Ultra-precision milling machine tool

Abstract

The utility model relates to an ultra-precision milling machine tool. The ultra-precision milling machine tool comprises a base; a column; the cutting depth feeding device can output lifting motion in the vertical direction. The air static pressure main shaft is connected with the cutting depth feeding device and ascends and descends along with the cutting depth feeding device; the hydrostatic guide rail is arranged on the base in the horizontal direction and located below the air static pressure main shaft, and the hydrostatic guide rail can output moving motion in the horizontal direction; the adsorption device is arranged on the hydrostatic guide rail, can move along with the hydrostatic guide rail and is used for adsorbing and fixing a workpiece; and the cutterhead device is arranged on the air static pressure main shaft. The cutting depth feeding device drives the air static pressure main shaft and the cutterhead device to automatically ascend and descend in the vertical direction, tool setting operation is completed, manual tool setting of operators is not needed, the air static pressure main shaft adopts the air static pressure technology, high rotation precision is achieved, the precision and rigidity of the air static pressure main shaft are guaranteed, and the working efficiency is improved. Therefore, the machining precision and the surface quality of the workpiece are guaranteed.

Description

Technical Field

[0001] The present application relates to the technical field of mechanical processing equipment, and in particular to an ultra-precision milling machine tool. Background Art

[0002] Ultra-precision cutting technology is an advanced manufacturing technology developed in the last century. The machining accuracy of parts depends on the accuracy of ultra-precision machine tools. Ultra-precision machining technology comprehensively utilizes cutting-edge scientific and technological achievements in the fields of measurement, servo control, optics, environmental control, sensing, hydraulics, etc. to meet the machining accuracy requirements of ultra-precision flat workpieces.

[0003] At present, the micro-cutting depth adjustment in ultra-precision fly cutter milling machines relies on manual operation, and the tool setting is cumbersome. In addition, the spindle adopts a liquid hydrostatic bearing structure, and the oil temperature increases accordingly with the increase in speed. The increase in temperature will cause thermal deformation and affect the spindle accuracy; when the oil is returned, air is brought into the oil source, forming tiny bubbles suspended in the oil, which are not easy to discharge, thereby reducing the rigidity of the liquid hydrostatic bearing, and the processing accuracy and surface quality are not ideal. Summary of the invention

[0004] Based on this, it is necessary to provide an ultra-precision milling machine tool that can automatically align the tool without the operator's manual tool alignment, simplifying the tool alignment steps. At the same time, air static pressure technology is used to ensure the rotation accuracy, thereby ensuring the machining accuracy and surface quality of the workpiece by the cutter head device, and realizing ultra-precision milling of the workpiece.

[0005] An ultra-precision milling machine tool, comprising:

[0006] Pedestal;

[0007] A column is arranged on the base in a vertical direction;

[0008] A cutting depth feeding device is arranged on the column along the vertical direction and can output a lifting movement along the vertical direction;

[0009] An air static pressure spindle is movably arranged on the column, the air static pressure spindle is connected to the cutting depth feeding device, and rises and falls with the cutting depth feeding device;

[0010] A liquid hydrostatic guide rail is arranged on the base in a horizontal direction and is located below the air hydrostatic main shaft, and the liquid hydrostatic guide rail can output a movement in a horizontal direction;

[0011] an adsorption device, which is disposed on the liquid hydrostatic guide rail and can move with the liquid hydrostatic guide rail, and the adsorption device is used to adsorb and fix the workpiece; and

[0012] A cutter disc device is arranged on the air static pressure spindle and is used for milling the workpiece.

[0013] In one embodiment of the present application, the air static pressure spindle includes an air static pressure bearing and a mounting sleeve. The mounting sleeve can be raised and lowered on the column. The air static pressure spindle is arranged in the mounting sleeve and connected to the cutting depth feed device. The output end of the air static pressure bearing is installed with the cutter disc device.

[0014] In one embodiment of the present application, the cutting depth feeding device includes a first driving member and a screw transmission pair, the first driving member is arranged on the column, the first driving member is connected to the screw transmission pair in a transmission manner, the screw transmission pair is arranged in a vertical direction, and the output end of the screw transmission pair is connected to the air static pressure spindle;

[0015] The screw transmission pair includes a screw shaft and a nut, the nut is movably arranged on the screw shaft, the first driving member is connected to the screw shaft, and the nut is connected to the air static pressure main shaft.

[0016] In one embodiment of the present application, the cutting depth feeding device further comprises a balancing component provided on the column, the balancing component is symmetrically located on both sides of the air static pressure spindle and connected to the air static pressure spindle, and the balancing component can be raised and lowered with the air static pressure spindle to balance the weight of the air static pressure spindle;

[0017] And / or, the cutting depth feeding device further comprises a first grating ruler, the first grating ruler is arranged on the column along the vertical direction, and the first grating ruler is used to detect the lifting distance of the air static pressure spindle;

[0018] And / or, the cutting depth feed device also includes a guide assembly, the guide assembly includes a guide rail and a guide slider, the guide rail is arranged on the column along the vertical direction, the guide slider can be slidably arranged on the guide rail and connected to the air static pressure spindle.

[0019] In one embodiment of the present application, the liquid hydrostatic guide rail includes a second driving member, a first guide rail, a second guide rail and a slide plate. The first guide rail and the second guide rail are parallel and arranged opposite to each other. The slide plate can be slidably disposed between the first guide rail and the second guide rail, and slidingly cooperates with the first guide rail and the second guide rail. The second driving member is connected to the slide plate to drive the slide plate to move along the first guide rail and the second guide rail.

[0020] In one embodiment of the present application, the hydrostatic guide rail further comprises a brake component, which is disposed on the first guide rail along the length direction of the first guide rail and cooperates with the slide, and the brake component is used to lock or unlock the slide;

[0021] And / or, the liquid hydrostatic guide rail further comprises a second grating ruler, the second grating ruler is arranged on the second guide rail along the length direction of the second guide rail, and the second grating ruler is used to detect the moving distance of the slide;

[0022] And / or, the liquid hydrostatic guide rail also includes a third guide rail, the third guide rail is arranged between the first guide rail and the second guide rail, the slide has a guide groove, the third guide rail can be slidably arranged in the guide groove, and the second driving member is arranged on the third guide rail and is transmission-connected to the slide.

