Exhaust device

Abstract

The embodiment of the utility model discloses an exhaust device. The exhaust device comprises at least two cavity exhaust mechanisms, each cavity exhaust mechanism comprises a cavity air inlet and a cavity air outlet, the cavity air inlets of the cavity exhaust mechanisms are communicated with different semiconductor cleaning equipment cavities, and the cavity air outlets are used for being communicated with the outside; the gas-liquid separation partition plate is arranged in at least one cavity exhaust mechanism; and the liquid discharge pipe is connected with at least one cavity exhaust mechanism. According to the embodiment of the utility model, a plurality of cavity exhaust mechanisms can be utilized to realize independent exhaust of multiple cavities, so that the mutual influence of exhaust of each cavity is reduced; and liquid steam discharged from different cavities can be separated into gas discharged from the air outlets of the cavities and liquid discharged from the liquid discharge pipes by utilizing the gas-liquid separation partition plates and the liquid discharge pipes, so that the air discharge efficiency of all the cavities can be improved, and meanwhile, the finally discharged gas can meet the discharge standard.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to an exhaust device. Background Art

[0002] At present, semiconductors are widely used in integrated circuits, displays, optoelectronic devices and other fields. In the production and processing of semiconductors, the semiconductor cleaning process plays a vital role. In the semiconductor cleaning process, it is often necessary to clean multiple chambers at the same time, and then gather the gases in all the chambers in the chamber of the exhaust device and then discharge them together. Due to the number of exhaust ports in each chamber and the different gas pressures discharged from different chambers, it is easy to retain liquid and exhaust dead corners in some areas of the exhaust device cavity, which will cause corrosion and liquid accumulation in the exhaust device pipeline, and also cause the exhaust to fail to meet the emission standards. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes an exhaust device to solve the problem that the exhaust efficiency of multiple cavities in the prior art is low and the exhaust gas cannot meet the emission standards due to the presence of liquid vapor.

[0004] The utility model provides an exhaust device, comprising:

[0005] At least two cavity exhaust mechanisms, each of which comprises a cavity air inlet and a cavity air exhaust port, the cavity air inlet of each cavity exhaust mechanism is respectively connected to a different semiconductor cleaning equipment cavity, and the cavity air exhaust port is used to connect to the outside world;

[0006] A gas-liquid separation partition is arranged in at least one of the cavity exhaust mechanisms;

[0007] A liquid drain pipe is connected to at least one of the cavity exhaust mechanisms and is used to drain the liquid in the cavity exhaust mechanism to the outside.

[0008] An exhaust device provided by the utility model can utilize multiple cavity exhaust mechanisms to achieve independent exhaust of multiple chambers, reduce the mutual influence of exhaust of each cavity, avoid the formation of exhaust dead corners in the chamber of the cavity exhaust mechanism, and each cavity exhaust mechanism is installed independently, and each cavity exhaust mechanism can be independently controlled, thereby facilitating subsequent inspection and maintenance; it can also utilize gas-liquid separation partitions and drain pipes to separate liquid vapor discharged from different chambers into gas discharged from the cavity exhaust port and liquid discharged from the drain pipe, thereby improving the exhaust efficiency of all cavities and ensuring that the final exhausted gas meets the emission standards.

[0009] In one embodiment of the above-mentioned exhaust device, along the exhaust direction, the gas-liquid separation partition is arranged between the cavity air inlet and the cavity air outlet of the corresponding cavity exhaust mechanism.

[0010] In one embodiment of the above-mentioned exhaust device, an extension direction of the gas-liquid separation partition and an exhaust direction of the corresponding cavity exhaust mechanism form a set angle.

[0011] In one embodiment of the above-mentioned exhaust device, in the exhaust direction, the projection of the cavity air inlet is located within the projection range of the gas-liquid separation partition.

[0012] In one embodiment of the above-mentioned exhaust device, a guide groove is provided on the windward surface of the gas-liquid separation partition along the exhaust direction.

