Flexible clamping tool structure based on semiconductor cavity processing

Abstract

The utility model discloses a flexible clamping tool structure based on semiconductor chamber processing, and relates to the technical field of clamping tools, the flexible clamping tool structure comprises a mounting rack, the top of the mounting rack is provided with a clamping assembly used for clamping parts, the bottom of the mounting rack is provided with a rotating assembly and a driving assembly, and the rotating assembly and the driving assembly are arranged on the mounting rack. The driving assembly is connected with the clamping assembly through the rotating assembly. According to the flexible clamping tool structure based on semiconductor cavity machining, a straight rack is pushed by an air cylinder to drive a gear and a rotary table to rotate to achieve centering clamping of a part, when a clamping plate makes contact with the part to generate resistance, a spring is not completely contracted to achieve the buffering effect, the flexible clamping effect is achieved, damage possibly caused by rigid clamping to the part is avoided, and meanwhile the clamping effect is improved. When the clamping block is clamped on the ratchet bar under a specific condition, part damage caused by overlarge thrust of the air cylinder or overtravel of telescopic action can be effectively avoided, and a good protection effect on semiconductor parts is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of clamping tooling, in particular to a flexible clamping tooling structure based on semiconductor chamber processing. Background Art

[0002] In the highly precise and complex field of semiconductor chamber processing, accurate clamping and stable positioning of the workpiece are key links to ensure processing quality and efficiency.

[0003] In the prior art, for example, Chinese patent number: CN218533614U discloses a semiconductor processing fixture, which includes a fixture bottom plate, a support shaft is fixedly arranged at the center of the upper end surface of the fixture bottom plate, push-pull devices are fixedly arranged on the upper end surface of the fixture bottom plate on both sides of the support shaft, the output shaft end of the push-pull device extending upward is fixedly connected with a connecting piece, the upper end of the connecting piece is fixedly mounted with a fixture movable plate, a middle plate slide groove is provided inside the fixture movable plate, a toothed cross bar portion of an L-shaped toothed sliding rod is slidably arranged in the middle plate slide groove, and a rotating gear is fixedly arranged directly below the toothed cross bar portion of the L-shaped toothed sliding rod. In this way, it can achieve a good fixing effect for semiconductor sheets of different sizes and shapes, and can meet the requirements of the fixed semiconductor sheets moving in four directions on the working plane.

[0004] Although the above patents are capable of clamping semiconductors, the prior art lacks elastic buffering and it is easy for excessive clamping force to cause physical damage such as scratches and indentations on the workpiece surface. For this reason, the utility model provides a flexible clamping tooling structure based on semiconductor chamber processing. Utility Model Content

[0005] In view of the deficiencies of the prior art, the utility model provides a flexible clamping tooling structure based on semiconductor chamber processing, which solves the problem that the prior art lacks elastic buffering and is easily prone to physical damage such as scratches and indentations on the workpiece surface due to excessive clamping force.

[0006] To achieve the above objectives, the utility model is implemented through the following technical solutions: a flexible clamping tooling structure based on semiconductor chamber processing, including a mounting frame, a clamping assembly is provided on the top of the mounting frame for clamping parts, a rotating assembly and a driving assembly are provided at the bottom of the mounting frame, and the driving assembly is connected to the clamping assembly through the rotating assembly; the driving assembly includes a mounting plate, a ratchet bar and a cylinder, a first connecting plate is installed at the telescopic end of the cylinder, a limiting telescopic rod is installed on one side of the first connecting plate, a second connecting plate is installed at one end of the limiting telescopic rod, a spring is sleeved on the outside of the limiting telescopic rod, a rotating seat is installed at the bottom of the first connecting plate, a rotating block is rotatably installed on the outer surface of the rotating seat, a guide groove is opened on the outer surface of the rotating block, a clamping block is connected to the bottom of the rotating block, and two brackets are installed at the bottom of the second connecting plate, and a cylindrical rod is connected between the opposite side surfaces of the two brackets.

[0007] Preferably, four slide grooves are opened on the top of the mounting frame, a plurality of columns are installed on the top of the mounting frame near the edge, a placing table is installed between the tops of the plurality of columns, and four through grooves are opened through the top of the placing table.

[0008] Preferably, the number of the clamping assemblies is set to four, and each of the clamping assemblies includes a slider, which is slidably arranged inside the slide groove, and a support column is fixedly installed on the top of the slider, and the support column passes through the through groove and extends upward, and a stick wheel is rotatably sleeved on the outer wall of the support column near the bottom, and a splint is fixedly installed on the top of the support column, and a rubber pad is provided on the inner side surface of the splint.

