Waste gas deacidification and white elimination integrated treatment device for etching processing

Abstract

The utility model discloses a waste gas deacidification and white elimination integrated treatment device for etching processing, and relates to the technical field of waste gas deacidification and white elimination, the waste gas deacidification and white elimination integrated treatment device comprises a filter box, a first deacidification tower, a second deacidification tower and a purification box, the filter box is communicated with the first deacidification tower, the other end of the filter box is communicated with a waste gas inlet, and the purification box is communicated with the second deacidification tower. A circulating spraying mechanism is arranged in the first deacidification tower, the top end of the first deacidification tower is communicated with the second deacidification tower through a first connecting pipe, and the top end of the second deacidification tower is communicated with the purification box through a second connecting pipe. Solid particles and large particle substances in the waste gas can be removed, the first deacidification tower is matched with the second deacidification tower to treat the acid waste gas for multiple times, the situation that the acid waste gas is not thoroughly treated is avoided, colored components and impurities in the waste gas are removed through the purification box, and the white smoke emitting phenomenon is effectively relieved.

Description

Technical Field

[0001] The utility model relates to the technical field of waste gas deacidification and dewhitening, in particular to an integrated waste gas deacidification and dewhitening treatment device for etching processing. Background Art

[0002] In recent years, with the rapid development of my country's social economy and the improvement of residents' living standards, people's food, clothing, housing and transportation have been greatly improved, and society and people have put forward higher requirements for the quality of the atmospheric environment.

[0003] During the etching line processing, a large amount of waste gas will be generated. At present, the commonly used etching processes in factories include acid etching, alkaline etching and laser etching. Acid etching uses acidic substances to etch, generally nitric acid, sulfuric acid, hydrochloric acid, etc. Due to the acid etching, the acidic waste gas generated is very easy to produce white smoke behind the chimney, which leads to many complaints from the company. At the same time, some processes do not completely treat the acidic waste gas, and the untreated waste gas evaporates, which is extremely harmful to the economic and social development, seriously restricts the sustainable development of the social economy, and threatens people's health. Based on this, this scheme provides an integrated waste gas deacidification and dewhitening treatment device for etching processing to solve the above-mentioned problems. Utility Model Content

[0004] In order to solve the above technical problems, an integrated waste gas deacidification and dewhitening treatment device for etching processing is provided. This technical solution solves the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] An integrated waste gas deacidification and deoxidation treatment device for etching processing comprises a base plate, a filter box, a first deacidification tower, a second deacidification tower and a purification box, wherein the filter box, the first deacidification tower, the second deacidification tower and the purification box are sequentially arranged at the upper end of the base plate, the filter box is arranged on the lower side of the rotating surface of the first deacidification tower, and the filter box is connected to the first deacidification tower, the other end of the filter box is connected to the waste gas inlet, a circulating spray mechanism is arranged inside the first deacidification tower, the top end of the first deacidification tower is connected to the second deacidification tower through a first connecting pipe, and the top end of the second deacidification tower is connected to the purification box through a second connecting pipe.

[0007] Preferably, a plurality of groups of filter screens are slidably mounted on the top of the filter box, and the top ends of the plurality of filter screens are fixedly connected to the lower end of the sealing plate.

[0008] Preferably, the first deacidification tower includes a first tower body, which is fixedly mounted on the upper end of the bottom plate, and a plurality of groups of first guide plates and second guide plates are arranged inside the first tower body, the number of the first guide plates is the same as that of the second guide plates, and they are arranged alternately with each other, an air inlet is arranged on the lower side of the left end of the first tower body, a first liquid drain pipe is arranged at the lower end of the first tower body, and a filter screen is arranged on the right side of the bottom of the first tower body.

[0009] Preferably, the circulating spray mechanism includes a circulating pump, which is fixedly installed on the upper end of the base plate, and the input end of the circulating pump is fixedly connected to a liquid inlet pipe, the other end of the liquid inlet pipe is connected to the lower end of the first tower body, and is arranged on the lower side of the filter screen, the output end of the circulating pump is fixedly connected to a liquid delivery main pipe, the other end of the liquid delivery main pipe is fixedly connected to a plurality of groups of branch pipes, the other ends of the branch pipes are respectively arranged on the inner lower side of the first guide plate or the second guide plate, and a plurality of groups of spray heads are arranged at the lower end of the branch pipes.

