An integrated plasma electrode

Abstract

The utility model relates to the technical field of plasma electrodes, and discloses an integrated plasma electrode, including a main body mechanism, an auxiliary mechanism and a fixing mechanism, wherein the auxiliary mechanism is located at the left end of the main body mechanism, the fixing mechanism is located at the front end of the main body mechanism, and the main body mechanism includes a base, a mounting groove and a plasma electrode plate. The integrated plasma electrode, through the installation of the main body mechanism, realizes that during use, through the setting of the circulating cooling component inside the plasma electrode plate, the circulating copper pipe can be connected to the refrigerator, when the plasma electrode plate is overheated, the cold air produced by the refrigerator enters the circulating copper pipe through the air inlet, takes away the heat generated by the electrode plate, and finally flows out through the air outlet, and the heat dissipation holes set on the surface of the plasma electrode plate can assist in heat dissipation, the structure is simple, the heat dissipation effect is good, the service life of the plasma electrode plate can be increased, and the practicality of the integrated plasma electrode is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma electrodes, in particular to an integrated plasma electrode. Background Art

[0002] Plasma is a substance produced by gas molecules under special circumstances such as vacuum and discharge. The device for producing plasma in plasma cleaning and etching is to set up two electrode magnetic fields in a sealed container and use a vacuum pump to achieve a certain vacuum degree. As the gas becomes thinner and thinner, the molecular distance and the free movement distance of molecules and ions become longer and longer. Under the action of the magnetic field, collisions occur and glow is generated. The plasma moves in the space within the electromagnetic field and bombards the surface of the processed object, thereby achieving the effect of surface treatment, cleaning and etching. Plasma cleaning greatly improves cleaning efficiency, reduces production costs, protects the cleanliness and hygiene of the environment, and has dual economic and social benefits.

[0003] The existing CN211605096U patent document proposes a plasma electrode plate, including: at least one electrode body and a supporting box body, the electrode body is fixedly installed in the supporting box body, the electrode body is provided with at least two water diversion pipes, at least one transparent groove and a constant temperature channel, at least two connected constant temperature channels are arranged along the electrode body, the transparent grooves and the constant temperature channels are alternately arranged, the transparent grooves are provided with at least one reinforcing rib, the supporting box body is provided with a water diversion hole, one end of the water diversion pipe is connected to the constant temperature channel, and the other end passes through the water diversion hole and is connected to an external water channel. By arranging the transparent grooves on the electrode body, while reducing the surface area of ​​the electrode body, the utilization rate of electric energy per unit area can be effectively improved, higher electric energy is provided for the gas, and the permeability and fluidity of the ionized gas are increased. The reinforcing ribs are arranged on the transparent grooves, which can reinforce the partitions, prevent excessive transparent grooves from causing large processing deformation of the electrode plate, and improve the anti-interference performance of the discharge process.

[0004] However, since the heat dissipation effect of the plasma electrode plate in the prior art patent technology with publication number CN211605096U is poor during use, long-term use may result in a reduction in the service life of the plasma electrode plate. Utility Model Content

[0005] 1. Technical issues to be resolved

[0006] The purpose of the utility model is to provide an integrated plasma electrode to solve the problem in the above background technology that the heat dissipation effect of the plasma electrode plate is poor and the service life of the plasma electrode plate may be reduced after long-term use.

[0007] (II) Technical solution

[0008] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an integrated plasma electrode, comprising a main body mechanism, an auxiliary mechanism and a fixing mechanism, wherein the auxiliary mechanism is located at the left end of the main body mechanism, the fixing mechanism is located at the front end of the main body mechanism, the main body mechanism comprises a base, a mounting groove and a plasma electrode plate 1, the mounting groove is fixedly arranged at the upper end of the base, and the plasma electrode plate 1 is movably installed inside the mounting groove;

