Square probe card mounting and positioning mechanism

Abstract

The utility model discloses a square probe card installing and positioning mechanism, which belongs to the field of semiconductor wafer testing, solves the problem that the installation or replacement of a probe card is inconvenient to position, and adopts the technical scheme that the square probe card installing and positioning mechanism comprises a chuck, the chuck is provided with a mounting clamp capable of fixing a square probe card, one of the square probe card and the chuck is provided with at least two positioning blocks, the positioning blocks are staggered in the clamping direction of the mounting clamp, and the other one is provided with positioning holes matched with the positioning blocks. The square probe card is positioned in the first direction and the second direction relative to the chuck through the cooperation of the positioning block and the positioning hole, and the mounting clamp presses and fixes the square probe card on the chuck. According to the utility model, the square probe card can be rapidly and accurately positioned during installation or replacement.

Description

Technical Field

[0001] The utility model relates to semiconductor wafer testing, in particular to a square probe card installation and positioning mechanism. Background Art

[0002] The wafer test process is composed of a probe station, a probe card and a test machine. The probe card is installed on the probe station and forms a test system with the test machine. For a fully automatic probe station, its operation mode basically includes three major items: needle alignment → alignment positioning → testing, and the main factor affecting the success rate of automatic needle alignment is the accuracy of the installation position of the probe card on the probe station. After the probe card is installed for the first time, the test program for the corresponding product is established, and the probe station will record and save the precise position of the probe card needle tip.

[0003] Under the premise that there is no abnormality in the probe station equipment, and the probe card is installed in the same position, the automatic needle alignment of the probe station will theoretically be 100% successful. However, due to the structure of the existing square card fixture, the width of the probe card is only limited in the Y direction. However, there is no limit device in the X direction of the needle card length. As a result, if the probe card is replaced during the test or when the test is completed and the batch is changed, the automatic needle alignment of the probe station will fail due to inaccurate X-direction position.

[0004] Therefore, during the entire chip testing process, in order to ensure the accuracy of the test position, when replacing the needle card during the test or replacing the needle after the test, the current operation mode requires manual needle alignment. The automatic needle alignment time of the probe station will increase to a certain extent according to the number of needle tips set, but the alignment time of a single needle is basically a few seconds or more than ten seconds. Manual needle alignment will take several minutes to more than ten minutes due to human factors such as the operating proficiency of different personnel. This greatly affects the test efficiency. Utility Model Content

[0005] In order to solve the problem of inconvenient positioning when installing or replacing a probe card, the utility model provides a square probe card installation and positioning mechanism, which can realize fast and accurate positioning of the square probe card during installation or replacement.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a square probe card installation and positioning mechanism, including a chuck, the chuck is provided with a mounting clamp capable of fixing the square probe card, the square probe card and the chuck are provided with at least two positioning blocks, the positioning blocks are staggered in the clamping direction of the mounting clamp, and the other is provided with a positioning hole adapted to the positioning block, the square probe card is positioned in a first direction and a second direction relative to the chuck through the cooperation of the positioning block and the positioning hole, and the mounting clamp presses and fixes the square probe card on the chuck.

[0007] After adopting the above technical scheme, the utility model has the following advantages: when installing and replacing the square probe card, no additional tools are required. The positioning hole on the square card pin can be directly aligned with the matching positioning block on the chuck and inserted to complete the positioning. Then the mounting frame is used to clamp and fix the square probe card on the chuck to complete the installation. The installation is more convenient and quick, because the square probe card can be positioned in the first direction and the second direction through the cooperation of the positioning block and the positioning hole, and the horizontal rotation freedom of the circular positioning hole can be limited by more than two groups of positioning blocks and positioning holes, thereby further ensuring the accuracy of positioning.

[0008] Furthermore, the positioning block is on the chuck, and the positioning block on the chuck is a cylindrical first positioning pin, and the positioning hole of the square probe card is a circular hole. The aforementioned technical solution is adopted, considering that the friction between the positioning block and the positioning hole during replacement will generate particles or dust, and thus a cylindrical first positioning pin and a circular positioning hole are adopted, which increases the contact area, reduces the pressure, and thus reduces the generation of particles.

