A swing mechanism of Marangoni dryer

Abstract

The utility model relates to the technical field of wafer processing, and discloses a Marangoni dryer swing mechanism, including: a lifting mechanism, used to drive a power mechanism to lift and lower in a vertical direction; a power mechanism, whose fixed end is connected to a movable end of the lifting mechanism, and whose movable end is connected to a swing arm mechanism, used to drive the swing arm mechanism to rotate in a vertical plane; a swing arm mechanism, including a swing arm connected to the power mechanism and a connecting arm connected to the swing arm; a wafer holder, connected to the connecting arm, and capable of accommodating wafers of at least two specifications. The above-mentioned Marangoni dryer swing mechanism can adjust the height of the swing arm mechanism through the lifting mechanism, thereby changing the distance between the wafer holder and the top heating mechanism, so that it can adapt to wafers of different specifications and be compatible with the drying processing requirements of wafers of different specifications, thereby improving the applicability of the swing arm Marangoni dryer.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, and more specifically to a swing mechanism of a Marangoni dryer. Background Art

[0002] Marangoni dryers can speed up wafer drying and improve production efficiency, so they are widely used in the field of wafer processing technology.

[0003] The swing-type Marangoni dryer mainly includes a driving motor, a horizontal slide rail, a swing arm mechanism and a wafer rack. The swing arm of the swing arm mechanism is provided with a guide groove, and the cam of the horizontal slide rail slides in the guide groove. Therefore, when the driving motor drives the horizontal slide rail to move left and right, the cam drives the swing arm to rotate around the bottom shaft, and the heating mechanism on the top sprays heated nitrogen to dry the wafer.

[0004] Since the height of the horizontal slide rail and the swing arm bearing seat is determined, the rotation trajectory of the above-mentioned swing Marangoni dryer is unique, and the height of the heating mechanism on the top is also not adjustable, so that the distance from the wafer holder to the nitrogen nozzle is a fixed curve, which is only applicable to the drying process of wafers of one specification.

[0005] In summary, how to achieve compatible drying processing for wafers of different specifications is a problem that needs to be solved urgently by those skilled in the art. Utility Model Content

[0006] In view of this, the purpose of the utility model is to provide a swing mechanism for a Marangoni dryer, which can adjust the height of the swing arm mechanism through a lifting mechanism and change the distance between the wafer holder and the top heating mechanism, so as to be compatible with the drying processing requirements of wafers of different specifications.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] A Marangoni dryer swing mechanism, comprising:

[0009] A lifting mechanism, used for driving the power mechanism to lift and lower in a vertical direction;

[0010] The power mechanism, whose fixed end is connected to the movable end of the lifting mechanism, and whose movable end is connected to the swing arm mechanism, is used to drive the swing arm mechanism to rotate in a vertical plane;

[0011] The swing arm mechanism comprises a swing arm connected to the power mechanism and a connecting arm connected to the swing arm;

[0012] The wafer bracket is connected to the connecting arm and can accommodate wafers of at least two specifications.

[0013] Preferably, the lifting mechanism includes a base, a lifting cylinder and a power platform for installing the power mechanism, the lifting cylinder is vertically installed on the base, and the piston rod of the lifting cylinder is connected to the power platform via a connecting screw so as to drive the power platform to drive the power mechanism to lift and lower in the vertical direction.

[0014] Preferably, the base is provided with a slide rail arranged along the vertical direction, and the side plate of the power platform is provided with a slider, and the slider is slidably arranged on the slide rail.

[0015] Preferably, the wafer holder comprises a holder base plate for connecting to the connecting arm, and an outer holder and an inner holder are detachably provided on opposite sides of the holder base plate, and the inner side surface of the outer holder and the inner side surface of the inner holder are both used to abut against the outer edge of the wafer, and the spacing between the outer holders on both sides is greater than the spacing between the inner holders on both sides, so that the outer holder and the inner holder can respectively position wafers of different specifications.

[0016] Preferably, a fixing seat is vertically provided between the outer brackets on both sides, and the inner bracket is clamped in the mounting grooves on both sides of the fixing seat.

[0017] Preferably, an intermediate support is vertically provided between the outer supports on both sides, and the intermediate support is provided at the midpoint of the outer supports.

[0018] Preferably, the power mechanism includes a swing motor, a driving pulley, a synchronous belt and a driven pulley, the swing motor is connected to the movable end of the lifting mechanism through a motor fixing plate, the driving pulley is sleeved on the output shaft of the swing motor, the driven pulley is sleeved on the swing arm shaft of the swing arm, and the synchronous belt is arranged between the driving pulley and the driven pulley.