[0009] Preferably, the main body structure also includes a second plasma electrode plate, a circulating cooling component, a heat dissipation hole, a conductive rod one and a second conductive rod. The second plasma electrode plate is movably mounted behind the first plasma electrode plate, the circulating cooling component is fixedly mounted inside the first plasma electrode plate, the heat dissipation hole is fixedly mounted at the outer end of the first plasma electrode plate, the first conductive rod is fixedly mounted at the lower end of the base, and the second conductive rod is fixedly mounted behind the first conductive rod. During use, the circulating copper tube can be connected to the refrigerator through the setting of the circulating cooling component inside the plasma electrode plate. When the plasma electrode plate is overheated, the cold air generated by the refrigerator enters the circulating copper tube through the air inlet, takes away the heat generated by the electrode plate, and finally flows out through the air outlet. The heat dissipation holes set on the surface of the plasma electrode plate can assist in heat dissipation. The structure is simple, the heat dissipation effect is good, and the service life of the plasma electrode plate can be improved.

[0010] Preferably, the circulating cooling assembly comprises a circulating copper tube, an air inlet and an air outlet, and the circulating copper tube is fixedly installed inside the plasma electrode plate.

[0011] Preferably, the air inlet is fixedly arranged at the left end of the circulating copper tube, and the air outlet is fixedly arranged above the air inlet.

[0012] Preferably, the auxiliary mechanism comprises a connecting flange, a sealing ring, a connecting hole, a fastening screw and a nut, and the connecting flange is fixedly mounted on the left end of the air inlet.

[0013] Preferably, the sealing ring is fixedly installed at the left end of the connecting flange, and the connecting hole is fixedly arranged at the left end of the connecting flange.

[0014] Preferably, the fastening screw is movably connected to the inside of the connecting hole, and the nut is movably connected to the outer end of the fastening screw. Through the mutual connection between the connecting flange, the connecting hole, the fastening screw and the nut, the air inlet and the air outlet of the circulating cooling component can be firmly connected to the refrigerator. The setting of the sealing ring can improve the sealing performance and avoid leakage of cold air.

[0015] Preferably, the fixing mechanism comprises a threaded hole, a bolt gasket and a fixing bolt, and the threaded hole is fixedly arranged at the front end of the base.

[0016] Preferably, the bolt gasket is movably connected to the front end of the threaded hole, and the fixing bolt is movably connected to the front end of the bolt gasket. During installation, the plasma electrode plate is first installed in the installation groove on the base, and then the plasma electrode plate can be fixed on the base through the connection between the threaded hole, the bolt gasket and the fixing bolt.

[0017] Compared with the prior art, the beneficial effects of the utility model are:

[0018] 1. The integrated plasma electrode, through the installation of the main body mechanism, realizes that during use, the circulating copper tube can be connected to the refrigerator through the setting of the circulating cooling component inside the plasma electrode plate. When the plasma electrode plate is overheated, the cold air generated by the refrigerator enters the circulating copper tube through the air inlet, takes away the heat generated by the electrode plate, and finally flows out through the air outlet. The heat dissipation holes set on the surface of the plasma electrode plate can assist in heat dissipation. The structure is simple and the heat dissipation effect is good. The service life of the plasma electrode plate can be increased, and the practicality of the integrated plasma electrode is improved.

[0019] 2. The integrated plasma electrode, through the installation of the auxiliary mechanism, realizes the mutual connection between the connecting flange, the connecting hole, the fastening screw and the nut, so that the air inlet and the air outlet of the circulating cooling component can be firmly connected to the refrigerator. The sealing performance can be improved by setting the sealing ring, avoiding the leakage of cold air, and improving the connection effect of the integrated plasma electrode;

[0020] 3. The integrated plasma electrode, through the installation of the fixing mechanism, realizes that during installation, the plasma electrode plate is first installed in the installation groove on the base, and then the plasma electrode plate can be fixed on the base through the connection between the threaded hole, the bolt gasket and the fixing bolt, thereby improving the fixing effect of the integrated plasma electrode. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0022] Figure 2 This is a schematic diagram of the internal structure of the main mechanism of the utility model;

[0023] Figure 3 This is a schematic diagram of the explosion structure of the utility model;

[0024] Figure 4 It is a schematic diagram of the enlarged structure of the auxiliary mechanism of the utility model.