[0010] Preferably, the second deacidification tower includes a second tower body, which is fixedly mounted on the upper end of the bottom plate, a plurality of sealing plates are arranged inside the second tower body, a purification tank is provided in the middle of the top end of the sealing plate, a discharge pipe is installed at the lower end of the sealing plate, air guide pipes are arranged on both sides of the sealing plate, a feeding pipe is arranged on the rear side of the second tower body, and a second liquid discharge pipe is arranged at the bottom of the second tower body.

[0011] Preferably, the purification box includes a box body, which is fixedly mounted on the upper end of the bottom plate, and several groups of ultraviolet lamps are installed on the left side of the interior of the box body, a drying silicon plate is arranged on the right side of the ultraviolet lamp, an activated carbon filter plate is arranged on the right side of the drying silicon plate, and an exhaust pipe is arranged on the right side of the activated carbon filter plate.

[0012] Compared with the prior art, the utility model proposes an integrated waste gas deacidification and dewhitening treatment device for etching processing, which has the following beneficial effects:

[0013] 1. The utility model is provided with a first deacidification tower and a second deacidification tower. The acidic waste gas generated during the etching process is filtered by a plurality of groups of filter screens inside the filter box before entering the first deacidification tower through the waste gas inlet, so that solid particles and large particles in the waste gas can be removed. After entering the first deacidification tower, an alkaline solution is sprayed out through a spray head through a circulating spray mechanism, so that the atomized alkaline solution can react with the acidic substances in the waste gas, so as to achieve the deacidification effect. At the same time, the atomized water droplets can combine with fine impurity particles to form a precipitate, and the waste gas is further filtered. Subsequently, the waste gas after the preliminary treatment is driven into the second deacidification tower through the first connecting pipe. The second deacidification tower completes the deacidification of the waste gas by allowing the waste gas to escape from the alkaline solution. By treating the acidic waste gas for multiple times, the situation of unclean treatment of the acidic waste gas can be avoided.

[0014] 2. The utility model is provided with a purification box, and a violet lamp, a dry silicon plate and an activated carbon filter plate are arranged inside the purification box. The violet lamp uses ultraviolet rays to decompose organic matter in the exhaust gas and converts it into harmless small molecules or gases, thereby purifying the exhaust gas. The dry silicon plate dries the exhaust gas through the built-in silica gel. The activated carbon filter plate can adsorb impurities in the exhaust gas, such as volatile organic compounds. These substances can be adsorbed and removed by the activated carbon filter to improve the quality of the exhaust gas. The device can remove or reduce colored components or impurities in the exhaust gas through the purification box, effectively reduce the white smoke phenomenon, and reduce the appearance of white smoke, so as to purify the exhaust gas and meet environmental emission standards. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the internal structure of the first deacidification tower in the utility model;

[0017] Figure 3 This is a schematic diagram of the internal structure of the second deacidification tower in the utility model;

[0018] Figure 4 It is a schematic diagram of the internal structure of the purification box in the utility model.

[0019] The numbers in the figure are:

[0020] 1. Bottom plate; 2. Waste gas inlet; 3. Filter box; 301. Filter screen; 302. Sealing plate; 4. First deacidification tower; 401. First tower body; 402. First guide plate; 403. Second guide plate; 404. Air inlet; 405. First drain pipe; 406. Filter screen; 5. Second deacidification tower; 501. Second tower body; 502. Sealing plate; 503. Purification tank; 504. Air guide pipe; 505. Feeding pipe; 506, discharge pipe; 507, second liquid discharge pipe; 6, purification box; 601, box body; 602, ultraviolet lamp; 603, drying silicon plate; 604, activated carbon filter plate; 605, exhaust pipe; 7, first connecting pipe; 8, second connecting pipe; 9, circulating spray mechanism; 901, circulating pump; 902, liquid inlet pipe; 903, liquid delivery main pipe; 904, branch pipe; 905, spray head; 10, alkaline solution. DETAILED DESCRIPTION

[0021] The following description is used to disclose the present invention so that those skilled in the art can implement the present invention. The preferred embodiments described below are only examples, and those skilled in the art may think of other obvious variations.

