positioning member is wrapped with a second protective cover, and a second protective pad is provided on the side where the second bottom plate abuts against the ceramic insulating disk.

[0005] Optionally, the first positioning member and the second positioning member are both top screws.

[0006] Optionally, a first top screw hole is provided on the first upper plate, and a first positioning member is connected in the first top screw hole; a second top screw hole is provided on the second upper plate, and a second positioning member is connected in the second top screw hole.

[0007] Optionally, the first upper plate is spaced apart from the bottom surface of the base, and the second upper plate is spaced apart from the bottom surface of the ceramic insulating disk.

[0008] Optionally, the first support is spaced apart from the outer side wall of the base; and the second support is spaced apart from the outer side wall of the ceramic insulating disk.

[0009] Optionally, a side of the second protection pad facing the electrostatic chuck is arc-shaped.

[0010] Optionally, the first protective cover, the first protective pad, the second protective cover and the second protective pad are all made of plastic.

[0011] Optionally, the first protection pad is connected to the first bottom plate via bolts, and the second protection pad is connected to the second bottom plate via bolts.

[0012] Optionally, the first support is detachably connected to the first upper plate and the first bottom plate respectively.

[0013] Optionally, the second support is detachably connected to the second upper plate and the second bottom plate respectively.

[0014] Compared with the prior art, it can be seen from the technical solution provided by the above-mentioned embodiments of the utility model that the embodiments of the utility model provide an electrostatic chuck assembly disassembly device, wherein the first positioning member supports the ceramic insulating disk and pushes the first bottom plate upward, and the first bottom plate drives the base to move upward, thereby realizing the separation of the base and the ceramic insulating disk, and the second positioning member supports the electrostatic chuck and pushes the second bottom plate upward, and the second bottom plate drives the ceramic insulating disk to move upward, thereby realizing the separation of the ceramic insulating disk and the electrostatic chuck; by respectively providing a first protective cover and a second protective cover on the first positioning member and the second positioning member, and respectively providing a first protective pad and a second protective pad on the first bottom plate and the second bottom plate, thereby effectively avoiding damage to the ceramic insulating disk or the dielectric layer of the electrostatic chuck due to collision during the disassembly process.

[0015] Additional aspects and advantages of the present invention will be partially given in the following description, which will become apparent from the following description or be understood through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic structural diagram of a first workpiece disassembly base in an electrostatic chuck assembly disassembly device provided by an embodiment of the utility model;

[0017] Figure 2A schematic cross-sectional view of a first workpiece disassembly base in an electrostatic chuck assembly disassembly device provided in an embodiment of the utility model.

[0018] Figure 3 A schematic diagram of the structure of a first workpiece provided in an embodiment of the utility model;

[0019] Figure 4 A schematic diagram of the structure of a second workpiece disassembling a ceramic insulating disk in an electrostatic chuck assembly disassembly device provided by an embodiment of the utility model;

[0020] Figure 5 A schematic structural diagram of a second workpiece provided in an embodiment of the utility model.

[0021] Description of reference numerals:

[0022] 1. Base; 2. Ceramic insulating disk; 3. Electrostatic chuck; 4. First mounting hole; 5. Second mounting hole; 6. Third mounting hole; 7. First sealing ring; 8. Second sealing ring;

[0023] 10. first workpiece; 101. first support; 102. first upper plate; 103. first bottom plate; 104. first positioning member; 105. first protective cover; 106. first protective pad;

[0024] 20. Second workpiece; 201. Second support; 202. Second upper plate; 203. Second bottom plate; 204. Second positioning member; 205. Second protective cover; 206. Second protective pad. DETAILED DESCRIPTION

[0025] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be interpreted as limiting the present invention.

[0026] Those skilled in the art will appreciate that, unless expressly stated, the singular forms "one", "said", and "the" used herein may also include plural forms. It should be further understood that the term "comprising" used in the specification of the present utility model refers to the presence of the features, integers, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or groups thereof. It should be understood that when we refer to an element as being "connected" or "coupled" to another element, it may be directly connected or coupled to the other element, or there may be an intermediate element. In addition, the "connection" or "coupling" used here may include wireless connection or coupling. The term "and / or" used here includes any unit and all combinations of one or more associated listed items.

