High-pressure synthetic furnace

Abstract

The utility model provides a high-pressure synthetic furnace. The high-pressure synthetic furnace comprises a bracket; the synthesis furnace body is arranged in the bracket; the lifting driving mechanism is arranged on the bracket, and the lifting driving mechanism is connected with the synthetic furnace body to drive the synthetic furnace body to lift; the plurality of first lifting guide rails are arranged on the bracket and surround the synthetic furnace body; the first limiting mechanism is connected with the synthetic furnace body and can ascend and descend along with the synthetic furnace body, and the first limiting mechanism comprises a plurality of first limiting pieces arranged in one-to-one correspondence with the first lifting guide rails; when the synthetic furnace body ascends and descends, the first lifting guide rails and the first limiting pieces are matched one by one to limit rotation of the synthetic furnace body. According to the high-pressure synthetic furnace provided by the invention, the stability during furnace opening and closing can be improved, the furnace opening and closing efficiency is improved, hoisting accidents are avoided, and the safety is high.

Description

Technical Field

[0001] The present application relates to the technical field of crystal growth, and in particular to a high-pressure synthesis furnace. Background Art

[0002] At present, in the LEC (liquid sealed Czochralski) single crystal growth process, a high-pressure synthesis furnace is needed to provide a high-pressure environment. When opening the existing high-pressure synthesis furnace, most of the lifting tools such as gantry cranes are used to open the furnace, which increases the opening and closing time of the furnace and affects production efficiency. At the same time, during the opening process of the furnace, the existing lifting tools make it difficult to keep the furnace cover and the furnace body balanced, and the vibration is serious during the lifting process, which is easy to scratch the fragile thermal field in the furnace, causing serious economic losses. Utility Model Content

[0003] In view of this, the purpose of the present application is to provide a high-pressure synthesis furnace that can increase the stability when opening and closing the furnace, improve the efficiency of opening and closing the furnace, avoid lifting accidents, and have high safety.

[0004] Based on the above purpose, the present application provides a high-pressure synthesis furnace, which comprises:

[0005] Bracket;

[0006] A synthesis furnace body is arranged in the support;

[0007] A lifting drive mechanism is arranged on the support, and the lifting drive mechanism is connected to the synthesis furnace body to drive the synthesis furnace body to lift;

[0008] A plurality of first lifting guide rails are arranged on the bracket and around the synthesis furnace body;

[0009] A first limiting mechanism, connected to the synthesis furnace body and capable of rising and falling with the synthesis furnace body, the first limiting mechanism comprising a plurality of first limiting members arranged in one-to-one correspondence with the first lifting guide rails;

[0010] When the synthesis furnace body is lifted or lowered, the first lifting guide rail and the first limiting member cooperate one by one to limit the rotation of the synthesis furnace body.

[0011] In a preferred embodiment, the high pressure synthesis furnace further comprises:

[0012] A plurality of second lifting guide rails are arranged on the bracket and around the synthesis furnace body;

[0013] A second limiting mechanism is connected to the synthesis furnace body and can be raised and lowered with the synthesis furnace body, the second limiting mechanism comprising a plurality of second limiting members arranged in one-to-one correspondence with the second lifting guide rails;

[0014] When the synthesis furnace body is lifted or lowered, the second lifting guide rail and the second limiting member cooperate one by one to limit the shaking of the synthesis furnace body.

[0015] In a preferred embodiment, the synthesis furnace body includes a furnace body, an upper cover and a lower cover, the upper cover is arranged on the top of the furnace body, the lower cover is arranged on the bottom of the furnace body, the first limiting mechanism is connected to the upper cover, and the second limiting mechanism is connected to the furnace body;

[0016] In the first open cover state, the furnace body and the lower cover are stationary, the lifting drive mechanism drives the upper cover and the first limit mechanism to rise, and the upper cover is separated from the furnace body;

[0017] In the second open cover state, the lower cover does not move, the lifting drive mechanism drives the upper cover, the furnace body, the first limiting mechanism and the second limiting mechanism to rise simultaneously, and the furnace body is separated from the lower cover.