[0013] In one embodiment of the above-mentioned exhaust device, an observation window is provided on the side wall of the cavity exhaust mechanism.

[0014] In one embodiment of the above-mentioned exhaust device, a differential pressure gauge is provided on the cavity exhaust mechanism.

[0015] In one embodiment of the above-mentioned exhaust device, the cavity air inlet and / or the cavity exhaust outlet are arranged at the bottom of the cavity exhaust mechanism in the direction of gravity, and the surrounding sides of the cavity air inlet and / or the cavity exhaust outlet are provided with isolation rings extending upward to a set height along the direction of gravity, and the cavity exhaust mechanism is provided with a drainage port connected to the drainage pipe at the lowest point in the direction of gravity, and the drainage port is arranged between the side wall of the cavity exhaust mechanism and the isolation ring.

[0016] In one embodiment of the above-mentioned exhaust device, it also includes a total exhaust mechanism, which includes at least two total air inlets arranged in one-to-one correspondence with the cavity exhaust ports and a total air exhaust port for connecting to the outside world, and the interval distance between every two adjacent total air inlets is not less than a set distance.

[0017] In one embodiment of the above-mentioned exhaust device, two groups of the gas-liquid separation baffles are provided in at least one of the cavity exhaust mechanisms, and the two groups of the gas-liquid separation baffles are staggered along the exhaust direction on the two opposite side walls of the cavity exhaust mechanism to form an S-shaped air duct.

[0018] In one embodiment of the above-mentioned exhaust device, the projections of the two groups of gas-liquid separation partitions in the exhaust direction at least partially overlap.

[0019] In one embodiment of the above-mentioned exhaust device, the two groups of gas-liquid separation baffles are inclined toward the air inlet of the cavity at one end facing each other, so that the two groups of gas-liquid separation baffles form an air vent between the end away from each other and the side wall of the cavity exhaust mechanism connected thereto.

[0020] In one embodiment of the above-mentioned exhaust device, each of the ventilation grooves is provided with a guide port at the lowest point in the gravity direction.

[0021] One or more of the above embodiments of the present invention have at least one or more of the following beneficial effects:

[0022] Multiple cavity exhaust mechanisms can be used to achieve independent exhaust of multiple chambers, reduce the mutual influence of exhaust of each cavity, avoid the formation of exhaust dead corners in the chamber of the cavity exhaust mechanism, and each cavity exhaust mechanism is installed independently, and each cavity exhaust mechanism can be independently controlled, so as to facilitate subsequent inspection and maintenance; gas-liquid separation partitions and drain pipes can also be used to separate liquid vapor discharged from different chambers into gas discharged from the cavity exhaust port and liquid discharged from the drain pipe, thereby improving the exhaust efficiency of all cavities and ensuring that the final exhausted gas meets the emission standards.

[0023] Additional aspects and advantages of the present invention will be given in part in the following description and in part will become apparent from the following description or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The disclosure of the present invention will become easier to understand with reference to the accompanying drawings. It is easy for those skilled in the art to understand that these drawings are only for illustrative purposes and are not intended to limit the scope of protection of the present invention. In addition, similar numbers in the drawings are used to represent similar components, among which:

[0025] Figure 1 This is a schematic diagram of the structure of the exhaust device described in the embodiment of the present application;

[0026] Figure 2 This is a schematic structural diagram of the front side of the exhaust device described in the embodiment of the present application;

[0027] Figure 3 This is a schematic structural diagram of the back side of the exhaust device described in an embodiment of the present application;

[0028] Figure 4 This is a schematic structural diagram of the side surface of the exhaust device described in an embodiment of the present application;

[0029] Figure 5 One of the embodiments of this application is Figure 4 Sectional view at AA in the middle;

[0030] Figure 6 Another embodiment of the present application is Figure 4 Sectional view at AA in the middle;

[0031] Figure 7 This is a schematic diagram of the structure of the cavity exhaust mechanism described in an embodiment of the present application;

[0032] Figure 8 This is a schematic diagram of the structure of the total exhaust mechanism described in the embodiment of the present application;

[0033] Fig. 9 This is a schematic diagram of the structure of the gas-liquid separation partition described in one of the embodiments of the present application.

