Heat recycling system for cleaning furnace body bell jar

Abstract

The utility model discloses a heat recycling system for cleaning a bell jar of a furnace body, which belongs to the technical field of heat recycling in polycrystalline silicon production and comprises a cleaning device, a drying device and a three-dimensional tank cleaning device. Water outlets of the alkali washing tank, the demineralized water tank and the pure water tank are connected with a heat exchanger I through pipelines and booster pumps respectively, the heat exchanger I is connected with a three-dimensional tank washing device through a pipeline I and a plunger pump, the drying device comprises a heat exchanger II, the heat exchanger II is connected with the three-dimensional tank washing device through a pipeline II, and medium inlets of the heat exchanger I and the heat exchanger II are connected with a steam pipeline. Medium outlets of the heat exchanger I and the heat exchanger II are connected with an inlet of a water return tank through pipelines, a water purification mechanism is arranged in the water return tank, and the water return tank is connected with an alkaline washing tank and / or a demineralized water tank through a pipeline III. The production cost is saved.

Description

Technical Field

[0001] The utility model belongs to the technical field of heat recovery and utilization in polysilicon production, and in particular relates to a heat recovery and utilization system for cleaning a furnace bell. Background Art

[0002] With the rapid development of polysilicon production in recent years, the production process has become more mature and can be scaled up. The price of crystalline silicon has gradually declined. Production companies are considering continuously optimizing the production process, improving production efficiency, shortening non-production time, reducing energy consumption, improving product quality, and reducing production costs to ensure corporate profits and ultimately win the market.

[0003] For the cleaning system of the bell jar of the reduction furnace, the technology currently used is the cleaning system disclosed in the utility model patent with application number "202021578118.X" and name "A cleaning system for a polysilicon reduction furnace" published on April 30, 2021. The cleaning process flow is:

[0004] (1) Pre-cleaning of desalted water: Open the desalted water inlet shut-off valve → Stand still, exhaust the pipeline → Start the high-pressure pump to exhaust → Open the high-pressure pump outlet shut-off valve → Open the sewage shut-off valve of the cleaning base → Start the high-pressure pump → Pre-clean for 10 to 20 minutes → Stop the pump → Close the desalted water inlet shut-off valve.

[0005] (2) High-purity water cleaning:

[0006] Open the high-purity water inlet shut-off valve → start the high-pressure pump → clean for 30 to 50 minutes → stop the pump → close the pure water inlet and outlet shut-off valves and the sewage shut-off valve.

[0007] (3) Hot air drying:

[0008] Hot water regulating valve TIC controls the air supply temperature to 70~85℃ → start the fan to supply air at 4500~5000Nm 3 / h→Dry for 25-40 minutes→Stop the fan→Close the hot water regulating valve.

[0009] In the traditional technology, high-pressure desalted water and high-purity water are used to clean the bell jar, but the cleaning of the bell jar is not thorough. Therefore, in the subsequent process, it is considered to add alkali solution to clean the bell jar on the basis of the existing equipment, and then use high-pressure desalted water and high-purity water to further clean the bell jar. After investigation, it is found that the cleaning effect of the bell jar is better when heated alkali solution is used to clean the bell jar, but the previous equipment can only meet the transportation requirements of the cleaning liquid below 70°C. Too high a temperature will significantly shorten the life of the equipment. In addition, the traditional technology uses a heating furnace to directly heat the air, and then uses the heated hot air to dry the bell jar, which makes the heat consumption of the entire system large, making the cost high. Utility Model Content

[0010] The utility model aims to solve the problem of large heat consumption and heat waste in the cleaning process of the reduction furnace bell in the production of polysilicon in the prior art, and at the same time optimizes the cleaning system, shortens the cleaning time, and achieves the purpose of reducing production costs.

[0011] In order to achieve the above-mentioned invention object, the technical solution of the utility model is as follows:

[0012] A heat recovery and utilization system for cleaning a furnace bell jar comprises a cleaning device, a drying device and a three-dimensional tank washing device. The cleaning device comprises an alkali washing tank, a desalted water tank, a pure water tank and a return water tank. The water outlets of the alkali washing tank, the desalted water tank and the pure water tank are respectively connected to the material inlet of a heat exchanger I through pipelines and a booster pump. The material outlet of the heat exchanger I is connected to the water inlet of the three-dimensional tank washing device through pipeline I and a plunger pump. The drying device comprises a heat exchanger II for heating air. The hot air outlet of the heat exchanger II is connected to the air inlet of the three-dimensional tank washing device through pipeline II. The medium inlets of the heat exchangers I and II are connected to a steam pipeline. The medium outlets of the heat exchangers I and II are connected to the liquid inlet of the return water tank through a pipeline. A water purification mechanism is provided in the return water tank. The clean water outlet of the return water tank is connected to the alkali washing tank and / or the desalted water tank through pipeline III.

[0013] Furthermore, the heat exchanger I is a shell-and-tube heat exchanger.

[0014] Furthermore, the heat exchanger II is a shell-and-tube heat exchanger with fins.

[0015] Furthermore, the drying device also includes a primary filter mechanism and an origami high-efficiency filter mechanism, and the primary filter mechanism and the origami high-efficiency filter mechanism are installed at the air inlet II end of the heat exchanger II.

[0016] Furthermore, the sealing ring of the plunger pump is a sealing ring made of PEEK material.

[0017] Furthermore, a basket filter with a filtration accuracy of 30 μm is provided on the pipeline between the booster pump and the heat exchanger I.

[0018] Furthermore, a filter I with a filtration accuracy of 60 μm is provided on the pipeline between the plunger pump and the water inlet of the three-dimensional tank washing device.