[0022] Reference Figure 1-4 As shown, an integrated deacidification and dewhitening treatment device for waste gas used in etching processing includes a base plate 1, a filter box 3, a first deacidification tower 4, a second deacidification tower 5 and a purification box 6. The filter box 3, the first deacidification tower 4, the second deacidification tower 5 and the purification box 6 are all arranged in sequence at the upper end of the base plate 1, the filter box 3 is arranged on the lower side of the rotating surface of the first deacidification tower 4, and the filter box 3 is connected to the first deacidification tower 4, the other end of the filter box 3 is connected to the waste gas inlet 2, a circulating spray mechanism 9 is arranged inside the first deacidification tower 4, the top end of the first deacidification tower 4 is connected to the second deacidification tower 5 through a first connecting pipe 7, and the top end of the second deacidification tower 5 is connected to the purification box 6 through a second connecting pipe 8. The acidic waste gas generated during the etching process is introduced into the filter box 3 through the waste gas inlet 2, and the waste gas is filtered through several groups of filter meshes 301 inside the filter box 3, so that solid particles and large particles in the waste gas can be removed, and then enters the first deacidification tower 4, and the waste gas is sprayed through the internal circulating spray mechanism 9, and the acidic substances in the waste gas are neutralized by the atomized alkaline solution 10, so as to achieve the deacidification effect. At the same time, the atomized water droplets can combine with fine impurity particles to form a precipitate, and the waste gas is further filtered; then the waste gas after preliminary treatment is driven into the second deacidification tower 5 through the first connecting pipe 7, and the second deacidification tower 5 completes the deacidification of the waste gas by allowing the waste gas to escape from the alkaline solution 10. By treating the acidic waste gas multiple times, the situation of unclean treatment of the acidic waste gas can be avoided.

[0023] Specifically, in this embodiment, a plurality of groups of filter screens 301 are slidably mounted on the top of the filter box 3, and the tops of the plurality of filter screens 301 are fixedly connected to the lower end of the sealing plate 302. The exhaust gas is filtered by the plurality of groups of filter screens 301 inside the filter box 3, thereby removing solid particles and large particles in the exhaust gas, and the sealing plate 302 is used to seal the filter box 3 to ensure that the exhaust gas does not escape.

[0024] Specifically, in this embodiment, the first deacidification tower 4 includes a first tower body 401, which is fixedly mounted on the upper end of the bottom plate 1, and a plurality of first guide plates 402 and second guide plates 403 are arranged inside the first tower body 401, the number of the first guide plates 402 and the second guide plates 403 are the same, and they are arranged in an interlaced manner, an air inlet 404 is arranged on the lower side of the left end of the first tower body 401, a first liquid discharge pipe 405 is arranged at the lower end of the first tower body 401, and a filter screen 406 is arranged on the right side of the bottom of the first tower body 401. The number of the first guide plates 402 and the second guide plates 403 is the same, and they are arranged in an interlaced manner, thereby forming a curved deacidification channel, and the lower end surface of the channel is inclined to facilitate the sediment to slide to the bottom of the first tower body 401.

[0025] Specifically, in the present embodiment, the circulating spray mechanism 9 comprises a circulating pump 901, which is fixedly mounted on the upper end of the base plate 1, and the input end of the circulating pump 901 is fixedly connected to a liquid inlet pipe 902, and the other end of the liquid inlet pipe 902 is connected to the lower end of the first tower body 401 and is arranged on the lower side of the filter screen 406, and the output end of the circulating pump 901 is fixedly connected to a liquid delivery main pipe 903, and the other end of the liquid delivery main pipe 903 is fixedly connected to a plurality of groups of branch pipes 904, and the other ends of the branch pipes 904 are respectively arranged on the inner lower side of the first guide plate 402 or the second guide plate 403, and a plurality of groups of spray heads 905 are arranged on the lower end of the branch pipes 904. The circulating spray mechanism 9 draws out the alkaline solution 10 through the liquid inlet pipe 902, and cooperates with the liquid delivery main pipe 903 and the branch pipe 904 to spray the alkaline solution through the spray head 905, so that the atomized alkaline solution can react with the acidic substances in the exhaust gas, thereby achieving the effect of deacidification. At the same time, the atomized water droplets can combine with fine impurity particles to form a precipitate, which further filters the exhaust gas.

