Annealing furnace for metal powder production

Abstract

The utility model relates to the technical field of annealing furnaces, and provides an annealing furnace for metal powder production, which comprises a protective plate, the top of the protective plate is fixedly connected with a support frame, and the side surface of the support frame is rotatably connected with an annealing furnace main body; a heating device is arranged at the top of the protection plate and comprises a mounting plate, the side face of the mounting plate is fixedly connected with the side face of the protection plate, a motor is fixedly connected to the side face of the mounting plate, an output shaft of the motor is fixedly connected with a reciprocating lead screw, and the circumferential face of the reciprocating lead screw is in threaded connection with a threaded block. A fixing plate is fixedly connected to the top of the threaded block, a heating pipe is arranged at the top of the fixing plate, and a rotating rod is fixedly connected to the end, away from the motor, of the reciprocating lead screw. By means of the technical scheme, the problems that in the prior art, temperature uniformity and stability in the heating process are difficult to ensure, and the product quality problem caused by uneven temperature is difficult to avoid are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of annealing furnaces, and in particular to an annealing furnace for producing metal powder. Background Art

[0002] An annealing furnace is a tool used in semiconductor device manufacturing that involves heating multiple semiconductor wafers to affect their electrical properties. The thermal treatment is designed for different effects. The wafers can be heated to activate dopants, convert thin films into thin films or convert thin films into wafer substrate interfaces, make densely deposited films, change the state of growing thin films, repair implanted damage, move dopants or transfer dopants from one film to another or from a thin film into the wafer substrate.

[0003] According to a disclosed continuous vacuum vertical annealing furnace for metal powder (publication number: CN106735178A), it includes a feed bin, a transition bin, a heating chamber, a furnace, a cooling tank, a powder gas delivery device, and a vacuum device; the vacuum device is connected to the furnace, the feed bin, the transition bin, and the cooling tank, so as to achieve the dual purposes of vacuum annealing and atmosphere protection annealing. However, in the above-mentioned device, components such as the cooling tank, the powder gas delivery device and the vacuum device cooperate with each other, and it is difficult to achieve the effect of uniform heating of the annealing furnace body, so that the powder inside is heated evenly, it is difficult to ensure the temperature uniformity and stability during the heating process, and it is difficult to avoid product quality problems caused by uneven temperature, which needs to be improved. Utility Model Content

[0004] The utility model provides an annealing furnace for producing metal powder.

[0005] The technical solution of the utility model is as follows: comprising a protective plate, the top of the protective plate is fixedly connected to a support frame, and the side of the support frame is rotatably connected to an annealing furnace body;

[0006] A heating device is provided on the top of the protective plate, and the heating device includes a mounting plate, a side surface of the mounting plate is fixedly connected to the side surface of the protective plate, a motor is fixedly connected to the side surface of the mounting plate, a reciprocating screw is fixedly connected to the output shaft of the motor, a threaded block is threadedly connected to the circumferential surface of the reciprocating screw, a fixing plate is fixedly connected to the top of the threaded block, a heating tube is provided on the top of the fixing plate, a rotating rod is fixedly connected to the end of the reciprocating screw away from the motor, a gear is fixedly connected to the circumferential surface of the rotating rod, and a gear ring is fixedly connected to the circumferential surface of the annealing furnace body.

[0007] A limiting rod is passed through the side surface of the threaded block, one end of the limiting rod is fixedly connected to the side surface of the mounting plate, and the limiting rod is located on the side surface of the reciprocating screw rod.

[0008] The circumferential surface of the rotating rod is rotatably connected with a belt, one end of the belt away from the rotating rod is rotatably connected with the rotating rod, the circumferential surface of the rotating rod is fixedly connected with a stirring blade, and one end of the stirring blade away from the rotating rod is fixedly connected with a scraper.

[0009] The side surface of the gear meshes with the side surface of the gear ring. The number of the stirring blades is set to be a plurality and arranged in a circumferential array on the circumferential surface of the rotating rod.

