PEEK material screw protective cap in etching equipment

Abstract

The utility model discloses a PEEK material screw protective cap in etching equipment. The PEEK material screw protective cap comprises an upper cover plate and a lower cover plate, the bottom side of the upper cover plate is in clamping connection with the top side of the lower cover plate; the upper cover plate further comprises a plurality of protruding blocks a, and the protruding blocks a are annularly distributed and all fixed to the outer side wall of the upper cover plate. A plurality of protruding blocks b distributed in a circular mode are fixed to the side wall of the bottom end of the lower cover plate, and the protruding blocks a are matched with the protruding blocks b. The service life of the threaded pin used in the etching machine can be better prolonged through the upper cover plate and the lower cover plate, the working efficiency when the upper cover plate and the lower cover plate are installed and fixed can be further improved through the protruding block b and the protruding block a, and the upper cover plate and the lower cover plate are both made of quartz materials. Therefore, the service life of the upper cover plate and the lower cover plate can be further prolonged, the protection effect on the threaded pin can be improved, and the service life of the threaded pin can be prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz rings of etching machines, in particular to a PEEK material screw protective cap in etching equipment. Background Art

[0002] Etching machines can be divided into two categories: chemical etcher and electrolytic etcher. In chemical etching, chemical solutions are used to achieve the purpose of etching through chemical reactions. Chemical etcher is a technology that removes materials through chemical reactions or physical impacts.

[0003] In the current CCP etching system, the parts under the showerhead cannot be made of metal parts. Plastic parts will be consumed quickly in the plasma environment and will react with the process gas. Therefore, quartz materials, single crystal silicon and other materials are generally used. The quartz parts are opened and fixed on the metal parts in reverse, and a protective cover is made to prevent the metal or PEEK threaded pins from reacting with the gas. The material used for the protective cover will be slowly consumed in the plasma environment and needs to be replaced regularly, and the life is short. Utility Model Content

[0004] The utility model aims to solve one of the technical problems existing in the prior art or related technology.

[0005] To this end, the technical solution adopted in this utility model is:

[0006] A PEEK screw protective cap in an etching device comprises: an upper cover plate and a lower cover plate; the bottom side of the upper cover plate is snap-connected with the top side of the lower cover plate; the upper cover plate also comprises a plurality of protrusions a, which are fixed in a ring shape to the outer side wall of the upper cover plate; a plurality of circularly distributed protrusions b are fixed to the bottom end side wall of the lower cover plate, and the protrusions a are matched with the protrusions b.

[0007] Preferably, a plurality of threaded holes are provided on the bottom side of the upper cover plate, a guide groove is provided on the top side of the upper cover plate, the guide groove is connected to one end of the threaded hole close to each other, and a threaded pin is provided in the threaded hole.

[0008] Preferably, a plurality of square grooves are provided on the outer side wall of the upper cover plate, and hanging holes are provided in the square grooves.

[0009] Preferably, a plurality of through slots are formed on the bottom side of the upper cover plate.

[0010] Preferably, the upper cover plate and the lower cover plate are both hollow cylindrical.

[0011] Preferably, a partition is fixed to the inner side wall of the lower cover plate, and the cross section of the partition is arc-shaped.

[0012] Preferably, the outer side wall of the lower cover plate is provided with a plurality of slots.

[0013] By adopting the above technical solution, the beneficial effects achieved by the utility model are as follows:

[0014] 1. In the utility model, the service life of the threaded pin inside the etching machine can be better extended by the upper cover plate and the lower cover plate, and the work efficiency of installing and fixing the upper cover plate and the lower cover plate can be further improved by the protrusions b and the protrusions a. In addition, the upper cover plate and the lower cover plate are both made of quartz material, which can further improve the service life of the upper cover plate and the lower cover plate, and at the same time, can improve the protection effect and service life of the threaded pin.

[0015] 2. In the utility model, the protrusions a and the protrusions b are used to further improve the installation efficiency of the upper cover plate and the lower cover plate. The threaded holes opened on the bottom side of the upper cover plate can further increase the service life of the threaded pins inside the etching machine. The guide groove can effectively discharge the corrosive liquid on the top of the threaded pin, thereby further increasing the service life of the threaded pins. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the main structure of an embodiment of the utility model;

[0017] Figure 2 This is a schematic diagram of the local structure of the upper cover plate of an embodiment of the utility model;

[0018] Figure 3 The figure is a schematic diagram of the local structure of the lower cover plate of one embodiment of the utility model.

[0019] Reference numerals:

[0020] 1. Upper cover plate; 2. Lower cover plate; 3. Threaded hole; 4. Guide groove; 5. Square groove; 6. Hanging hole; 7. Through groove; 8. Partition plate; 9. Card slot; 10. Bump a; 11. Bump b; 12. Threaded pin. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of the utility model clearer, the utility model is further described in detail below in combination with specific implementation methods and with reference to the accompanying drawings. It should be noted that the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

[0022] It should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present invention.

[0023] The following describes a PEEK screw protective cap in an etching device provided by some embodiments of the utility model in conjunction with the accompanying drawings.