[0026] Specifically, in this embodiment, the second deacidification tower 5 includes a second tower body 501, which is fixedly mounted on the upper end of the bottom plate 1, and a plurality of sealing plates 502 are arranged inside the second tower body 501. A purification tank 503 is provided at the middle of the top of the sealing plate 502, and a discharge pipe 506 is installed at the lower end of the sealing plate 502. Air guide pipes 504 are arranged on both sides of the sealing plate 502, and a feeding pipe 505 is arranged at the rear side of the second tower body 501. A second liquid discharge pipe 507 is arranged at the bottom of the second tower body 501. The waste gas after preliminary treatment is driven into the second deacidification tower 5 through the first connecting pipe 7. The second deacidification tower 5 completes the deacidification treatment of the waste gas by allowing the waste gas to escape from the alkaline solution 10, and the acid waste gas is treated multiple times to avoid the situation where the acid waste gas is not treated cleanly.

[0027] Specifically, in this embodiment, the purification box 6 includes a box body 601, which is fixedly installed on the upper end of the base plate 1, and several groups of ultraviolet lamps 602 are installed on the left side of the interior of the box body 601. A drying silicon plate 603 is arranged on the right side of the ultraviolet lamp 602, an activated carbon filter plate 604 is arranged on the right side of the drying silicon plate 603, and an exhaust pipe 605 is arranged on the right side of the activated carbon filter plate 604. The interior of the purification box 6 is provided with a violet lamp 602, a dry silicon plate 603 and an activated carbon filter plate 604, wherein the violet lamp 602 uses ultraviolet rays to decompose organic matter in the exhaust gas and converts it into harmless small molecules or gases, thereby purifying the exhaust gas. The dry silicon plate 603 dries the exhaust gas through the built-in silica gel. The activated carbon filter plate 604 can adsorb impurities in the exhaust gas, such as volatile organic compounds. These substances can be adsorbed and removed by the activated carbon filter to improve the quality of the exhaust gas. The device can remove or reduce colored components or impurities in the exhaust gas through the purification box 6, effectively reduce the white smoke phenomenon, reduce the appearance of white smoke, and purify the exhaust gas and meet environmental emission standards.

[0028] The working principle of the utility model is as follows: the acidic waste gas generated during the etching process is introduced into the filter box 3 through the waste gas inlet 2, and the waste gas is filtered through several groups of filter screens 301 inside the filter box 3, so that solid particles and large particles in the waste gas can be removed, and then enters the first deacidification tower 4, and the waste gas is sprayed through the internal circulation spray mechanism 9, and the acidic substances in the waste gas are neutralized by the atomized alkaline solution 10, so as to achieve the deacidification effect. At the same time, the atomized water droplets can combine with fine impurity particles to form a precipitate, and the waste gas is further filtered; then the waste gas after the preliminary treatment is driven into the second deacidification tower 5 through the first connecting pipe 7, and the second deacidification tower 5 completes the deacidification treatment of the waste gas by allowing the waste gas to escape from the alkaline solution 10, and the acidic waste gas is treated for multiple times, thereby avoiding the situation where the acidic waste gas is not treated cleanly.

[0029] After deacidification, the waste gas is introduced into the purification box 6 through the second connecting pipe 8. The interior of the purification box 6 is provided with a violet lamp 602, a dry silicon plate 603 and an activated carbon filter plate 604. The violet lamp 602 uses ultraviolet rays to decompose the organic matter in the waste gas and convert it into harmless small molecules or gases, thereby purifying the waste gas. The dry silicon plate 603 dries the waste gas through the built-in silica gel. The activated carbon filter plate 604 can adsorb impurities in the waste gas, such as volatile organic compounds. These substances can be adsorbed and removed by the activated carbon filter to improve the quality of the waste gas. The device can remove or reduce the color components or impurities in the waste gas through the purification box 6, effectively reduce the white smoke phenomenon, and reduce the appearance of white smoke, so as to purify the waste gas and meet the environmental emission standards.