[0023] In one embodiment of the present application, the cutter disc device includes a cutter disc body, a clamping component and a counterweight component. The clamping component is disposed on the cutter disc body and is used to clamp and fix the tool to the cutter disc body. The counterweight component is disposed on the cutter disc body and is arranged corresponding to the clamping component.

[0024] In one embodiment of the present application, the adsorption device includes a suction cup workbench and a control valve, the suction cup workbench has a connected air flow channel and adsorption hole, the control valve is arranged in the suction cup workbench to control the opening and closing of the adsorption hole, and the air flow channel and the adsorption hole cooperate to adsorb and fix the workpiece on the surface of the suction cup workbench.

[0025] In one embodiment of the present application, the column has a first installation space along the vertical direction, the air static pressure spindle is at least partially located in the first installation space, and the screw transmission pair of the cutting depth feeding device is located in the first installation space;

[0026] The columns are made of marble.

[0027] In one embodiment of the present application, the base includes a bed and a plurality of vibration isolators, and the plurality of vibration isolators are disposed at the bottom of the bed;

[0028] The bed has a second installation space along the horizontal direction, and the hydrostatic guide rail is located in the second installation space;

[0029] The bed is made of marble.

[0030] After adopting the above technical solution, this application has at least the following technical effects:

[0031] The ultra-precision milling machine tool of the present application has a column arranged on the base in the vertical direction, a cutting depth feed device arranged on the column in the vertical direction and capable of outputting lifting and lowering movement in the vertical direction, an air static pressure spindle movably arranged on the column and connected to the cutting depth feed device, a liquid static pressure guide rail arranged on the base in the horizontal direction and capable of outputting horizontal movement, an adsorption device arranged on the liquid static pressure guide rail, the adsorption device can adsorb and fix the workpiece, and a cutter head device arranged on the air static pressure spindle. After the adsorption device adsorbs and fixes the workpiece, the cutting depth feed device and the air static pressure spindle move to complete the tool alignment, and then the feed amount of the cutting depth feed device is adjusted, the air static pressure spindle rotates, and the liquid static pressure guide rail drives the adsorption fixing device and the workpiece to reciprocate, thereby realizing the milling process of the workpiece.

[0032] This ultra-precision milling machine tool uses a cutting depth feed device to drive the air static pressure spindle and the cutter head device to automatically rise and fall in the vertical direction to complete the tool setting operation. There is no need for the operator to manually set the tool, which simplifies the tool setting steps. In addition, the air static pressure spindle adopts air static pressure technology and has high rotation accuracy. The temperature rise is very small when rotating at high speed, and it can basically reach a constant temperature state, resulting in small thermal deformation errors. It can ensure the accuracy and rigidity of the air static pressure spindle, thereby ensuring the processing accuracy and surface quality of the cutter head device on the workpiece, and realizing ultra-precision milling of the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a schematic diagram of an ultra-precision milling machine tool in one embodiment of the present application.

[0034] Figure 2 for Figure 1 The schematic diagram of the structure of the air static pressure spindle in the ultra-precision milling machine tool is shown.

[0035] Figure 3 for Figure 1 The schematic diagram shown is that the cutting depth feed device in the ultra-precision milling machine is arranged on the column.

[0036] Figure 4 for Figure 1 Schematic diagram of the base in the ultra-precision milling machine shown.

[0037] Figure 5 for Figure 1 Schematic diagram of the hydrostatic guide in the ultra-precision milling machine shown.

[0038] Figure 6 for Figure 1 Schematic diagram of the cutter head device in the ultra-precision milling machine tool shown.

[0039] Figure 7 for Figure 1 Schematic diagram of the adsorption device in the ultra-precision milling machine tool shown.

[0040] Among them: 100, ultra-precision milling machine; 110, base; 111, bed; 1111, second installation space; 112, vibration isolator; 120, column; 121, first installation space; 130, cutting depth feed device; 131, first driving member; 132, screw transmission pair; 1321, screw nut; 1322, screw shaft; 133, balancing component; 134, first grating ruler; 135, guide assembly; 1351, guide rail; 1352, guide slide; 140, air static pressure main Shaft; 141, air static pressure bearing; 142, mounting sleeve; 150, liquid static pressure guide rail; 151, second driving member; 152, first guide rail; 153, second guide rail; 154, slide; 155, third guide rail; 156, braking component; 157, second grating scale; 160, adsorption device; 161, suction cup workbench; 162, adsorption hole; 163, switch valve; 170, cutter disc device; 171, cutter disc body; 172, clamping component; 173, counterweight component; 200, tool. DETAILED DESCRIPTION

[0041] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0042] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0043] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0044] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0045] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "on" or "below" a second feature, etc., or the like, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0046] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0047] See also Figure 1 , the present application provides an ultra-precision milling machine tool 100 . Figure 1 Schematic diagram of an ultra-precision milling machine tool 100 in an embodiment of the present application. The ultra-precision machine tool can perform milling processing on ultra-precision planar workpieces to meet the milling processing requirements of ultra-precision planar workpieces and ensure the processing accuracy and surface quality of the workpieces.

[0048] It is understandable that the current micro-cutting depth adjustment in ultra-precision fly cutter milling cutting machines relies on manual operation, and tool alignment is cumbersome. Moreover, the spindle adopts a liquid hydrostatic bearing structure, and the oil temperature increases accordingly with the increase in rotation speed. The increase in temperature will cause thermal deformation, affecting the spindle accuracy, resulting in unsatisfactory processing accuracy and surface quality. To this end, the present application provides a new type of ultra-precision milling machine 100, which can automatically align the tool without the operator manually aligning the tool, simplifying the tool alignment steps, and at the same time, using air hydrostatic technology to ensure the rotation accuracy, thereby ensuring the tool disc device 170 The specific structure of the workpiece and the surface quality, and realizing ultra-precision milling processing of the workpiece. The following introduces the specific structure of the ultra-precision milling machine 100 of an embodiment.

[0049] See also Figure 1 In one embodiment, the ultra-precision milling machine 100 includes a base 110, a column 120, a cutting depth feed device 130, an air static pressure spindle 140, a liquid static pressure guide rail 150, an adsorption device 160, and a cutter head device 170. The column 120 is arranged on the base 110 in the vertical direction. The cutting depth feed device 130 is arranged on the column 120 in the vertical direction, and can output a lifting movement in the vertical direction. The air static pressure spindle 140 is movably arranged on the column 120, and the air static pressure spindle 140 is connected to the cutting depth feed device 130 and rises and falls with the cutting depth feed device 130. The liquid static pressure guide rail 150 is arranged on the base 110 in the horizontal direction and is located below the air static pressure spindle 140. The liquid static pressure guide rail 150 can output a moving movement in the horizontal direction. The adsorption device 160 is disposed on the liquid static pressure guide rail 150 and can move with the liquid static pressure guide rail 150. The adsorption device 160 is used to adsorb and fix the workpiece. The cutter head device 170 is disposed on the air static pressure spindle 140 and is used to perform milling processing on the workpiece.