[0009] Preferably, the rotating assembly includes a turntable, which is arranged in the interlayer between the mounting frame and the placing table. Four arc grooves are opened through the end of the turntable, and the arc grooves cooperate with the stick wheels. A rotating shaft is fixedly installed at the bottom of the turntable, and the rotating shaft movably passes through the top of the mounting frame and extends downward, and a gear is installed at the bottom end of the rotating shaft.

[0010] Preferably, the mounting plate is installed at the bottom of the mounting frame, the ratchet bar is installed at the inner bottom of the mounting plate and is located below the block, the cylinder is installed on the inner wall of one side of the mounting plate, the cylindrical rod is movably arranged on the inner side of the guide groove, and the two ends of the spring are fixedly connected to the surfaces of the opposite sides of the first connecting plate and the second connecting plate respectively.

[0011] Preferably, a spur rack is installed on one side of the second connecting plate, the spur rack is meshed with the gear, a limit block is slidably provided on the outer surface of the spur rack, and the limit block is installed on an inner wall of one side of the mounting plate.

[0012] Beneficial Effects

[0013] The utility model provides a flexible clamping tooling structure based on semiconductor chamber processing. Compared with the prior art, it has the following beneficial effects:

[0014] (1) The flexible clamping tooling structure based on semiconductor chamber processing realizes the centering clamping of parts by driving the spur rack through the cylinder to drive the gear and the turntable to rotate. When the clamping plate contacts the part and generates resistance, the incomplete contraction of the spring plays a buffering role, achieving a flexible clamping effect and avoiding the damage to the part caused by rigid clamping. At the same time, when the clamping block is stuck on the ratchet bar under certain circumstances, it can effectively avoid damage to the part caused by excessive cylinder thrust or overtravel of the telescopic action, thereby playing a good protective role for semiconductor parts.

[0015] (2) The flexible clamping tooling structure based on semiconductor chamber processing has greatly reduced the friction resistance between the support column and the arc groove by the cooperation between the stick wheel and the arc groove and the rolling of the stick wheel during the movement of the support column, avoiding the support column from getting stuck in the arc groove, and ensuring the stability and reliability of the clamping device during operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional appearance schematic diagram of the utility model;

[0017] Figure 2 It is a partial structural sectional view of the utility model;

[0018] Figure 3 This is a schematic diagram of the three-dimensional appearance of the turntable of the utility model;

[0019] Figure 4 This is a three-dimensional schematic diagram of the driving component of the utility model;

[0020] Figure 5 For this utility model Figure 4 Enlarged view of point A in .

[0021] In the figure: 1. mounting frame; 11. slide groove; 12. column; 13. placement table; 14. through groove; 2. clamping assembly; 21. slider; 22. support column; 23. stick wheel; 24. clamping plate; 25. rubber pad; 3. rotating assembly; 31. turntable; 32. arc groove; 33. rotating shaft; 34. gear; 4. driving assembly; 41. mounting plate; 42. ratchet bar; 43. cylinder; 44. first connecting plate; 45. limiting telescopic rod; 46. second connecting plate; 47. spring; 48. spur rack; 49. rotating seat; 410. rotating block; 411. clamping block; 412. guide groove; 413. bracket; 414. cylindrical rod; 415. limiting block. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] The utility model provides two technical solutions:

[0024] Figure 1-Figure 5 The first embodiment is shown: a flexible clamping tooling structure based on semiconductor chamber processing, including a mounting frame 1, a clamping assembly 2 is provided on the top of the mounting frame 1 for clamping parts, a rotating assembly 3 and a driving assembly 4 are provided at the bottom of the mounting frame 1, and the driving assembly 4 is connected to the clamping assembly 2 through the rotating assembly 3; the driving assembly 4 includes a mounting plate 41, a ratchet bar 42 and a cylinder 43, a first connecting plate 44 is installed at the telescopic end of the cylinder 43, a limiting telescopic rod 45 is installed on one side of the first connecting plate 44, a second connecting plate 46 is installed at one end of the limiting telescopic rod 45, a spring 47 is sleeved on the outside of the limiting telescopic rod 45, a rotating seat 49 is installed at the bottom of the first connecting plate 44, a rotating block 410 is rotatably installed on the outer surface of the rotating seat 49, a guide groove 412 is opened through the outer surface of the rotating block 410, a clamping block 411 is connected to the bottom of the rotating block 410, two brackets 413 are installed at the bottom of the second connecting plate 46, and a cylindrical rod 414 is connected between the opposite side surfaces of the two brackets 413.