[0018] In a preferred embodiment, the synthesis furnace body further includes a first upper flange and a first lower flange, the upper cover is connected to the furnace body via the first upper flange, and the lower cover is connected to the furnace body via the first lower flange.

[0019] In a preferred embodiment, the second lifting guide rail includes a lifting slider, the second limiting mechanism includes a second frame, the second frame is connected to the synthesis furnace body, the second limiting member includes a second roller, the rotating shaft of the second roller is connected to the second frame, and when the synthesis furnace body is lifted or lowered, the wheel surface of the second roller can roll on the lifting slider.

[0020] In a preferred embodiment, the first lifting guide rail includes a guide rail groove, and the first limiting member is located in the guide rail groove.

[0021] In a preferred embodiment, the first limiting mechanism includes a first frame, the first frame is connected to the synthesis furnace body, the first limiting member includes a first roller, the first roller is at least partially located in the guide rail groove, the rotating axis of the first roller is connected to the first frame, and when the synthesis furnace body is raised or lowered, the wheel surface of the first roller can roll on the side wall of the guide rail groove.

[0022] In a preferred embodiment, the bracket includes three columns, the three columns are arranged in a triangle, and each of the columns is provided with a first lifting guide rail.

[0023] In a preferred embodiment, the bracket further includes a bottom frame, and the lifting drive mechanism and the three columns are arranged on the bottom frame.

[0024] In a preferred embodiment, the lifting drive mechanism includes a driving member, a fixed end of the driving member is connected to the bracket, and a movable end of the driving member is connected to the first limiting mechanism via a rotating shaft.

[0025] From the above description, it can be seen that the high-pressure synthesis furnace provided in the present application sets the synthesis furnace body in a bracket, drives the synthesis furnace body to rise and fall through a lifting drive mechanism, and sets a plurality of first lifting guide rails on the bracket. The stability of the synthesis furnace body during lifting and falling is ensured by cooperating with a plurality of first limiting mechanisms and a plurality of first lifting guide rails, and the rotation of the synthesis furnace body during lifting and falling is limited, which can increase the stability when opening and closing the furnace, improve the efficiency of opening and closing the furnace, avoid hoisting accidents, and has high safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the present application or related technologies, the drawings required for use in the embodiments or related technical descriptions are briefly introduced below. Obviously, the drawings described below are only embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 This is an axonometric diagram of a high pressure synthesis furnace in one embodiment of the present application;

[0028] Figure 2 A top view of a high pressure synthesis furnace in one embodiment of the present application;

[0029] Figure 3 for Figure 2 Section view along AA;

[0030] Figure 4 This is an axonometric view of a column in one embodiment of the present application;

[0031] Figure 5 A side view of a column in one embodiment of the present application;

[0032] Figure 6 This is an axonometric view of the bottom frame in one embodiment of the present application;

[0033] Figure 7 A top view of a bottom frame in an embodiment of the present application;

[0034] Figure 8 This is a schematic diagram of the structure of the top frame in one embodiment of the present application;

[0035] Fig. 9 This is an axonometric diagram of the first limiting mechanism in one embodiment of the present application;

[0036] Fig.10 This is an axonometric diagram of the second limiting mechanism in one embodiment of the present application;

[0037] Fig.11 It is an axonometric view of the lifting drive mechanism in one embodiment of the present application.

[0038] Reference numerals

[0039] 1. Bracket; 11. Column; 12. Bottom frame; 121. Foot cup; 122. Universal ball; 123. First mounting surface; 124. Second mounting surface; 125. Third mounting surface; 13. Top frame;

[0040] 2. Synthesis furnace body; 21. Furnace body; 22. Upper cover; 23. Lower cover; 24. First upper flange; 25. First lower flange;

[0041] 3. Lifting drive mechanism; 31. Driving member; 311. Fixed end; 312. Movable end; 32. Rotating shaft;

[0042] 4. First lifting guide rail; 41. Guide rail groove;

[0043] 5. first limiting mechanism; 51. first limiting member; 52. first frame; 521. second upper flange; 522. second lower flange; 523. lifting hole;

[0044] 6. Second lifting guide rail; 61. Lifting slide block;

[0045] 7. Second limiting mechanism; 71. Second limiting member; 72. Second frame;

[0046] 8. Top lifting and rotating mechanism;

[0047] 9. Bottom lifting and rotating mechanism. DETAILED DESCRIPTION

[0048] In order to make the objectives, technical solutions and advantages of the present application more clearly understood, the present application is further described in detail below in combination with specific embodiments and with reference to the accompanying drawings.