[0034] Description of Reference Numerals

[0035] 101. First cavity exhaust mechanism; 102. Second cavity exhaust mechanism; 11. Cavity air inlet; 12. Cavity air outlet; 13. Guide port; 14. Observation window; 15. Drain port; 16. Isolation ring; 2. Gas-liquid separation baffle; 21. Guide trough; 3. Drain pipe; 4. Main exhaust mechanism; 41. Main air inlet; 42. Main exhaust port; 5. Differential pressure gauge; 51. Differential pressure gauge body; 52. Pressure taker; 6. Flange. DETAILED DESCRIPTION

[0036] Some embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the protection scope of the present invention.

[0037] The utility model aims at the problem that the multi-cavity exhaust efficiency in the prior art is low and the exhaust gas may fail to meet the emission standards due to the presence of liquid vapor. The utility model provides an exhaust device which can utilize multiple cavity exhaust mechanisms to achieve independent exhaust of multiple chambers, reduce the mutual influence of the exhaust of each cavity, avoid the formation of exhaust dead corners in the chamber of the cavity exhaust mechanism, and each cavity exhaust mechanism is installed independently, and each cavity exhaust mechanism can be controlled independently, so as to facilitate subsequent inspection and maintenance; it can also utilize gas-liquid separation partitions and drain pipes to separate liquid vapor discharged from different chambers into gas discharged from the cavity exhaust port and liquid discharged from the drain pipe, so as to improve the exhaust efficiency of all cavities and ensure that the gas finally discharged meets the emission standards.

[0038] The present invention will be described in detail below through specific embodiments.

[0039] Reference Figures 1 to 9As shown, this embodiment provides an exhaust device, including: at least two cavity exhaust mechanisms, each cavity exhaust mechanism includes a cavity air inlet 11 and a cavity exhaust port 12, the cavity air inlet 11 of each cavity exhaust mechanism is respectively connected to a different semiconductor cleaning equipment cavity, and the cavity exhaust port 12 is used to connect to the outside; a gas-liquid separation partition 2, which is arranged in at least one cavity exhaust mechanism; a drain pipe 3, which is connected to at least one cavity exhaust mechanism and is used to discharge the liquid in the cavity exhaust mechanism to the outside.

[0040] The exhaust device provided in this embodiment can utilize multiple cavity exhaust mechanisms to achieve independent exhaust of multiple chambers, reduce the mutual influence of exhaust of each cavity, and avoid the formation of exhaust dead corners in the chamber of the cavity exhaust mechanism. Moreover, each cavity exhaust mechanism is installed independently, and each cavity exhaust mechanism can be independently controlled, thereby facilitating subsequent inspection and maintenance; it can also utilize the gas-liquid separation partition 2 and the drain pipe 3 to separate the liquid vapor discharged from different chambers into gas discharged from the cavity exhaust port 12 and liquid discharged from the drain pipe 3, thereby improving the exhaust efficiency of all cavities and ensuring that the final exhausted gas meets the emission standards.

[0041] Specifically, a gas-liquid separation partition 2 may be provided in each cavity exhaust mechanism, or only in the cavity exhaust mechanism where liquid vapor accounts for a relatively large proportion, as long as the final exhausted gas meets the exhaust standard.

[0042] In one embodiment of the above-mentioned exhaust device, along the exhaust direction of the cavity exhaust mechanism, the gas-liquid separation baffle 2 is arranged between the cavity air inlet 11 and the cavity air outlet 12 of the cavity exhaust mechanism corresponding to it, that is, the gas discharged from the cavity passes through the cavity air inlet 11, can first contact with the gas-liquid separation baffle 2, and after completing the gas-liquid separation work, flow to the cavity air outlet 12, thereby further improving the gas-liquid separation efficiency of the exhaust device.