[0027] Those skilled in the art will appreciate that, unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meaning as the general understanding of ordinary technicians in the field to which the utility model belongs. It should also be understood that those terms such as those defined in general dictionaries should be understood to have the same meaning as the meaning in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless defined as herein.

[0028] To facilitate the understanding of the embodiments of the present utility model, several specific embodiments will be further explained below with reference to the accompanying drawings, and each embodiment does not constitute a limitation on the embodiments of the present utility model.

[0029] See also Figure 1 and Figure 2 As shown, the electrostatic chuck assembly includes a base 1 and a ceramic insulating disk 2. The base 1, the ceramic insulating disk 2 and the electrostatic chuck 3 are coaxially arranged in sequence from top to bottom, and the outer diameter of the base 1 is larger than the outer diameter of the ceramic insulating disk 2, and the outer diameter of the ceramic insulating disk 2 is larger than the outer diameter of the electrostatic chuck 3. Among them, the bottom surface of the base 1 is a side located above the ceramic insulating disk 2 and away from the ceramic insulating disk 2, and the top surface of the base 1 is a side close to the ceramic insulating disk 2; the bottom surface of the ceramic insulating disk 2 is a side close to the base 1, and the top surface of the ceramic insulating disk 2 is a side away from the base 1; the bottom surface of the electrostatic chuck 3 is a side close to the ceramic insulating disk 2, and the top surface of the electrostatic chuck 3 is a side away from the ceramic insulating disk 2, and the top surface of the electrostatic chuck 3 is used to carry a wafer. The bottom surface of the base 1 is provided with a plurality of first mounting holes 4 along the circumferential direction, such as Figure 1 As shown, the number of the first mounting holes 4 is six, and the six first mounting holes 4 are spaced apart from each other and evenly distributed along the circumference of the base 1. Figure 2As shown, the bottom surface of the ceramic insulating disk 2 is provided with a second mounting hole 5 matched with the first mounting hole 4, and the bottom surface of the electrostatic chuck 3 is provided with a third mounting hole 6 matched with the second mounting hole 5, and the number of the first mounting hole 4, the second mounting hole 5 and the third mounting hole 6 are the same. When the electrostatic chuck assembly is assembled with the electrostatic chuck 3, the first mounting hole 4, the second mounting hole 5 and the third mounting hole 6 are aligned, and the bolts pass through the first mounting hole 4, the second mounting hole 5 and the third mounting hole 6 in sequence, so that the base 1, the ceramic insulating disk 2 and the electrostatic chuck 3 are fastened and connected, wherein a first sealing ring 7 is provided between the base 1 and the ceramic insulating disk 2, and a second sealing ring 8 is provided between the ceramic insulating disk 2 and the electrostatic chuck 3. When the electrostatic chuck assembly and the electrostatic chuck 3 are disassembled, the electrostatic chuck assembly and the electrostatic chuck 3 are taken out of the process chamber and inverted, that is, the electrostatic chuck assembly is placed on top and the electrostatic chuck 3 is placed on the bottom, and the bolts used for fastening are taken out from the first mounting hole 4, the second mounting hole 5 and the third mounting hole 6. Since the electrostatic chuck assembly is in a relatively high ambient temperature in the process chamber for a long time, the first sealing ring 7 and the second sealing ring 8 are respectively adhered, which makes it difficult to disengage the electrostatic chuck assembly during disassembly.

