Piezoelectric pulse valve

Abstract

The utility model relates to the technical field of electromagnetic valves, in particular to a piezoelectric pulse valve. The piezoelectric pulse valve comprises a valve body, a piezoelectric bending piece, a piezoelectric insulating piece, a spring reset piece and a supporting frame. A containing cavity is formed in the valve body, and an air inlet hole and an air outlet hole which are communicated with the containing cavity are oppositely formed in the outer surface of the valve body; the piezoelectric insulating part is arranged in the containing cavity, the piezoelectric bending piece is erected on the piezoelectric insulating part, and the supporting frame is fixedly connected with the piezoelectric bending piece; the piezoelectric bending piece, the piezoelectric insulating piece and the supporting frame divide the containing cavity into a first cavity close to one side of the air inlet hole and a second cavity close to one side of the air outlet hole. The spring reset piece is located on the supporting frame of the first cavity, and in the initial state, the spring reset piece enables the piezoelectric bending piece to abut against the piezoelectric insulating piece. The structure is simple, the operation is convenient, and the application prospect is good.

Description

Technical Field

[0001] The utility model relates to the technical field of electromagnetic valves, in particular to a piezoelectric pulse valve. Background Art

[0002] At present, electromagnetic pulse valves are commonly used in many physical experimental instruments to release the carrier gas of the sample into the vacuum chamber in the form of very narrow high-pressure gas pulses. However, the existing electromagnetic pulse valves have the following problems: on the one hand, the electromagnetic coil of the electromagnetic pulse valve will generate heat during operation and the valve core is prone to friction and heat, which can easily affect the accuracy of the experimental temperature; on the other hand, the mechanical characteristics of electromagnetic adsorption are used to control the switch, and its adjustment accuracy and difficulty are subject to certain limitations, and it is impossible to achieve a higher switching speed, and thus it is impossible to effectively control the accuracy of the carrier gas inlet and outlet. Utility Model Content

[0003] In order to solve at least one of the shortcomings of the pulse valve in the prior art, the utility model provides a piezoelectric pulse valve, which at least includes a valve body, a piezoelectric bending piece, a piezoelectric insulating member, a spring return member, and a support frame;

[0004] A accommodating cavity is formed inside the valve body, and an air inlet hole and an air outlet hole connected to the accommodating cavity are relatively opened on the outer surface of the valve body; the piezoelectric insulating component is arranged in the accommodating cavity, the piezoelectric bending sheet is mounted on the piezoelectric insulating component, and the support frame is fixedly connected to the piezoelectric bending sheet; the piezoelectric bending sheet, the piezoelectric insulating component and the support frame divide the accommodating cavity into a first cavity close to the air inlet hole and a second cavity close to the air outlet hole; the spring return component is located on the support frame of the first cavity, and in the initial state, the spring return component presses the piezoelectric bending sheet against the piezoelectric insulating component.

[0005] In one embodiment, the valve body includes a valve cover and a valve seat, and the valve cover and the valve seat are detachably sealed and enclosed to form the accommodating cavity; the air inlet is arranged on the valve cover, and the air outlet is arranged on the valve seat.

[0006] In one embodiment, the piezoelectric insulating member is a ceramic insulating gasket arranged around the edge of the inner side wall of the accommodating cavity.

[0007] In one embodiment, the support frame includes a U-groove section and an extension section, the U-groove section passes through the center of the piezoelectric bending piece and has a groove opening toward the first cavity, the U-groove section is formed with an open end close to the side of the groove opening and a closed end away from the open end, and the spring return member is arranged in the groove; the closed end of the U-groove section abuts against the air outlet; the extension section extends from the open end of the U-groove section to the outside of the opening in the first cavity, and the extension section is used to connect with the piezoelectric bending piece.

[0008] In one embodiment, a sealing component is provided on the valve body located at the air outlet, and the sealing component is located on the contact end surface where the U-groove section abuts against the air outlet.

[0009] In one embodiment, a height adjusting member is further included, and the support frame is connected to the piezoelectric bending piece via the height adjusting member, so as to adjust the height of the support frame on the piezoelectric bending piece.

[0010] In one embodiment, the piezoelectric bending piece is an annular disc, the valve body is a centrally symmetrical structure along the central axis of the piezoelectric bending piece, the air inlet and the air outlet are respectively located on the outer surface of the valve body on both sides of the end face of the piezoelectric bending piece, and the axes of the air inlet and the air outlet are coaxial with the axis of the piezoelectric bending piece.

