ZR axis module with adjustable R axis

Abstract

The embodiment of the utility model discloses a ZR-axis module with an adjustable R-axis, which comprises a Z-axis motor, an R-axis motor, a shell, a sliding table, a pressure sensor, a positioning pin A and an eccentric pin A. The Z-axis motor is arranged on the shell, the sliding table is connected with a rotor of the Z-axis motor, the pressure sensor is connected with the R-axis motor, and the positioning pin A is arranged on the shell. An upper through hole A and an upper pin hole A corresponding to the positioning pin A are formed in the pressure sensor and the front face of the sliding table respectively, a lower through hole A and a lower pin hole A corresponding to the eccentric pin A are formed in the pressure sensor and the front face of the sliding table respectively, the positioning pin A penetrates through the upper through hole A to be installed in the upper pin hole A, and the eccentric pin A penetrates through the lower through hole A to be installed in the lower pin hole A. The pressure sensor is correspondingly connected with the sliding table through a positioning pin A and an eccentric pin A; according to the utility model, the R shaft can be adjusted in the X direction and the Y direction through the eccentric pin, so that the R shaft is always in the vertical direction, the parallelism between a load on the R shaft and a mounting surface during rotation is ensured, and the precision of a ZR shaft module is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of picking up and mounting semiconductor chips, in particular to a ZR axis module with adjustable R axis. Background Art

[0002] In automated production, the application of manipulators has become more and more widespread. ZR axis modules are used in the grasping process of some small workpieces (such as small ICs, especially some semiconductor chips with length and width at the micron level). After the ZR axis module is installed, the R axis of the ZR axis module needs to be kept in the vertical direction. However, due to the machining accuracy of the ZR axis module, after some ZR axis modules are installed, their R axis is not completely vertical, and many are deflected, which cannot meet the grasping requirements. Utility Model Content

[0003] The technical problem to be solved by the embodiments of the present utility model is to provide a ZR axis module with adjustable R axis to achieve R axis adjustability.

[0004] In order to solve the above technical problems, an embodiment of the utility model proposes an R-axis adjustable ZR-axis module, including a Z-axis motor, an R-axis motor, a housing, a slide, a pressure sensor, and also including a positioning pin A and an eccentric pin A. The Z-axis motor is arranged on the housing, the slide is connected to the mover of the Z-axis motor, the pressure sensor is connected to the R-axis motor, and an upper through hole A and an upper pin hole A corresponding to the positioning pin A are respectively provided on the pressure sensor and the front face of the slide, and a lower through hole A and a lower pin hole A corresponding to the eccentric pin A are respectively provided on the pressure sensor and the front face of the slide, the positioning pin A passes through the upper through hole A and is installed in the upper pin hole A, the eccentric pin A passes through the lower through hole A and is installed in the lower pin hole A, and the pressure sensor is connected to the slide via the positioning pin A and the eccentric pin A.

[0005] Furthermore, it also includes a positioning pin B, an eccentric pin B and a mounting platform arranged on the side of the shell, the mounting surface of the mounting platform is perpendicular to the front of the slide table, and an upper through hole B and an upper pin hole B corresponding to the positioning pin B are respectively provided on the shell and the mounting surface of the mounting platform, and a lower through hole B and a lower pin hole B corresponding to the eccentric pin B are respectively provided on the shell and the mounting surface of the mounting platform, and the shell is connected to the mounting platform through the positioning pin B and the eccentric pin B.

[0006] Furthermore, the eccentric pin A adopts an eccentric pin with unequal sizes at both ends or an eccentric pin with equal sizes at both ends, and the eccentric pin B adopts an eccentric pin with unequal sizes at both ends or an eccentric pin with equal sizes at both ends.

[0007] Further, the mounting table is parallel to the R-axis motor.

[0008] Furthermore, a slide rail corresponding to the slide table is provided on the shell.

[0009] The beneficial effects of the utility model are as follows: the utility model can adjust the R-axis in the X-direction and the Y-direction through the eccentric pin, so that the R-axis can always be in the vertical direction, thereby ensuring the parallelism of the load on the R-axis with the mounting surface during rotation, and improving the accuracy of the ZR-axis module. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a three-dimensional structural diagram at one angle of the ZR axis module with adjustable R axis of an embodiment of the utility model.

[0011] Figure 2 It is a three-dimensional structural diagram of the ZR axis module with adjustable R axis from another angle according to an embodiment of the present utility model.

[0012] Figure 3 It is a diagram of the internal structure of the ZR axis module with adjustable R axis according to an embodiment of the present utility model.

[0013] Description of Figure Numbers

[0014] Z-axis motor 1, R-axis motor 2, housing 3, slide table 4, pressure sensor 5, positioning pin A6, eccentric pin A7, positioning pin B8, eccentric pin B9, mounting table 10, slide rail 11. DETAILED DESCRIPTION

[0015] It should be noted that, in the absence of conflict, the embodiments in the present application and the features in the embodiments may be combined with each other. The present utility model is further described in detail below in conjunction with the drawings and specific embodiments.

