Automatic helium mass spectrum leak detection device

Abstract

The utility model provides an automatic helium mass spectrometer leak detection device. The automatic helium mass spectrometer leak detection device comprises a rotating disc, a feeding mechanism and a discharging mechanism, the feeding mechanism and the discharging mechanism are provided with suction nozzles moving back and forth between the feeding mechanism and the rotary disc and between the feeding mechanism and the discharging mechanism respectively, the two ends of the feeding mechanism and the two ends of the discharging mechanism are further provided with storage mechanisms respectively, and the rotary disc is provided with an air exhaust mechanism. Through the automatic feeding and discharging mechanism and the automatic detection mechanism, sealing detection can be rapidly carried out on a large batch of products, unqualified products can be automatically removed, and the production efficiency and the reliability of the products are greatly improved.

Description

Technical Field

[0001] The utility model relates to an automated helium mass spectrometer leak detection device. Background Art

[0002] Helium mass spectrometry leak detection uses the property of helium molecules diffusing in a vacuum to detect holes or cracks in products by injecting helium into the inside of the object being tested, and then using a helium mass spectrometer leak detector to detect whether there is helium in the environment around the product. The current method of testing air-sealed devices is to manually place a small number of products in batches into a manual helium mass spectrometer leak detection device for testing after the products are filled with helium. If all products pass the test, the next batch will be tested. However, if one product fails the test, that batch of products will have to be taken out and divided into two small batches for testing separately, and this process will be repeated. This detection method is inefficient, has high labor costs, and may affect subsequent processes. Utility Model Content

[0003] In order to solve the above technical problems, the utility model provides an automated helium mass spectrometer leak detection device.

[0004] The utility model is realized through the following technical solutions.

[0005] The utility model provides an automated helium mass spectrometer leak detection device, comprising a turntable and a loading mechanism and a unloading mechanism arranged on opposite sides of the turntable; the loading mechanism and the unloading mechanism are respectively provided with suction nozzles that move back and forth between the loading mechanism and the turntable and between the loading mechanism and the unloading mechanism, and both ends of the loading mechanism and the unloading mechanism are also respectively provided with material storage mechanisms, and the turntable is provided with an air extraction mechanism.

[0006] The loading mechanism and the unloading mechanism have the same structure. The loading mechanism includes a longitudinal slide and a double-row conveyor belt. The longitudinal slide is arranged away from the turntable, and the double-row conveyor belt is arranged between the longitudinal slide and the turntable. A transverse slide is installed on the longitudinal slide. The transverse slide is perpendicular to the double-row conveyor belt. A push-down cylinder is vertically installed on the transverse slide. A control valve is installed on the push rod end of the push-down cylinder, and a suction nozzle is vertically installed on the lower end of the control valve.

[0007] A limit cylinder is provided under the double-row conveyor belt, and an adapter plate is installed on the push rod of the limit cylinder. A limit plate is vertically installed on both ends of the adapter plate. The cross-section of the limit plate is L-shaped, and the concave surfaces of the two limit plates are relatively erected on both sides of the double-row conveyor belt and on the projection of the travel trajectory of the transverse slide.

[0008] The material storage mechanism includes a silo slide, a connecting rod is installed on the movable end of the silo slide, the connecting rod is fixedly connected to one end face of a mounting seat, hinge ears are provided at the left and right ends of the other end face of the mounting seat, a rotating shaft is provided between the hinge ears, a mounting plate is installed in the middle of the rotating shaft, the end face of the mounting plate facing away from the mounting seat is connected to a right-angle end face of a right-angle connecting block, the other right-angle end face of the right-angle connecting block faces downward and is installed with a clamping cylinder, a connecting plate is respectively installed on the two clamping heads of the clamping cylinder, and a claw is installed at both ends of the lower end face of the connecting plate; a material seat is also provided below the clamping cylinder, the material seat is installed on the movable rod of the lifting cylinder, and a waffle box is placed on the material seat.

