Test probe
By designing a detachable connection test probe structure and conductive spring buffering device, the existing probes are solved for wafer damage and inconvenient replacement, achieving more efficient disassembly and assembly and more stable conduction.
Patent Information
- Application Number
- CN202421252319.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-03
- Publication Date
- 2025-04-22
- Estimated Expiration
- 2034-06-03
AI Technical Summary
The existing test probe has a hard structure, which can easily cause damage to the wafer and is inconvenient to replace.
A test probe including an outer needle sleeve and an inner needle sleeve is designed. The inner needle sleeve is provided with a probe, which is removably connected to the inner needle sleeve, and a conductive spring is provided in the outer cavity to provide cushioning and conduction.
With this structure, the test probe can be more convenient in disassembly and assembly and replacement. At the same time, the buffering effect of the conductive spring reduces damage to the wafer and ensures stable conduction between the probe and the needle tail.
Smart Images
Figure CN222784533U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of testing devices, in particular to a testing probe. Background Art
[0002] After wafer manufacturing is completed, wafer testing is an indispensable and important process. At present, the electrical performance of wafers is generally tested by connecting the test probe to the positive pole of the test machine, and the negative pole of the test machine to the wafer stage where the wafer is placed; when the test probe contacts the wafer, the positive pole of the test machine-test probe-wafer-wafer stage-negative pole of the test machine forms a loop, thereby testing the electrical performance of the wafer.
[0003] However, most of the current test probe structures are integrally formed rigid structures. When the test probe contacts the wafer, it is easy to damage the wafer, and it is not easy to replace the test probe. Utility Model Content
[0004] The utility model aims to provide a test probe for the above-mentioned deficiencies in the prior art, which plays a buffering role and is easy to disassemble and assemble.
[0005] The purpose of the utility model is achieved through the following technical solutions: a test probe, comprising an outer needle sleeve and an inner needle sleeve; the outer needle sleeve is provided with an outer cavity; the inner needle sleeve is provided with an inner cavity; the inner needle sleeve is detachably connected to one end of the outer needle sleeve; the other end of the outer needle sleeve is provided with a needle tail;
[0006] The inner needle sleeve is movably provided with a probe; the probe comprises a head, a movable part and a tail; the head protrudes out of one end of the inner needle sleeve; the movable part is movably provided in the inner cavity; the tail protrudes out of the other end of the inner needle sleeve and is movably provided in the outer cavity;
[0007] A conductive spring is arranged in the outer cavity; one end of the conductive spring is connected to the needle tail; and the other end of the conductive spring is used for electrical conduction with the tail.
[0008] The utility model is further configured that a metal fastener is provided between the tail and the needle tail in the outer cavity; one end of the conductive spring is connected to the needle tail; the other end of the conductive spring is connected to the metal fastener; and the metal fastener is used to abut against the tail.
[0009] The utility model is further configured that a limiting column is provided at one end of the metal fastener close to the needle tail; and the conductive spring is sleeved outside the limiting column.
[0010] The utility model is further configured that one end of the conductive spring is welded to the pin tail; and the other end of the conductive spring is welded to the metal fastener.
[0011] The utility model is further configured that one end of the metal fastener close to the tail portion is provided with a cone groove matching with the tail portion.
[0012] The utility model is further configured that a first position-limiting conductive ring is provided on an outer wall of one end of the inner needle sleeve; the first position-limiting conductive ring is used to abut against one end of the outer needle sleeve.
[0013] The utility model is further configured that the inner wall of the other end of the inner needle sleeve is provided with a second limiting conductive ring; and the tail portion is penetrated through the second limiting conductive ring.
[0014] The utility model is further configured that a limiting portion is provided between the head portion and the movable portion; the limiting portion is used to abut against one end of the inner cavity.
[0015] The utility model is further configured that the inner cavity is provided with a buffer spring; one end of the buffer spring is connected to the other end of the inner cavity; and the other end of the buffer spring is connected to the limiting portion.
[0016] The utility model is further configured such that the inner needle sleeve is interference fit with the outer cavity.
[0017] The utility model is further configured that the outer wall of the inner needle sleeve is provided with a protrusion; the inner wall of the outer cavity is provided with a groove matching with the protrusion;
[0018] The protrusions and the grooves are both arc surface structures.
[0019] The beneficial effects of the utility model are as follows: the utility model integrates the probe into the inner needle sleeve, and the inner needle sleeve is detachably connected to the outer cavity of the outer needle sleeve, so that the test probe can be easily disassembled, assembled and replaced on the entire inner needle sleeve; in addition, a conductive spring is provided, which produces a certain deformation, has a certain buffering effect, and can ensure conduction between the probe and the needle tail. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] The utility model is further described using the accompanying drawings, but the embodiments in the accompanying drawings do not constitute any limitation to the utility model. A person skilled in the art can obtain other drawings based on the following drawings without creative work.