[0043] Continue to refer to Figure 5 and Figure 6 As shown, in one embodiment of the above-mentioned exhaust device, the extension direction of the gas-liquid separation partition 2 and the exhaust direction of the corresponding cavity exhaust mechanism are at a set angle; it should be understood that the gas-liquid separation partition 2 can have a windward surface (such as Figure 5 and Figure 6 That is to say, the exhaust direction can be opposite to the windward side of the gas-liquid separation partition 2, and then more gas can contact the surface of the gas-liquid separation partition 2, thereby further improving the gas-liquid separation efficiency.

[0044] In one embodiment of the above-mentioned exhaust device, in the exhaust direction, the projection of the cavity air inlet 11 is located within the projection range of the gas-liquid separation partition 2; it should be noted that such a setting can ensure that the air discharged from the cavity will first contact the gas-liquid separation partition 2 when it enters the interior of the cavity exhaust mechanism from the cavity air inlet 11, thereby reducing the situation in which the gas with a high liquid vapor content has not yet contacted the gas-liquid separation partition 2 and completed the gas-liquid separation, and is discharged from the cavity exhaust port 12.

[0045] In one embodiment of the above-mentioned exhaust device, the windward surface of the gas-liquid separation partition 2 is provided with a guide groove 21 along the exhaust direction. Fig. 9 As shown, the guide groove 21 can increase the surface area of ​​the windward side of the gas-liquid separation baffle 2, thereby increasing the gas-liquid separation efficiency of the gas-liquid separation baffle 2. At the same time, the setting of the guide groove 21 can make the liquid formed on the windward side of the gas-liquid separation baffle 2 flow quickly to the drain pipe 3, avoiding staying on the windward side of the gas-liquid separation baffle 2 for a long time and affecting the subsequent gas-liquid separation work of the exhaust. Specifically, the extension direction of the guide groove 21 can also extend along the gravity direction, as long as it can ensure that the liquid flows out to the drain pipe 3 quickly after being formed.

[0046] Continue to refer to Figure 1 , Figure 2 , Figure 7 and Figure 8 As shown, in one embodiment of the above-mentioned exhaust device, an observation window 14 is opened on the side wall of the cavity exhaust mechanism; an observation window 14 may also be opened on the side wall of the total exhaust mechanism 4, and the observation window 14 may specifically be a through hole opened on the side wall of the cavity exhaust mechanism and the side wall of the total exhaust mechanism 4, and then a light-transmitting plate is sealed on the through hole, so that the internal conditions of the cavity exhaust mechanism and the total exhaust mechanism 4 can be easily observed.

[0047] In one embodiment of the above-mentioned exhaust device, a differential pressure gauge 5 is provided on the cavity exhaust mechanism. Figures 3 to 6As shown, the differential pressure gauge 5 also includes a differential pressure gauge body 51 and a pressure taker 52. The differential pressure gauge body 51 can be arranged on the outer bracket of the shell of the cavity exhaust mechanism or the shell of the total exhaust mechanism 4, and the pressure taker 52 can be arranged on the side wall of the cavity exhaust mechanism and the total exhaust mechanism 4, and extend into the cavity exhaust mechanism and the total exhaust mechanism 4 to obtain the wind source air pressure inside the cavity exhaust mechanism and the total exhaust mechanism 4; wherein, since there are multiple cavity exhaust mechanisms, each semiconductor cleaning equipment cavity is connected to a different cavity exhaust mechanism, respectively, so that the pressure value in each cavity exhaust mechanism can be accurately measured by using multiple pressure takers 52, and with the independent installation of multiple cavity exhaust mechanisms, when any one or more pressure takers 52 detect that the pressure value in the cavity exhaust mechanism is at an abnormal value, it is more convenient to inspect and repair the cavity exhaust mechanism with problems.