[0009] The claw is vertically above the material seat, is L-shaped, has a long end fixed below the connecting plate, and has a short end provided with a vertical strip protrusion. The length of the material seat is the same as that of the waffle box, and has vertical baffles at both ends.

[0010] The waffle box includes a square bottom plate and a panel. The area of ​​the panel is smaller than that of the bottom plate and the panel is fixed on the bottom plate. The two opposite ends of the bottom plate are processed with clamping grooves. The upper end surface of the panel is evenly processed with a plurality of product grooves. There are two clamping grooves. The spacing between the two clamping grooves is the same as the spacing between the claws on the same connecting plate. The bottom of the clamping groove is below the panel.

[0011] A stepper motor is arranged under the turntable, and a plurality of cylindrical grooves are evenly and circumferentially distributed on the end surface of the turntable. A sealing ring is arranged on the periphery of the cylindrical groove. A square box is installed in the cylindrical groove, and a groove having the same size as the product is processed on the square box.

[0012] The air extraction mechanism includes a support plate and a vacuum disk, two parallel downward-pressing cylinders are vertically installed below the vacuum disk, and the push rods of the two downward-pressing cylinders are respectively fixed at opposite ends of the vacuum disk. An air release valve, a standby pump valve, and a mechanical pump valve are also respectively installed on the support plate. The air outlets of the standby pump valve and the mechanical pump valve and the air inlet of the air release valve are connected to three interfaces of a four-way joint through a bellows, and the other interface of the four-way joint is connected to the air extraction hole in the center of the vacuum disk. The air inlets of the standby pump valve and the mechanical pump valve are respectively connected to the standby pump and the mechanical pump through a bellows, and the air outlet of the air release valve is vacant.

[0013] A docking groove having the same diameter as the cylindrical groove is processed at the center of the lower end surface of the vacuum disk, and a probe hole is also processed at the top of the docking groove, in which a detection probe is sealed and installed.

[0014] A waste box is also provided between the unloading mechanism and the rotating disk below the movement track of the suction nozzle.

[0015] The beneficial effect of the utility model is that through the automatic loading and unloading mechanism and the automatic detection mechanism, a large number of products can be quickly tested for sealing, and unqualified products can be automatically rejected, which greatly improves the production efficiency and product reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the vacuum pumping mechanism structure of the utility model;

[0018] Figure 3 This is a schematic diagram of the vacuum coil pipeline structure of the utility model;

[0019] Figure 4 This is a schematic diagram of the bottom structure of the vacuum plate of the utility model;

[0020] Figure 5 It is a structural schematic diagram of the upper and lower material mechanism structure of the utility model;

[0021] Figure 6 This is a schematic diagram of the structure of the material storage module of the utility model;

[0022] Figure 7 This is a schematic diagram of the waffle box structure of the utility model;

[0023] Figure 8 This is a functional diagram of the material storage mechanism of the utility model;

[0024] In the figure: 1-feeding mechanism, 11-longitudinal slide, 12-transverse slide, 13-double-row conveyor belt, 14-push-down cylinder, 15-control valve, 16-suction nozzle, 17-limit plate, 18-adapter plate, 19-limit cylinder, 2-turntable, 21-cylindrical groove, 22-square box, 23-sealing ring, 3-feeding mechanism, 4-storage mechanism, 41-silo slide, 42-connecting rod, 43-mounting seat, 44-hinge ear, 45-mounting plate, 46-right-angle connecting block, 47-clamping cylinder, 48 -Material holder, 49-claw, 410-connecting plate, 5-waste box, 6-exhaust mechanism, 61-spare pump, 62-mechanical pump, 63-support plate, 64-air release valve, 65-spare pump valve, 66-mechanical pump valve, 67-downward pressure cylinder, 68-four-way joint, 69-vacuum plate, 691-docking groove, 692-probe hole, 693-exhaust hole, 610-detection probe, 7-product, 8-bellows, 9-waffle box, 91-bottom plate, 92-clamping groove, 93-panel, 94-product groove. DETAILED DESCRIPTION

[0025] The technical solution of the utility model is further described below, but the scope of protection required is not limited to the description.