[0030] See also Figure 1 and Figure 4 As shown, the embodiment of the utility model provides an electrostatic chuck assembly disassembly device, which includes a first workpiece 10 and a second workpiece 20. The first workpiece 10 is used to disassemble the base 1 in the electrostatic chuck assembly, and the second workpiece 20 is used to disassemble the ceramic insulating disk 2 in the electrostatic chuck assembly. Figure 3 As shown, the first workpiece 10 includes a first support 101, a first upper plate 102 and a first bottom plate 103. The first bottom plate 103 and the first upper plate 102 are spaced apart at both ends of the first support 101. The first upper plate 102 is movably connected with a first positioning member 104, and the first positioning member 104 is used to support the ceramic insulating disk 2. The first bottom plate 103 is used to abut against the top surface of the base 1. The first positioning member 104 is wrapped with a first protective cover 105. The side of the first bottom plate 103 abutting against the base 1 is provided with a first protective pad 106. Figure 5As shown, the second workpiece 20 includes a second support 201, a second upper plate 202 and a second bottom plate 203. The second bottom plate 203 and the second upper plate 202 are spaced apart at both ends of the second support 201. The second upper plate 202 is movably connected with a second positioning member 204. The second positioning member 204 is used to support the electrostatic chuck 3. The second bottom plate 203 is used to abut against the top surface of the ceramic insulating disk 2. The second positioning member 204 is wrapped with a second protective cover 205. A second protective pad 206 is provided on the side of the second bottom plate 203 abutting against the ceramic insulating disk 2. When the electrostatic chuck assembly and the electrostatic chuck 3 are disassembled, the first bottom plate 103 is placed under the top surface of the base 1 so that the first bottom plate 103 is in contact with the base 1, and the first positioning member 104 is inserted into one of the first mounting holes 4 and adjusted so that the first positioning member 104 is against the ceramic insulating disk 2. When the first bottom plate 103 is pushed upward, the first bottom plate 103 drives the base 1 to move upward, and at the same time, the first positioning member 104 can prevent the ceramic insulating disk 2 from moving upward, so that the base 1 is separated from the ceramic insulating disk 2. Since the first sealing ring 7 is arranged in an annular shape, the first positioning member 104 is inserted into each first mounting hole 4 in turn, and the first bottom plate 103 is pushed upward so that the base 1 is fully separated from the ceramic insulating disk 2, and then the base 1 is removed to complete the disassembly of the base 1. Unloading; place the second bottom plate 203 under the top surface of the ceramic insulating disk 2, so that the second bottom plate 203 is in contact with the ceramic insulating disk 2, insert the second positioning member 204 into one of the second mounting holes 5 and adjust the second positioning member 204 so that the second positioning member 204 supports the electrostatic chuck 3, when the second bottom plate 203 is pushed upward, the second bottom plate 203 drives the ceramic insulating disk 2 to move upward, and at the same time, the second positioning member 204 can prevent the electrostatic chuck 3 from moving upward, thereby separating the ceramic insulating disk 2 from the electrostatic chuck 3, since the first sealing ring 8 is arranged in an annular shape, insert the second positioning member 204 into each second mounting hole 5 in turn, and push the second bottom plate 203 upward, so that the ceramic insulating disk 2 is fully separated from the electrostatic chuck 3, remove the ceramic insulating disk 2, and complete the disassembly of the ceramic insulating disk 2.

[0031] By applying the above technical scheme of the embodiment of the utility model, the first positioning member 104 is used to support the ceramic insulating disk 2, and the first bottom plate 103 is pushed upward. The first bottom plate 103 drives the base 1 to move upward, thereby realizing the separation of the base 1 and the ceramic insulating disk 2. The second positioning member 204 is used to support the electrostatic chuck 3, and the second bottom plate 203 is pushed upward. The second bottom plate 203 drives the ceramic insulating disk 2 to move upward, thereby realizing the separation of the ceramic insulating disk 2 and the electrostatic chuck 3. By respectively providing the first protective cover 105 and the second protective cover 205 on the first positioning member 104 and the second positioning member 204, and respectively providing the first protective pad 106 and the second protective pad 206 on the first bottom plate 103 and the second bottom plate 203, the damage of the dielectric layer of the ceramic insulating disk 2 or the electrostatic chuck 3 due to collision during the disassembly process is effectively avoided.

[0032] In some embodiments, the first support 101 and the second support 201 may adopt a lifting structure, and by adjusting the height of the first support 101 and the second support 201, electrostatic chuck assemblies of different sizes may be suitable.

[0033] See also Figure 3 and Figure 5 As shown, in some embodiments, the first positioning member 104 and the second positioning member 204 are both top screws. The top screw is a stud structure, and its outer wall has an external thread. For example, the top screw is a screw, which is cheap and easy to purchase, and has low cost. During disassembly, the first positioning member 104 forms a threaded fit with the first upper plate 102 and supports the ceramic insulating disk 2. By screwing the first positioning member 104, the supporting force can be increased to fix the ceramic insulating disk 2. The second positioning member 204 forms a threaded fit with the second upper plate 202 and supports the electrostatic chuck 3. By screwing the second positioning member 204, the supporting force can be increased to fix the electrostatic chuck 3.