[0010] The side surface of the scraper is in contact with the inner wall of the annealing furnace body. The number of the scrapers is set to be several and they are arranged along a linear array on the side surface of the stirring blade.

[0011] The circumferential surface of the annealing furnace body is provided with ventilation holes, the circumferential surface of the annealing furnace body is provided with a touch panel, and the side surface of the annealing furnace body is rotatably connected with a rotating shaft.

[0012] The number of the support frames is set to be a plurality, in groups of two, and symmetrical with each other along the vertical center axis of the protective plate.

[0013] The size of the gear is smaller than that of the gear ring, and the material of the belt is set to be polyurethane.

[0014] A cover plate is fixedly connected to the circumferential surface of the rotating shaft, and the belt is located on the side of the gear.

[0015] The heating tube is located at the bottom of the annealing furnace body, and the diameter of the cover plate is consistent with the diameter of the annealing furnace body.

[0016] The working principle and beneficial effects of the utility model are:

[0017] 1. The utility model uses the force of the reciprocating screw driven by the motor to rotate, and cooperates with the limit rod, threaded block, heating tube and other components in the heating device, so as to realize the function of driving the gear ring to rotate through the rotation of the gear, and then driving the annealing furnace body to rotate through the rotation of the gear ring, thereby achieving the effect of uniformly heating the annealing furnace body, so that the powder inside it is heated evenly. This precise control can ensure the temperature uniformity and stability during the heating process, and avoid product quality problems caused by uneven temperature.

[0018] 2. The utility model realizes the effect of driving the rotating rod to rotate the belt by the force of the rotating rod, and driving the stirring blades to rotate by the rotating rod, thereby achieving the effect of stirring the powder inside the annealing furnace body, ensuring that the powder remains evenly distributed during the entire heating process, avoiding local overheating or overcooling, and thus improving the quality and uniformity of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0020] Figure 1 This is a schematic diagram of the three-dimensional appearance structure of the utility model;

[0021] Figure 2 It is a three-dimensional side view structural schematic diagram of the cover plate of the utility model;

[0022] Figure 3 It is a three-dimensional side view structural schematic diagram of the fixed plate of the utility model;

[0023] Figure 4 It is a three-dimensional side view structural diagram of the stirring blade of the utility model;

[0024] Figure 5 It is a three-dimensional enlarged structural schematic diagram of the scraper of the utility model.

[0025] In the figure: 101, protective plate; 102, support frame; 103, annealing furnace body; 104, ventilation hole; 105, touch panel; 106, rotating shaft; 107, cover plate; 2, heating device; 201, mounting plate; 202, motor; 203, reciprocating screw; 204, limit rod; 205, threaded block; 206, fixing plate; 207, heating tube; 208, rotating rod; 209, gear; 210, gear ring; 211, belt; 212, rotating rod; 213, stirring blade; 214, scraper. DETAILED DESCRIPTION

[0026] The following will be combined with the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] Example 1

[0028] like Figure 1-2As shown, this embodiment proposes an annealing furnace for metal powder production, including a protective plate 101, the top of the protective plate 101 is fixedly connected to a support frame 102, and the side of the support frame 102 is rotatably connected to an annealing furnace body 103; a heating device 2 is arranged on the top of the protective plate 101, and the heating device 2 includes a mounting plate 201, the side of the mounting plate 201 is fixedly connected to the side of the protective plate 101, and the side of the mounting plate 201 is fixedly connected to a motor 202, the output shaft of the motor 202 is fixedly connected to a reciprocating screw 203, the circumferential surface of the reciprocating screw 203 is threadedly connected to a threaded block 205, the top of the threaded block 205 is fixedly connected to a fixed plate 206, and a heating tube 207 is arranged on the top of the fixed plate 206, the end of the reciprocating screw 203 away from the motor 202 is fixedly connected to a rotating rod 208, the circumferential surface of the rotating rod 208 is fixedly connected to a gear 209, and the circumferential surface of the annealing furnace body 103 is fixedly connected to a gear ring 210. A limit rod 204 passes through the side of the threaded block 205, and one end of the limit rod 204 is fixedly connected to the side of the mounting plate 201. The limit rod 204 is located on the side of the reciprocating screw 203. The reciprocating screw 203 drives the heating tube 207 to move horizontally, so that the annealing furnace body 103 can be evenly heated. This is very important for the heat treatment of metal powder, because uniform heating can ensure that the powder reaches a consistent temperature during the annealing process, thereby improving the quality and performance of the product. This precise control can ensure the temperature uniformity and stability during the heating process, and avoid product quality problems caused by uneven temperature.

