Feeding mechanism and silicon material heating equipment

Abstract

The embodiment of the utility model discloses a feeding mechanism and silicon material heating equipment, the feeding mechanism comprises a rack, a material carrier and a first baffle, the rack is provided with a first opening and a second opening, the first opening and the second opening are respectively communicated with the interior of the rack, and the first opening is communicated with a feeding port; the material carrier is movably connected to the rack in the second direction, and the first direction is perpendicular to the second direction; the first baffle is movably connected to the rack in the first direction. The second opening is used for conveying the material carrier into the rack, the first opening is used for conveying the material carrier to the feeding port, and the first baffle is used for sealing the first opening after the material carrier is conveyed to the feeding port. By means of the mode, the first baffle can seal the first opening, then the feeding port is shielded, heat loss at the feeding port can be reduced, energy consumption is reduced, and meanwhile the risk that heat extends to the machine frame to damage parts installed on the machine frame can be reduced.

Description

Technical Field

[0001] The embodiments of the present application relate to the technical field of semiconductor material equipment, and in particular to a feeding mechanism and a silicon material heating device. Background Art

[0002] In the photovoltaic and semiconductor industries, single crystal silicon is widely used. At present, most single crystal silicon is prepared by the CZ method. When pulling single crystal silicon materials, polycrystalline silicon materials are generally used as raw materials. In order to improve the pulling efficiency, the polycrystalline silicon materials need to be broken into suitable sizes before adding them to the crucible tongs. At present, mechanical crushing is mostly used, including manual knocking, mechanical extrusion crushing or roller crushing. However, the above physical methods are inefficient and easy to pollute. Moreover, the block materials are uneven, there are many powder materials, and the waste is serious.

[0003] Recently, some manufacturers have adopted silicon material heating equipment to heat silicon materials, and then used water to rapidly cool down the heated silicon materials. The stress generated by the different expansion degrees caused by the temperature difference between the surface and the interior of the silicon materials is used to form micro-cracks from the surface to the inside of the silicon materials, making the silicon materials easy to break, greatly reducing the powder materials, and at the same time reducing the pollution in the crushing process.

[0004] However, in the process of implementing the embodiments of the present application, the inventors found that the feed port of the silicon material heating equipment currently on the market is open and not sealed with an insulating door. Heat will be lost from the feed port, increasing energy consumption, and the lost heat will also cause the temperature of other mechanisms to rise. Utility Model Content

[0005] The embodiments of the present application provide a feeding mechanism and a silicon material heating device that reduce heat loss from a feed port and lower energy consumption.

[0006] In order to solve the above technical problems, a technical solution adopted in the present application is: to provide a feeding mechanism, which is applied to a silicon material heating device, wherein the silicon material heating device comprises a feeding port, and the feeding mechanism comprises:

[0007] A frame, wherein the frame is provided with a first opening and a second opening, wherein the first opening and the second opening are respectively connected to the interior of the frame;

[0008] A first baffle, the first baffle is movably connected to the frame, and the first baffle can move relative to the frame along a first direction;

[0009] A material carrier, the material carrier being movably connected to the frame, and the material carrier being movable relative to the frame along a second direction;

[0010] The second opening is used for the material carrier to be transported to the inside of the frame, the first opening is used for the material carrier to be transported to the feed port, and the first baffle is used for closing the first opening;

[0011] The first direction is perpendicular to the second direction.

[0012] In some embodiments, the feeding mechanism further comprises a support frame, the support frame is movably mounted on the frame, and the support frame can move between the first opening and the second opening along the first direction;

[0013] The first baffle is connected to the support frame, and the support frame can drive the first baffle to move relative to the frame. The material carrier is movably disposed on the support frame, and the material carrier can move relative to the support frame along a second direction.

[0014] In some embodiments, the support frame is provided with a slide rail along the second direction, the material carrier is provided with a pulley, and the pulley is slidably connected to the slide rail; and / or

[0015] The frame is provided with a guide rail along the first direction, and the support frame is movably connected to the guide rail.

[0016] In some embodiments, the rack is further provided with a third opening, and the third opening is communicated with the interior of the rack;

[0017] Along the second direction, the third opening and the first opening are respectively arranged on two opposite sides of the frame, and the third opening at least partially overlaps with the first opening;

[0018] The third opening is used for external equipment to extend into the interior of the frame to push the material carrier into the feed opening.