[0011] In one embodiment, a cross-sectional area of ​​the air inlet is greater than a cross-sectional area of ​​the air outlet.

[0012] In one embodiment, a plurality of mounting grooves are provided at intervals on the outer side wall of the valve body; the mounting grooves are used to fix the piezoelectric pulse valve.

[0013] In one embodiment, a wiring member is further included, and the wiring member is electrically connected to the piezoelectric bending piece.

[0014] Based on the above, compared with the prior art, the piezoelectric pulse valve provided by the utility model can effectively utilize high-speed pulse voltage to realize the inlet and outlet air control of the pulse valve through the structural design of the valve body, piezoelectric bending sheet, spring return member and support frame, thereby effectively improving the accuracy. It has a simple structure, fast switching response speed, low cost and good application prospects.

[0015] Other features and beneficial effects of the utility model will be described in the subsequent description, and partly become apparent from the description, or understood by practicing the utility model. The purpose and other beneficial effects of the utility model can be achieved and obtained by the structures specifically pointed out in the description, claims and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. The positional relationships shown in the drawings in the following description are based on the directions of the components shown in the drawings unless otherwise specified.

[0017] Figure 1 A main cross-sectional view of a piezoelectric pulse valve provided in one embodiment of the utility model;

[0018] Figure 2 This is a main cross-sectional view of a support frame provided in one embodiment of the utility model.

[0019] Reference numerals:

[0020] 10 valve body 11 valve cover 12 valve seat

[0021] 10a first cavity 10b second cavity 10c air inlet

[0022] 10d air outlet 20 piezoelectric bending piece 30 piezoelectric insulating member

[0023] 40 Spring return piece 50 Support frame 51U slot section

[0024] 52 extension section 51a groove S1 opening end

[0025] S2 closed end 60 sealing assembly 70 height adjustment member

[0026] 10e installation slot DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solutions and advantages of the embodiments of the utility model clearer, the technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all of the embodiments; the technical features designed in different implementation modes of the utility model described below can be combined with each other as long as they do not conflict with each other; based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0028] In the description of the present invention, it should be noted that all terms (including technical terms and scientific terms) used in the present invention have the same meanings as those generally understood by ordinary technicians in the field to which the present invention belongs, and cannot be understood as limitations on the present invention; it is further understood that the terms used in the present invention should be understood to have meanings consistent with the meanings of these terms in the context of this specification and in the relevant fields, and should not be understood in an idealized or overly formal sense, unless explicitly defined in this utility model.

[0029] See also Figure 1 The utility model provides a piezoelectric pulse valve, which at least includes a valve body 10, a piezoelectric bending piece 20, a piezoelectric insulating member 30, a spring return member 40, and a support frame 50.

[0030] The valve body 10 has an internal accommodating cavity, and the outer surface of the valve body 10 has an air inlet 10c and an air outlet 10d connected to the accommodating cavity. The valve body 10 may include a valve cover 11 and a valve seat 12, and the valve cover 11 and the valve seat 12 are detachably sealed and enclosed to form the accommodating cavity. The specific structures of the valve cover 11 and the valve seat 12 may be reasonably designed according to actual structural requirements. Preferably, the air inlet 10c is provided on the valve cover 11, and the air outlet 10d is provided on the valve seat 12. Figure 1 As shown, in this embodiment, the valve cover 11 and the valve seat 12 are preferably threadedly connected, and a sealing element is provided to achieve a detachable seal. Of course, the valve cover 11 and the valve seat 12 can also be connected by other detachable methods such as a buckle structure, a latch structure, a magnetic structure, a vacuum adsorption structure, etc., which are not limited here.

[0031] Preferably, the cross-sectional area of ​​the air inlet 10c is larger than the cross-sectional area of ​​the air outlet 10d, so that when the air outlet 10d is opened, the gas will be ejected from the air outlet 10d at a higher speed due to the pressure difference, thereby increasing the switching speed of the piezoelectric pulse valve. In this embodiment, the cross-sectional area of ​​the air inlet 10c is preferably a reduced type. Among them, the air inlet 10c is connected to the gas emitting container, and the air outlet 10d is connected to the gas receiving container. Therefore, the piezoelectric pulse valve is connected to the gas emitting container and the gas receiving container respectively, and specifically can be connected through a pipeline or directly designed with a detachable structure to connect the containers.