[0019] Preferably, the motor fixing plate is provided with a tensioning assembly, and the tensioning assembly includes a tensioning wheel and an adjustment block. The tensioning wheel is installed on the adjustment block through a pin shaft, and the adjustment block is slidably connected to the motor mounting plate so that the tensioning wheel can be adjusted to move up and down in the vertical direction through the adjustment block to change the tightness of the synchronous belt.

[0020] The Marangoni dryer swing mechanism provided by the utility model can adjust the height of the swing arm mechanism through the lifting mechanism, thereby changing the distance between the wafer bracket and the top heating mechanism, so that it can adapt to wafers of different specifications and be compatible with the drying processing requirements of wafers of different specifications, thereby improving the applicability of the swing arm Marangoni dryer. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0022] Figure 1 A schematic diagram of the front view of the swing mechanism of the Marangoni dryer provided by the utility model;

[0023] Figure 2 for Figure 1 A side view schematic diagram of

[0024] Figure 3 It is a structural schematic diagram of the lifting mechanism;

[0025] Figure 4 It is a structural diagram of the power mechanism;

[0026] Figure 5 It is a structural schematic diagram of the swing arm mechanism;

[0027] Figure 6 Schematic diagram of the structure of the wafer holder.

[0028] Figure 1-Figure 6 middle:

[0029] 10-lifting mechanism; 101-base; 102-lifting cylinder; 103-slide rail; 104-slider; 105-side plate; 106-power platform; 107-connecting screws;

[0030] 20-power mechanism; 201-motor fixing plate; 202-swing motor; 203-driving pulley; 204-synchronous belt; 205-driven pulley; 206-tensioning assembly; 2061-tensioning wheel; 2062-pin shaft; 2063-adjusting block; 2064-top adjusting rod; 2065-blocking piece;

[0031] 30-swing arm mechanism; 301-bearing seat; 302-sleeve; 303-bearing; 304-bearing baffle; 305-locking nut; 306-swing arm shaft; 307-tensioning sleeve; 308-swing arm; 309-connecting arm;

[0032] 40 - wafer bracket; 401 - bracket base; 402 - outer bracket; 403 - fixing seat; 404 - inner bracket; 405 - middle support. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] The core of the utility model is to provide a swing mechanism of a Marangoni dryer, which can adjust the height of the swing arm mechanism through a lifting mechanism and change the distance between the wafer bracket and the top heating mechanism, so as to be compatible with the drying processing requirements of wafers of different specifications.

[0035] The Marangoni dryer swing mechanism provided by the utility model comprises:

[0036] The lifting mechanism 10 is used to drive the power mechanism 20 to lift in the vertical direction;

[0037] A power mechanism 20, whose fixed end is connected to the moving end of the lifting mechanism 10, and whose moving end is connected to the swing arm mechanism 30, is used to drive the swing arm mechanism 30 to rotate in a vertical plane;

[0038] The swing arm mechanism 30 comprises a swing arm 308 connected to the power mechanism 20 and a connecting arm 309 connected to the swing arm 308;

[0039] The wafer holder 40 is connected to the connecting arm 309 and is compatible with wafers of at least two specifications.

[0040] Please refer to Figure 1 The lifting mechanism 10 is used to drive the power mechanism 20 and the swing arm mechanism 30 to rise and fall in the vertical direction, thereby changing the distance from the wafer holder 40 connected to the swing arm mechanism 30 to the heating mechanism on the top of the Marangoni dryer, meeting the drying requirements of wafers of different specifications.

[0041] The lifting mechanism 10 can be configured as follows Figure 3 The lifting cylinder 102 shown can also be configured as a vertically arranged hydraulic cylinder, or can also be configured as a linear displacement mechanism such as a ball screw mechanism.

[0042] The power mechanism 20 is used to drive the swing arm mechanism 30 to drive the wafer holder 40 to rotate. The power mechanism 20 mainly includes a swing motor 202 and transmission components such as a synchronous belt assembly and a synchronous sprocket assembly.