[0019] In some embodiments, a stopper is provided at one end of the support frame facing the third opening, and the stopper is used to limit the position of the material carrier.

[0020] In some embodiments, a second baffle is further included, wherein the second baffle is movably connected to the frame, the second baffle is movable relative to the frame along a first direction, and the second baffle is used to close the third opening.

[0021] In some embodiments, a driving component is further included, wherein the driving component is connected to the support frame, and the driving component can drive the support frame to move relative to the frame.

[0022] In some embodiments, the driving assembly includes a driving source, a gear and a rack, the driving source is connected to the gear, the gear is meshed with the rack, and the rack is mounted on the frame;

[0023] The gear is also connected to the support frame, and the driving source can drive the gear to rotate, so that the gear drives the support frame to move along the rack.

[0024] In some embodiments, a controller and a detection component are further included, wherein the controller is electrically connected to the driving component and the detection component respectively;

[0025] The detection component is disposed on the support frame, and the detection component is used to detect the position of the material carrier on the support frame. The controller is used to control the opening or closing of the driving component.

[0026] The embodiment of the present application also provides a silicon material heating device, including the above-mentioned feeding mechanism.

[0027] The beneficial effect of the embodiment of the present application is that, different from the prior art, the embodiment of the present application provides a feeding mechanism and silicon material heating equipment, by arranging the feeding mechanism in front of the feeding port of the silicon material heating equipment and arranging a first baffle plate, so that the first baffle plate can close the first opening, thereby shielding the feeding port, which is conducive to reducing the heat loss of the silicon material heating equipment and reducing energy consumption. At the same time, it can also reduce the risk of the heat from the feeding port extending to the frame and damaging the parts installed on the frame, thereby extending the service life of the feeding mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the drawings without paying creative work.

[0029] Figure 1 It is a three-dimensional schematic diagram of a feeding mechanism provided in an embodiment of the present application;

[0030] Figure 2 yes Figure 1 A three-dimensional schematic diagram of a frame in a feeding mechanism shown;

[0031] Figure 3 yes Figure 1 A three-dimensional schematic diagram of another viewing angle of the frame in the feeding mechanism shown;

[0032] Figure 4 yes Figure 1 A three-dimensional schematic diagram of the supporting frame in the feeding mechanism shown moving to the second opening;

[0033] Figure 5 yes Figure 1 The schematic diagram of the installation of the material carrier and the driving assembly in the feeding mechanism shown;

[0034] Figure 6 yes Figure 1 A schematic diagram of the installation of the material carrier and the drive assembly in the feeding mechanism shown in another perspective;

[0035] Figure 7 yes Figure 1 A simplified plan view of the feeding mechanism shown;

[0036] Figure 8 yes Figure 1 The schematic diagram of the installation of the material carrier and the sliding assembly in the feeding mechanism shown;

[0037] Fig. 9 yes Figure 1 A three-dimensional schematic diagram of the feeding mechanism from another perspective is shown.

[0038] Reference numerals:

[0039] 100. Feeding mechanism;

[0040] 10. rack; 101. first opening; 102. second opening; 103. third opening;

[0041] 20. Material carrier;

[0042] 30. First baffle;

[0043] 301, 40, support frame; 41, accommodating space; 42, mounting seat;

[0044] 50. driving assembly; 51. driving source; 52. active member; 53. driven member;

[0045] 60. guide assembly; 61. guide rail; 62. slider;

[0046] 70. Sliding assembly; 71. Slide rail; 72. Pulley;

[0047] 80. Stopper;

[0048] 90. detection member; 91. first detection member; 92. second detection member;

[0049] 30a, second baffle;

[0050] 200. Silicon material. DETAILED DESCRIPTION

[0051] In order to facilitate the understanding of the present application, the present application is described in more detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that when an element is described as "fixed to" another element, it can be directly on the other element, or there can be one or more centered elements therebetween. When an element is described as "connected to" another element, it can be directly connected to the other element, or there can be one or more centered elements therebetween. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this specification are for illustrative purposes only.

[0052] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used in this specification and in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in this specification includes any and all combinations of one or more of the related listed items.