[0034] See also Figure 3 and Figure 5 As shown, in some embodiments, a first top screw hole is provided on the first upper plate 102, and a first positioning member 104 is connected in the first top screw hole; a second top screw hole is provided on the second upper plate 202, and a second positioning member 204 is connected in the second top screw hole. Both the first top screw hole and the second top screw hole have internal threads, and the first positioning member 104 is threadedly connected to the first top screw hole, and the first positioning member 104 can move along the axis of the first top screw hole to make the first positioning member 104 close to or away from the ceramic insulating disk 2; the second positioning member 204 is threadedly connected to the second top screw hole, and the second positioning member 204 can move along the axis of the second top screw hole to make the second positioning member 204 close to or away from the electrostatic chuck 3.

[0035] In some embodiments, handles are respectively provided on the tops of the first positioning member 104 and the second positioning member 204 to facilitate screwing of the first positioning member 104 and the second positioning member 204 .

[0036] See also Figure 1 , Figure 2 and Figure 4 As shown, in some embodiments, the first upper plate 102 is spaced apart from the bottom surface of the base 1, and the second upper plate 202 is spaced apart from the bottom surface of the ceramic insulating disk 2. Through the above arrangement, the first upper plate 102 does not contact the base 1, and the second upper plate 202 does not contact the ceramic insulating disk 2, thereby preventing the bottom surface of the base 1 and the bottom surface of the ceramic insulating disk 2 from being damaged by collision.

[0037] See also Figure 1 , Figure 2 and Figure 4As shown, in some embodiments, the first support 101 is spaced apart from the outer wall of the base 1; the second support 201 is spaced apart from the outer wall of the ceramic insulating disk 2. The above arrangement can prevent the first support 101 from colliding with the outer wall of the base 1 and the second support 201 from colliding with the outer wall of the ceramic insulating disk 2, thereby avoiding damage to the base 1 and the ceramic insulating disk 2.

[0038] See also Figure 5 As shown, in some embodiments, the side of the second protection pad 206 facing the electrostatic chuck 3 is in an arc shape. The side shape of the second protection pad 206 is adapted to the side wall shape of the electrostatic chuck 3, and the side wall of the electrostatic chuck 3 is usually in an arc shape. Therefore, the side of the second protection pad 206 facing the electrostatic chuck 3 is in an arc shape, which can be adapted to the side wall of the electrostatic chuck 3 to prevent the side wall of the electrostatic chuck 3 from being bumped.

[0039] In some embodiments, the first protective cover 105, the first protective pad 106, the second protective cover 205 and the second protective pad 206 are all made of plastic material, and softer materials such as PTFE can be selected to avoid bumping the ceramic insulating disk 2 and the electrostatic chuck 3. In addition, the first protective cover 105, the first protective pad 106, the second protective cover 205 and the second protective pad 206 can also be made of rubber or silicone material.

[0040] See also Figure 3 and Figure 5 As shown, in some embodiments, the first protection pad 106 is connected to the first bottom plate 103 by bolts, and the second protection pad 206 is connected to the second bottom plate 203 by bolts. Through the above arrangement, the first protection pad 106 is detachably connected to the first bottom plate 103, and the second protection pad 206 is detachably connected to the second bottom plate 203, so that the first protection pad 106 and the second protection pad 206 are easy to disassemble and replace.

[0041] See also Figure 3 As shown, in some embodiments, the first support 101 is detachably connected to the first upper plate 102 and the first bottom plate 103. Through the above arrangement, when there are damaged parts in the first support 101, the first upper plate 102 and the first bottom plate 103, they can be easily replaced; in addition, different sizes can also be replaced to adapt to bases 1 of different sizes.

[0042] See also Figure 5 As shown, in some embodiments, the second support 201 is detachably connected to the second upper plate 202 and the second bottom plate 203. Through the above arrangement, when there are damaged parts in the second support 201, the second upper plate 202 and the second bottom plate 203, they can be easily replaced; in addition, different sizes can also be replaced to adapt to ceramic insulating disks 2 of different sizes.