[0048] Continue to refer to Figures 5 to 8 As shown, in one embodiment of the above-mentioned exhaust device, the cavity air inlet 11 and / or the cavity air outlet 12 are arranged at the bottom of the cavity exhaust mechanism in the gravity direction, and the surrounding side of the cavity air inlet 11 and / or the cavity air outlet 12 is provided with an isolation ring 16 extending upwardly to a set height along the gravity direction, and the cavity exhaust mechanism is provided with a drain port 15 connected to the drain pipe 3 at the lowest point in the gravity direction, and the drain port 15 is arranged between the side wall of the cavity exhaust mechanism and the isolation ring 16; the drain port 15 is provided at the bottom of the cavity exhaust mechanism. Such a setting can prevent residual liquid in the cavity exhaust mechanism from being unable to be completely discharged; wherein, the isolation ring 16 can be formed at the end of the pipeline connected to the cavity air inlet 11 and / or the cavity air exhaust port 12, specifically, the end of the pipeline inserted into the cavity exhaust mechanism. The isolation ring 16 can prevent the liquid separated by the gas-liquid separation partition 2 from flowing into the cavity air inlet 11 and / or the cavity air exhaust port 12, and separate the liquid at the bottom of the cavity exhaust mechanism from the cavity air inlet 11 and / or the cavity air exhaust port 12.

[0049] Continue to refer to Figures 1 to 6 and Figure 8As shown, in one embodiment of the above-mentioned exhaust device, the exhaust device also includes a total exhaust mechanism 4, the total exhaust mechanism 4 includes at least two total air inlets 41 arranged in a one-to-one correspondence with the cavity exhaust ports 12 and a total exhaust port 42 for connecting to the outside world, and the spacing distance between each two adjacent total air inlets 41 is not less than the set distance; the bottom of the total exhaust mechanism 4 can be provided with a drain port 15, and the liquid is discharged through the drain pipe 3. The drain port 15 is arranged in this way to avoid the residual liquid in the total exhaust mechanism 4 from being unable to be drained; such a setting can collect the gases discharged from all cavity exhaust mechanisms for easy detection. At the same time, the gases discharged from all cavity exhaust mechanisms can also be subjected to secondary gas-liquid separation in the total exhaust mechanism 4, and the spacing distance is set between two adjacent total air inlets 41, which can avoid the wind pressures of the two cavity exhaust mechanisms connected to the two adjacent total air inlets 41 from affecting each other, thereby ensuring the exhaust efficiency of the entire exhaust device.

[0050] Continue to refer to Figures 1 to 7 As shown, the cavity exhaust port 12 of the cavity exhaust mechanism needs to be connected to the two main air inlets 41 of the main exhaust mechanism 4 through the flange 6. By utilizing the setting of the flange 6, it is possible to ensure that a spacing distance is reserved between every two main air inlets 41, thereby further avoiding the mutual influence of wind pressure between the two cavity exhaust mechanisms connected to the two adjacent main air inlets 41, thereby ensuring the exhaust efficiency of the entire exhaust device.

[0051] Specifically, two adjacent cavity exhaust mechanisms may be a first cavity exhaust mechanism 101 and a second cavity exhaust mechanism 102, respectively. It should be understood that the "first" in the first cavity exhaust mechanism 101 and the "second" in the second cavity exhaust mechanism 102 do not refer to the first cavity and the second cavity, but are a naming method used to distinguish the two cavity exhaust mechanisms; continue to refer to Figures 1 to 3 As shown, the first cavity exhaust mechanism 101 and the second cavity exhaust mechanism 102 can have a fitting surface, which can improve the stability of the two during exhaust operation and provide support for each other. At the same time, the fitting surface can also be used to form a restriction to avoid two adjacent cavity exhaust mechanisms being too close to each other, which affects each other's wind pressure when connected to two adjacent total air inlets 41 of the total exhaust mechanism 4.

[0052] Continue to refer to Figure 1 and Figure 7 As shown, three cavity air inlets 11 can be arranged at equal intervals on the cavity exhaust mechanism, that is, three cavity air inlets 11 are arranged according to the three vertex positions of an equilateral triangle to improve the exhaust efficiency; it should be noted that the three cavity air inlets 11 can all be connected to one semiconductor cleaning equipment cavity, or can be respectively connected to different semiconductor cleaning equipment cavities.