[0032] The piezoelectric insulating member 30 is arranged in the accommodating cavity, the piezoelectric bending piece 20 is mounted on the piezoelectric insulating member 30, and the support frame 50 is fixedly connected to the piezoelectric bending piece 20; the piezoelectric bending piece 20, the piezoelectric insulating member 30 and the support frame 50 divide the accommodating cavity into a first cavity 10a close to the air inlet 10c and a second cavity 10b close to the air outlet 10d; the spring return member 40 is located on the support frame 50 of the first cavity 10a, and in the initial state, the spring return member 40 presses the piezoelectric bending piece 20 against the piezoelectric insulating member 30.

[0033] In a specific implementation, the piezoelectric insulating member 30 is a ceramic insulating gasket arranged in a ring around the edge of the inner side wall of the accommodating cavity, and the specific shape is designed according to the shape of the inner side wall of the accommodating cavity. For example, when the inner side wall of the accommodating cavity is hexagonal, the piezoelectric insulating member 30 is a ring-shaped hexagonal ceramic insulating gasket; when the inner side wall of the accommodating cavity is circular, the piezoelectric insulating member 30 is a ring-shaped circular ceramic insulating gasket. Of course, the piezoelectric insulating member 30 is not limited to the following. Figure 1 The gasket shape shown may also be other support structures on which the piezoelectric bending piece 20 can be mounted.

[0034] The piezoelectric bending piece 20 can be bent at its outer edge when a pulse voltage is applied, so the piezoelectric bending piece 20 can be a piezoelectric ceramic piece. In a preferred embodiment, the piezoelectric bending piece 20 is an annular disc, the valve body 10 is centrally symmetrical along the central axis of the piezoelectric bending piece 20, the air inlet 10c and the air outlet 10d are respectively located on the outer surface of the valve body 10 on both sides of the end face of the piezoelectric bending piece 20, and the axes of the air inlet 10c and the air outlet 10d are coaxial with the axis of the piezoelectric bending piece 20, so as to further ensure the stability and practicality of the piezoelectric pulse valve.

[0035] In the initial state, the first cavity 10a is not connected to the second cavity 10b, and the air inlet 10c and the air outlet 10d cannot form a connected airflow. When a pulse voltage is applied to the piezoelectric bending piece 20, the position of the piezoelectric bending piece 20 away from the support frame 50 bends, the first cavity 10a is connected to the second cavity 10b, and a connected airflow is formed between the air inlet 10c and the air outlet 10d, so that the gas is ejected from the air inlet 10c to the air outlet 10d. The spring return member 40 is used to restore the support frame 50 and the piezoelectric bending piece 20 to the initial position.

[0036] Therefore, please refer to Figure 1 The working principle of the piezoelectric pulse valve provided by the embodiment of the present invention is as follows: in the initial state, high-pressure gas enters from the air inlet and fills the first cavity 10a, and the upper part of the support frame 50 is subjected to the gas pressure difference, pressing the piezoelectric bending piece 20 onto the piezoelectric insulating member 30, thereby making the first cavity 10a and the second cavity 10b disconnected, and the gas cannot be ejected from the gas outlet 10d; when a pulse voltage is applied to the piezoelectric bending piece 20, the piezoelectric bending piece 20 will move upward, causing the support frame 50 to lift upward, and under the action of the spring return member 40, the piezoelectric bending piece 20 It bends upward, and at this time, the first cavity 10a is connected with the second cavity 10b, and the air inlet 10c is connected with the air outlet 10d. Under the action of the internal and external pressure difference, the gas is ejected out of the air outlet 10d in the form of a molecular beam and enters the gas receiving container; then, the pulse voltage applied to the piezoelectric bending piece 20 disappears, and the piezoelectric bending piece 20 immediately returns to its original state. At the same time, under the action of the elastic restoring force of the elastic reset part, the support frame 50 moves downward back to the initial state, and the first cavity 10a is not connected with the second cavity 10b, and the gas cannot be ejected from the air outlet 10d.

[0037] On the basis of the above working principle, the pulse voltage can be controlled by the driving signal to alternate between being applied and not applied, so that the piezoelectric bending piece 20 is bent and the support column continuously vibrates up and down, thereby realizing the ejection of gas under high-speed pulses.

[0038] The piezoelectric pulse valve provided by the utility model can not only adjust the amplitude and frequency of the support frame 50 by changing the amplitude, frequency, duty cycle and other numerical values ​​of the driving voltage, thereby realizing the control of the pulse valve performance; it can also control the bending deformation of the piezoelectric bending sheet 20 by changing the voltage, thereby controlling the gas inlet and outlet amount each time the piezoelectric pulse valve is switched.