[0049] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present application should be the usual meanings understood by people with ordinary skills in the field to which the present application belongs. The "first", "second" and similar words used in the embodiments of the present application do not represent any order, quantity or importance, but are only used to distinguish different components. "Including" or "comprising" and similar words mean that the elements or objects appearing in front of the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0050] Reference Figure 1-Figure 11 As shown, an embodiment of the present application discloses a high-pressure synthesis furnace, which includes a bracket 1, a synthesis furnace body 2, a lifting drive mechanism 3, a plurality of first lifting guide rails 4 and a first limiting mechanism 5.

[0051] Among them, the synthesis furnace body 2 is arranged in the bracket 1; the lifting drive mechanism 3 is arranged on the bracket 1, and the lifting drive mechanism 3 is connected to the synthesis furnace body 2 to drive the synthesis furnace body 2 to rise and fall; a plurality of first lifting guide rails 4 are arranged on the bracket 1 and are arranged around the synthesis furnace body 2; the first limiting mechanism 5 is connected to the synthesis furnace body 2 and can be lifted and lowered with the synthesis furnace body 2, and the first limiting mechanism 5 includes a plurality of first limiting members 51 arranged one by one corresponding to the first lifting guide rails 4.

[0052] When the synthesis furnace body 2 is lifted or lowered, the first lifting guide rail 4 cooperates with the first stopper 51 to limit the rotation of the synthesis furnace body 2. The synthesis furnace body 2 has a central axis along the vertical direction, and limiting the rotation of the synthesis furnace body 2 means limiting the rotation of the synthesis furnace body 2 around the central axis.

[0053] The high-pressure synthesis furnace provided in the present embodiment arranges the synthesis furnace body 2 in the bracket 1, drives the synthesis furnace body 2 to be lifted and lowered by the lifting drive mechanism 3, and arranges a plurality of first lifting guide rails 4 on the bracket 1, and ensures the stability of the synthesis furnace body 2 when being lifted and lowered by cooperating with the plurality of first limiting mechanisms 5 and the plurality of first lifting guide rails 4, and limits the rotation of the synthesis furnace body 2 when being lifted and lowered, thereby increasing the stability when opening and closing the furnace, improving the efficiency of opening and closing the furnace, avoiding hoisting accidents, and having high safety.

[0054] In one embodiment, the high-pressure synthesis furnace also includes a plurality of second lifting guide rails 6 and a second limiting mechanism 7; wherein, the plurality of second lifting guide rails 6 are arranged on the bracket 1 and are arranged around the synthesis furnace body 2; the second limiting mechanism 7 is connected to the synthesis furnace body 2 and can be lifted and lowered with the synthesis furnace body 2, and the second limiting mechanism 7 includes a plurality of second limiting members 71 which are arranged one by one corresponding to the second lifting guide rails 6.

[0055] When the synthesis furnace body 2 is lifted or lowered, the second lifting guide rail 6 and the second stopper 71 cooperate with each other to limit the shaking of the synthesis furnace body 2. That is, the central axis of the synthesis furnace body 2 is always in the vertical direction, or the deviation from the vertical direction is very small, so as to avoid the inclination of the synthesis furnace body 2 and ensure the stability of the synthesis furnace body 2 when it is lifted or lowered.

