Wafer loading device

Abstract

The utility model discloses a wafer loading device, including a wafer loading rack and a wafer placing rack, an annular conveying mechanism is arranged above the wafer loading rack, a conveyor belt is arranged inside the annular conveying mechanism, the wafer placing rack is arranged on one side of the annular conveying mechanism, the wafer placing rack is arranged inside a suspension frame, hollow grooves are arranged on both sides of the suspension frame, the bottom of the suspension frame is connected to a U-shaped stable seat, the suspension frame is arranged inside a support frame, and an electric cylinder is arranged in the middle position of the top of the support frame. The height of the wafer placing rack in the utility model is adjusted by the electric cylinder, and the distance pushed by the electric cylinder is precisely controlled by an electromagnetic valve, so that the wafer placing rack is lowered or raised at a uniform speed downward or upward, so that the internal wafers are lifted and conveyed by the wafer loading tray in turn, and the loading principle is simple, which not only frees both hands, but also speeds up the wafer loading speed and improves work efficiency.

Description

Technical Field

[0001] The utility model relates to the field related to wafer processing, in particular to a wafer loading device. Background Art

[0002] A wafer refers to the silicon chip used in the production of silicon semiconductor integrated circuits. Due to its round shape, it is called a wafer. Various circuit component structures can be processed on the silicon wafer to become IC products with specific electrical functions. The original material of the wafer is silicon, and there is an inexhaustible supply of silicon dioxide on the surface of the earth's crust. The silicon dioxide ore is refined in an electric arc furnace, chlorinated with hydrochloric acid, and distilled to make high-purity polysilicon.

[0003] There are still some deficiencies in the use of wafer loading devices in the prior art. The traditional loading method usually adopts manual loading, which requires manual placement of wafers one by one. The loading speed is slow, wastes manpower, and is inconvenient to operate. Utility Model Content

[0004] The purpose of the utility model is to provide a wafer loading device to solve the problem that the traditional loading method proposed in the above background technology usually adopts manual loading, which requires manual placement of wafers one by one, has a slow loading speed, wastes manpower, and is inconvenient to operate.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a wafer loading device, comprising a wafer loading rack and a wafer placing rack, a ring-shaped conveying mechanism is provided above the wafer loading rack, a conveyor belt is provided inside the ring-shaped conveying mechanism, the wafer placing rack is arranged on one side of the ring-shaped conveying mechanism, the wafer placing rack is arranged inside a suspension frame, hollow grooves are provided on both sides of the suspension frame, the bottom of the suspension frame is connected to a U-shaped stable seat, the suspension frame is arranged inside a support frame, an electric cylinder is provided at the middle position of the top of the support frame, and a base plate is provided at the bottom of the wafer loading rack.

[0006] In a further embodiment, wafer positioning claws are provided on both sides of the inner wall of the wafer placement rack, and the wafer positioning claws are fixedly connected to the wafer placement rack through a reinforcement plate, and guide plates are provided at the bottom ends of both sides of the interior of the wafer placement rack, and the bottom surface position of the guide plate is set to an inclined structure.

[0007] In a further embodiment, a piston is provided inside the electric cylinder, the lower end of the piston is connected to the suspension frame via a fixing sleeve, limit blocks are provided on both sides of the connection position between the suspension frame and the U-shaped stable seat, and the suspension frame and the U-shaped stable seat are fixedly connected via fixing bolts.

[0008] In a further embodiment, the wafer placement rack is slidably connected to the suspension frame via an assembly slide groove and an assembly slider, and the outer shape of the wafer placement rack is set to an inverted U-shaped structure.

[0009] In a further embodiment, both sides of the U-shaped stabilizing seat are slidably connected to the support frame via positioning slide grooves and positioning slide bars, and the positioning slide bars are connected to the support frame via welding.