[0053] The embodiment of the present application provides a silicon material heating device, including a tunnel-type microwave heating system, a cold medium quenching system, a microwave drying system and a material conveying system, wherein the material conveying system sequentially passes through the microwave heating system, the cold medium quenching system and the microwave drying system. Specifically, the microwave heating system includes a feed port, the microwave drying system includes a discharge port, the material conveying system includes a transmission roller and a material loading mechanism, the transmission roller passes through the microwave heating system, the cold medium quenching system and the microwave drying system, and the material loading mechanism is arranged at the front and rear ends of the transmission roller, and is used to transport the material carrier containing silicon material on the transmission roller, so that the material carrier containing silicon material enters the microwave heating system from the feed port, or receives the material carrier containing silicon material coming out of the discharge port. This process uses microwaves as an energy source, and utilizes the characteristics of microwaves being uniformly converted into heat energy inside the silicon material to heat the silicon material at a relatively low ambient temperature. Then the heated silicon material is immersed in a cooling medium, and then dried by microwave drying to dry the silicon material. The dried silicon material can be broken into uniform fragments that meet the requirements of downstream processes by slight beating.

[0054] In the embodiment of the present application, a first baffle is added to the feeding mechanism, so that after the material carrier loaded with silicon material enters the feeding port, the first baffle can block the feeding port, thereby reducing heat loss and energy consumption. The feeding mechanism provided in front of the microwave heating system is used as an example for explanation.

[0055] Specifically, see Figure 1 and Figure 2 , Figure 1 FIG. 1 shows a three-dimensional schematic diagram of a feeding mechanism 100 according to an embodiment of the present application. Figure 2The three-dimensional schematic diagram of the rack 10 is shown. The loading mechanism 100 includes the rack 10, the material carrier 20 and the first baffle 30. The rack 10 is erected at the feed port. The rack 10 is provided with a first opening 101 and a second opening 102 in parallel along the first direction z. The first opening 101 and the second opening 102 are respectively connected to the inside of the rack 10. The first opening 101 is used to be opposite to and connected to the feed port, and the second opening 102 is used for the material carrier 20 to carry the silicon material 200 into the inside of the rack 10. The material carrier 20 is movably connected to the rack 10. The material carrier 20 is used to load the silicon material 200, and the material carrier 20 can move relative to the rack 10 along the second direction x so that the material carrier 20 and the silicon material 200 enter the feed port through the first opening 101. The second direction x is perpendicular to the first direction z. The first baffle 30 is movably connected to the frame 10 . The first baffle 30 can move relative to the frame 10 along a first direction z. The first baffle 30 is used to close the first opening 101 .

[0056] For the convenience of description, the embodiment of the present application is described by taking the first direction z as the height direction of the rack 10, the second direction x as the width direction of the rack, and the third direction y as the length direction of the rack as an example.

[0057] In some embodiments, Figure 3 As shown, the frame 10 is further provided with a third opening 103, which is in communication with the interior of the frame 10. Along the second direction x, the third opening 103 and the first opening 101 are respectively provided on two opposite sides of the frame 10, and the third opening 103 at least partially overlaps with the first opening 101. The third opening 103 is used for an external device to extend into the interior of the frame 10 to push the material carrier 20 into the feed port.

[0058] In some embodiments, the material carrier 20 can be formed by casting and calcining, or can be manufactured by processing and welding a quartz plate.

[0059] In some embodiments, the material carrier 20 is made of a high temperature resistant and non-wave absorbing material.

[0060] In some embodiments, the first baffle 30 is made of a high temperature resistant heat insulating material, such as ceramic.

[0061] In some embodiments, in order to allow the material carrier 20 to enter the interior of the rack 10 and be transported to the first opening 101 through the second opening 102, the material carrier 20 is configured to be movable relative to the rack 10 along the first direction z. For example, the loading mechanism 100 includes a support frame 40, the support frame 40 is used to carry the material carrier 20, the support frame 40 is movably mounted on the rack 10, and the support frame 10 can move between the first opening 101 and the second opening 102 along the first direction z. Specifically, when the support frame 40 moves to the second opening 102, as shown in FIG. Figure 4As shown, the material carrier 20 is transported to the support frame 40 through the conveying mechanism and the second opening 102; and then the support frame 40 carries the material carrier 20 to move to the first opening 101, as shown in FIG. Figure 1 As shown, it is convenient for the subsequent material carrier 20 to carry the silicon material 200 into the feed port through the first opening 101 .