[0021] Figure 1 It is a structural schematic diagram of the utility model;
[0022] Figure 2 It is a cross-sectional view of the utility model;
[0023] Figure 3 It is a structural exploded view of the utility model;
[0024] Figure 4This is a structural exploded view of the inner needle sleeve of the utility model;
[0025] Among them: 1. outer needle sleeve; 11. outer cavity; 2. inner needle sleeve; 21. inner cavity; 31. needle tail; 32. conductive spring; 41. head; 42. movable part; 43. tail; 44. limiting part; 5. metal fastener; 51. limiting column; 52. conical groove; 61. first limiting conductive ring; 62. second limiting conductive ring; 7. buffer spring; 81. protrusion; 82. groove. DETAILED DESCRIPTION
[0026] The utility model is further described in conjunction with the following embodiments.
[0027] Depend on Figures 1 to 4 It can be seen that the test probe described in this embodiment includes an outer needle sleeve 1 and an inner needle sleeve 2; the outer needle sleeve 1 is provided with an outer cavity 11; the inner needle sleeve 2 is provided with an inner cavity 21; the inner needle sleeve 2 is detachably connected to one end of the outer needle sleeve 1; the other end of the outer needle sleeve 1 is provided with a needle tail 31;
[0028] The inner needle sleeve 2 is movably provided with a probe; the probe comprises a head 41, a movable portion 42 and a tail 43; the head 41 protrudes out of one end of the inner needle sleeve 2; the movable portion 42 is movably provided in the inner cavity 21; the tail 43 protrudes out of the other end of the inner needle sleeve 2 and is movably provided in the outer cavity 11;
[0029] A conductive spring 32 is disposed in the outer cavity 11 ; one end of the conductive spring 32 is connected to the needle tail 31 ; and the other end of the conductive spring 32 is used for electrical conduction with the tail portion 43 .
[0030] Specifically, when the test probe described in this embodiment is used, the negative pole of the tester is connected to the wafer stage, and the positive pole of the tester is connected to the needle tail 31 of the test probe.
[0031] When the wafer on the wafer stage is tested by the test probe, when the head 41 of the probe contacts the electrode surface of the wafer to be tested, the electrical signal of the positive electrode of the tester passes through the needle tail 31-conductive spring 32-probe-wafer-negative electrode of the tester in sequence, thereby forming a loop to test the electrical performance of the wafer; in this embodiment, the probe is integrated into the inner needle sleeve 2, and the inner needle sleeve 2 is detachably connected to the outer cavity 11 of the outer needle sleeve 1, so that the test probe can be easily disassembled, assembled and replaced on the entire inner needle sleeve 2; in addition, by providing the conductive spring 32, the conductive spring 32 produces a certain deformation, has a certain buffering effect, and can ensure the conduction between the probe and the needle tail 31.
[0032] In the test probe of this embodiment, a metal fastener 5 is provided between the tail portion 43 and the needle tail 31 in the outer cavity 11; one end of the conductive spring 32 is connected to the needle tail 31; the other end of the conductive spring 32 is connected to the metal fastener 5; the metal fastener 5 is used to abut against the tail portion 43. Specifically, by providing the metal fastener 5, the conduction between the probe and the needle tail 31 can be further ensured.
[0033] In the test probe of this embodiment, the end of the metal fastener 5 close to the tail 43 is provided with a conical groove 52 that matches the tail 43. Through the above arrangement, the contact area between the metal fastener 5 and the tail 43 can be increased, and the electrical conduction between the metal fastener 5 and the tail 43 can be ensured.
[0034] In the test probe described in this embodiment, a stop column 51 is provided at one end of the metal fastener 5 close to the needle tail 31; and the conductive spring 32 is sleeved outside the stop column 51. The above arrangement makes the structure of the conductive spring 32 stable and reliable.
[0035] In the test probe of this embodiment, one end of the conductive spring 32 is welded to the needle tail 31, and the other end of the conductive spring 32 is welded to the metal fastener 5. Through the above, the conduction between the conductive spring 32 and the needle tail 31 and the conduction between the conductive spring 32 and the metal fastener 5 can be ensured.
[0036] In the test probe described in this embodiment, the outer wall of one end of the inner needle sleeve 2 is provided with a first limiting conductive ring 61; the first limiting conductive ring 61 is used to abut against one end of the outer needle sleeve 1. In the test probe described in this embodiment, the inner wall of the other end of the inner needle sleeve 2 is provided with a second limiting conductive ring 62; the tail 43 is passed through the second limiting conductive ring 62. The above arrangement can prevent the probe from shaking.