[0010] In a further embodiment, a wafer loading tray is provided on the surface of the conveyor belt, and the wafer loading tray is fixedly connected to the conveyor belt by screws.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] 1. The height of the wafer placement rack in the utility model is adjusted by an electric cylinder, and the distance pushed by the electric cylinder is precisely controlled by an electromagnetic valve, so that the wafer placement rack is lowered or raised at a uniform speed downward or upward, so that the wafers inside are lifted and transported by the wafer loading tray in turn. The loading principle is simple, which not only frees both hands, but also speeds up the wafer loading speed and improves work efficiency. Wafer positioning claws are provided on both sides of the interior of the wafer placement rack. The wafers stored inside can be spaced by the wafer positioning claws to avoid close contact and wear of two adjacent wafers, thereby better protecting the wafers.

[0013] 2. In the utility model, the conveying mechanism is configured as a ring structure, which can be rotated 360 degrees to circulate the wafers, reduce the occupied area, and make it easier to load the wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic structural diagram of a wafer loading device of the utility model;

[0015] Figure 2 It is a schematic diagram of the lowering structure of the wafer placement rack of the utility model;

[0016] Figure 3 It is a structural schematic diagram of a wafer placement rack of the utility model;

[0017] Figure 4 It is a structural schematic diagram of the suspension frame of the utility model;

[0018] Figure 5 This is a top view of a wafer loading device of the utility model;

[0019] Figure 6 It is a side view of the suspension frame of the utility model.

[0020] In the figure: 1. Electric cylinder; 2. Support frame; 3. Suspension frame; 4. Wafer placement rack; 5. U-shaped stabilizing seat; 6. Ring conveying mechanism; 7. Wafer loading rack; 8. Bottom plate; 9. Positioning slide; 10. Piston; 11. Fixed sleeve; 12. Wafer loading tray; 13. Wafer positioning claw; 14. Reinforcement sheet; 15. Limit block; 16. Guide plate; 17. Assembly slider; 18. Feed belt; 19. Assembly slide; 20. Hollow groove; 21. Positioning slide; 22. Fixing bolt. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0022] See also Figure 1-6 The utility model provides an embodiment: a wafer loading device, including a wafer loading rack body 7 and a wafer placing rack 4, a circular conveying mechanism 6 is arranged above the wafer loading rack body 7, a conveying belt 18 is arranged inside the circular conveying mechanism 6, the wafer placing rack 4 is arranged on one side of the circular conveying mechanism 6, the wafer placing rack 4 is arranged inside the suspension frame 3, hollow grooves 20 are arranged on both sides of the suspension frame 3, the bottom of the suspension frame 3 is connected to the U-shaped stable seat 5, the suspension frame 3 is arranged inside the support frame 2, and the middle position of the top of the support frame 2 An electric cylinder 1 is provided, and a base plate 8 is provided at the bottom of the wafer loading rack 7; the annular conveying mechanism 6 is used to rotate and convey the wafer in an annular path, the wafer placement rack 4 is used to stack multiple wafers together for easy loading, the hanging frame 3 is used to install and fix the wafer placement rack 4, the U-shaped stable seat 5 is used to seal the bottom of the hanging frame 3, so that the hanging frame 3 and the annular conveying mechanism 6 are installed as one, the support frame 2 is used to install and fix the hanging frame 3, and the electric cylinder 1 is used to adjust the lifting of the hanging frame 3.

[0023] Wafer positioning claws 13 are provided on both sides of the inner wall of the wafer placement rack 4, and the wafer positioning claws 13 are fixedly connected to the wafer placement rack 4 through reinforcing plates 14. Guide plates 16 are provided at the bottom ends of both sides of the inside of the wafer placement rack 4, and the bottom surface position of the guide plate 16 is set as an inclined structure, and the wafer positioning claws 13 are used to space the wafers placed inside.

[0024] A piston 10 is provided inside the electric cylinder 1, and the lower end of the piston 10 is connected to the suspension frame 3 through a fixing sleeve 11. Limit blocks 15 are provided on both sides of the connection position between the suspension frame 3 and the U-shaped stable seat 5, and the suspension frame 3 and the U-shaped stable seat 5 are fixedly connected by fixing bolts 22. The limit blocks 15 are used to limit the installation position of the suspension frame 3, and the fixing bolts 22 are used to install and fix the suspension frame 3 and the U-shaped stable seat 5.