[0062] In some embodiments, Figure 5 and Figure 6 As shown, the support frame 40 includes a receiving space 41 , and the material carrier 20 is received in the receiving space 41 . The receiving space 41 is respectively connected to the first opening 101 , the second opening 102 and the third opening 103 , so that the material carrier 20 can enter and exit the receiving space.

[0063] In some embodiments, the loading mechanism 100 includes a driving assembly 50 and a controller. The driving assembly 50 is connected to the support frame 40 and is used to drive the support frame 40 to move relative to the frame 10 along the first direction z.

[0064] In some embodiments, the driving assembly 50 includes a driving source 51, a driving member 52, and a driven member 53. Figure 7 As shown, when the driving source 51 is fixed to the support frame 40, the output end of the driving source 51 is connected to the active member 52, the driven member 53 is fixed to the frame 10, and the driven member 53 is in transmission cooperation with the active member 52. At this time, the driving source 51 can be a motor, the active member 52 can be a gear, and the driven member 53 can be a rack. Specifically, the rack is arranged on the frame 10 along the first direction z, the output end of the motor is axially fixed to the gear, the gear is meshed with the rack, and then when the motor is started, the gear can drive the support frame 40 to rise and fall along the rack.

[0065] In some embodiments, the driving source 51 can also be fixed to the frame 10, the output end of the driving source 51 is connected to the active member 52, the driven member 53 is fixed to the support frame 40, and the driven member 53 is in transmission cooperation with the active member 52. At this time, the driving source 51 can be a motor, the active member 52 is a screw, and the driven member 53 is a screw mounting seat. Specifically, the motor is fixed to the frame 10, the output end of the motor is coaxially connected to the screw, the screw mounting seat is fixed to the support frame 40 and is threadedly connected to the screw, so that when the motor is started, the screw mounting seat drives the support frame 40 to rise and fall relative to the frame 10 along the first direction z. It can be understood that all driving components that can drive the support frame to rise and fall relative to the frame are included in this application.

[0066] It can be understood that the number of the above-mentioned driving components is 2, and the two driving components are respectively arranged on both sides of the support frame along the third direction y.

[0067] In some embodiments, when the drive assembly 50 is a combination of a gear and a rack, such as Figure 5As shown, the support frame 40 includes a mounting seat 42, which is arranged outside the accommodating space 41, and the driving source 51 is fixed to the mounting seat 42, one end of the mounting seat 42 is fixed to the outer wall of the accommodating space 41, and the other end of the mounting seat 42 is fixed to the slider 62, so that the slider 62 can drive the support frame 40 to rise and fall together. It can be understood that the guide rail and the rack are arranged on the frame at intervals along the second direction x. When the driving assembly 50 is a screw drive, the screw and the guide rail are arranged on the frame at intervals along the second direction x.

[0068] It should be noted that a plurality of sliders, such as 1, 2, 3, etc., may be provided on a guide rail.

[0069] The embodiment of the present application drives the support frame 40 to move through the driving component 50, which can reduce human intervention, reduce pollution from foreign impurities, and also reduce radiation to the human body.

[0070] In some embodiments, in order to facilitate the control of the movement of the first baffle 30, when the support frame 40 moves to the second opening 102 (such as Figure 4 As shown), the first baffle 30 can close the first opening 101, and when the support frame 40 moves to the first opening 101 (as shown Figure 1 As shown in FIG. 1 , the first baffle 30 can open the first opening 101, and the first baffle 30 is connected to the support frame 40, for example, the first baffle 30 is connected to a side of the accommodating space 41 close to the first opening 101. Thus, the support frame 40 can drive the first baffle 30 to move relative to the frame 10 along the first direction z.

[0071] In some embodiments, Figure 7 As shown, in order to make the support frame 40 rise and fall more smoothly along the first direction z, the loading mechanism 100 also includes a guide assembly 60, the guide assembly 60 includes a guide rail 61 and a slider 62, the guide rail 61 is arranged on the frame 10 along the first direction z, the slider 62 is slidably connected to the guide rail 61, and the support frame 40 is fixed to the slider 62, so that the support frame 40 is movably connected to the guide rail 61 through the slider 62.