[0026] The present invention provides an automated helium mass spectrometer leak detection device, comprising a turntable 2 and a loading mechanism 1 and a unloading mechanism 3 arranged on opposite sides of the turntable 2; the loading mechanism 1 and the unloading mechanism 3 are respectively provided with a suction nozzle 16 that travels back and forth between the loading mechanism 1 and the turntable 2 and between the loading mechanism 1 and the unloading mechanism 3, and the two ends of the loading mechanism 1 and the unloading mechanism 3 are also respectively provided with a material storage mechanism 4, and the turntable 2 is provided with an exhaust mechanism 6. During the production process, a waffle box filled with products is placed on the storage mechanism where the product is unloading. The loading mechanism is used to grab the waffle box on the top of the storage mechanism and place it on the belt. The belt rolls, and the cylinder of the limit mechanism set on the working position moves upward. After the waffle box moves to the working position, the belt stops working. The suction nozzle in the loading mechanism sucks the product and places it in a detection slot of the turntable 2. The turntable rotates to make the next detection slot enter under the suction nozzle, and the detection recess where the product is placed is sent to the bottom of the suction mechanism 6 for suction detection. After the product of the waffle box is placed, the limit cylinder moves downward, and the belt rolls to move the waffle box to the waffle box collection position. The clamping device on the storage mechanism at this position clamps it and places it in the receiving bin, that is, the loading part of the work is completed. After the product on the turntable is tested, it is sent by the turntable to the bottom of the suction nozzle of the unloading mechanism. The suction nozzle of the unloading mechanism sucks it and transports it to the waffle box on the belt of the unloading mechanism. After the waffle box is full, it is sent to the receiving mechanism on the product receiving position.

[0027] Furthermore, the loading mechanism 1 and the unloading mechanism 3 have the same structure, and the loading mechanism 1 includes a longitudinal slide 11 and a double-row conveyor belt 13. The longitudinal slide 11 is arranged away from the turntable 2, and the double-row conveyor belt 13 is arranged between the longitudinal slide 11 and the turntable 2 to avoid the longitudinal slide being arranged between the turntable 2 and the double-row conveyor belt interfering with the movement trajectory of the suction nozzle. A transverse slide 12 is installed on the longitudinal slide 11, and the transverse slide 12 is perpendicular to the double-row conveyor belt 13. A push-down cylinder 14 is vertically installed on the transverse slide 12, and a control valve 15 is installed at the push rod end of the push-down cylinder 14. A suction nozzle 16 is vertically installed at the lower end of the control valve 15. The longitudinal slide 11 drives the transverse slide to reciprocate along the middle of the double-row conveyor belt, and the transverse slide 12 drives the push-down cylinder and the suction nozzle to reciprocate between the double-row conveyor belt and the turntable, so that the movement trajectory of the suction nozzle can cover the entire waffle plate limited in the middle of the double-row conveyor belt.

[0028] Furthermore, in order to accurately locate the position of the waffle plate, a limit cylinder 19 is provided under the double-row conveyor belt 13, and an adapter plate 18 is installed on the push rod of the limit cylinder 19. A limit plate 17 is vertically installed on both ends of the adapter plate 18. The cross-section of the limit plate 17 is L-shaped, and the concave surfaces of the two limit plates 17 are relatively erected on both sides of the double-row conveyor belt 13 and on the projection of the travel trajectory of the horizontal slide 12. Since the double-row conveyor belt is elastic, the position of the waffle box on the belt will be inaccurate when the start and stop of the belt motor is controlled. However, by using the limit plate in a fixed position, the waffle box can be accurately stopped at the position initially set by the system.