[0009] Furthermore, the positioning holes on the square probe card are through holes. By adopting the aforementioned technical solution, it is possible to observe whether there are particles or dust in the positioning holes when installing or replacing the square probe card, and clean the dust to avoid bringing the square probe card with particles or dust into the semiconductor device.

[0010] Furthermore, there are three first locating pins distributed in a triangle. By adopting the aforementioned technical solution, because the first locating pins are an odd number of three and the locating pins are arranged in a triangle, the operator can avoid installing the square probe card upside down during operation, thereby avoiding misoperation.

[0011] Furthermore, the first positioning pins are arranged at the three corners of an isosceles triangle. The aforementioned technical solution is adopted. Since the isosceles triangle has two equal sides, the square probe card can be subjected to uniform force when working, and it also has the stable characteristic of a triangle, which can make the square probe card more stable when working.

[0012] Furthermore, the height of the positioning block is the same as the thickness of the square probe card. By adopting the aforementioned technical solution, the operator can determine whether the square probe card is installed in place by observing whether the top surface of the first positioning pin in each through hole and the top surface of the square probe card are aligned. If a positioning pin and the square probe card are not aligned, dust may cause it to warp. The operator can check to avoid damage to the equipment.

[0013] Furthermore, the positioning block is on the square probe card, and the positioning block is a second positioning pin. The above-mentioned technical solution further avoids the square probe card from being misaligned in the forward and reverse directions. The second positioning pin needs to be inserted into the positioning hole to complete the installation.

[0014] Furthermore, the mounting clips are symmetrically arranged on the chuck.

[0015] By adopting the above technical solution, two symmetrically arranged mounting clamps can place the square probe card between the two mounting clamps, so that the mounting clamps clamp the square probe card at the same time, thereby fixing the square probe card.

[0016] Furthermore, the mounting clip is L-shaped.

[0017] By adopting the above-mentioned technical solution, the L-shaped mounting clamp can clamp the square probe card through the short side. Because of the L-shaped design, it will have a certain amount of deformation, which can increase the friction after clamping the square probe card to prevent the square probe card from shaking.

[0018] Furthermore, the mounting clip is fixed to the chuck by bolts.

[0019] By adopting the above-mentioned technical solution, the mounting clip can be easily disassembled using bolts. After multiple uses or after changing the model of the square probe card, the mounting clip can be replaced by removing the bolts. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The utility model is further described below in conjunction with the accompanying drawings:

[0021] Figure 1 It is a schematic diagram of a square probe card installation and positioning mechanism of the utility model;

[0022] Figure 2 is a schematic diagram of a square probe card not being installed on the chuck;

[0023] Figure 3 It is a cross-sectional view in the AA direction of a square probe card installed on the chuck;

[0024] Figure 4 This is a cross-sectional view taken along the AA direction of a square probe card installed on the chuck in Example 2.

[0025] Explanation of the reference numerals: 1. chuck; 11. through slot; 12. support plate; 2. mounting clip; 3. square probe card; 4. positioning block; 4A. first positioning pin; 4B. second positioning pin; 5. positioning hole; 5A. positioning blind hole; 7. bolt. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solutions and advantages of the embodiments of the utility model clearer, the technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments.

[0027] The terms "first", "second", etc. (if any) in the specification and claims of the present utility model are used to distinguish similar objects, rather than to describe a specific order or sequence. Even if "second" is used to distinguish a certain technical feature, it does not necessarily mean that it has "first". It should be understood that in the present utility model, "including" and "having" and any of their variations are intended to cover non-exclusive inclusions. It should be understood that in the present utility model, "multiple" refers to two or more. "And / or" is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, X and / or Y can represent: X exists alone, X and Y exist at the same time, and Y exists alone. The character " / " generally indicates that the related objects before and after are in an "or" relationship. "Contains X, Y and Z", "Contains X, Y, Z" means that X, Y, and Z are all included, "Contains X, Y or Z" means that one of X, Y, and Z is included, and "Contains X, Y and / or Z" means that any one, any two, or three of X, Y, and Z are included.