[0050] The base 110 is the base of the ultra-precision milling machine 100. The base 110 is arranged in a horizontal plane, and the base 110 is installed on a reference surface such as a table or the ground to ensure the levelness of the base 110, thereby ensuring the levelness of the entire ultra-precision milling machine 100, so as to ensure the processing accuracy and surface quality of the workpiece. The column 120 is arranged at one end of the machine (such as Figure 1 The columns 120 are arranged behind the base 110 to form a gantry structure, and the various components of the ultra-precision milling machine 100 are supported by the columns 120 and the base 110.

[0051] The cutting depth feeding device 130 and the air static pressure spindle 140 are arranged on the column 120 along the vertical direction, and the cutting depth feeding device 130 and the air static pressure spindle 140 are arranged in parallel. The output end of the cutting depth feeding device 130 is connected to the air static pressure spindle 140, and the output end of the air static pressure spindle 140 is installed with a cutter head device 170, and the cutter head device 170 clamps and fixes the tool 200. The cutting depth feeding device 130 can adjust the distance between the tool 200 and the workpiece, that is, the cutting depth feeding device 130 can adjust the feed amount.

[0052] The cutting depth feeding device 130 can drive the air static pressure spindle 140 to rise and fall in the vertical direction relative to the column 120, and then the air static pressure spindle 140 can drive the cutter head device 170 and the tool 200 to rise and fall synchronously. When setting the tool, the cutting depth feeding device 130 can drive the air static pressure spindle 140 and the cutter head device 170 to automatically descend in the vertical direction relative to the column 120, eliminating the need for the operator to manually set the tool, simplifying the tool setting steps, and realizing automatic tool setting.

[0053] The air static pressure spindle 140 can rotate around the rotation axis. When the air static pressure spindle 140 rotates, it can drive the cutter head device 170 and the tool 200 to rotate synchronously, so that the tool 200 performs milling processing. The air static pressure spindle 140 adopts air static pressure technology, that is, the static pressure of the gas is used to support the loaded object. Within the predetermined load range, the friction surfaces of two objects that are relatively rotating or in a static state are completely separated by the gas pressed into their gap from the outside. In this way, the air static pressure spindle 140 has a very high rotation accuracy when it starts, and its temperature rise is very small when it rotates at high speed, and it can basically reach a constant temperature state, causing a small thermal deformation error, which can ensure the accuracy and rigidity of the air static pressure spindle 140, thereby ensuring the processing accuracy and surface quality of the cutter head device 170 on the workpiece, and realizing ultra-precision milling of the workpiece.

[0054] The liquid hydrostatic guide 150 is arranged in the base 110 along the length direction of the base 110. The liquid hydrostatic guide 150 can reciprocate along the length direction of the base 110 in a horizontal plane. The movement direction of the liquid hydrostatic guide 150 is perpendicular to the movement direction of the cutting depth feed device 130. The liquid hydrostatic guide 150 has a large load-bearing capacity to bear a workpiece of large mass. The adsorption device 160 is arranged on the liquid hydrostatic guide 150 and can reciprocate with the liquid hydrostatic guide 150. The adsorption device 160 can adsorb the workpiece to achieve the fixation of the workpiece and facilitate the processing of the workpiece.

[0055] It is understandable that the ultra-precision milling machine 100 has a loading and unloading position and a processing position. Figure 1 and Figure 6As shown, the left side of the hydrostatic guide 150 is the loading and unloading position, and the right side of the hydrostatic guide 150 is the processing position. The hydrostatic guide 150 can drive the adsorption device 160 to reciprocate between the loading and unloading position and the processing position. The hydrostatic guide 150 can drive the adsorption device 160 to adsorb or release the workpiece at the loading and unloading position, and the hydrostatic guide 150 can also reciprocate at the processing position to cooperate with the tool 200 to perform milling processing.

[0056] When the ultra-precision milling machine 100 of the present application is working, the liquid hydrostatic guide rail 150 can drive the adsorption device 160 to move to the loading and unloading position, and the workpiece to be processed is placed on the adsorption device 160, and the adsorption device 160 adsorbs and fixes the workpiece. Subsequently, the liquid hydrostatic guide rail 150 drives the adsorption device 160 and the workpiece to move from the loading and unloading position to the processing position. The air hydrostatic spindle 140 is started, and the air hydrostatic spindle 140 drives the cutter disc device 170 and the tool 200 to rotate at a high speed. At the same time, the depth feed device 130 gradually reduces the output feed amount. The depth feed device 130 can drive the air hydrostatic spindle 140 to descend relative to the column 120, so that the tip of the tool 200 contacts the workpiece to complete the tool alignment.

[0057] After the tool setting is completed, the feed rate of the cutting depth feed device 130 is set, and the hydrostatic guide rail 150 drives the adsorption device 160 and the workpiece to reciprocate at the processing position, and the surface of the workpiece is milled by the tool 200. After the processing is completed, the hydrostatic guide rail 150 drives the adsorption device 160 and the workpiece from the processing position back to the loading and unloading position, and the adsorption device 160 turns off the adsorption function to release the workpiece. At this time, the workpiece can be removed to complete the milling process.

[0058] The ultra-precision milling machine 100 of the above-mentioned embodiment drives the air static pressure spindle 140 and the cutter disc device 170 to automatically rise and fall in the vertical direction through the cutting depth feed device 130 to complete the tool setting operation. There is no need for the operator to manually set the tool, which simplifies the tool setting steps. Moreover, the air static pressure spindle 140 adopts air static pressure technology and has very high rotation accuracy. The temperature rise is very small when rotating at high speed, and it can basically reach a constant temperature state, resulting in small thermal deformation error, which can ensure the accuracy and rigidity of the air static pressure spindle 140, thereby ensuring the processing accuracy and surface quality of the workpiece by the cutter disc device 170, and realizing ultra-precision milling of the workpiece.