[0043] In summary, the embodiment of the utility model provides an electrostatic chuck assembly disassembly device, which has the following beneficial effects:

[0044] (1) The first positioning member 104 is used to support the ceramic insulating disk 2, and the first bottom plate 103 is pushed upward. The first bottom plate 103 drives the base 1 to move upward, thereby realizing the separation of the base 1 and the ceramic insulating disk 2. The second positioning member 204 is used to support the electrostatic chuck 3, and the second bottom plate 203 is pushed upward. The second bottom plate 203 drives the ceramic insulating disk 2 to move upward, thereby realizing the separation of the ceramic insulating disk 2 and the electrostatic chuck 3;

[0045] (2) By providing the first protective cover 105 and the second protective cover 205 on the first positioning member 104 and the second positioning member 204, respectively, and providing the first protective pad 106 and the second protective pad 206 on the first bottom plate 103 and the second bottom plate 203, respectively, damage to the dielectric layer of the ceramic insulating disk 2 or the electrostatic chuck 3 due to collision during the disassembly process is effectively avoided;

[0046] (3) The utility model device is not only applicable to the disassembly of a single type of electrostatic chuck, but also applicable to the disassembly of similar components or components under similar working conditions in the semiconductor industry.

[0047] Those skilled in the art can understand that the accompanying drawings are only schematic diagrams of an embodiment, and the modules or processes in the accompanying drawings are not necessarily necessary for implementing the present utility model.

[0048] Those skilled in the art can understand that the components in the device in the embodiment can be distributed in the device in the embodiment according to the description of the embodiment, or can be changed accordingly and located in one or more devices different from the embodiment. The components in the above embodiment can be combined into one component, or can be further divided into multiple sub-components.

[0049] The above is only a preferred specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the utility model should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. An electrostatic chuck assembly disassembly device, characterized in that: It comprises a first workpiece and a second workpiece, wherein the first workpiece is used for disassembling a base in the electrostatic chuck assembly, and the second workpiece is used for disassembling a ceramic insulating disk in the electrostatic chuck assembly; The first workpiece comprises a first support, a first upper plate and a first bottom plate, the first bottom plate and the first upper plate are spaced apart at two ends of the first support, the first upper plate is movably connected with a first positioning member, the first positioning member is used to support the ceramic insulating disk, the first bottom plate is used to abut against the top surface of the base, the first positioning member is wrapped with a first protective cover, and a first protective pad is provided on the side of the first bottom plate abutting against the base; The second workpiece includes a second support, a second upper plate and a second bottom plate. The second bottom plate and the second upper plate are spaced apart at both ends of the second support. The second upper plate is movably connected with a second positioning member. The second positioning member is used to support the electrostatic chuck. The second bottom plate is used to abut against the top surface of the ceramic insulating disk. The second positioning member is wrapped with a second protective cover. A second protective pad is provided on the side of the second bottom plate abutting against the ceramic insulating disk.

2. The electrostatic chuck assembly disassembly device according to claim 1, characterized in that: The first positioning member and the second positioning member are both top screws.

3. The electrostatic chuck assembly disassembly device according to claim 2, characterized in that: The first upper plate is provided with a first top screw hole, in which a first positioning member is connected; the second upper plate is provided with a second top screw hole, in which a second positioning member is connected.

4. The electrostatic chuck assembly disassembly device according to claim 1, characterized in that: The first upper plate is spaced apart from the bottom surface of the base, and the second upper plate is spaced apart from the bottom surface of the ceramic insulating disk.

5. The electrostatic chuck assembly disassembly device according to claim 1, characterized in that: The first support is spaced apart from the outer side wall of the base; the second support is spaced apart from the outer side wall of the ceramic insulating disk.

6. The electrostatic chuck assembly disassembly device according to claim 1, characterized in that: A side of the second protection pad facing the electrostatic chuck is in an arc shape.

7. The electrostatic chuck assembly disassembly device according to claim 1, characterized in that: The first protective cover, the first protective pad, the second protective cover and the second protective pad are all made of plastic.

8. The electrostatic chuck assembly disassembly device according to claim 1, characterized in that: The first protection pad is connected to the first bottom plate via bolts, and the second protection pad is connected to the second bottom plate via bolts.

9. The electrostatic chuck assembly disassembly device according to claim 1, characterized in that: The first support is detachably connected to the first upper plate and the first bottom plate respectively.

10. The electrostatic chuck assembly disassembly device according to claim 1, characterized in that: The second support is detachably connected to the second upper plate and the second bottom plate respectively.

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