[0025] Four slide grooves 11 are provided on the top of the mounting frame 1, and a plurality of columns 12 are installed on the top of the mounting frame 1 near the edge. A placement table 13 is installed between the tops of the plurality of columns 12, and four through grooves 14 are provided through the top of the placement table 13. The four slide grooves 11 can provide guidance and limiting functions for the movement of the slider 21, ensuring the stable movement of the components in a specific direction and improving the operation accuracy of the entire device. The plurality of columns 12 play the role of supporting the placement table 13, ensuring the stability and firmness of the placement table 13, so that it can safely carry semiconductor parts for processing operations, and the four through grooves 14 on the top of the placement table 13 can provide activity space for the support columns 22.

[0026] The number of clamping assemblies 2 is set to four, and each clamping assembly 2 includes a slider 21, which is slidably arranged inside the slide groove 11. A support column 22 is fixedly installed on the top of the slider 21. The support column 22 passes through the through groove 14 and extends upward. A stick wheel 23 is rotatably sleeved on the outer wall of the support column 22 near the bottom. A splint 24 is fixedly installed on the top of the support column 22, and a rubber pad 25 is provided on the inner side surface of the splint 24. The slider 21 slides in the slide groove 11 to provide guidance for the movement of the clamping assembly 2 and ensure the accuracy of the clamping action. The rubber pad 25 can play a buffering role to prevent damage to the parts, while increasing friction and improving the stability of the clamping.

[0027] Figure 1-Figure 5 A second embodiment is shown, which mainly differs from the first embodiment in that the rotating assembly 3 includes a turntable 31, which is arranged in the interlayer between the mounting frame 1 and the placing table 13. Four arc grooves 32 are penetrated at the end of the turntable 31, and the arc grooves 32 cooperate with the stick wheel 23. A rotating shaft 33 is fixedly installed at the bottom of the turntable 31, and the rotating shaft 33 movably passes through the top of the mounting frame 1 and extends downward. A gear 34 is installed at the bottom of the rotating shaft 33. The four arc grooves 32 on the turntable 31 cooperate with the stick wheel 23 to realize synchronous control of the four clamping assemblies 2 and improve the coordination of clamping. The rotating shaft 33 and the gear 34 can transmit the power of the cylinder 43 to the turntable 31 to realize the rotation action, thereby driving the clamping assembly 2 to perform the clamping operation.

[0028] The mounting plate 41 is mounted on the bottom of the mounting frame 1, the ratchet bar 42 is mounted on the inner bottom of the mounting plate 41 and is located below the block 411, the cylinder 43 is mounted on the inner wall of one side of the mounting plate 41, the cylindrical rod 414 is movably arranged on the inner side of the guide groove 412, and the two ends of the spring 47 are respectively fixedly connected to the surfaces of the first connecting plate 44 and the second connecting plate 46 on the opposite side. The ratchet bar 42 cooperates with the block 411 to prevent the cylinder 43 from causing damage to parts due to excessive thrust during the clamping process, thereby playing a safety protection role. The cylinder 43 provides power for the clamping operation to realize automatic clamping. The cylindrical rod 414 cooperates with the guide groove 412 to control the action of the block 411, and the spring 47 connects the first connecting plate 44 and the second connecting plate 46 to play a buffering and resetting role.

[0029] A spur rack 48 is mounted on one side of the second connecting plate 46, and the spur rack 48 is meshed with the gear 34. A limit block 415 is slidably provided on the outer surface of the spur rack 48, and the limit block 415 is mounted on an inner wall of one side of the mounting plate 41. The spur rack 48 is meshed with the gear 34 to achieve power transmission. The limit block 415 can limit the movement range of the spur rack 48 to ensure the stability of its movement.

[0030] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0031] When in use, place the semiconductor part on the placement table 13, and use the cylinder 43 to push the spur rack 48 to move, thereby driving the gear 34 to rotate counterclockwise, and cooperate with the rotating shaft 33 to make the turntable 31 rotate synchronously, and under the guidance of the arc groove 32, the support column 22 is gathered inward, and then cooperate with the clamping plate 24 to center the part. When the cylinder 43 pushes the spur rack 48 to move, if the clamping plate 24 has not yet contacted the part, the spur rack 48 moves normally. If the clamping plate 24 contacts the part, The spur rack 48 generates resistance and cannot move, while the first connecting plate 44 is continuously pressed toward the spur rack 48 under the thrust of the cylinder 43. At this time, the incomplete contraction of the spring 47 plays a buffering role to achieve a flexible clamping effect. At the same time, the rotating block 410 at the bottom of the first connecting plate 44 also moves toward the spur rack 48. Since the position of the cylindrical rod 414 is fixed, the rotating block 410 will rotate according to the trajectory of the guide groove 412 under the action of the cylindrical rod 414. When the inclined surface on the guide groove 412 gradually contacts the cylindrical rod 414, the rotating block 410 and the clamping block 411 rotate downward, so that the clamping block 411 is clamped on the ratchet bar 42. When the clamping block 411 is stuck, the first connecting plate 44 cannot move further, and the thrust generated by the cylinder 43 cannot act on the spur rack 48, thereby effectively avoiding damage to the parts due to excessive thrust of the cylinder 43 or overtravel of the telescopic action. When the parts need to be loosened, the cylinder 43 drives the first connecting plate 44 to move. The connecting plate 44 retracts, and under the action of the thrust of the spring 47, the first connecting plate 44 and the second connecting plate 46 move away from each other, and the cylindrical rod 414 also moves from the inclined surface of the guide groove 412 to the plane, thereby pulling up the block 411 for convenience in subsequent use. When the support column 22 is moving, the stick wheel 23 cooperates with the arc groove 32, and the stick wheel 23 rolls, thereby greatly reducing the friction resistance between the support column 22 and the arc groove 32, and avoiding the support column 22 from getting stuck in the arc groove 32.