[0025] The wafer placement rack 4 and the suspension frame 3 are slidably connected via the assembly slide groove 19 and the assembly slider 17, and the outer shape of the wafer placement rack 4 is set to an inverted U-shaped structure, which is connected via the assembly slide groove 19 and the assembly slider 17 to install or disassemble the wafer placement rack 4 and the suspension frame 3 in a sliding manner.

[0026] The two sides of the U-shaped stable seat 5 are slidably connected to the support frame 2 through the positioning slide grooves 21 and the positioning slide bar 9, and the positioning slide bar 9 is connected to the support frame 2 by welding. The connection between the positioning slide grooves 21 and the positioning slide bar 9 is used to position the U-shaped stable seat 5 when it moves up and down.

[0027] A wafer loading tray 12 is provided on the surface of the conveyor belt 18 , and the wafer loading tray 12 is fixedly connected to the conveyor belt 18 by screws. The wafer loading tray 12 is used to lift and load the wafers stored in the wafer placement rack 4 .

[0028] Working principle: When in use, the wafer loading rack 7 is placed on one side of the wafer processing equipment, and the required number of wafers are stacked one by one in the wafer placement rack 4, and the wafer positioning claws 13 are used to space them. According to the loading speed requirement, the solenoid valve is set, and the distance of the electric cylinder 1 is positioned by the solenoid valve. The piston 10 is driven downward by the electric cylinder 1 to move the suspension frame 3 downward to the required distance, and the conveyor belt 18 is rotated. When the wafer loading tray 12 is embedded in the interior of the wafer placement rack 4, the wafer inside is held and taken out by the wafer loading tray 12, and the conveyor belt 18 is rotated to transport the wafer to the other end to the wafer processing equipment on one side, and the surface of the wafer can be processed by the wafer processing equipment.

[0029] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A wafer loading device, comprising a wafer loading rack (7) and a wafer placing rack (4), characterized in that: A circular conveying mechanism (6) is arranged above the wafer loading rack (7), a conveyor belt (18) is arranged inside the circular conveying mechanism (6), the wafer placing rack (4) is arranged on one side of the circular conveying mechanism (6), the wafer placing rack (4) is arranged inside a suspension frame (3), hollow grooves (20) are arranged on both sides of the suspension frame (3), the bottom of the suspension frame (3) is connected to a U-shaped stabilizing seat (5), the suspension frame (3) is arranged inside a support frame (2), an electric cylinder (1) is arranged in the middle position of the top of the support frame (2), and a base plate (8) is arranged at the bottom of the wafer loading rack (7).

2. A wafer loading device according to claim 1, characterized in that: Wafer positioning claws (13) are provided on both sides of the inner wall of the wafer placement rack (4), and the wafer positioning claws (13) are fixedly connected to the wafer placement rack (4) via a reinforcing sheet (14); guide plates (16) are provided at the bottom ends of both sides of the interior of the wafer placement rack (4), and the bottom surface position of the guide plate (16) is set as an inclined structure.

3. A wafer loading device according to claim 1, characterized in that: A piston (10) is provided inside the electric cylinder (1), and the lower end of the piston (10) is connected to the suspension frame (3) via a fixing sleeve (11), and limit blocks (15) are provided on both sides of the connection position between the suspension frame (3) and the U-shaped stabilizing seat (5), and the suspension frame (3) and the U-shaped stabilizing seat (5) are fixedly connected via fixing bolts (22).

4. The wafer loading device according to claim 1, characterized in that: The wafer placement rack (4) and the suspension frame (3) are slidably connected via an assembly slide groove (19) and an assembly slider (17), and the outer shape of the wafer placement rack (4) is set to an inverted U-shaped structure.

5. The wafer loading device according to claim 1, characterized in that: The two sides of the U-shaped stable seat (5) are slidably connected to the support frame (2) through positioning slide grooves (21) and positioning slide bars (9), and the positioning slide bars (9) and the support frame (2) are connected by welding.

6. The wafer loading device according to claim 1, characterized in that: A wafer loading tray (12) is provided on the surface of the conveyor belt (18), and the wafer loading tray (12) is fixedly connected to the conveyor belt (18) by means of screws.

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