[0030] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and the specification only describe the principles of the utility model. The utility model may be subject to various changes and improvements without departing from the spirit and scope of the utility model. These changes and improvements fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. An integrated treatment device for deacidification and dewhitening of waste gas for etching processing, characterized in that: The invention comprises a bottom plate (1), a filter box (3), a first deacidification tower (4), a second deacidification tower (5) and a purification box (6); the filter box (3), the first deacidification tower (4), the second deacidification tower (5) and the purification box (6) are arranged in sequence on the upper end of the bottom plate (1); the filter box (3) is arranged on the lower side of the rotating surface of the first deacidification tower (4), and the filter box (3) is connected to the first deacidification tower (4); the other end of the filter box (3) is connected to the exhaust gas inlet (2); a circulating spray mechanism (9) is arranged inside the first deacidification tower (4); the top end of the first deacidification tower (4) is connected to the second deacidification tower (5) through a first connecting pipe (7); and the top end of the second deacidification tower (5) is connected to the purification box (6) through a second connecting pipe (8).

2. The integrated treatment device for deacidification and dewhitening of waste gas for etching processing according to claim 1 is characterized in that: A plurality of groups of filter screens (301) are slidably mounted on the top end of the filter box (3), and the top ends of the plurality of filter screens (301) are fixedly connected to the lower end of the sealing plate (302).

3. The integrated treatment device for deacidification and dewhitening of waste gas for etching processing according to claim 1 is characterized in that: The first deacidification tower (4) comprises a first tower body (401), wherein the first tower body (401) is fixedly mounted on the upper end of the bottom plate (1), wherein a plurality of groups of first guide plates (402) and second guide plates (403) are arranged inside the first tower body (401), wherein the number of the first guide plates (402) and the second guide plates (403) are the same and are arranged alternately with each other, an air inlet (404) is arranged on the lower side of the left end of the first tower body (401), a first liquid drain pipe (405) is arranged at the lower end of the first tower body (401), and a filter screen (406) is arranged on the right side of the bottom of the first tower body (401).

4. The integrated waste gas deacidification and dewhitening treatment device for etching processing according to claim 1 is characterized in that: The circulating spray mechanism (9) comprises a circulating pump (901), wherein the circulating pump (901) is fixedly mounted on the upper end of the bottom plate (1); the input end of the circulating pump (901) is fixedly connected to a liquid inlet pipe (902); the other end of the liquid inlet pipe (902) is connected to the lower end of the first tower body (401) and is arranged on the lower side of the filter screen (406); the output end of the circulating pump (901) is fixedly connected to a liquid delivery main pipe (903); the other end of the liquid delivery main pipe (903) is fixedly connected to a plurality of groups of branch pipes (904); the other end of the branch pipes (904) is respectively arranged on the lower side of the first guide plate (402) or the second guide plate (403); and the lower end of the branch pipes (904) is provided with a plurality of groups of spray heads (905).

5. The integrated treatment device for deacidification and dewhitening of waste gas for etching processing according to claim 1 is characterized in that: The second deacidification tower (5) comprises a second tower body (501), which is fixedly mounted on the upper end of the bottom plate (1), and a plurality of sealing plates (502) are arranged inside the second tower body (501), a purification tank (503) is provided in the middle of the top end of the sealing plate (502), a discharge pipe (506) is installed at the lower end of the sealing plate (502), air guide pipes (504) are arranged on both sides of the sealing plate (502), a feeding pipe (505) is arranged on the rear side of the second tower body (501), and a second liquid discharge pipe (507) is arranged at the bottom of the second tower body (501).

6. The integrated deacidification and dewhitening treatment device for waste gas used in etching processing according to claim 1 is characterized in that: The purification box (6) comprises a box body (601), wherein the box body (601) is fixedly mounted on the upper end of the bottom plate (1), and a plurality of groups of ultraviolet lamps (602) are mounted on the left side of the interior of the box body (601), a drying silicon plate (603) is arranged on the right side of the ultraviolet lamp (602), an activated carbon filter plate (604) is arranged on the right side of the drying silicon plate (603), and an exhaust pipe (605) is arranged on the right side of the activated carbon filter plate (604).

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