[0029] In this embodiment, the reciprocating screw 203 is driven to rotate by the motor 202, and the rotation of the reciprocating screw 203 drives the threaded block 205 to move horizontally, and the threaded block 205 is limited by the limiting rod 204 on the side of the threaded block 205, and the horizontal displacement of the threaded block 205 drives the fixed plate 206 to move horizontally, and then the displacement of the fixed plate 206 drives the heating tube 207 to move horizontally, and the reciprocating motion of the heating tube 207 can uniformly heat the annealing furnace body 103, and the rotation of the reciprocating screw 203 drives the rotating rod 208 to rotate, and then the rotation of the rotating rod 208 drives the gear 209 to rotate, and the rotation of the gear 209 drives the gear ring 210 to rotate, and then the rotation of the gear ring 210 drives the annealing furnace body 103 to rotate, thereby achieving the effect of uniform heating of the annealing furnace body 103, so that the powder inside it is evenly heated.

[0030] Example 2

[0031] like Figure 3 to Figure 5As shown, based on the same concept as the above-mentioned embodiment 1, this embodiment also proposes an annealing furnace for metal powder production, the circumferential surface of the rotating rod 208 is rotatably connected with a belt 211, the end of the belt 211 away from the rotating rod 208 is rotatably connected with a rotating rod 212, the circumferential surface of the rotating rod 212 is fixedly connected with a stirring blade 213, and the end of the stirring blade 213 away from the rotating rod 212 is fixedly connected with a scraper 214. The side surface of the gear 209 is meshed with the side surface of the gear ring 210, the number of stirring blades 213 is set to be several, and they are arranged in a circumferential array on the circumferential surface of the rotating rod 212. The side surface of the scraper 214 contacts the inner wall of the annealing furnace body 103, the number of scrapers 214 is set to be several, and they are arranged in a linear array on the side surface of the stirring blade 213. The circumferential surface of the annealing furnace body 103 is provided with ventilation holes 104, the circumferential surface of the annealing furnace body 103 is provided with a touch panel 105, and the side of the annealing furnace body 103 is rotatably connected with a rotating shaft 106. The number of support frames 102 is set to be several, two by two, and symmetrical with each other along the vertical center axis of the protective plate 101. The size of the gear 209 is smaller than the size of the gear ring 210, and the material of the belt 211 is set to be polyurethane. The circumferential surface of the rotating shaft 106 is fixedly connected with a cover plate 107, and the belt 211 is located on the side of the gear 209. The heating tube 207 is located at the bottom of the annealing furnace body 103. The diameter of the cover plate 107 is consistent with the diameter of the annealing furnace body 103. The stirring blade 213 is driven by the rotating rod 208 to effectively mix the metal powder in the annealing furnace body 103, which ensures that the powder remains evenly distributed during the entire heating process, avoids local overheating or overcooling, and thus improves the quality and uniformity of the product. The setting of the scraper 214 can effectively remove the powder on the inner wall of the annealing furnace body 103, especially in corners and hidden areas, so as to avoid the agglomeration of powder or the formation of dead corners, and ensure that all powder can be evenly heated and processed.