[0039] In an optional embodiment, see Figure 2 The support frame 50 includes a U-groove section 51 and an extension section 52. The U-groove section 51 passes through the center of the piezoelectric bending piece 20 and has a groove 51a with an opening toward the first cavity 10a. The spring return member 40 is arranged in the groove 51a. The two ends of the spring return member 40 abut against the inside of the groove 51a and the first cavity 10a respectively. In order to ensure that the spring return member 40 only exerts elastic action along the axis, the inside of the groove 51a should just accommodate part of the spring return member 40. A limiting groove (not marked in the figure) opposite to the groove 51a is also provided on the cavity wall of the first cavity 10a, so that the spring return member 40 can be embedded between the limiting groove and the groove 51a.

[0040] Please continue reading Figure 1 , Figure 2 , the U-groove section 51 is formed with an open end S1 close to the opening side of the groove 51a and a closed end S2 away from the open end S1; the closed end S2 of the U-groove section 51 abuts the air outlet 10d. Specifically, extending the U-groove section 51 of the support frame 50 to abut the air outlet 10d can further ensure that in the initial state, when the gas fills the first cavity 10a, due to the pressure difference, the support frame 50 has a downward force to effectively block the air outlet 10d to prevent gas leakage. When a pulse voltage is applied to the piezoelectric bending piece 20, the support frame 50 is lifted, and the closed end S2 of the U-groove section 51 also leaves the air outlet 10d to open the air outlet 10d, so as to facilitate the gas to be ejected from the air outlet 10d.

[0041] The extension section 52 extends from the opening end S1 of the U-groove section 51 to the outside of the opening in the first cavity 10a, and the extension section 52 is used to connect with the piezoelectric bending piece 20. Figure 2 As shown, the extension section 52 is provided with a through hole to facilitate connection with the piezoelectric bending piece 20 .

[0042] In one embodiment, a sealing assembly 60 is provided on the valve body 10 located at the air outlet 10d, and the sealing assembly 60 is located on the contact end surface where the U-groove section 51 abuts the air outlet 10d. Among them, the sealing assembly 60 can be a conventional sealing structure such as a sealing ring, a sealing gasket and a sealing groove, which is not limited here. In this embodiment, the sealing assembly 60 is preferably an O-ring, and the O-ring is provided on the contact end surface where the U-groove section 51 abuts the air outlet 10d. When the spring return member 40 is reset, the support frame 50 pushes against the O-ring at the air outlet 10d, thereby effectively sealing the air outlet 10d, effectively preventing gas from entering and exiting the air outlet 10d, and improving the performance of the piezoelectric pulse valve.

[0043] Preferably, the piezoelectric pulse valve further includes a height adjustment member 70, and the support frame 50 is connected to the piezoelectric bending piece 20 through the height adjustment member 70, so as to adjust the height of the support frame 50 on the piezoelectric bending piece 20. By adjusting the height of the support frame 50 on the piezoelectric bending piece 20, the tightness between the support frame 50 and the sealing component 60 is adjusted to reach the critical point of airtightness, thereby improving the corresponding speed of the piezoelectric pulse valve switch. Among them, the height adjustment member 70 includes but is not limited to the use of multiple threaded connectors to achieve height adjustment.

[0044] In a preferred embodiment, a plurality of mounting grooves 10e are spaced apart on the outer wall of the valve body 10; the mounting grooves 10e are used to fix the piezoelectric pulse valve. Specifically, the piezoelectric pulse valve can be fixed to the gas receiving container by the mounting grooves 10e of the valve body 10 in cooperation with fasteners. It should be noted that the connection between the piezoelectric pulse valve and the gas receiving container is not limited to the detachable connection of the mounting grooves 10e and the fasteners, but can also be other conventional fixing methods, all of which fall within the scope of protection of the present utility model.

[0045] In addition, a sealing element may also be provided at the connection contact position between the piezoelectric pulse valve and the gas receiving container to prevent gas leakage, and the specific design method can be reasonably designed according to the actual structure. Figure 1 The sealing element disposed below the gas outlet 10d is used to achieve sealing with the gas receiving container.

[0046] In other embodiments, the piezoelectric pulse valve further includes a wiring member (not shown in the figure), which is electrically connected to the piezoelectric bending piece 20 for sending a pulse signal to the piezoelectric bending piece 20 to control the piezoelectric pulse valve to achieve corresponding actions.