[0043] The swing arm mechanism 30 is used to drive the wafer holder 40 to rotate in the vertical plane. For its specific structure and size, please refer to the existing swing-type Marangoni dryer;

[0044] Please refer to Figure 5The swing arm 308 is sleeved on one end of the swing arm shaft 306 through a tensioning sleeve 307. The swing arm shaft 306 is sleeved in the bearing seat 301 of the power platform 106 through a bearing 303. A shaft sleeve 302 is provided between two adjacent bearings 303. A bearing baffle 304 is provided on the outer side of the bearing 303 for axial positioning of the bearing 303. The end of the swing arm shaft 306 relatively close to the swing arm 308 is sleeved with a driven pulley 205, and the end of the swing arm shaft 306 relatively far from the swing arm 308 is sleeved with a locking nut 305.

[0045] The wafer holder 40 is used to install and fix the dried wafer to prevent it from falling off during the swinging process; in order to enhance the applicability of the swing mechanism, the wafer holder 40 can be compatible with at least two specifications of wafers.

[0046] Independent wafer placement areas can be set on the wafer holder 40 to meet the installation and fixation needs of wafers of different specifications; wafer placement areas for wafers of different specifications can also be set to overlap with each other, and each wafer placement area is surrounded by different limiting structures. The installation needs of wafers of different specifications can be met by disassembling the limiting structures of the wafer placement areas.

[0047] In this embodiment, the swing mechanism can adjust the height of the swing arm mechanism 30 through the lifting mechanism 10, thereby changing the distance between the wafer holder 40 and the top heating mechanism, so that it can adapt to wafers of different specifications and be compatible with the drying processing requirements of different wafers, thereby improving the applicability of the swing arm Marangoni dryer.

[0048] On the basis of the above-mentioned embodiment, the structure of the lifting mechanism 10 is defined. The lifting mechanism 10 may include a base 101, a lifting cylinder 102 and a power platform 106 for installing the power mechanism 20. The lifting cylinder 102 is vertically installed on the base 101. The piston rod of the lifting cylinder 102 is connected to the power platform 106 by a connecting screw 107 so as to drive the power platform 106 to drive the power mechanism 20 to lift and lower in the vertical direction.

[0049] The specific type, model and adjustment accuracy of the lifting cylinder 102 are determined according to the needs in actual production and will not be described in detail here.

[0050] Please refer to Figure 3 When the piston rod of the lifting cylinder 102 extends outward, the lifting cylinder 102 drives the power platform 106 to move up in the vertical direction through the connecting screw 107, thereby driving the power mechanism 20 and the swing arm mechanism 30 to move up in the vertical direction, and the distance from the wafer bracket 40 to the top heating mechanism is shortened to adapt to larger wafers;

[0051] When the piston rod of the lifting cylinder 102 contracts inward, the lifting cylinder 102 drives the power platform 106 to move downward in the vertical direction through the connecting screws 107, and then drives the power mechanism 20 and the swing arm mechanism 30 to move downward in the vertical direction. The distance from the wafer holder 40 to the top heating mechanism increases to adapt to smaller wafers.

[0052] Preferably, the base 101 may be provided with a slide rail 103 arranged along the vertical direction, and the side plate 105 of the power platform 106 may be provided with a slider 104 , and the slider 104 is slidably arranged on the slide rail 103 .

[0053] For the convenience of processing, the slider 104 is usually configured as a rectangular slider; the shape of the slide rail 103 is not limited as long as it can form a stable sliding connection with the slider 104 .

[0054] The sliding connection between the slide rail 103 and the slider 104 not only enhances the structural stability of the lifting mechanism 10 , but also limits the extension and retraction direction of the piston rod of the lifting cylinder 102 , thereby preventing the moving direction of the power platform 106 from deviating from the vertical direction.

[0055] On the basis of the above embodiment, the structure of the power mechanism 20 is limited. The power mechanism 20 may include a swing motor 202, a driving pulley 203, a synchronous belt 204 and a driven pulley 205. The swing motor 202 is connected to the moving end of the lifting mechanism 10 through a motor fixing plate 201. The driving pulley 203 is sleeved on the output shaft of the swing motor 202. The driven pulley 205 is sleeved on the swing arm shaft 306 of the swing arm 308. The synchronous belt 204 is arranged between the driving pulley 203 and the driven pulley 205.

[0056] Please refer to Figure 5 When the swing motor 202 rotates, the driving pulley 203 drives the synchronous belt 204 to rotate, the synchronous belt 204 drives the driven pulley 205 to rotate, and the driven pulley 205 drives the swing arm 308 to rotate through the swing arm shaft 306.