[0029] Further, such as Figure 6 As shown, the material storage mechanism 4 includes a silo slide 41, and a connecting rod 42 is installed on the movable end of the silo slide 41, and the connecting rod 42 is fixedly connected to one end face of a mounting seat 43, and hinge ears 44 are provided at the left and right ends of the other end face of the mounting seat 43, and a rotating shaft is provided between the hinge ears 44, and a mounting plate 45 is installed in the middle of the rotating shaft, and the end face of the mounting plate 45 facing away from the mounting seat 43 is connected to a right-angle end face of a right-angle connecting block 46, and the other right-angle end face of the right-angle connecting block 46 faces downward and is installed with a clamping cylinder 47, and the mounting plate on which the clamping cylinder 47 is installed is hinged on the mounting seat, so that after the clamping cylinder clamps the waffle box, one end of the waffle box will fall first, and when the silo slide 41 drives it above the belt, the end that falls first will contact the belt first, and after the clamping cylinder releases the waffle box, the collision between the waffle box and the belt will be reduced, which can prevent the product from being scattered and damaged by a violent collision.

[0030] A connecting plate 410 is respectively installed on the two clamping heads of the clamping cylinder 47, and a claw 49 is installed at both ends of the lower end surface of the connecting plate 410; a material seat 48 is also provided under the clamping cylinder 47, and the material seat 48 is installed on the movable rod of the lifting cylinder, and a waffle box 9 is placed on the material seat 48.

[0031] like Figure 8 As shown, a storage mechanism is installed at both ends of the loading mechanism and the unloading mechanism respectively. The one on the left side of the loading mechanism is used to place waffle boxes with uninspected products, and the one on the right side is used to place waffle boxes after the products are delivered; the storage mechanism on the left side of the unloading mechanism is used to place waffle boxes for collecting inspected products, and the one on the right side is used to place waffle boxes filled with qualified products.

[0032] Furthermore, the claw 49 on the material storage mechanism is vertically above the material seat 48. The claw 49 is L-shaped, with the long end fixed below the connecting plate 410 and a vertical strip protrusion at the short end. The material seat 48 has the same length as the waffle box 9, and vertical baffles are provided at both ends. When the waffle box is clamped, the strip protrusion extends from the clamping groove 92 into the bottom of the panel 93, and its short side is stuck in the clamping groove 92 to prevent the waffle box from sliding in the claw.

[0033] Furthermore, the waffle box includes a square bottom plate 91 and a panel 93. The panel 93 has an area smaller than that of the bottom plate 91 and is fixed on the bottom plate 91. Clamping grooves 92 are processed at opposite ends of the bottom plate 91. A plurality of product grooves 94 are evenly processed on the upper end surface of the panel 93. There are two clamping grooves 92. The spacing between the two clamping grooves 92 is the same as the spacing between the claws 49 on the same connecting plate 410. The bottom of the clamping groove 92 is below the panel 93.

[0034] Furthermore, a stepper motor is provided under the turntable 2, and a plurality of cylindrical grooves 21 are evenly and circumferentially distributed on the end surface of the turntable 2. A sealing ring 23 is provided on the periphery of the cylindrical groove 21. A square box 22 is installed in the cylindrical groove 21. The square box 22 can be replaced according to different products. A groove of the same size as the product is processed on the square box 22 for placing the product for testing.

[0035] Furthermore, the vacuum mechanism 6 includes a support plate 63 and a vacuum disk 69, two parallel downward pressure cylinders 67 are vertically installed below the vacuum disk 69, and the push rods of the two downward pressure cylinders 67 are respectively fixed at the opposite ends of the vacuum disk 69, and the support plate 63 is also respectively installed with a venting valve 64, a standby pump valve 65, and a mechanical pump valve 66. The air outlets of the standby pump valve 65 and the mechanical pump valve 66 and the air inlet of the venting valve 64 are connected to the three interfaces of the four-way joint 68 through bellows, and the other interface of the four-way joint 68 is connected to the vacuum hole 693 in the center of the vacuum disk 69, and the air inlets of the standby pump valve 65 and the mechanical pump valve 66 are respectively connected to the standby pump 61 and the mechanical pump 62 through bellows, and the air outlet of the venting valve 64 is vacant.