[0047] To sum up, compared with the prior art, the piezoelectric pulse valve provided by the utility model can effectively utilize high-speed pulse voltage to achieve precise control of the amount of gas entering and exiting the pulse valve through the structural design of the valve body, piezoelectric bending piece, spring return member and support frame, thereby effectively improving the accuracy. It has a simple structure, fast switching response speed, high sensitivity, strong practicality, low manufacturing cost, and has good application prospects.

[0048] In addition, those skilled in the art should understand that, although there are many problems in the prior art, each embodiment or technical solution of the utility model can be improved in only one or several aspects, without having to solve all the technical problems listed in the prior art or background technology at the same time. Those skilled in the art should understand that the content not mentioned in a claim should not be used as a limitation on the claim.

[0049] Although the terms such as valve body, valve cover, valve seat, first cavity, second cavity, air inlet, air outlet, piezoelectric bending piece, piezoelectric insulating member, spring return member, support frame, U-groove section, extension section, groove, open end, closed end, sealing assembly, height adjustment member, mounting groove, etc. are used more frequently in this article, the possibility of using other terms is not excluded. The use of these terms is only to more conveniently describe and explain the essence of the utility model; interpreting them as any additional restrictions is contrary to the spirit of the utility model; the terms "first", "second", etc. (if any) in the description and claims of the embodiment of the utility model and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence.

[0050] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A piezoelectric pulse valve, characterized in that: include: Valve body, piezoelectric bending piece, piezoelectric insulating member, spring return member, support frame; The valve body has an accommodating cavity formed inside, and an air inlet and an air outlet connected to the accommodating cavity are formed on the outer surface of the valve body. The piezoelectric insulating member is disposed in the accommodating cavity, the piezoelectric bending piece is mounted on the piezoelectric insulating member, and the supporting frame is fixedly connected to the piezoelectric bending piece; The piezoelectric bending piece, the piezoelectric insulating member and the supporting frame divide the accommodating cavity into a first cavity near the air inlet and a second cavity near the air outlet; The spring return member is located on the support frame of the first cavity. In an initial state, the spring return member presses the piezoelectric bending piece against the piezoelectric insulating member.

2. The piezoelectric pulse valve according to claim 1, characterized in that: The valve body comprises a valve cover and a valve seat, the valve cover and the valve seat are detachably sealed and enclosed to form the accommodating cavity; the air inlet is arranged on the valve cover, and the air outlet is arranged on the valve seat.

3. The piezoelectric pulse valve according to claim 1, characterized in that: The piezoelectric insulating member is a ceramic insulating gasket arranged around the edge of the inner side wall of the accommodating cavity.

4. The piezoelectric pulse valve according to claim 1, characterized in that: The support frame includes a U-groove section and an extension section, the U-groove section passes through the center of the piezoelectric bending piece and has a groove opening toward the first cavity, the U-groove section is formed with an open end close to the opening side of the groove and a closed end away from the open end, and the spring return member is arranged in the groove; the closed end of the U-groove section abuts against the air outlet; the extension section extends from the open end of the U-groove section to the outside of the opening in the first cavity, and the extension section is used to connect with the piezoelectric bending piece.

5. The piezoelectric pulse valve according to claim 4, characterized in that: A sealing component is arranged on the valve body at the air outlet, and the sealing component is located on the contact end surface where the U-groove section abuts against the air outlet.

6. The piezoelectric pulse valve according to claim 1, characterized in that: It also includes a height adjusting member, through which the support frame is connected to the piezoelectric bending piece, so as to adjust the height of the support frame on the piezoelectric bending piece.

7. The piezoelectric pulse valve according to claim 1, characterized in that: The piezoelectric bending piece is an annular disc, and the valve body is centrally symmetrical along the central axis of the piezoelectric bending piece. The air inlet and the air outlet are respectively located on the outer surface of the valve body on both sides of the end face of the piezoelectric bending piece, and the axes of the air inlet and the air outlet are coaxial with the axis of the piezoelectric bending piece.

8. The piezoelectric pulse valve according to claim 1, characterized in that: The cross-sectional area of ​​the air inlet is greater than the cross-sectional area of ​​the air outlet.

9. The piezoelectric pulse valve according to claim 1, characterized in that: A plurality of mounting grooves are arranged at intervals on the outer side wall of the valve body; the mounting grooves are used to fix the piezoelectric pulse valve.

10. The piezoelectric pulse valve according to claim 1, characterized in that: A wiring member is also included, and the wiring member is electrically connected to the piezoelectric bending piece.

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