[0057] On the basis of the above embodiment, in order to adjust the tightness of the synchronous belt 204, the motor fixing plate 201 can be provided with a tensioning assembly 206, the tensioning assembly 206 includes a tensioning wheel 2061 and an adjustment block 2063, the tensioning wheel 2061 is installed on the adjustment block 2063 through a pin shaft 2062, and the adjustment block 2063 is slidingly connected to the motor fixing plate 201 so that the tensioning wheel 2061 can be adjusted to move up and down in the vertical direction through the adjustment block 2063 to change the tightness of the synchronous belt 204.

[0058] The tensioning wheel 2061 is installed on the adjustment block 2063 through the pin shaft 2062 so that the tensioning wheel 2061 can rotate around the pin shaft 2062 in the vertical plane; to prevent the tensioning wheel 2061 from moving along the axial direction of the pin shaft 2062, a baffle 2065 is provided at at least one end of the tensioning wheel 2061 to limit the axial position of the tensioning wheel 2061.

[0059] The material and size of the tension wheel 2061 are determined according to the material and size of the synchronous belt 204 in actual production.

[0060] The adjustment block 2063 is slidably connected to the motor fixing plate 201. The adjustment block 2063 and the motor mounting plate 2061 can be slidably connected through the snap-fitting of the slide rail and the slider, and then the relative positions of the slide rail and the slider are fixed by fasteners such as fastening bolts;

[0061] A threaded hole can also be provided on the motor fixing plate 201, and a top adjusting rod 2064 threadedly connected to the threaded hole can be provided on the top of the adjusting block 2063, and the position of the adjusting block 2063 relative to the motor fixing plate 201 can be adjusted by screwing the top adjusting rod 2064. Figure 4 shown.

[0062] Please refer to Figure 1 When the adjustment block 2063 slides downward relative to the motor fixing plate 201, the adjustment block 2063 drives the tensioning wheel 2061 to move downward in the vertical direction, and the pressure on the synchronous belt 204 increases, so that the synchronous belt 204 is relatively tensioned;

[0063] On the contrary, when the adjustment block 2063 slides upward relative to the motor fixing plate 201 , the adjustment block 2063 drives the tensioning wheel 2061 to move upward in the vertical direction, and the pressure on the synchronous belt 204 is reduced, so that the synchronous belt 204 is relatively loose.

[0064] On the basis of the above embodiment, the structure of the wafer holder 40 is defined, the wafer holder 40 includes a holder base plate 401 for connecting to the connecting arm 309, and the holder base plate 401 is detachably provided with an outer bracket 402 and an inner bracket 404 on opposite sides, and the inner side surface of the outer bracket 402 and the inner side surface of the inner bracket 404 are both used to abut against the outer edge of the wafer, and the spacing between the outer brackets 402 on both sides is greater than the spacing between the inner brackets 404 on both sides, so that the outer brackets 402 and the inner brackets 404 can hold wafers of different specifications.

[0065] The outer bracket 402 and the inner bracket 404 are collectively referred to as wafer brackets. The wafer brackets are arranged on two opposite sides of the bracket base plate 401, and the wafer is arranged close to the inner wall surface of the wafer bracket so that the wafer bracket can limit the wafer and prevent the wafer from moving relative to the bracket base plate 401.

[0066] The wafer specifications adapted by the outer bracket 402 and the inner bracket 404 are determined according to the actual production needs. For example, if 6-inch wafers and 8-inch wafers are mainly produced, the outer bracket 402 can be set as an 8-inch wafer bracket and the inner bracket 404 can be set as a 6-inch wafer bracket.

[0067] In order to better support and fix the wafer, an intermediate support 405 is usually vertically provided between the outer supports 402 on both sides, and the intermediate support 405 is provided at the midpoint of the outer supports 402; the specific shape and structure of the intermediate support 405 shall be determined by referring to the structure of the wafer.

[0068] The shapes and structures of the outer bracket 402 and the inner bracket 404 can be the same or different; please refer to Figure 6 The outer bracket 402 is a flat plate structure, and the outer bracket 402 is connected to the outer side of the bracket bottom plate 401 . The inner bracket 404 is an L-shaped bracket, and the horizontal plate of the L-shaped bracket is connected to the bracket bottom plate 401 .

[0069] The wafer holder is detachably connected to the bracket base plate 401, and the two can be connected by common fasteners such as fastening bolts and connecting pins. The connection is simple and the loading and unloading are convenient. The wafer holder can be quickly replaced to meet the drying requirements of wafers of different specifications.