[0016] In the embodiments of the present invention, if there are directional indications (such as up, down, left, right, front, back, etc.), they are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0017] In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features.

[0018] Please refer to Figure 1 to Figure 3 The R-axis adjustable ZR-axis module of the embodiment of the utility model includes a Z-axis motor, an R-axis motor, a housing, a slide, a pressure sensor, a positioning pin A and an eccentric pin A.

[0019] The Z-axis motor is arranged on the housing, the slide table is connected to the mover of the Z-axis motor, and the pressure sensor is connected to the R-axis motor. This part of the structure is the same as the existing ZR-axis module.

[0020] An upper through hole A and an upper pin hole A corresponding to the positioning pin A are respectively provided on the pressure sensor and the front of the slide, and a lower through hole A and a lower pin hole A corresponding to the eccentric pin A are respectively provided on the pressure sensor and the front of the slide. The positioning pin A passes through the upper through hole A and is installed in the upper pin hole A, and the eccentric pin A passes through the lower through hole A and is installed in the lower pin hole A. The pressure sensor is connected to the slide via the positioning pin A and the eccentric pin A.

[0021] After installing the positioning pin A, when the eccentric pin A is rotated to different positions, the pressure sensor can be deflected around the positioning pin A due to the action of the eccentric pin A, and then the R-axis motor connected to the pressure sensor is adjusted to deflect, thereby achieving fine-tuning of the R-axis of the R-axis motor.

[0022] As an embodiment, the ZR axis module with adjustable R axis also includes a positioning pin B, an eccentric pin B and a mounting table arranged on the side of the shell. The mounting table is used to install the ZR axis module to the corresponding workstation. The mounting surface of the mounting table is perpendicular to the front of the slide table. An upper through hole B and an upper pin hole B corresponding to the positioning pin B are respectively provided on the shell and the mounting surface of the mounting table. A lower through hole B and a lower pin hole B corresponding to the eccentric pin B are respectively provided on the shell and the mounting surface of the mounting table. The positioning pin B passes through the upper through hole B and is installed in the upper pin hole B. The eccentric pin B passes through the lower through hole B and is installed in the lower pin hole B. The shell is connected to the mounting table through the positioning pin B and the eccentric pin B.

[0023] After installing the positioning pin B, when rotating the eccentric pin B to different positions, the housing can be deflected around the positioning pin B due to the action of the eccentric pin B, thereby adjusting the deflection of the R-axis motor on the housing, thereby achieving fine-tuning of the R-axis of the R-axis motor.

[0024] As an implementation mode, the eccentric pin A adopts an eccentric pin with unequal sizes at both ends or an eccentric pin with equal sizes at both ends, and the eccentric pin B adopts an eccentric pin with unequal sizes at both ends or an eccentric pin with equal sizes at both ends.

[0025] As an implementation method, the mounting table is parallel to the R-axis motor.

[0026] As an implementation method, a slide rail corresponding to the slide table is further provided on the housing. The slide table and the slide rail cooperate to improve the stability of the R-axis motor moving along the Z-axis.

[0027] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A ZR axis module with adjustable R axis, comprising a Z axis motor, an R axis motor, a housing, a slide table, and a pressure sensor, characterized in that: It also includes a positioning pin A and an eccentric pin A. The Z-axis motor is arranged on the shell, the slide is connected to the mover of the Z-axis motor, the pressure sensor is connected to the R-axis motor, and an upper through hole A and an upper pin hole A corresponding to the positioning pin A are respectively provided on the pressure sensor and the front of the slide, and a lower through hole A and a lower pin hole A corresponding to the eccentric pin A are respectively provided on the pressure sensor and the front of the slide. The positioning pin A passes through the upper through hole A and is installed in the upper pin hole A, and the eccentric pin A passes through the lower through hole A and is installed in the lower pin hole A. The pressure sensor is connected to the slide via the positioning pin A and the eccentric pin A accordingly.

2. The R-axis adjustable ZR axis module according to claim 1, characterized in that: It also includes a positioning pin B, an eccentric pin B and a mounting platform arranged on the side of the shell. The mounting surface of the mounting platform is perpendicular to the front of the slide table. An upper through hole B and an upper pin hole B corresponding to the positioning pin B are respectively provided on the shell and the mounting surface of the mounting platform. A lower through hole B and a lower pin hole B corresponding to the eccentric pin B are respectively provided on the shell and the mounting surface of the mounting platform. The shell is connected to the mounting platform via the positioning pin B and the eccentric pin B.

3. The R-axis adjustable ZR axis module as claimed in claim 2, characterized in that: The eccentric pin A adopts an eccentric pin with unequal sizes at both ends or an eccentric pin with equal sizes at both ends, and the eccentric pin B adopts an eccentric pin with unequal sizes at both ends or an eccentric pin with equal sizes at both ends.

4. The R-axis adjustable ZR axis module as claimed in claim 2, characterized in that: The mounting table is parallel to the R-axis motor.

5. The R-axis adjustable ZR axis module according to claim 1, characterized in that: The shell body is also provided with a slide rail corresponding to the slide platform.

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