[0059] See also Figure 1 and Figure 2 In one embodiment, the air static pressure spindle 140 includes an air static pressure bearing 141 and a mounting sleeve 142. The mounting sleeve 142 can be raised and lowered on the column 120 and is connected to the cutting depth feeding device 130. The air static pressure bearing 141 is arranged in the mounting sleeve 142, and the output end of the air static pressure bearing 141 is installed with a cutter disc device 170. Figure 2 for Figure 1 The structure diagram of the air static pressure spindle 140 in the ultra-precision milling machine 100 is shown.

[0060] The mounting sleeve 142 can be raised and lowered on the column 120, and the output end of the cutting depth feeding device 130 is connected to the mounting sleeve 142, and the air static pressure bearing 141 is fixedly installed in the mounting sleeve 142, and the output end of the air static pressure spindle 140 can output a rotary motion. When the cutting depth feeding device 130 outputs a lifting motion, the cutting depth feeding device 130 can drive the mounting sleeve 142 to rise and fall along the column 120, and then the mounting sleeve 142 can drive the air static pressure spindle 140 to rise and fall synchronously, so that the air static pressure spindle 140 drives the cutter head device 170 and the tool 200 to rise and fall synchronously, so as to realize tool setting and milling processing.

[0061] It can be understood that the air static pressure bearing 141 has a mounting flange and an output shaft, the output shaft is rotatably arranged in the air static pressure bearing 141, and the mounting flange is located on the outside of the air static pressure bearing 141. After the air static pressure bearing 141 is arranged in the mounting sleeve 142, the mounting flange is fixedly connected to the inner wall of the mounting sleeve 142 to fix the air static pressure bearing 141 to the mounting sleeve 142, and the cutter head device 170 is installed at the end of the output shaft.

[0062] When the air static pressure main shaft 140 is started, it can drive the output shaft to rotate relative to the mounting sleeve 142. The air static pressure bearing 141 uses gas such as air as a lubricating medium to drive the output shaft to rotate, so that the output shaft can drive the cutter head device 170 and the cutter 200 to rotate. It is worth noting that the structure and working principle of the air static pressure bearing 141 are prior art and will not be described in detail here.

[0063] In the present application, the air static pressure bearing 141 has a high rotation accuracy. The temperature rise of the air static pressure bearing 141 is very small when rotating at high speed, and it can basically reach a constant temperature state, so the thermal deformation error caused is very small. Since the cutting force of ultra-precision machining is very small, the air static pressure bearing 141 can ensure the machining accuracy and surface quality of the workpiece.

[0064] See also Figures 1 to 3 In one embodiment, the cutting depth feed device 130 includes a first driving member 131 and a screw transmission pair 132. The first driving member 131 is arranged on the column 120. The first driving member 131 is connected to the screw transmission pair 132 in a transmission manner. The screw transmission pair 132 is arranged in a vertical direction, and the output end of the screw transmission pair 132 is connected to the air static pressure spindle 140. Figure 3 for Figure 1 The schematic diagram of the ultra-precision milling machine 100 in which the cutting depth feeding device 130 is arranged on the column 120 is shown.

[0065] The first driving member 131 is the power source of the cutting depth feeding device 130. The first driving member 131 drives the cutting depth feeding device 130 to output lifting motion, thereby driving the air static pressure spindle 140 to drive the cutter head device 170 and the tool 200 to rise and fall synchronously. The screw transmission pair 132 is arranged on the column 120 along the vertical direction. The input end of the screw transmission pair 132 is connected to the first driving member 131, and the output end of the screw transmission pair 132 is connected to the mounting sleeve 142 of the air static pressure spindle 140. The screw transmission pair 132 can output linear motion. When the first driving member 131 drives the screw transmission pair 132 to move, the screw transmission pair 132 can drive the mounting sleeve 142 to drive the air static pressure spindle 140 and the cutter head device 170 to rise and fall relative to the column 120.

[0066] Optionally, the first drive member 131 is a motor, such as a servo motor, etc. Optionally, the first drive member 131 is fixed to the column 120, and the output end of the first drive member 131 is directly connected to the screw transmission pair 132. Of course, in other embodiments of the present application, the first drive member 131 can also be connected to the screw transmission pair 132 through a reducer, etc. Optionally, the first drive member 131 can also be a linear motor, in which case the output end of the first drive member 131 can be directly connected to the mounting sleeve 142. Of course, in other embodiments of the present application, the screw transmission pair 132 can also be replaced by other structural forms capable of outputting linear motion.

[0067] See also Figure 1 and Figure 3 In one embodiment, the screw transmission pair 132 includes a nut 1321 and a screw shaft 1322. The nut 1321 is movably disposed on the screw shaft 1322. The first driving member 131 is connected to the screw shaft 1322. The nut 1321 is connected to the air static pressure main shaft 140. The screw shaft 1322 extends in the vertical direction. The top and bottom of the screw shaft 1322 are rotatably disposed on the column 120 through a bracket. The top of the screw shaft 1322 is connected to the first driving member 131. The nut 1321 is movably disposed on the screw shaft 1322. The nut 1321 is connected to the mounting sleeve 142. The first driving member 131 drives the screw shaft 1322 to rotate. When the screw shaft 1322 rotates, it can drive the nut 1321 to rise and fall along the screw shaft 1322, and then the nut 1321 drives the mounting sleeve 142 to rise and fall relative to the column 120.

[0068] See also Figure 1 and Figure 2In one embodiment, the column 120 has a first installation space 121 along the vertical direction, the air static pressure spindle 140 is at least partially located in the first installation space 121, and the screw transmission pair 132 of the cutting depth feeding device 130 is located in the first installation space 121. One side of the column 120 has a notch that passes through from top to bottom, and the notch is the first installation space 121. The screw transmission pair 132 is arranged in the first installation space 121 along the vertical direction and is located on the bottom wall of the first installation space 121.

[0069] In this way, the first installation space 121 can play a protective role, preventing other components from interfering with the screw transmission pair 132, and ensuring the smooth movement of the screw transmission pair 132. In addition, the air static pressure spindle 140 is at least partially arranged in the first installation space 121, which can reduce the overall volume of the ultra-precision milling machine 100 as much as possible, and at the same time, the rotary movement of the cutter head device 170 can be at least partially located in the column 120, and the column 120 plays a protective role.