[0053] Furthermore, the isolation ring 16 can also be formed at the end of the pipeline connected to the total air inlet 41 and / or the total air outlet 42 of the total exhaust mechanism 4, specifically, the pipeline is inserted into the end inside the total exhaust mechanism 4, so as to prevent the liquid separated by the gas-liquid separation partition 2 from flowing into the total air inlet 41 and / or the total air outlet 42, and separate the liquid at the bottom of the total exhaust mechanism 4 from the total air inlet 41 and / or the total air outlet 42.

[0054] Continue to refer to Figure 6 As shown, in one embodiment of the above-mentioned exhaust device, two groups of gas-liquid separation baffles 2 are provided in at least one cavity exhaust mechanism, and the two groups of gas-liquid separation baffles 2 are staggered along the exhaust direction on the two opposite side walls of the cavity exhaust mechanism to form an S-shaped air duct; such a configuration can increase the contact area between the gas and the gas-liquid separation baffle 2, thereby improving the gas-liquid separation efficiency of the gas-liquid separation baffle 2; in other embodiments, the gas-liquid separation baffle 2 can also divide the interior of the cavity exhaust mechanism into air ducts of other shapes such as circular, maze, etc., as long as the gas-liquid separation efficiency can be improved.

[0055] Further, continue to refer to Figure 6 As shown, Figure 6 The dotted line in the figure is the exhaust direction, and the projections of the two groups of gas-liquid separation baffles 2 in the exhaust direction at least partially overlap; after the gas enters the cavity exhaust mechanism from the cavity air inlet 11, it will first contact the windward surface of one of the gas-liquid separation baffles 2, and then the gas begins to diffuse around, and then when it flows toward the cavity exhaust port 12, it will continue to flow toward the cavity exhaust port 12 under the guidance of the next gas-liquid separation baffle 2. This arrangement can significantly increase the contact area and contact time between the gas and the gas-liquid separation baffle 2, so that the cavity exhaust mechanism can complete the gas-liquid separation work more efficiently.

[0056] Continue to refer to Figure 6 As shown, in one embodiment of the above-mentioned exhaust device, the ends of the two groups of gas-liquid separation baffles 2 facing each other are inclined toward the cavity air inlet 11, so that the two groups of gas-liquid separation baffles 2 form a wind groove between the ends away from each other and the side wall of the cavity exhaust mechanism connected thereto. Specifically, after the gas enters the cavity exhaust mechanism from the cavity air inlet 11, it will first contact the windward surface of one of the gas-liquid separation baffles 2, and then the gas begins to flow toward the gas-liquid separation baffle 2 under the guidance of the gas-liquid separation baffle 2. The gas flows from the connection between the partition 2 and the side wall of the cavity exhaust mechanism (ventilation groove). After the gas reaches the ventilation groove, it will begin to return to the side wall on the other side, and then flow along the side wall on the other side to the ventilation groove formed by the next gas-liquid separation partition 2 and the side wall on the other side, and then continue to flow from the ventilation groove along the windward surface of the gas-liquid separation partition 2 to the side wall opposite to the second gas-liquid separation partition 2, and so on. This arrangement can further significantly improve the gas-liquid separation efficiency of the cavity exhaust mechanism.

[0057] Continue to refer to Figure 6 and Fig. 9 As shown, in one embodiment of the above-mentioned exhaust device, each vent groove is provided with a guide port 13 at the lowest point in the gravity direction. Specifically, the cavity air inlet 11 can be set at the top of the cavity exhaust mechanism in the gravity direction, and the cavity exhaust port 12 can be set at the bottom of the cavity exhaust mechanism in the gravity direction; after the liquid is formed on the windward surface of the corresponding gas-liquid separation partition 2, under the action of gravity, the liquid will flow along the guide groove 21 to the bottom of the vent groove. At this time, the liquid can be discharged downward layer by layer through the guide port 13 until the position of the discharge port 15. The guide port 13 can prevent the liquid from accumulating in the vent groove and affecting the subsequent exhaust effect.