[0028] The following specific embodiments are used to describe the technical solution of the utility model in detail. The following specific embodiments can be combined or replaced with each other according to actual conditions, and the same or similar concepts or processes may not be described in detail in some embodiments.

[0029] like Figures 1 to 4 As shown, the utility model provides a square probe card 3 installation and positioning mechanism, including a chuck 1, the chuck 1 is provided with a mounting clamp 2 capable of fixing the square probe card 3, the chuck 1 is provided with at least two positioning blocks 4, the positioning blocks 4 are staggered in the clamping direction of the mounting clamp 2, the square probe card 3 is provided with a positioning hole 5 adapted to the positioning block 4, the square probe card 3 is positioned in a first direction and a second direction with the chuck 1 through the positioning block 4 and the positioning hole 5, and the mounting clamp 2 presses and fixes the square probe card 3 on the chuck 1.

[0030] After adopting the above technical solution, the utility model has the following advantages: it is more convenient and quick to install and replace the square probe card, the square probe card can be positioned in the first direction and the second direction through the cooperation of the positioning block and the positioning hole, and the horizontal rotation freedom of the circular positioning hole can be limited by more than two groups of positioning blocks and positioning holes, further ensuring the accuracy of positioning. It can be understood that the first direction and the second direction correspond to the X direction and the Y direction of the chuck.

[0031] Specifically, the first direction, i.e., the X direction, is perpendicular to the clamping direction of the mounting clamp, and the second direction, i.e., the Y direction, is parallel to the clamping direction of the mounting clamp. A through slot 11 is provided in the chuck 1, and a support plate 12 extending inward is provided on the side wall of the through slot 11, so that when the square probe card 3 is mounted on the support plate 12, the probe on the square probe card 3 can enter the through slot. The mounting clamp 2 is arranged near the through slot 11, and after the square probe card 3 is mounted on the chuck, the mounting clamp 2 clamps the square probe card 3 to the chuck 1, and the probe on the square probe card 3 can extend out of the chuck 1 through the through slot, so that the wafer in operation can be tested by contacting the probe.

[0032] In Example 1:

[0033] like Figures 1 to 3 As shown, in order to reduce the friction between the positioning block 4 and the positioning hole 5 when replacing the square probe card 2, which may generate particles or dust, the positioning block 4 is designed on the chuck 1, and the positioning block 4 on the chuck 1 is a cylindrical first positioning pin 4A. The above-mentioned technical solution is adopted. Considering that the friction between the positioning block 4 and the positioning hole 5 during replacement may generate particles or dust, a cylindrical first positioning pin 4A is adopted to increase the contact area, reduce the pressure, and thus reduce the generation of particles.

[0034] Furthermore, in order to avoid dust in the positioning hole 5 that prevents observation, the positioning hole 5 on the square probe card 3 is a through hole.

[0035] By adopting the above technical solution, when installing or replacing the square probe card 3, it is possible to observe whether there are particles or dust in the positioning hole 5, and clean the dust to avoid bringing the square probe card 3 with particles or dust into the semiconductor device.

[0036] Furthermore, in order to avoid installing the square probe card 3 upside down, the first positioning pins 4A are designed to be three and arranged at the three corners of a triangle. The aforementioned technical solution is adopted because the first positioning pins 4A are three, which is an odd number. The odd number can prevent the operator from installing the square probe card 3 upside down during operation, thereby avoiding the occurrence of misoperation.

[0037] Furthermore, in order to make the square probe card 3 more stable during operation, the first positioning pins 4A are arranged at the positions of the three corners of an isosceles triangle.

[0038] With the above technical solution, since the isosceles triangle has two equal sides, the square probe card 3 can be subjected to uniform force when working, and has the stable characteristic of the triangle, so that the square probe card 3 can be more stable when working.