[0070] See also Figure 1 and Figure 4 In one embodiment, the base 110 includes a bed 111 and a plurality of vibration isolators 112 , and the plurality of vibration isolators 112 are disposed at the bottom of the bed 111 . Figure 4 for Figure 1 The schematic diagram of the base 110 in the ultra-precision milling machine 100 shown in FIG. The bed 111 is the main body of the base 110, and the various components of the ultra-precision milling machine 100 are carried by the bed 111. Specifically, the liquid hydrostatic guide 150 is arranged on the top of the bed 111, and the column 120 is arranged on the bed 111 and is located on one side of the liquid hydrostatic guide 150. The vibration isolator 112 can play a supporting and vibration isolating role. A plurality of vibration isolators 112 are evenly distributed at the bottom of the bed 111 to support and isolate the entire ultra-precision milling machine 100 and reduce the error caused by vibration.

[0071] See also Figure 1 and Figure 4 In one embodiment, the bed 111 has a second installation space 1111 along the horizontal direction, and the liquid hydrostatic guide rail 150 is located in the second installation space 1111. The first installation space 121 is recessed in the top surface of the bed 111, and the liquid hydrostatic guide rail 150 is arranged in the second installation space 1111. The second installation space 1111 can limit and fix the liquid hydrostatic guide rail 150 to ensure the accuracy of the installation position of the liquid hydrostatic guide rail 150. At the same time, the liquid hydrostatic guide rail 150 is arranged as a whole in the second installation space 1111 of the bed 111, which can effectively reduce the overall center of gravity of the ultra-precision milling machine 100 and greatly improve the machine rigidity of the ultra-precision milling machine 100.

[0072] Optionally, the column 120 is made of marble. In this way, the structural strength and support performance of the column 120 can be guaranteed, and the error can be reduced. At the same time, the air static pressure main shaft 140 is at least partially installed in the first installation space 121 of the marble column 120, which can ensure that the air static pressure main shaft 140 has high stability, precision and rigidity.

[0073] Optionally, the bed 111 is made of marble. In this way, the structural strength and support performance of the bed 111 can be guaranteed and the error can be reduced. It can be understood that the bed 111 and the column 120 are made of high-quality natural marble, which has high strength and good rigidity and can provide a lower thermal expansion coefficient to reduce the processing accuracy and surface quality of the workpiece.

[0074] See also Figure 1 and Figure 3 In one embodiment, the cutting depth feeding device 130 further includes a balancing component 133 disposed on the column 120. The balancing component 133 is symmetrically located on both sides of the air static pressure spindle 140 and connected to the air static pressure spindle 140. The balancing component 133 can rise and fall with the air static pressure spindle 140 to balance the weight of the air static pressure spindle 140. The balancing component 133 can offset the mass of the air static pressure spindle 140, and can also effectively eliminate or reduce the comprehensive gap, thereby ensuring the rotation accuracy when the air static pressure spindle 140 drives the cutter head device 170 to rotate.

[0075] Optionally, the balancing component 133 is a balancing cylinder. The balancing component 133 is located on both sides of the mounting sleeve 142, the balancing component 133 is fixed to the column 120, and the output end of the balancing component 133 is connected to the mounting sleeve 142. When the screw transmission pair 132 drives the air static pressure main shaft 140 to rise and fall, the balancing component 133 balances the air static pressure main shaft 140 to ensure that the cutter head device 170 rotates smoothly. Optionally, the balancing component 133 is fixed to the column 120 through a bracket. Optionally, the output end of the balancing component 133 is connected to the mounting sleeve 142 by a synchronous connecting piece such as a connecting plate.

[0076] See also Figure 1 and Figure 3 In one embodiment, the cutting depth feeding device 130 further includes a first grating ruler 134, which is arranged on the column 120 along the vertical direction, and is used to detect the lifting distance of the air static pressure spindle 140. The first grating ruler 134 can realize real-time feedback of the position, and the first grating ruler 134 is arranged in the first installation space 121 along the vertical direction. When the screw transmission pair 132 drives the air static pressure spindle 140 to rise and fall synchronously, the first grating ruler 134 can feedback the lifting distance of the air static pressure spindle 140 in real time to ensure that the cutting depth feeding device 130 controls the feeding amount of the tool 200 accurately.

[0077] It can be understood that the ultra-precision milling machine 100 has a controller, and the first drive member 131, the air static pressure spindle 140 and the first grating ruler 134 are electrically connected to the controller respectively. The controller controls the first drive member 131 to drive the screw transmission pair 132 to output a predetermined feed amount. At this time, the screw transmission pair 132 can drive the air static pressure spindle 140 and the cutter head device 170 and the tool 200 to descend. In this process, the first grating ruler 134 can detect the actual feed amount of the air static pressure spindle 140 in real time and feed it back to the controller. The controller can compare the actual feed amount with the predetermined feed amount to control the first drive member 131 to drive the screw transmission pair 132 to descend until the actual feed amount of the air static pressure spindle 140 descends matches the predetermined feed amount, and the first drive member 131 stops working. In this way, the closed-loop control of the feed amount of the air static pressure spindle 140 can be achieved through the first grating ruler 134 to ensure the processing accuracy and surface quality of the workpiece.

[0078] See also Figure 1 and Figure 3 In one embodiment, the cutting depth feeding device 130 further includes a guide assembly 135, which is disposed on the column 120 along the vertical direction, and the guide assembly 135 guides the mounting sleeve 142 connecting the air static pressure spindle 140 and the column 120. The guide assembly 135 guides the lifting and lowering of the mounting sleeve 142 to ensure that the air static pressure spindle 140 can be lifted and lowered accurately, and the lifting and lowering accuracy of the air static pressure spindle 140 is ensured, thereby ensuring the accurate feeding amount of the tool 200.

[0079] See also Figure 1 and Figure 3 In one embodiment, the guide assembly 135 includes a guide rail 1351 and a guide slider 1352. The guide rail 1351 is arranged on the column 120 along the vertical direction, and the guide slider 1352 is slidably arranged on the guide rail 1351 and connected to the air static pressure main shaft 140. The guide rail 1351 is arranged on the column 120 along the to direction and is located on the outside or inside of the first installation space 121. When the screw transmission pair 132 drives the air static pressure main shaft 140 to rise and fall in the vertical direction, the installation sleeve 142 can drive the guide slider 1352 to move along the guide rail 1351 to ensure the lifting accuracy of the air static pressure main shaft 140.