[0056] Reference Figure 1 As shown, in one embodiment, the synthesis furnace body 2 includes a furnace body 21, an upper cover 22 and a lower cover 23, the upper cover 22 is arranged on the top of the furnace body 21, the lower cover 23 is arranged on the bottom of the furnace body 21, the first limiting mechanism 5 is connected to the upper cover 22, and the second limiting mechanism 7 is connected to the furnace body 21;

[0057] In the first open cover state, the furnace body 21 and the lower cover 23 are stationary, the lifting drive mechanism 3 drives the upper cover 22 and the first limit mechanism 5 to rise, and the upper cover 22 is separated from the furnace body 21;

[0058] In the second open cover state, the lower cover 23 does not move, the lifting drive mechanism 3 drives the upper cover 22, the furnace body 21, the first limiting mechanism 5 and the second limiting mechanism 7 to rise simultaneously, and the furnace body 21 is separated from the lower cover 23.

[0059] It can be seen that the high-pressure synthesis furnace in this embodiment can realize two opening states, and different opening modes can meet different furnace opening requirements. In the first opening state, the upper cover 22 is separated from the furnace body 21, and the upper cover 22 is limited to rotate during the rising process by the cooperation of the first limiting mechanism 5 and the first lifting guide rail 4; in the second opening state, the furnace body 21 is separated from the lower cover 23, and the upper cover 22 and the furnace body 21 are limited to rotate or shake during the rising process by the cooperation of the first limiting mechanism 5 and the first lifting guide rail 4, and the second limiting mechanism 7 and the second lifting guide rail 6.

[0060] In one embodiment, the furnace body 21 , the upper cover 22 and the lower cover 23 are all jacketed with water cooling to ensure the cooling effect of the synthesis furnace body 2 .

[0061] Reference Figure 1 As shown, in one embodiment, the synthesis furnace body 2 further includes a first upper flange 24 and a first lower flange 25, the upper cover 22 is connected to the furnace body 21 via the first upper flange 24, and the lower cover 23 is connected to the furnace body 21 via the first lower flange 25. The stability and sealing of the connection are ensured.

[0062] Reference Figure 1 , 4 As shown in Figure 5, the bracket 1 includes three columns 11, which are arranged in a triangle, and each column 11 is provided with a first lifting guide rail 4. The triangular arrangement can ensure the stability of the bracket 1 structure; further, the three columns 11 are arranged in an isosceles triangle.

[0063] Reference Figure 6 and 7 As shown, in one embodiment, the bracket 1 also includes a bottom frame 12, and the lifting drive mechanism 3 and the column 11 are arranged on the bottom frame 12. The bottom frame 12 can effectively support the column 11 to ensure the stability of the structure. Specifically, the bottom frame 12 is provided with a plurality of first mounting surfaces 123 for mounting the column 11; the bottom frame 12 is provided with a plurality of second mounting surfaces 124 for mounting the lifting drive mechanism 3. Furthermore, the bottom frame 12 is provided with a plurality of third mounting surfaces 125 for mounting the lower cover 23.

[0064] In one embodiment, a foot cup 121 and a universal ball 122 are provided at the bottom of the bottom frame 12. The foot cup 121 can provide support and adjust the horizontality; the universal ball 122 facilitates the movement of the high-pressure synthesis furnace and reduces labor intensity.

[0065] Reference Figure 8 As shown, in one embodiment, the high pressure synthesis furnace further includes a top frame 13, and the top frame 13 is used to connect the three columns 11 to ensure the stability of the structure.

[0066] Please continue to refer to Figure 4 , 5 As shown in Figure 10, in one embodiment, the second lifting guide rail 6 includes a lifting slider 61, the second limiting mechanism 7 includes a second frame 72, the second frame 72 is connected to the synthesis furnace body 2, the second limiting member 71 includes a second roller, the rotating shaft 32 of the second roller is connected to the second frame 72, and when the synthesis furnace body 2 is lifted or lowered, the wheel surface of the second roller can roll on the lifting slider 61. The cooperation between the wheel surface and the lifting slider 61 can reduce friction, avoid violent collisions between equipment structures, and effectively protect the equipment structure. Further, the second lifting guide rail 6 is arranged on the column 11. The second roller can be made of flexible materials such as rubber and silicone.

[0067] Please continue to refer to Figure 4 and 5 As shown, in one embodiment, the first lifting guide rail 4 includes a guide rail groove 41, and the first stopper 51 is located in the guide rail groove 41. The guide rail groove 41 limits the first stopper 51 to move only along the extension direction of the guide rail groove 41, thereby preventing the synthesis furnace body 2 from shaking.