[0032] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0033] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A flexible clamping tooling structure based on semiconductor chamber processing, comprising a mounting frame (1), characterized in that: The top of the mounting frame (1) is provided with a clamping assembly (2) for clamping parts, and the bottom of the mounting frame (1) is provided with a rotating assembly (3) and a driving assembly (4), and the driving assembly (4) is connected to the clamping assembly (2) via the rotating assembly (3); The driving assembly (4) comprises a mounting plate (41), a ratchet bar (42) and a cylinder (43); a first connecting plate (44) is mounted on the telescopic end of the cylinder (43); a limited telescopic rod (45) is mounted on one side of the first connecting plate (44); a second connecting plate (46) is mounted on one end of the limited telescopic rod (45); a spring (47) is sleeved on the outside of the limited telescopic rod (45); a rotating seat (49) is mounted on the bottom of the first connecting plate (44); a rotating block (410) is rotatably mounted on the outer surface of the rotating seat (49); a guide groove (412) is formed through the outer surface of the rotating block (410); a clamping block (411) is connected to the bottom of the rotating block (410); two brackets (413) are mounted on the bottom of the second connecting plate (46); a cylindrical rod (414) is connected between the opposite side surfaces of the two brackets (413).

2. The flexible clamping tooling structure based on semiconductor chamber processing according to claim 1 is characterized in that: Four slide grooves (11) are provided on the top of the mounting frame (1), a plurality of columns (12) are installed near the edge of the top of the mounting frame (1), a placement platform (13) is installed between the tops of the plurality of columns (12), and four through grooves (14) are provided through the top of the placement platform (13).

3. The flexible clamping tooling structure based on semiconductor chamber processing according to claim 2 is characterized in that: The number of the clamping assemblies (2) is set to four, and each of the clamping assemblies (2) includes a slider (21), the slider (21) is slidably arranged inside the slide groove (11), a support column (22) is fixedly installed on the top of the slider (21), the support column (22) passes through the through groove (14) and extends upward, a rod wheel (23) is rotatably sleeved on the outer wall of the support column (22) near the bottom, and a clamping plate (24) is fixedly installed on the top of the support column (22), and a rubber pad (25) is provided on the inner side surface of the clamping plate (24).

4. The flexible clamping tooling structure based on semiconductor chamber processing according to claim 3 is characterized in that: The rotating assembly (3) comprises a turntable (31), and the turntable (31) is arranged in the interlayer between the mounting frame (1) and the placing table (13). Four arc grooves (32) are opened through the end of the turntable (31), and the arc grooves (32) cooperate with the stick wheel (23). A rotating shaft (33) is fixedly installed at the bottom of the turntable (31), and the rotating shaft (33) movably passes through the top of the mounting frame (1) and extends downward, and a gear (34) is installed at the bottom of the rotating shaft (33).

5. The flexible clamping tooling structure based on semiconductor chamber processing according to claim 1 is characterized in that: The mounting plate (41) is mounted on the bottom of the mounting frame (1); the ratchet bar (42) is mounted on the inner bottom of the mounting plate (41) and is located below the clamping block (411); the cylinder (43) is mounted on an inner wall of one side of the mounting plate (41); the cylindrical rod (414) is movably arranged on the inner side of the guide groove (412); and the two ends of the spring (47) are fixedly connected to the surfaces of the first connecting plate (44) and the second connecting plate (46) on opposite sides thereof.

6. The flexible clamping tooling structure based on semiconductor chamber processing according to claim 4 is characterized in that: A spur rack (48) is installed on one side of the second connecting plate (46), the spur rack (48) is meshingly connected with the gear (34), and a limit block (415) is slidably provided on the outer surface of the spur rack (48), and the limit block (415) is installed on an inner wall of one side of the mounting plate (41).

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