[0080] Optionally, the number of guide assemblies 135 is two groups, and the two groups of guide assemblies 135 are symmetrically arranged on both sides of the mounting sleeve 142 to ensure the guiding accuracy of the air static pressure main shaft 140. Optionally, the guide assembly 135 also includes an adapter, and the guide slider 1352 is connected to the mounting sleeve 142 through the adapter such as an adapter plate. Optionally, in each guide assembly 135, the number of guide sliders 1352 is multiple to ensure the guiding accuracy of the air static pressure main shaft 140.

[0081] When the cutting depth feeding device 130 is working, the first driving member 131 drives the screw transmission pair 132 to move, and the screw transmission pair 132 converts the rotational motion into the lifting motion, and is guided by the guide assembly 135, driving the air static pressure spindle 140 to move up and down in the vertical direction. At the same time, the balancing component 133 can offset the mass of the air static pressure spindle 140, and can also effectively eliminate or reduce the comprehensive gap. Then the first grating ruler 134 provides real-time position feedback to achieve feed cutting depth adjustment, and can also achieve rapid movement of the air static pressure spindle 140 in the vertical direction to meet the needs of processing workpieces of different heights.

[0082] Optionally, the screw transmission pair 132 is a high-precision transmission pair, and the guide assembly 135 is a high-precision linear rail. In other words, the screw transmission pair 132 and the guide assembly 135 have high precision requirements to ensure the precision requirements of the feed depth of the cutting depth feeding device 130 and achieve sub-micron feed depth adjustment.

[0083] See also Figure 1 and Figure 5 In one embodiment, the liquid hydrostatic guide rail 150 includes a second driving member 151, a first guide rail 152, a second guide rail 153 and a slide plate 154. The first guide rail 152 and the second guide rail 153 are parallel and arranged opposite to each other. The slide plate 154 can be slidably disposed between the first guide rail 152 and the second guide rail 153, and is slidably matched with the first guide rail 152 and the second guide rail 153. The second driving member 151 is connected to the slide plate 154 to drive the slide plate 154 to move along the first guide rail 152 and the second guide rail 153. Figure 5 for Figure 1 FIG. 1 is a schematic diagram of a hydrostatic guideway 150 in an ultra-precision milling machine 100 .

[0084] The second driving member 151 is provided on the base 110. The second driving member 151 is the power source of the hydrostatic guide rail 150. The hydrostatic guide rail 150 is driven by the second driving member 151 to output the movement. The first guide rail 152 and the second guide rail 153 are arranged in parallel in the horizontal plane and extend along the length direction of the base 110. There is a certain distance between the first guide rail 152 and the second guide rail 153. The slide plate 154 can be slidably provided between the first guide rail 152 and the second guide rail 153. The first guide rail 152 and the second guide rail 153 can slide and limit the slide plate 154. The second driving member 151 is in transmission connection with the slide plate 154.

[0085] The top surface of the slide 154 is provided with an adsorption device 160. Due to the position limitation of the slide 154 by the first guide rail 152 and the second guide rail 153, the second driving member 151 can drive the slide 154 to move in the horizontal plane, and the slide 154 can accurately move along the horizontal plane. Figure 1 and Figure 5As shown, the slide 154 can move in the left and right directions, and then the slide 154 can drive the adsorption device 160 to move back and forth between the loading and unloading position and the processing position, and drive the adsorption device 160 to move back and forth at the processing position to meet the loading and unloading and processing requirements of the workpiece.

[0086] Optionally, the second driving member 151 is a linear motor. Of course, in other embodiments of the present application, the second driving member 151 may also cooperate with a screw drive assembly or other linear output components to drive the slide 154 to perform linear motion along the first guide rail 152 and the second guide rail 153. Optionally, the first guide rail 152 and the second guide rail 153 use liquid hydrostatic technology, and the slide 154 achieves reciprocating motion on the inner side of the first guide rail 152 and the second guide rail 153 under the action of the liquid hydrostatic technology.

[0087] See also Figure 1 and Figure 6 In one embodiment, the hydrostatic guide rail 150 further includes a brake component 156, which is disposed on the first guide rail 152 along the length direction of the first guide rail 152 and cooperates with the slide 154. The brake component 156 is used to lock or unlock the slide 154. Optionally, the brake component 156 is a brake. When the brake component 156 is braked, the brake component 156 can lock the slide 154 at a specified position of the first guide rail 152 and the second guide rail 153, so that the adsorption device 160 remains stationary. After the brake component 156 is released, the slide 154 can drive the adsorption device 160 to reciprocate between the loading and unloading position and the processing position along the first guide rail 152 and the second guide rail 153.

[0088] See also Figure 1 and Figure 6 In one embodiment, the hydrostatic guide rail 150 further includes a second grating ruler 157, which is disposed on the second guide rail 153 along the length direction of the second guide rail 153, and is used to detect the moving distance of the slide 154. The second grating ruler 157 can realize real-time feedback of the position, and the second grating ruler 157 is disposed on the second guide rail 153 along the horizontal direction and extends in the left-right direction. When the second driving member 151 drives the slide 154 to move in the horizontal direction, the second grating ruler 157 can provide real-time feedback of the moving distance of the slide 154 to ensure that the moving position of the slide 154 is accurate.

[0089] Optionally, the second grating ruler 157 and the second driving member 151 are electrically connected to the controller. It is worth noting that the control principle of the second grating ruler 157 is substantially the same as the control principle of the first grating ruler 134, which will not be repeated here.

[0090] See also Figure 1 and Figure 6In one embodiment, the hydrostatic guide rail 150 further includes a third guide rail 155, which is disposed between the first guide rail 152 and the second guide rail 153. The slide plate 154 has a guide groove, in which the third guide rail 155 can be slidably disposed. The second driving member 151 is disposed on the third guide rail 155 and is in transmission connection with the slide plate 154. The third guide rail 155 is located between the first guide rail 152 and the second guide rail 153 and below the slide plate 154. The third guide rail 155 is used to install the second driving member 151 to drive the slide plate 154 to move.

[0091] Optionally, the bed 111 has a guide groove, and the bottom of the slide 154 has a guide protrusion, which can be slidably installed in the guide groove. In this way, the movement trajectory of the slide 154 can be further guaranteed to be accurate. Optionally, the first guide rail 152, the second guide rail 153, the third guide rail 155 and the slide 154 are made of high-quality natural marble. In this way, the first guide rail 152, the second guide rail 153, the third guide rail 155 and the slide 154 can have the characteristics of high strength and good rigidity. At the same time, the high-quality natural marble can also provide a higher thermal expansion coefficient and better wear resistance to ensure the processing accuracy and surface quality of the workpiece.