[0068] Reference Fig. 9 As shown, in one embodiment, the first limiting mechanism 5 includes a first frame 52, the first frame 52 is connected to the synthesis furnace body 2, the first limiting member 51 includes a first roller, the first roller is at least partially located in the guide rail groove 41, the rotating shaft 32 of the first roller is connected to the first frame 52, and when the synthesis furnace body 2 is raised or lowered, the wheel surface of the first roller can roll on the side wall of the guide rail groove 41. The cooperation between the wheel surface and the side wall of the guide rail groove 41 can reduce friction and effectively protect the equipment structure. Furthermore, the first roller can be made of flexible materials such as rubber and silicone.

[0069] In one of the embodiments, an upper limit switch and a lower limit switch are provided on the column 11. The upper limit switch corresponds to the highest position in which the first limit member 51 can operate, which is the maximum position in which the upper cover 22 can be opened, thereby ensuring that the first limit member 51 automatically stops when it reaches the highest position; the lower limit switch corresponds to the lowest position in which the second limit member 71 can operate, thereby ensuring that when the second limit member 71 reaches the lowest position, the furnace body 21 and the lower cover 23 are completely closed.

[0070] Reference Fig.11 As shown, in one embodiment, the lifting drive mechanism 3 includes a driving member 31, a fixed end 311 of the driving member 31 is connected to the bracket 1, and a movable end 312 of the driving member 31 is connected to the first limiting mechanism 5 through a rotating shaft 32. The rotating shaft 32 can ensure the stability of the first limiting mechanism 5 while realizing the transmission of force, and effectively avoid damage to the equipment structure; optionally, the driving member 31 is a hydraulic cylinder, a gas cylinder, an electric cylinder, etc. Further, the fixed end 311 of the driving member 31 is also connected to the column 11 to increase its stability during driving.

[0071] Reference Figure 3As shown, in one embodiment, the high pressure synthesis furnace also includes a top pulling and rotating mechanism 8 and a bottom pulling and rotating mechanism 9. The top pulling and rotating mechanism 8 and the bottom pulling and rotating mechanism 9 in this embodiment are used to pull and rotate the single crystal during the crystal growth process. Optionally, the top pulling and rotating mechanism 8 includes a weighing module, a lifting motor, a rotating motor, a seed crystal rod, a grating ruler, upper and lower limit switches and other structures, and the bottom pulling and rotating mechanism 9 includes a lifting motor, a rotating motor, a gear steering gear, a crucible shaft, a grating ruler, upper and lower limit switches and other structures. During the LEC single crystal growth process, the liquid sealant (such as boron trioxide) and the material are placed in the crucible, the inert gas pressure in the furnace is higher than the melt dissociation pressure, and the material is melted by graphite or high frequency heating. The growth system consists of an inert gas, a crystal, a liquid sealant and a melt. The melt is directionally solidified under controlled conditions, and a solid-liquid phase transition occurs, which ends with the growth of the crystal and the gradual reduction of the melt. The seed crystal rod can be rotated and lifted, and there is a seed crystal chuck at the lower end of the seed crystal rod. During crystal growth, the seed crystal is inserted into the melt through a liquid sealant, the melt temperature is controlled to make the seed crystal slightly melted, and then the crystal is slowly pulled upward and rotated while slowly cooling down, and the crystal gradually grows thicker.

[0072] In one embodiment, a second upper flange 521 is provided on the first frame 52, and a second lower flange 522 is provided at the bottom of the first frame 52. The second upper flange 521 is used to be sealed and connected with the top lifting and rotating mechanism 8, and the second lower flange 522 is used to be sealed and connected with the upper cover 22. Furthermore, a plurality of hoisting holes 523 are also provided on the first frame 52, and the hoisting equipment can hoist the first frame 52 through the hoisting holes 523 to realize assembly or separation with the bracket 1.

[0073] It should be noted that the above describes some embodiments of the present application. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the above embodiments and still achieve the desired results. In addition, the processes depicted in the drawings do not necessarily require the specific order or sequential order shown to achieve the desired results.