[0039] Furthermore, in order to facilitate the operator to observe whether the square probe card 3 is installed in place, the height of the positioning block 4 is the same as the thickness of the square probe card 3. By adopting the above-mentioned technical solution, the operator can judge whether the square probe card 3 is installed in place by observing whether the top surface of the first positioning pin 4A in each through hole and the top surface of the square probe card 3 are aligned.

[0040] Furthermore, in order to clamp the square probe card more stably, the mounting clamps are symmetrically arranged on the chuck.

[0041] By adopting the above technical solution, two symmetrically arranged mounting clamps can place the square probe card between the two mounting clamps, so that the mounting clamps clamp the square probe card at the same time, thereby fixing the square probe card.

[0042] Furthermore, in order to allow the mounting clip to clamp the square probe card more stably, the mounting clip is formed into an L-shape.

[0043] Using the above-mentioned technical solution, the mounting clip is L-shaped, and the short side extends into the through groove to clamp the square probe card placed on the support plate. Because the mounting clip is L-shaped, the short side of the mounting clip has a certain deformation amount, which can increase the friction after clamping the square probe card and prevent the square probe card from shaking.

[0044] Furthermore, in order to facilitate replacement of the mounting clip, the mounting clip is fixed to the chuck by bolts.

[0045] By adopting the above-mentioned technical solution, the mounting clip can be easily disassembled using bolts. After multiple uses or after changing the model of the square probe card, the mounting clip can be replaced by removing the bolts.

[0046] In Example 2:

[0047] Different from Example 1, Figure 4 As shown, in order to avoid the square probe card 3 from being installed upside down, the positioning block 4 is on the square probe card 3, the positioning block 4 is a second positioning pin 4B, the positioning hole 5 is arranged on the chuck, and the positioning hole 5 is a positioning blind hole 5A. The aforementioned technical solution is adopted, because the characteristics of the second positioning pin 4B are more obvious, the operator can further avoid the square probe card 3 from being installed upside down, and the operator can complete the installation by inserting the second positioning pin 4B into the positioning blind hole 5A.

[0048] In addition to the above-mentioned preferred embodiments, the present invention also has other implementation modes. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative work are within the scope of protection requested by the present invention.

Claims

1. A square probe card installation and positioning mechanism, comprising a chuck, wherein the chuck is provided with a mounting clip capable of fixing the square probe card, wherein: One of the square probe card and the chuck is provided with at least two positioning blocks, and the positioning blocks are staggered in the clamping direction of the mounting clamp, and the other is provided with a positioning hole adapted to the positioning block. The square probe card is positioned relative to the chuck in a first direction and a second direction through the cooperation between the positioning block and the positioning hole, and the mounting clamp presses and fixes the square probe card on the chuck.

2. A square probe card installation and positioning mechanism according to claim 1, characterized in that: The positioning block is arranged on the chuck, and the positioning block is a cylindrical first positioning pin; the positioning hole is arranged on the square probe card.

3. A square probe card installation and positioning mechanism according to claim 2, characterized in that: The positioning hole is a through hole.

4. A square probe card installation and positioning mechanism according to claim 2, characterized in that: There are three first positioning pins distributed in a triangle.

5. A square probe card installation and positioning mechanism according to claim 4, characterized in that: The first positioning pins are arranged at the positions of the three corners of an isosceles triangle.

6. A square probe card installation and positioning mechanism according to claim 3, characterized in that: The height of the first positioning pin is the same as the thickness of the square probe card.

7. A square probe card installation and positioning mechanism according to claim 1, characterized in that: The positioning block is arranged on the square probe card, and the positioning block is a second positioning pin.

8. A square probe card installation and positioning mechanism according to claim 1, characterized in that: Two mounting clips are symmetrically arranged on the chuck.

9. A square probe card installation and positioning mechanism according to claim 1, characterized in that: The mounting clip is L-shaped.

10. The square probe card installation and positioning mechanism according to claim 1, characterized in that: The mounting clip is fixed to the chuck by bolts.

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