[0092] See also Figure 1 and Figure 6 In one embodiment, the cutter disc device 170 includes a cutter disc body 171, a clamping component 172 and a counterweight component 173. The clamping component 172 is disposed on the cutter disc body 171 and is used to clamp and fix the tool 200 to the cutter disc body 171. The counterweight component 173 is disposed on the cutter disc body 171 and is arranged corresponding to the clamping component 172. Figure 6 for Figure 1 A schematic diagram of a cutter head device 170 in an ultra-precision milling machine 100 is shown.

[0093] The cutter head body 171 is a component that carries the tool 200 and can be installed at the output end of the air static pressure spindle 140. Moreover, the cutter head body 171 is set in a disc shape, and the tool 200 is fixed to the cutter head body 171 through the clamping component 172. In this way, when the air static pressure spindle 140 drives the cutter head body 171 to rotate, the cutter head body 171 can drive the tool 200 to rotate synchronously through the clamping component 172 to achieve tool alignment and milling processing.

[0094] The counterweight component 173 is disposed on the cutter disc body 171, and the counterweight component 173 and the tool 200 are disposed along the same radial direction. The tool 200 is counterweighted by the counterweight component 173 so that the center of mass of the cutter disc body 171 is located on the axis of rotation, thereby ensuring the static balance of the rotation of the cutter disc body 171, thereby ensuring the stability of the rotation of the cutter disc body 171, and ensuring the processing accuracy and surface quality of the workpiece.

[0095] Optionally, the tool 200 is a diamond blade. Moreover, the clamping component 172 can detachably install the tool 200 to achieve the replacement of the tool 200. It is worth noting that the structural form of the clamping component 172 is not limited in principle, as long as the clamping component 172 can clamp the guide rod of the tool 200. Optionally, the clamping component 172 has a clamping portion and a fixing portion, the clamping portion is installed with a tool rod, and the fixing portion is fixedly connected so that the clamping portion can clamp and fix the tool rod. Optionally, the clamping component 172 also includes a fastener, which is arranged on the fixing portion to achieve locking or unlocking of the fixing portion, so that the clamping portion can clamp or release the tool rod.

[0096] See also Figure 1 and Figure 7 In one embodiment, the adsorption device 160 includes a suction cup workbench 161 and a control valve. The suction cup workbench 161 has a connected air flow channel and an adsorption hole 162. The control valve is arranged in the suction cup workbench 161 to control the opening and closing of the adsorption hole 162. The air flow channel and the adsorption hole 162 cooperate to adsorb and fix the workpiece on the surface of the suction cup workbench 161. Figure 7 for Figure 1 A schematic diagram of the adsorption device 160 in the ultra-precision milling machine 100 is shown.

[0097] The surface of the suction cup workbench 161 can be used to mount the workpiece, the airflow channel can be used for the vacuum airflow to flow, and the adsorption holes 162 penetrate the surface of the suction cup workbench 161 and the airflow channel. After the workpiece is placed on the surface of the suction cup workbench 161, the suction cup workbench 161 is vacuumed through the airflow channel and the adsorption holes 162. At this time, the adsorption holes 162 can adsorb the workpiece to the surface of the suction cup workbench 161 to fix the workpiece. When releasing the workpiece, the vacuuming of the suction cup workbench 161 can be released.

[0098] Moreover, the control valve is arranged in the suction cup workbench 161, and the control valve can control the automatic opening and closing of the suction hole 162 of the suction cup workbench 161. Specifically, the control valve can automatically control the opening and closing of the suction hole 162 according to the shape of the workpiece, without adding a sealing gasket, and is flexible to use to meet the needs of workpieces of different shapes.

[0099] The adsorption device 160 further includes a switch valve 163, which is disposed at the inlet and outlet of the air flow channel to control the opening and closing of the inlet and outlet, so that the vacuum air flow can flow into and out of the air flow channel. Moreover, the switch valve 163 can also control the opening of the inlet and outlet of the air flow channel to control the adsorption force of the adsorption hole 162.

[0100] When the ultra-precision milling machine 100 of the present application is working, the liquid hydrostatic guide rail 150 can drive the slide 154 and the adsorption device 160 to move to the loading and unloading position, and place the workpiece to be processed on the suction cup worktable 161, and the suction cup worktable 161 adsorbs and fixes the workpiece. Subsequently, the liquid hydrostatic guide rail 150 drives the slide 154, the suction cup worktable 161, and the workpiece to move from the loading and unloading position to the processing position. The air hydrostatic spindle 140 is started, and the air hydrostatic spindle 140 drives the cutter disc device 170 and the tool 200 to rotate at a high speed. At the same time, the screw transmission pair 132 of the depth feed device 130 gradually reduces the output feed amount. The screw transmission pair 132 can drive the air hydrostatic spindle 140 to descend relative to the column 120, so that the tip of the tool 200 contacts the workpiece to complete the tool alignment.

[0101] After the tool setting is completed, the feed rate of the cutting depth feed device 130 is set, and the hydrostatic guide rail 150 drives the suction cup table 161 and the workpiece to reciprocate at the processing position, and the surface of the workpiece is milled by the tool 200. After the processing is completed, the hydrostatic guide rail 150 drives the suction cup table 161 and the workpiece from the processing position back to the loading and unloading position, and the suction cup table 161 turns off the adsorption function to release the workpiece. At this time, the workpiece can be removed to complete the milling process.

[0102] The ultra-precision milling machine 100 of the present application adopts a gantry structure for the overall layout, has high rigidity, and can process workpieces of larger sizes than a horizontal structure. Moreover, the liquid hydrostatic guide rail 150 adopts liquid hydrostatic technology, has the advantages of high vibration damping, high rigidity, and large bearing capacity, and provides reliable stability and straightness for the operation of the workpiece. The air hydrostatic spindle 140 adopts air hydrostatic bearing 141 technology, has high rotation accuracy, and has very little temperature rise when rotating at high speed, which can basically achieve a constant temperature state, so the thermal deformation error caused is very small.

[0103] The cutting depth feed device 130 uses a high-precision screw transmission pair 132 to cooperate with the guide assembly 135 and the first grating ruler 134 to achieve sub-micron feeding cutting depth adjustment. In addition, the base 110, the column 120, and the liquid hydrostatic guide rail 150 are all made of natural marble materials, which provide the whole machine with a lower thermal expansion coefficient, higher hardness and wear resistance, and ensure the stability of dimensional accuracy while achieving the effect of flying cutting instead of grinding.