[0072] In some embodiments, the frame 10 is further provided with a stopper. For example, when the drive assembly 50 is a gear rack, along the first direction z, two stoppers are respectively fixed to opposite ends of the rack, and the gear rolls along the rack between the two stoppers to reduce the risk of the gear being separated from the rack. For example, when the drive assembly 50 is a screw drive, along the first direction z, two stoppers are respectively fixed to opposite ends of the screw, and the screw mounting seat is disposed between the two stoppers, thereby reducing the risk of the screw mounting seat being separated from the screw.

[0073] In some embodiments, Figure 8As shown, in order to facilitate the material carrier 20 to move to the accommodating space 41 of the support frame 40 through the second opening 102 and to facilitate the material carrier 20 to enter the feed port, the material carrier 20 is movably arranged on the support frame 40, and the material carrier 40 can move relative to the support frame 40 along the second direction x. Specifically, the feeding mechanism 100 includes a sliding assembly 70, and the sliding assembly 70 includes a slide rail 71 and a pulley 72. The slide rail 71 is arranged at the bottom of the accommodating space 41 of the support frame 40 along the second direction x, and the pulley 72 is arranged at the bottom of the material carrier 20, and the pulley 72 is slidably connected to the slide rail 71. Specifically, the pulley 72 is rotatably connected to the bottom of the material carrier 20, for example, a groove is provided at the bottom of the material carrier, and a shaft is connected in the groove, and the pulley 72 is accommodated in the groove and penetrated on the shaft, and at least a portion of the pulley extends out of the groove so that the pulley 72 is connected to the slide rail 71.

[0074] It can be understood that the number of the slide rails is at least 2, and the two slide rails are arranged at a distance at the bottom of the accommodation space. A plurality of pulleys can be arranged on one slide rail.

[0075] In some embodiments, Figure 6 and Figure 8 As shown, in order to reduce the material carrier 20 accommodated in the accommodation space 41 from sliding out of the accommodation space 41, the loading mechanism 100 includes a stopper 80, and the stopper 80 is arranged at one end of the support frame 40 facing the third opening 103. Specifically, the stopper 80 is arranged in the accommodation space 41 and close to the third opening 103, and the stopper 80 is used to limit the material carrier 20 to prevent the material carrier 20 from leaving the accommodation space 41.

[0076] In some embodiments, Figure 8 As shown, the feeding mechanism includes a detection member 90, and the detection member 90 includes a first detection member 91 and a second detection member 92. The first detection member 91 is arranged in the accommodating space 41 and is arranged near the first opening 101. The first detection member 91 is electrically connected to the controller. The first detection member 91 is configured to send a first signal to the controller when the material carrier 20 enters the feed port through the first opening 101, so that the controller controls the driving source 51 to drive the support frame 40 to move from the first opening 101 to the second opening 102, so that the first baffle 30 can close the first opening 101, and the support frame 40 waits for loading a new material carrier 20 (carrying silicon material). The second detection member 92 is disposed in the accommodating space 41 and is disposed near the third opening 103. The second detection member 92 is electrically connected to the controller. The second detection member 92 is configured to send a second signal to the controller when a new material carrier enters the accommodating space 41 through the second opening 102 and abuts against the stop member 80, so that the controller controls the driving source 51 to drive the support frame 40 to move from the second opening to the first opening, so as to push the material carrier 20 carrying the silicon material into the feed port, and repeat this cycle.

[0077] In some embodiments, Fig. 9 As shown, the feeding mechanism 100 further includes a second baffle 30a, which is used to close the third opening 103, further reducing the heat loss of the silicon material heating device, and also reducing the pollution of the parts installed in the frame 10. For example, in one embodiment, the second baffle 30a is movably connected to the frame 10, and the second baffle 30a can move relative to the frame 10 along the first direction z. The second baffle 30a is configured to close the third opening 103 when the support frame 40 moves to the second opening 102, and to open the third opening 103 when the support frame 40 moves to the first opening 101. At this time, the second baffle 30a can be driven by a driving device, and at the same time, the driving device is electrically connected to the controller, so that the controller controls the driving device to drive the second baffle 30a to close the third opening 103 in response to the first signal, or the controller controls the driving device to drive the second baffle 30a to open the third opening 103 in response to the second signal. Alternatively, in another embodiment, one end of the second baffle 30a is rotatably connected to the frame 10, and the other end of the second baffle 30a is configured to open / close the third opening 103, so that an external device can extend into the accommodating space 41 through the third opening 103 to push the material carrier 20 into the feed port. For example, when the support frame 40 moves to the second opening 102, the second baffle 30a closes the third opening 103; when the support frame 40 moves to the first opening 101, the external device can push the second baffle 30a to open the third opening 103.