[0037] Specifically, by setting a first limiting conductive ring 61 and a second limiting conductive ring 62, the positive pole of the tester can pass through the needle tail 31-outer needle sleeve 1-first limiting conductive ring 61 and the second limiting conductive ring 62 inner slip ring-probe-wafer-negative pole of the tester in sequence, thereby forming another circuit to ensure the test effect.
[0038] In the test probe described in this embodiment, a stopper 44 is provided between the head 41 and the movable part 42; the stopper 44 is used to abut against one end of the inner cavity 21. The above arrangement can prevent the probe from falling off in the inner cavity 21.
[0039] In the test probe described in this embodiment, the inner cavity 21 is provided with a buffer spring 7; one end of the buffer spring 7 is connected to the other end of the inner cavity 21; and the other end of the buffer spring 7 is connected to the limiter 44. Specifically, through the above arrangement, when the head 41 contacts the wafer, the buffer spring 7 is compressed during the inward movement of the probe, and the buffer spring 7 generates pressure, which can ensure the downward pressure and the reliability of the contact circuit.
[0040] In the test probe described in this embodiment, the inner needle sleeve 2 is interference-fitted with the outer cavity 11. The above arrangement facilitates the disassembly and assembly of the inner needle sleeve 2 and the outer cavity 11.
[0041] In the test probe described in this embodiment, the outer wall of the inner needle sleeve 2 is provided with a protrusion 81; the inner wall of the outer cavity 11 is provided with a groove 82 that matches the protrusion 81; the protrusion 81 and the groove 82 are both arc structures. The above arrangement can further ensure the stability of the connection between the inner needle sleeve 2 and the outer cavity 11.
[0042] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit the protection scope of the utility model. Although the utility model has been described in detail with reference to the preferred embodiments, ordinary technicians in this field should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the essence and scope of the technical solution of the utility model.
Claims
1. A test probe, characterized in that: The invention comprises an outer needle sleeve (1) and an inner needle sleeve (2); the outer needle sleeve (1) is provided with an outer cavity (11); the inner needle sleeve (2) is provided with an inner cavity (21); the inner needle sleeve (2) is detachably connected to one end of the outer needle sleeve (1); the other end of the outer needle sleeve (1) is provided with a needle tail (31); The inner needle sleeve (2) is movably provided with a probe; the probe comprises a head (41), a movable portion (42) and a tail (43); the head (41) protrudes out of one end of the inner needle sleeve (2); the movable portion (42) is movably provided in the inner cavity (21); the tail (43) protrudes out of the other end of the inner needle sleeve (2) and is movably provided in the outer cavity (11); A conductive spring (32) is provided in the outer cavity (11); one end of the conductive spring (32) is connected to the needle tail (31); and the other end of the conductive spring (32) is used for electrical conduction with the tail (43).
2. A test probe according to claim 1, characterized in that: A metal fastener (5) is provided inside the outer cavity (11) between the tail portion (43) and the needle tail (31); one end of the conductive spring (32) is connected to the needle tail (31); the other end of the conductive spring (32) is connected to the metal fastener (5); and the metal fastener (5) is used to abut against the tail portion (43).
3. A test probe according to claim 2, characterized in that: A limiting column (51) is provided at one end of the metal fastener (5) close to the needle tail (31); and the conductive spring (32) is sleeved outside the limiting column (51).
4. A test probe according to claim 2, characterized in that: One end of the conductive spring (32) is welded to the needle tail (31); the other end of the conductive spring (32) is welded to the metal fastener (5).
5. A test probe according to claim 2, characterized in that: One end of the metal fastener (5) close to the tail portion (43) is provided with a conical groove (52) that matches the tail portion (43).
6. A test probe according to claim 1, characterized in that: A first position-limiting conductive ring (61) is provided on the outer wall of one end of the inner needle sleeve (2); the first position-limiting conductive ring (61) is used to abut against one end of the outer needle sleeve (1).
7. A test probe according to claim 1, characterized in that: A second position-limiting conductive ring (62) is provided on the inner wall of the other end of the inner needle sleeve (2); and the tail portion (43) is inserted through the second position-limiting conductive ring (62).
8. A test probe according to claim 1, characterized in that: A limiting portion (44) is provided between the head portion (41) and the movable portion (42); the limiting portion (44) is used to abut against one end of the inner cavity (21); The inner cavity (21) is provided with a buffer spring (7); one end of the buffer spring (7) is connected to the other end of the inner cavity (21); and the other end of the buffer spring (7) is connected to the limiting portion (44).
9. A test probe according to claim 1, characterized in that: The inner needle sleeve (2) and the outer cavity (11) are interference fit.
10. A test probe according to claim 1, characterized in that: The outer wall of the inner needle sleeve (2) is provided with a protrusion (81); the inner wall of the outer cavity (11) is provided with a groove (82) that matches the protrusion (81); The protrusion (81) and the groove (82) are both arc surface structures.