[0024] Embodiment 1:

[0025] Combination Figure 1 , Figure 2 and Figure 3 As shown, the utility model provides a PEEK screw protective cap in an etching device, comprising: an upper cover plate 1 and a lower cover plate 2; the bottom side of the upper cover plate 1 is snap-connected with the top side of the lower cover plate 2; the upper cover plate 1 also includes a plurality of protrusions a10, and the plurality of protrusions a10 are fixed to the outer side wall of the upper cover plate 1 in a ring shape; a plurality of circularly distributed protrusions b11 are fixed to the bottom end side wall of the lower cover plate 2, and the protrusions a10 are adapted to the protrusions b11. By making both the upper cover plate 1 and the lower cover plate 2 made of quartz material, the service life of the upper cover plate 1 and the lower cover plate 2 can be further improved, and at the same time, the protection effect and service life of the threaded pin 12 can be improved. Both the upper cover plate 1 and the lower cover plate 2 are made of quartz material.

[0026] A plurality of threaded holes 3 are provided on the bottom side of the upper cover plate 1, and a guide groove 4 is provided on the top side of the upper cover plate 1. The guide groove 4 is connected to one end of the threaded hole 3 which is close to each other. A threaded pin 12 is provided in the inner thread of the threaded hole 3. The corrosive liquid on the top of the threaded pin 12 can be effectively discharged through the guide groove 4, thereby improving the service life of the threaded pin 12.

[0027] A plurality of square grooves 5 are formed on the outer side wall of the upper cover plate 1 , and hanging holes 6 are formed in the square grooves 5 , through which the upper cover plate 1 can be hung more conveniently.

[0028] A plurality of through grooves 7 are provided on the bottom side of the upper cover plate 1 , and the corrosive liquid infiltrated between the upper cover plate 1 and the lower cover plate 2 can be effectively discharged through the through grooves 7 .

[0029] The upper cover plate 1 and the lower cover plate 2 are both hollow cylindrical, which can effectively reduce the retention of corrosive liquid.

[0030] A partition plate 8 is fixed to the inner wall of the lower cover plate 2. The cross section of the partition plate 8 is in an arc shape. The partition plate 8 is in an arc shape, so that the residual liquid can be better guided out.

[0031] The outer side wall of the lower cover plate 2 is provided with a plurality of slots 9 .

[0032] The working principle and use process of the utility model are as follows: when the upper cover plate 1 and the threaded pin 12 need to be hoisted and protected, firstly, the threaded pin 12 is screwed into the threaded hole 3 from the bottom side of the upper cover plate 1, and then the side of the lower cover plate 2 with the protrusion b11 is close to the side of the upper cover plate 1 with the protrusion a10, and then the protrusion b11 is placed parallel to the protrusion a10, and then the lower cover plate 2 is pushed upward, and then the lower cover plate 2 is rotated until the protrusion a10 overlaps with the protrusion b11, thereby completing the installation of the upper cover plate 1 and the lower cover plate 2, and at the same time achieving the protection effect of the screws.

[0033] In the present invention, the term "plurality" means two or more than two, unless otherwise clearly defined. The term "and / or" used herein includes any and all combinations of one or more related listed items. The terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense. For example, "connect" can be a fixed connection, a detachable connection, or an integral connection; "connect" can be a direct connection or an indirect connection through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0034] It should be noted that when an element is referred to as being "assembled on", "installed on", "fixed on" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

[0035] In the description of this specification, the description of the terms "one embodiment", "some embodiments", "specific embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0036] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and purpose of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A PEEK screw protective cap in an etching device, characterized in that: include: An upper cover plate (1) and a lower cover plate (2); The bottom side of the upper cover plate (1) is snap-connected with the top side of the lower cover plate (2); The upper cover plate (1) further comprises a plurality of protrusions a (10), wherein the plurality of protrusions a (10) are fixed to the outer side wall of the upper cover plate (1) in an annular shape; A plurality of circularly distributed protrusions b (11) are fixed to the bottom side wall of the lower cover plate (2), and the protrusions a (10) are adapted to the protrusions b (11).

2. A PEEK screw protective cap for etching equipment according to claim 1, characterized in that: The bottom side of the upper cover plate (1) is provided with a plurality of threaded holes (3), the top side of the upper cover plate (1) is provided with a guide groove (4), the guide groove (4) is connected to one end of the threaded hole (3) close to each other, and the threaded hole (3) has a threaded pin (12) in the inner thread.

3. A PEEK screw protective cap for etching equipment according to claim 1, characterized in that: The outer side wall of the upper cover plate (1) is provided with a plurality of square grooves (5), and hanging holes (6) are provided in the square grooves (5).

4. A PEEK screw protective cap for etching equipment according to claim 1, characterized in that: A plurality of through slots (7) are provided on the bottom side of the upper cover plate (1).

5. The PEEK screw protective cap in the etching equipment according to claim 1, characterized in that: The upper cover plate (1) and the lower cover plate (2) are both in the shape of hollow cylinders.

6. A PEEK screw protective cap for etching equipment according to claim 1, characterized in that: A partition plate (8) is fixed to the inner side wall of the lower cover plate (2), and the cross section of the partition plate (8) is in the shape of an arc.

7. A PEEK screw protective cap for etching equipment according to claim 1, characterized in that: The outer side wall of the lower cover plate (2) is provided with a plurality of slots (9).

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