[0032] In this embodiment, the belt 211 is driven to rotate by the rotating rod 208, and the rotating rod 212 is driven to rotate by the belt 211, and the stirring blade 213 is driven to rotate by the rotating rod 212, thereby achieving the effect of stirring the powder inside the annealing furnace body 103, and the scraper 214 is driven to rotate by the stirring blade 213. The scraper 214 can be set to scrape off the metal powder on the inner wall of the annealing furnace body 103, thereby achieving the effect of evenly heating the metal powder.

[0033] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An annealing furnace for metal powder production, characterized in that: It comprises a protection plate (101), the top of the protection plate (101) is fixedly connected to a support frame (102), and the side of the support frame (102) is rotatably connected to an annealing furnace body (103); A heating device (2) is arranged on the top of the protection plate (101), and the heating device (2) comprises a mounting plate (201), a side surface of the mounting plate (201) is fixedly connected to a side surface of the protection plate (101), a motor (202) is fixedly connected to the side surface of the mounting plate (201), a reciprocating screw rod (203) is fixedly connected to the output shaft of the motor (202), a threaded block (205) is threadedly connected to the circumferential surface of the reciprocating screw rod (203), a fixed plate (206) is fixedly connected to the top of the threaded block (205), a heating tube (207) is arranged on the top of the fixed plate (206), a rotating rod (208) is fixedly connected to the end of the reciprocating screw rod (203) away from the motor (202), a gear (209) is fixedly connected to the circumferential surface of the rotating rod (208), and a gear ring (210) is fixedly connected to the circumferential surface of the annealing furnace body (103).

2. An annealing furnace for metal powder production according to claim 1, characterized in that: A limiting rod (204) passes through the side of the threaded block (205); one end of the limiting rod (204) is fixedly connected to the side of the mounting plate (201); and the limiting rod (204) is located on the side of the reciprocating screw rod (203).

3. The annealing furnace for metal powder production according to claim 2, characterized in that: The circumferential surface of the rotating rod (208) is rotatably connected to a belt (211), one end of the belt (211) away from the rotating rod (208) is rotatably connected to a rotating rod (212), the circumferential surface of the rotating rod (212) is fixedly connected to a stirring blade (213), and one end of the stirring blade (213) away from the rotating rod (212) is fixedly connected to a scraper (214).

4. The annealing furnace for metal powder production according to claim 3, characterized in that: The side surface of the gear (209) meshes with the side surface of the gear ring (210), and the number of the stirring blades (213) is set to be a plurality and arranged in a circumferential array on the circumferential surface of the rotating rod (212).

5. The annealing furnace for metal powder production according to claim 4, characterized in that: The side surfaces of the scrapers (214) are in contact with the inner wall of the annealing furnace body (103), and the number of the scrapers (214) is set to be a plurality and arranged along a linear array on the side surfaces of the stirring blades (213).

6. The annealing furnace for metal powder production according to claim 5, characterized in that: The circumferential surface of the annealing furnace body (103) is provided with ventilation holes (104), the circumferential surface of the annealing furnace body (103) is provided with a touch panel (105), and the side surface of the annealing furnace body (103) is rotatably connected to a rotating shaft (106).

7. An annealing furnace for metal powder production according to claim 6, characterized in that: The number of the support frames (102) is set to be a plurality, in groups of two, and symmetrical with each other along the vertical center axis of the protection plate (101).

8. The annealing furnace for metal powder production according to claim 7, characterized in that: The size of the gear (209) is smaller than the size of the gear ring (210), and the material of the belt (211) is set to be polyurethane material.

9. An annealing furnace for metal powder production according to claim 8, characterized in that: The circumferential surface of the rotating shaft (106) is fixedly connected to a cover plate (107), and the belt (211) is located on the side of the gear (209).

10. An annealing furnace for metal powder production according to claim 9, characterized in that: The heating tube (207) is located at the bottom of the annealing furnace body (103), and the diameter of the cover plate (107) is consistent with the diameter of the annealing furnace body (103).

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