[0070] In order to better position the inner bracket 404 , preferably, a fixing seat 403 may be vertically provided between the outer brackets 402 on both sides, and the inner bracket 404 may be snap-fitted into the mounting grooves on both sides of the fixing seat 403 .

[0071] The bottom of the inner bracket 404 is provided with a limit block that is clamped with the installation groove, or the bottom of the inner bracket 404 as a whole is used as a limit block, so that the inner bracket 404 is clamped and connected with the installation groove of the fixed seat 403. At the same time, fasteners such as fastening bolts and connecting pins are provided between the inner bracket 404 and the installation groove to fix the relative positions of the two.

[0072] The mounting slots can be set as Figure 6 The rectangular groove shown can also be set as a trapezoidal groove or other limiting groove with obvious directionality, so as to form a fool-proof design and indicate the installation direction of the inner bracket 404.

[0073] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0074] The above is a detailed introduction to the Marangoni dryer swing mechanism provided by the utility model. This article uses specific examples to illustrate the principle and implementation method of the utility model. The description of the above embodiment is only used to help understand the method and core idea of ​​the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. A Marangoni dryer swing mechanism, characterized in that: include: A lifting mechanism (10) is used to drive the power mechanism (20) to move up and down in a vertical direction; The power mechanism (20) has a fixed end connected to the movable end of the lifting mechanism (10), and a movable end connected to the swing arm mechanism (30) for driving the swing arm mechanism (30) to rotate in a vertical plane; The swing arm mechanism (30) comprises a swing arm (308) connected to the power mechanism (20) and a connecting arm (309) connected to the swing arm (308); The wafer bracket (40) is connected to the connecting arm (309) and is compatible with accommodating wafers of at least two specifications.

2. The Marangoni dryer swing mechanism according to claim 1, characterized in that: The lifting mechanism (10) comprises a base (101), a lifting cylinder (102), and a power platform (106) for mounting the power mechanism (20); the lifting cylinder (102) is vertically mounted on the base (101); a piston rod of the lifting cylinder (102) is connected to the power platform (106) via a connecting screw (107) so as to drive the power platform (106) to drive the power mechanism (20) to lift and lower in a vertical direction.

3. The Marangoni dryer swing mechanism according to claim 2, characterized in that: The base (101) is provided with a slide rail (103) arranged in a vertical direction, and the side plate (105) of the power platform (106) is provided with a slide block (104), and the slide block (104) is slidably arranged on the slide rail (103).

4. The Marangoni dryer swing mechanism according to claim 1, characterized in that: The wafer support (40) comprises a support base plate (401) for connecting to the connecting arm (309), and an outer support (402) and an inner support (404) are detachably provided on opposite sides of the support base plate (401), and the inner side surface of the outer support (402) and the inner side surface of the inner support (404) are both used to abut against the outer edge of the wafer, and the spacing between the outer supports (402) on both sides is greater than the spacing between the inner supports (404) on both sides, so that the outer support (402) and the inner support (404) can respectively position wafers of different specifications.

5. The Marangoni dryer swing mechanism according to claim 4, characterized in that: A fixing seat (403) is vertically arranged between the outer brackets (402) on both sides, and the inner bracket (404) is clamped in the installation grooves on both sides of the fixing seat (403).

6. The Marangoni dryer swing mechanism according to claim 4, characterized in that: An intermediate support (405) is vertically arranged between the outer supports (402) on both sides, and the intermediate support (405) is arranged at the midpoint of the outer supports (402).

7. The Marangoni dryer swing mechanism according to any one of claims 1 to 6, characterized in that: The power mechanism (20) comprises a swing motor (202), a driving pulley (203), a synchronous belt (204) and a driven pulley (205); the swing motor (202) is connected to the moving end of the lifting mechanism (10) via a motor fixing plate (201); the driving pulley (203) is sleeved on the output shaft of the swing motor (202); the driven pulley (205) is sleeved on the swing arm shaft (306) of the swing arm (308); and the synchronous belt (204) is arranged between the driving pulley (203) and the driven pulley (205).

8. The Marangoni dryer swing mechanism according to claim 7, characterized in that: The motor fixing plate (201) is provided with a tensioning assembly (206), the tensioning assembly (206) comprising a tensioning wheel (2061) and an adjustment block (2063), the tensioning wheel (2061) being mounted on the adjustment block (2063) via a pin shaft (2062), the adjustment block (2063) being slidably connected to the motor fixing plate so that the tensioning wheel (2061) can be adjusted to move up and down in a vertical direction via the adjustment block (2063) to change the tightness of the synchronous belt (204).

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