[0025] In the figure: 1. Main body; 101. Base; 102. Mounting groove; 103. Plasma electrode plate 1; 104. Plasma electrode plate 2; 105. Circulation cooling assembly; 1051. Circulation copper tube; 1052. Air inlet; 1053. Air outlet; 106. Heat dissipation hole; 107. Conductive rod 1; 108. Conductive rod 2; 2. Auxiliary mechanism; 201. Connecting flange; 202. Sealing ring; 203. Connecting hole; 204. Fastening screw; 205. Nut; 3. Fixing mechanism; 301. Threaded hole; 302. Bolt gasket; 303. Fixing bolt. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] See also Figure 1-Figure 4The utility model provides a technical solution: an integrated plasma electrode, including a main body mechanism 1, an auxiliary mechanism 2 and a fixing mechanism 3, the auxiliary mechanism 2 is located at the left end of the main body mechanism 1, the fixing mechanism 3 is located at the front end of the main body mechanism 1, the main body mechanism 1 includes a base 101, a mounting groove 102 and a plasma electrode plate 103, the mounting groove 102 is fixedly arranged at the upper end of the base 101, the plasma electrode plate 103 is movably installed inside the mounting groove 102, the main body mechanism 1 also includes a plasma electrode plate 2 104, a circulating cooling component 105, a heat dissipation hole 106, a conductive rod 107 and a conductive rod 2 108, the plasma electrode plate 2 104 is movably installed at the rear of the plasma electrode plate 103, the circulating cooling component 105 is fixedly arranged inside the plasma electrode plate 103, the heat dissipation hole 106 is fixedly arranged at the outer end of the plasma electrode plate 103, and the conductive rod 107 is fixedly arranged at the outer end of the plasma electrode plate 103. Installed at the lower end of the base 101, the conductive rod 108 is fixedly installed behind the conductive rod 107, and the circulating cooling component 105 includes a circulating copper tube 1051, an air inlet 1052 and an air outlet 1053. The circulating copper tube 1051 is fixedly installed inside the plasma electrode plate 103, the air inlet 1052 is fixedly set at the left end of the circulating copper tube 1051, and the air outlet 1053 is fixedly set above the air inlet 1052. During use, the plasma electrode plate is connected to the device through the conductive rod 107 and the conductive rod 108. Through the setting of the circulating cooling component 105 inside the plasma electrode plate, when the plasma electrode plate is overheated, the cold air generated by the refrigerator enters the circulating copper tube 1051 through the air inlet 1052, takes away the heat generated by the electrode plate, and finally flows out through the air outlet 1053. The heat dissipation holes 106 set on the surface of the plasma electrode plate can assist in heat dissipation.

[0028] The auxiliary mechanism 2 includes a connecting flange 201, a sealing ring 202, a connecting hole 203, a fastening screw 204 and a nut 205. The connecting flange 201 is fixedly installed at the left end of the air inlet 1052, the sealing ring 202 is fixedly installed at the left end of the connecting flange 201, the connecting hole 203 is fixedly set at the left end of the connecting flange 201, the fastening screw 204 is movably connected to the inside of the connecting hole 203, and the nut 205 is movably connected to the outer end of the fastening screw 204. Through the mutual connection between the connecting flange 201, the connecting hole 203, the fastening screw 204 and the nut 205, the air inlet 1052 and the air outlet 1053 of the circulating cooling component 105 are firmly connected to the refrigerator. The setting of the sealing ring 202 can improve the sealing performance and avoid leakage of cold air.

[0029] The fixing mechanism 3 includes a threaded hole 301, a bolt gasket 302 and a fixing bolt 303. The threaded hole 301 is fixedly arranged at the front end of the base 101, the bolt gasket 302 is movably connected to the front end of the threaded hole 301, and the fixing bolt 303 is movably connected to the front end of the bolt gasket 302. During installation, the plasma electrode plate is first installed in the installation groove 102 on the base 101, and then the plasma electrode plate is fixed on the base 101 through the connection between the threaded hole 301, the bolt gasket 302 and the fixing bolt 303.