[0078] The embodiment of the present application provides a feeding mechanism and silicon material heating equipment, which is helpful to reduce the heat loss of the silicon material heating equipment and reduce energy consumption by setting the feeding mechanism at the feeding port of the silicon material heating equipment and setting a first baffle so that the first baffle can close the first opening, thereby shielding the feeding port. At the same time, it can also reduce the risk of the heat from the feeding port extending to the frame and damaging the parts installed on the frame, thereby extending the service life of the feeding mechanism.

[0079] It should be noted that the preferred embodiments of the present application are given in the specification and drawings of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described in the specification. These embodiments are not used as additional limitations on the content of the present application. The purpose of providing these embodiments is to make the understanding of the disclosure of the present application more thorough and comprehensive. In addition, the above-mentioned technical features continue to be combined with each other to form various embodiments not listed above, which are all regarded as the scope of the description of the present application; further, for ordinary technicians in this field, they can be improved or transformed according to the above description, and all these improvements and transformations should belong to the scope of protection of the claims attached to the present application.

Claims

1. A feeding mechanism, applied to a silicon material heating device, wherein the silicon material heating device comprises a feeding port, characterized in that: The feeding mechanism comprises: A frame, wherein the frame is provided with a first opening and a second opening, the first opening and the second opening are respectively connected to the interior of the frame, and the first opening is used to communicate with the feed port; A first baffle, the first baffle is movably connected to the frame, and the first baffle can move relative to the frame along a first direction; A material carrier, the material carrier being movably connected to the frame, and the material carrier being movable relative to the frame along a second direction; The second opening is used for the material carrier to be transported to the inside of the frame, the first opening is used for the material carrier to be transported to the feed port, and the first baffle is used for closing the first opening; The first direction is perpendicular to the second direction.

2. The feeding mechanism according to claim 1, characterized in that: The feeding mechanism further includes a support frame, which is movably mounted on the frame, and the support frame can move between the first opening and the second opening along the first direction; The material carrier is movably disposed on the support frame, and the material carrier is movable relative to the support frame along the second direction.

3. The feeding mechanism according to claim 2, characterized in that: The support frame is provided with a slide rail along the second direction, the material carrier is provided with a pulley, and the pulley is slidably connected to the slide rail; and / or The frame is provided with a guide rail along the first direction, and the support frame is movably connected to the guide rail.

4. The feeding mechanism according to claim 2, characterized in that: The frame is further provided with a third opening, and the third opening is communicated with the interior of the frame; Along the second direction, the third opening and the first opening are respectively arranged on two opposite sides of the frame, and the third opening at least partially overlaps with the first opening; The third opening is used for external equipment to extend into the interior of the frame to push the material carrier into the feed opening.

5. The feeding mechanism according to claim 4, characterized in that: A stopper is provided at one end of the support frame facing the third opening, and the stopper is used to limit the position of the material carrier.

6. The feeding mechanism according to claim 4, characterized in that: It also includes a second baffle, which is movably connected to the frame, and the second baffle can move relative to the frame along a first direction, and the second baffle is used to close the third opening.

7. The feeding mechanism according to any one of claims 4 to 6, characterized in that: It also includes a driving component, which is connected to the supporting frame and can drive the supporting frame to move relative to the frame.

8. The feeding mechanism according to claim 7, characterized in that: The driving assembly includes a driving source, a gear and a rack, the driving source is connected to the gear, the gear is meshed with the rack, and the rack is installed on the frame; The gear is also connected to the support frame, and the driving source can drive the gear to rotate, so that the gear drives the support frame to move along the rack.

9. The feeding mechanism according to claim 7, characterized in that: It also includes a controller and a detection component, wherein the controller is electrically connected to the driving component and the detection component respectively; The detection component is disposed on the support frame, and the detection component is used to detect the position of the material carrier on the support frame. The controller is used to control the opening or closing of the driving component.

10. A silicon material heating device, characterized in that: It comprises a feeding mechanism as described in any one of claims 1 to 9.

Images