[0036] The product detection process on the turntable is as follows:

[0037] Step 1: The downward pressure cylinder drives the vacuum plate downward to press the sealing ring;

[0038] Step 2: The mechanical pump is turned on to keep the vacuum pumping state at all times, ensuring that the bellows is always in a vacuumed space (vacuuming can be achieved quickly);

[0039] Step 3: The solenoid valve of the mechanical pump opens and starts pre-pumping.

[0040] Step 4: After the detection probe detects that the vacuum gauge has reached the set pre-pumping value, close the mechanical pump solenoid valve;

[0041] Step 5: Start leak detection;

[0042] Step 6: After the leak detection is completed, the vent valve is opened to release the pressure, and then the downward pressure cylinder drives the vacuum plate to move upward to complete the entire helium mass spectrometer leak detection process (the pipe connected to the solenoid valve is a vacuum bellows).

[0043] Step 7: Feedback the result of the helium mass spectrometer leak detection process to the controller. Based on the detection result, the controller transports unqualified products to the waste box using the suction nozzle on the unloading mechanism, and transports qualified products to the waffle box.

[0044] Furthermore, a docking groove having the same diameter as the cylindrical groove 21 is processed at the center of the lower end surface of the vacuum disk 69 , and a probe hole 692 is also processed at the top of the docking groove, in which a detection probe 610 is sealed and installed.

[0045] Furthermore, a waste box 5 is provided between the unloading mechanism 3 and the turntable 2 below the movement track of the suction nozzle 16, and the waste box is used to place unqualified products to facilitate the recycling of discarded products.

Claims

1. An automated helium mass spectrometer leak detection device, characterized in that: The invention comprises a turntable (2) and a loading mechanism (1) and a unloading mechanism (3) arranged on opposite sides of the turntable (2); the loading mechanism (1) and the unloading mechanism (3) are respectively provided with suction nozzles (16) which move back and forth between the loading mechanism (1) and the turntable (2) and between the loading mechanism (1) and the unloading mechanism (3); the two ends of the loading mechanism (1) and the unloading mechanism (3) are also respectively provided with material storage mechanisms (4); and the turntable (2) is provided with an air extraction mechanism (6).

2. The automated helium mass spectrometer leak detection device according to claim 1, characterized in that: The loading mechanism (1) and the unloading mechanism (3) have the same structure. The loading mechanism (1) includes a longitudinal slide (11) and a double-row conveyor belt (13). The longitudinal slide (11) is arranged away from the turntable (2). The double-row conveyor belt (13) is arranged between the longitudinal slide (11) and the turntable (2). A transverse slide (12) is installed on the longitudinal slide (11). The transverse slide (12) is perpendicular to the top of the double-row conveyor belt (13). A push-down cylinder (14) is vertically installed on the transverse slide (12). A control valve (15) is installed at the push rod end of the push-down cylinder (14). A suction nozzle (16) is vertically installed at the lower end of the control valve (15).

3. The automated helium mass spectrometer leak detection device according to claim 2, characterized in that: A limit cylinder (19) is provided below the double-row conveyor belt (13), a transfer plate (18) is installed on the push rod of the limit cylinder (19), and a limit plate (17) is vertically installed on both ends of the transfer plate (18), the cross section of the limit plate (17) is L-shaped, and the concave surfaces of the two limit plates (17) are relatively erected on both sides of the double-row conveyor belt (13) and on the projection of the travel track of the transverse slide (12).