[0104] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0105] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. An ultra-precision milling machine tool, characterized in that: include: Base (110); A column (120) is arranged on the base (110) along a vertical direction; A cutting depth feeding device (130) is arranged on the column (120) along the vertical direction and can output a lifting movement along the vertical direction; An air static pressure spindle (140) is movably disposed on the column (120), the air static pressure spindle (140) being connected to the cutting depth feeding device (130) and rising and falling along with the cutting depth feeding device (130); A liquid hydrostatic guide rail (150) is arranged on the base (110) in a horizontal direction and is located below the air hydrostatic main shaft (140), wherein the liquid hydrostatic guide rail (150) is capable of outputting a movement in a horizontal direction; an adsorption device (160), which is disposed on the liquid hydrostatic guide rail (150) and can move with the liquid hydrostatic guide rail (150), and the adsorption device (160) is used to adsorb and fix a workpiece; and A cutter head device (170) is arranged on the air static pressure spindle (140) and is used to perform milling processing on the workpiece.

2. The ultra-precision milling machine tool according to claim 1, characterized in that: The air static pressure main shaft (140) comprises an air static pressure bearing (141) and a mounting sleeve (142); the mounting sleeve (142) is movably mounted on the column (120); the air static pressure main shaft (140) is disposed in the mounting sleeve (142) and is connected to the cutting depth feed device (130); and the cutter head device (170) is mounted on the output end of the air static pressure bearing (141).

3. The ultra-precision milling machine tool according to claim 1, characterized in that: The cutting depth feeding device (130) comprises a first driving member (131) and a screw transmission pair (132), wherein the first driving member (131) is arranged on the column (120), the first driving member (131) is in transmission connection with the screw transmission pair (132), the screw transmission pair (132) is arranged in a vertical direction, and the output end of the screw transmission pair (132) is connected to the air static pressure main shaft (140); The screw transmission pair (132) comprises a nut (1321) and a screw shaft (1322); the nut (1321) is movably arranged on the screw shaft (1322); the first driving member (131) is connected to the screw shaft (1322); and the nut (1321) is connected to the air static pressure main shaft (140).

4. The ultra-precision milling machine tool according to claim 1, characterized in that: The cutting depth feeding device (130) further comprises a balancing component (133) disposed on the column (120), wherein the balancing component (133) is symmetrically located on both sides of the air static pressure main shaft (140) and is connected to the air static pressure main shaft (140), and the balancing component (133) can be raised and lowered along with the air static pressure main shaft (140) to balance the weight of the air static pressure main shaft (140); And / or, the cutting depth feeding device (130) further comprises a first grating ruler (134), the first grating ruler (134) being arranged on the column (120) along a vertical direction, the first grating ruler (134) being used to detect a lifting distance of the air static pressure spindle (140); And / or, the cutting depth feed device (130) further comprises a guide assembly (135), wherein the guide assembly (135) comprises a guide rail (1351) and a guide slider (1352), wherein the guide rail (1351) is arranged on the column (120) in a vertical direction, and the guide slider (1352) can be slidably arranged on the guide rail (1351) and connected to the air static pressure spindle (140).

5. The ultra-precision milling machine tool according to claim 1, characterized in that: The liquid hydrostatic guide rail (150) comprises a second driving member (151), a first guide rail (152), a second guide rail (153) and a slide plate (154); the first guide rail (152) and the second guide rail (153) are parallel and arranged opposite to each other; the slide plate (154) is slidably arranged between the first guide rail (152) and the second guide rail (153) and is slidably matched with the first guide rail (152) and the second guide rail (153); the second driving member (151) is connected to the slide plate (154) to drive the slide plate (154) to move along the first guide rail (152) and the second guide rail (153).

6. The ultra-precision milling machine tool according to claim 5, characterized in that: The liquid hydrostatic guide rail (150) further comprises a brake component (156), the brake component (156) being arranged on the first guide rail (152) along the length direction of the first guide rail (152) and cooperating with the slide plate (154), the brake component (156) being used to lock or unlock the slide plate (154); And / or, the liquid hydrostatic guide rail (150) further comprises a second grating ruler (157), the second grating ruler (157) being arranged on the second guide rail (153) along the length direction of the second guide rail (153), the second grating ruler (157) being used to detect the moving distance of the slide (154); And / or, the liquid hydrostatic guide rail (150) further comprises a third guide rail (155), the third guide rail (155) being arranged between the first guide rail (152) and the second guide rail (153), the slide plate (154) having a guide groove, the third guide rail (155) being slidably arranged in the guide groove, and the second driving member (151) being arranged on the third guide rail (155) and being transmission-connected to the slide plate (154).

7. The ultra-precision milling machine tool according to any one of claims 1 to 6, characterized in that: The cutter disc device (170) comprises a cutter disc body (171), a clamping component (172) and a weight component (173); the clamping component (172) is arranged on the cutter disc body (171) and is used to clamp and fix the tool (200) on the cutter disc body (171); the weight component (173) is arranged on the cutter disc body (171) and is arranged corresponding to the clamping component (172).

8. The ultra-precision milling machine tool according to any one of claims 1 to 6, characterized in that: The adsorption device (160) comprises a suction cup workbench (161) and a control valve. The suction cup workbench (161) has an air flow channel and an adsorption hole (162) that are connected. The control valve is arranged in the suction cup workbench (161) to control the opening and closing of the adsorption hole (162). The air flow channel cooperates with the adsorption hole (162) to adsorb and fix the workpiece on the surface of the suction cup workbench (161).

9. The ultra-precision milling machine tool according to any one of claims 1 to 6, characterized in that: The column (120) has a first installation space (121) along the vertical direction, the air static pressure spindle (140) is at least partially located in the first installation space (121), and the screw transmission pair (132) of the cutting depth feeding device (130) is located in the first installation space (121); The column (120) is made of marble.

10. The ultra-precision milling machine tool according to any one of claims 1 to 6, characterized in that: The base (110) comprises a bed (111) and a plurality of vibration isolators (112), wherein the plurality of vibration isolators (112) are arranged at the bottom of the bed (111); The bed (111) has a second installation space (1111) along the horizontal direction, and the liquid hydrostatic guide rail (150) is located in the second installation space (1111); The bed (111) is made of marble.

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