[0074] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present application (including the claims) is limited to these examples. In line with the concept of the present application, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of different aspects of the above embodiments of the present application, which are not provided in detail for the sake of simplicity.

[0075] The embodiments of the present application are intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the embodiments of the present application should be included in the scope of protection of the present application.

Claims

1. A high pressure synthesis furnace, characterized in that: The high pressure synthesis furnace comprises: Bracket; A synthesis furnace body is arranged in the support; A lifting drive mechanism is arranged on the support, and the lifting drive mechanism is connected to the synthesis furnace body to drive the synthesis furnace body to lift; A plurality of first lifting guide rails are arranged on the bracket and around the synthesis furnace body; A first limiting mechanism, connected to the synthesis furnace body and capable of rising and falling with the synthesis furnace body, the first limiting mechanism comprising a plurality of first limiting members arranged in one-to-one correspondence with the first lifting guide rails; When the synthesis furnace body is lifted or lowered, the first lifting guide rail and the first limiting member cooperate one by one to limit the rotation of the synthesis furnace body.

2. The high pressure synthesis furnace according to claim 1, characterized in that: The high pressure synthesis furnace also includes: A plurality of second lifting guide rails are arranged on the bracket and around the synthesis furnace body; A second limiting mechanism is connected to the synthesis furnace body and can be raised and lowered with the synthesis furnace body, the second limiting mechanism comprising a plurality of second limiting members arranged in one-to-one correspondence with the second lifting guide rails; When the synthesis furnace body is lifted or lowered, the second lifting guide rail and the second limiting member cooperate one by one to limit the shaking of the synthesis furnace body.

3. The high pressure synthesis furnace according to claim 2, characterized in that: The synthesis furnace body comprises a furnace body, an upper cover and a lower cover, wherein the upper cover is arranged on the top of the furnace body, the lower cover is arranged on the bottom of the furnace body, the first limiting mechanism is connected to the upper cover, and the second limiting mechanism is connected to the furnace body; In the first open cover state, the furnace body and the lower cover are stationary, the lifting drive mechanism drives the upper cover and the first limit mechanism to rise, and the upper cover is separated from the furnace body; In the second open cover state, the lower cover does not move, the lifting drive mechanism drives the upper cover, the furnace body, the first limiting mechanism and the second limiting mechanism to rise simultaneously, and the furnace body is separated from the lower cover.

4. The high pressure synthesis furnace according to claim 3, characterized in that: The synthesis furnace body further includes a first upper flange and a first lower flange. The upper cover is connected to the furnace body via the first upper flange, and the lower cover is connected to the furnace body via the first lower flange.

5. The high pressure synthesis furnace according to claim 2, characterized in that: The second lifting guide rail includes a lifting slider, the second limiting mechanism includes a second frame, the second frame is connected to the synthesis furnace body, the second limiting member includes a second roller, the rotating shaft of the second roller is connected to the second frame, and when the synthesis furnace body is lifted or lowered, the wheel surface of the second roller can roll on the lifting slider.

6. The high pressure synthesis furnace according to claim 1, characterized in that: The first lifting guide rail comprises a guide rail groove, and the first limiting member is located in the guide rail groove.

7. The high pressure synthesis furnace according to claim 6, characterized in that: The first limiting mechanism includes a first frame, which is connected to the synthesis furnace body. The first limiting member includes a first roller, which is at least partially located in the guide rail groove. The rotating axis of the first roller is connected to the first frame. When the synthesis furnace body is raised or lowered, the wheel surface of the first roller can roll on the side wall of the guide rail groove.

8. The high pressure synthesis furnace according to claim 1, characterized in that: The bracket includes three columns, which are arranged in a triangle shape, and each column is provided with a first lifting guide rail.

9. The high pressure synthesis furnace according to claim 8, characterized in that: The support also includes a bottom frame, and the lifting drive mechanism and the column are arranged on the bottom frame.

10. The high pressure synthesis furnace according to claim 1, characterized in that: The lifting drive mechanism comprises a driving member, a fixed end of the driving member is connected to the bracket, and a movable end of the driving member is connected to the first limiting mechanism via a rotating shaft.

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