4. The automated helium mass spectrometer leak detection device according to claim 1, characterized in that: The material storage mechanism (4) comprises a silo slide (41), a connecting rod (42) is installed on the movable end of the silo slide (41), the connecting rod (42) is fixedly connected to one end surface of a mounting seat (43), hinge ears (44) are provided at the left and right ends of the other end surface of the mounting seat (43), a rotating shaft is provided between the hinge ears (44), a mounting plate (45) is installed in the middle of the rotating shaft, and the mounting plate (45) is opposite to the end surface of the mounting seat (43) and is connected to one end of a right-angle connecting block (46). The right-angle end faces are connected, the other right-angle end face of the right-angle connection block (46) faces downward and is installed with a clamping cylinder (47), two clamping heads of the clamping cylinder (47) are respectively installed with a connecting plate (410), and both ends of the lower end face of the connecting plate (410) are installed with a claw (49); a material seat (48) is also provided below the clamping cylinder (47), the material seat (48) is installed on the movable rod of the lifting cylinder, and a waffle box (9) is placed on the material seat (48).

5. The automated helium mass spectrometer leak detection device according to claim 4, characterized in that: The claw (49) is vertically disposed above the material seat (48). The claw (49) is L-shaped, with a long end fixed below the connecting plate (410) and a short end provided with a vertical strip protrusion. The length of the material seat (48) is the same as that of the waffle box (9), and vertical baffles are provided at both ends.

6. The automated helium mass spectrometer leak detection device according to claim 5, characterized in that: The waffle box (9) comprises a square bottom plate (91) and a panel (93); the panel (93) has an area smaller than that of the bottom plate (91) and is fixed on the bottom plate (91); clamping grooves (92) are processed at opposite ends of the bottom plate (91); a plurality of product grooves (94) are evenly processed on the upper end surface of the panel (93); two clamping grooves (92) are processed; the spacing between the two clamping grooves (92) is the same as the spacing between the claws (49) on the same connecting plate (410); and the bottom of the clamping groove (92) is below the panel (93).

7. The automated helium mass spectrometer leak detection device according to claim 1, characterized in that: A stepping motor is arranged below the turntable (2). A plurality of cylindrical grooves (21) are evenly and circumferentially distributed on the end surface of the turntable (2). A sealing ring (23) is arranged on the periphery of the cylindrical groove (21). A square box (22) is installed in the cylindrical groove (21). A groove having the same size as the product is processed on the square box (22).

8. The automated helium mass spectrometer leak detection device according to claim 1, characterized in that: The air extraction mechanism (6) comprises a support plate (63) and a vacuum plate (69). Two mutually parallel downward pressure cylinders (67) are vertically installed below the vacuum plate (69). Push rods of the two downward pressure cylinders (67) are respectively fixed at two opposite ends of the vacuum plate (69). The support plate (63) is also respectively installed with an air release valve (64), a standby pump valve (65), and a mechanical pump valve (66). The air outlets of the standby pump valve (65) and the mechanical pump valve (66) and the air inlet of the air release valve (64) are connected to three interfaces of a four-way joint (68) through a bellows. Another interface of the four-way joint (68) is connected to an air extraction hole (693) at the center of the vacuum plate (69). The air inlets of the standby pump valve (65) and the mechanical pump valve (66) are respectively connected to the standby pump (61) and the mechanical pump (62) through a bellows. The air outlet of the air release valve (64) is left vacant.

9. The automated helium mass spectrometer leak detection device according to claim 8, characterized in that: A docking groove (691) having the same diameter as the cylindrical groove (21) is processed at the center of the lower end surface of the vacuum plate (69), and a probe hole (692) is also processed at the top of the docking groove (691), and a detection probe (610) is sealed and installed in the probe hole (692).

10. The automated helium mass spectrometer leak detection device according to claim 1, characterized in that: A waste box (5) is also provided between the unloading mechanism (3) and the rotating disk (2) below the movement track of the suction nozzle (16).

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