[0058] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0059] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0060] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations of the present invention. Ordinary technicians in the field can change, modify, replace and modify the above embodiments within the scope of the present invention.

Claims

1. An exhaust device, characterized in that: include: At least two cavity exhaust mechanisms, each of the cavity exhaust mechanisms comprising a cavity air inlet (11) and a cavity air exhaust port (12), the cavity air inlet (11) of each cavity exhaust mechanism being respectively connected to a different semiconductor cleaning equipment cavity, and the cavity air exhaust port (12) being used to connect to the outside; A gas-liquid separation partition (2) is arranged in at least one of the cavity exhaust mechanisms; A liquid discharge pipe (3) is connected to at least one of the cavity exhaust mechanisms and is used to discharge liquid in the cavity exhaust mechanism to the outside.

2. The exhaust device according to claim 1, characterized in that: Along the exhaust direction, the gas-liquid separation partition (2) is arranged between the cavity air inlet (11) and the cavity air outlet (12) of the cavity exhaust mechanism corresponding thereto.

3. The exhaust device according to claim 2, characterized in that: The extension direction of the gas-liquid separation partition (2) and the exhaust direction of the corresponding cavity exhaust mechanism form a set angle.

4. The exhaust device according to claim 3, characterized in that: In the exhaust direction, the projection of the cavity air inlet (11) is located within the projection range of the gas-liquid separation partition (2).

5. The exhaust device according to claim 1, characterized in that: The windward surface of the gas-liquid separation partition (2) is provided with a guide groove (21) along the exhaust direction.

6. The exhaust device according to claim 1, characterized in that: An observation window (14) is provided on the side wall of the cavity exhaust mechanism.

7. The exhaust device according to claim 1, characterized in that: The cavity exhaust mechanism is provided with a differential pressure gauge (5).

8. The exhaust device according to claim 1, characterized in that: The cavity air inlet (11) and / or the cavity air outlet (12) are arranged at the bottom of the cavity air exhaust mechanism in the direction of gravity, and the surrounding side of the cavity air inlet (11) and / or the cavity air outlet (12) is provided with an isolation ring (16) extending upward to a set height in the direction of gravity. The cavity air exhaust mechanism is provided with a drainage port (15) connected to the drainage pipe (3) at the lowest point in the direction of gravity, and the drainage port (15) is arranged between the side wall of the cavity air exhaust mechanism and the isolation ring (16).

9. The exhaust device according to claim 1, characterized in that: It also includes a total exhaust mechanism (4), the total exhaust mechanism (4) including at least two total air inlets (41) arranged in one-to-one correspondence with the cavity exhaust ports (12) and a total air exhaust port (42) for communicating with the outside, and the spacing distance between each two adjacent total air inlets (41) is not less than a set distance.

10. The exhaust device according to any one of claims 1 to 9, characterized in that: At least one of the cavity exhaust mechanisms is provided with two groups of the gas-liquid separation baffles (2), and the two groups of the gas-liquid separation baffles (2) are staggeredly arranged on two opposite side walls of the cavity exhaust mechanism along the exhaust direction to form an S-shaped air duct.

11. The exhaust device according to claim 10, characterized in that: The projections of the two groups of gas-liquid separation partitions (2) in the exhaust direction at least partially overlap.

12. The exhaust device according to claim 11, characterized in that: The ends of the two groups of gas-liquid separation baffles (2) facing each other are inclined toward the cavity air inlet (11), so that the two groups of gas-liquid separation baffles (2) form an air vent between the ends away from each other and the side wall of the cavity exhaust mechanism connected thereto.

13. The exhaust device according to claim 12, characterized in that: Each of the ventilation grooves is provided with a flow guide port (13) at the lowest point in the gravity direction.

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