[0030] Working principle: When installing, first install the plasma electrode plate in the installation groove 102 on the base 101, and then fix the plasma electrode plate on the base 101 through the connection between the threaded hole 301, the bolt gasket 302 and the fixing bolt 303. Through the connection between the connecting flange 201, the connecting hole 203, the fastening screw 204 and the nut 205, the air inlet 1052 and the air outlet 1053 of the circulating cooling component 105 are firmly connected to the refrigerator. The sealing performance can be improved to avoid leakage of cold air. During use, the plasma electrode plate is connected to the device through the conductive rod 107 and the conductive rod 2 108. Through the setting of the circulating cooling component 105 inside the plasma electrode plate, when the plasma electrode plate is overheated, the cold air generated by the refrigerator enters the circulating copper tube 1051 through the air inlet 1052, takes away the heat generated by the electrode plate, and finally flows out through the air outlet 1053. The heat dissipation holes 106 set on the surface of the plasma electrode plate can assist in heat dissipation.

[0031] Finally, it should be noted that the above content is only used to illustrate the technical solution of the utility model, rather than to limit the protection scope of the utility model. Simple modifications or equivalent substitutions of the technical solution of the utility model by ordinary technicians in this field do not deviate from the essence and scope of the technical solution of the utility model.

Claims

1. An integrated plasma electrode, comprising a main mechanism (1), an auxiliary mechanism (2) and a fixing mechanism (3), characterized in that: The auxiliary mechanism (2) is located at the left end of the main mechanism (1), the fixing mechanism (3) is located at the front end of the main mechanism (1), the main mechanism (1) comprises a base (101), a mounting groove (102) and a plasma electrode plate (103), the mounting groove (102) is fixedly arranged at the upper end of the base (101), and the plasma electrode plate (103) is movably installed inside the mounting groove (102); The main body mechanism (1) further comprises a second plasma electrode plate (104), a circulating cooling component (105), a heat dissipation hole (106), a first conductive rod (107) and a second conductive rod (108); the second plasma electrode plate (104) is movably mounted behind the first plasma electrode plate (103); the circulating cooling component (105) is fixedly mounted inside the first plasma electrode plate (103); the heat dissipation hole (106) is fixedly mounted at the outer end of the first plasma electrode plate (103); the first conductive rod (107) is fixedly mounted at the lower end of the base (101); and the second conductive rod (108) is fixedly mounted behind the first conductive rod (107).

2. The integrated plasma electrode according to claim 1, characterized in that: The circulating cooling component (105) comprises a circulating copper tube (1051), an air inlet (1052) and an air outlet (1053), and the circulating copper tube (1051) is fixedly installed inside the plasma electrode plate (103).

3. The integrated plasma electrode according to claim 2, characterized in that: The air inlet (1052) is fixedly arranged at the left end of the circulation copper tube (1051), and the air outlet (1053) is fixedly arranged above the air inlet (1052).

4. The integrated plasma electrode according to claim 3, characterized in that: The auxiliary mechanism (2) comprises a connecting flange (201), a sealing ring (202), a connecting hole (203), a fastening screw (204) and a nut (205); the connecting flange (201) is fixedly mounted on the left end of the air inlet (1052).

5. The integrated plasma electrode according to claim 4, characterized in that: The sealing ring (202) is fixedly mounted on the left end of the connecting flange (201), and the connecting hole (203) is fixedly arranged on the left end of the connecting flange (201).

6. The integrated plasma electrode according to claim 5, characterized in that: The fastening screw (204) is movably connected to the inside of the connecting hole (203), and the nut (205) is movably connected to the outer end of the fastening screw (204).

7. The integrated plasma electrode according to claim 6, characterized in that: The fixing mechanism (3) comprises a threaded hole (301), a bolt washer (302) and a fixing bolt (303); the threaded hole (301) is fixedly arranged at the front end of the base (101).

8. The integrated plasma electrode according to claim 7, characterized in that: The bolt washer (302) is movably connected to the front end of the threaded hole (301), and the fixing bolt (303) is movably connected to the front end of the bolt washer (302).

Images