[0019] Furthermore, the water purification mechanism includes an inclined tube sedimentation area and a fine filter plate with a filtration accuracy of 120 μm.

[0020] Furthermore, the alkali washing tank is provided with a grille bucket for adding caustic soda flakes, and the alkali washing tank is also provided with a stirring mechanism.

[0021] Beneficial effects of the utility model:

[0022] 1. In the utility model, heat exchangers I and II through which medium-steam is passed are used to heat washing liquid (including alkali solution, desalted water and pure water) and air respectively. The condensed water obtained after heat exchange has a certain amount of heat. This part of the condensed water with a certain amount of heat is recovered in the return water tank at the lower part of the cleaning device. The fluid passes through the water purification mechanism to intercept impurities therein to obtain relatively pure clean water, and the clean water is sent to the alkali washing tank and / or the desalted water tank through the clean water outlet and pipeline III as their feed water. In this way, the steam usage of heat exchanger I can be reduced, the energy consumed in obtaining steam can be reduced, and the discharge of wastewater can also be reduced, thereby achieving the purpose of energy saving and emission reduction.

[0023] 2. In the present invention, both heat exchanger I and heat exchanger II are shell-and-tube heat exchangers, which have better temperature resistance than existing plate heat exchangers and can allow higher temperature logistics to pass through. In addition, heat exchanger II is a shell-and-tube heat exchanger with fins, which can improve heat conduction efficiency and raise the air to the expected temperature in a short time.

[0024] 3. In the utility model, the drying device also includes a primary filter mechanism and an origami high-efficiency filter mechanism, which are installed at the air inlet II end of the heat exchanger II. The primary filter mechanism and the origami high-efficiency filter mechanism can ensure that the gas dried by the bell jar is clean gas, and prevent impurities in the air from contaminating the bell jar.

[0025] 4. In the present invention, the sealing ring of the plunger pump is a sealing ring made of PEEK material, so that the plunger pump has better temperature resistance and can allow the cleaning liquid with a temperature of up to 120°C to pass through.

[0026] 5. In the utility model, a basket filter with a filtration accuracy of 30μm is installed on the pipeline between the booster pump and the heat exchanger I, which can intercept a small amount of undissolved lumps and other impurities in the cleaning liquid to prevent them from entering the rear heat exchanger I and affecting its normal operation. Most of the impurities have been intercepted at the front end of the heat exchanger I, and a filter I with a filtration accuracy of 60μm is installed on the pipeline between the plunger pump and the water inlet of the three-dimensional tank washing device to further filter the logistics and remove particles in the logistics to prevent them from entering the rear three-dimensional tank washing device and affecting the normal operation of the system.

[0027] 6. In the utility model, the water purification mechanism includes an inclined tube sedimentation area and a fine filter plate with a filtration accuracy of 120μm. The inclined tube sedimentation area first performs preliminary precipitation on the recovered condensed water. This structure can extend the residence time of the fluid in this area and achieve a better impurity removal effect. The fine filter plate further filters the clear liquid after sedimentation, and the obtained clean water can be used as feed water for the alkali washing tank and / or the desalted water tank.

[0028] 7. In the utility model, a grid bucket for adding caustic soda flakes is provided in the caustic soda washing tank, and a stirring mechanism is also provided in the caustic soda washing tank to avoid problems such as uneven addition of caustic soda flakes, easy formation of lumps, unstable alkali solution concentration caused by insufficient dissolution, and clogging / corrosion of delivery pipes and delivery pumps due to undissolved lumps. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a structural schematic diagram of the utility model.

[0030] Figure 2 It is a structural schematic diagram of another implementation method.

[0031] Figure 3 It is a structural schematic diagram of yet another implementation method.

[0032] Figure 4 It is a structural schematic diagram of a preferred embodiment of the cleaning device.

[0033] Among them, 1. Cleaning device; 2. Drying device; 3. Three-dimensional tank washing device; 4. Booster pump; 5. Heat exchanger I; 6. Pipeline I; 7. Plunger pump; 8. Pipeline II; 9. Steam pipeline; 10. Water purification mechanism; 11. Basket filter; 12. Filter I; 13. Grille bucket; 14. Stirring mechanism; 15. Pipeline III; 16. Pipeline IV; 17. Pipeline V; 18. Pipeline VI; 19. Bell jar; 20. Temperature sensor; 21. Fan; 22. Desalted water supply pipeline I; 23. Desalted water supply pipeline I; 24. Ultrapure water supply pipeline; 25. Liquid level meter; 1.1. Alkaline washing trough; 1.2, desalted water trough; 1.3, pure water trough; 1.4, return water trough; 2.1, heat exchanger II; 2.2, primary filter mechanism; 2.3, origami high-efficiency filter mechanism; 3.1, water inlet; 3.2, air inlet; 5.1, material inlet; 5.2, material outlet; 5.3, medium inlet I; 5.4, medium outlet I; 10.1, inclined tube settling area; 10.2, fine filter plate; 1.4.1, liquid inlet; 1.4.2, clean water outlet; 2.1.1, hot air outlet; 2.1.2, medium inlet II; 2.1.3, medium outlet II; 2.1.4, air inlet II. DETAILED DESCRIPTION

[0034] The present invention is further described in detail below in conjunction with the embodiments, but the implementation manner of the present invention is not limited thereto.

[0035] Example 1

[0036] The heat recovery system for cleaning the furnace bell belongs to the technical field of heat recovery in polysilicon production, including a cleaning device 1, a drying device 2 and a three-dimensional tank washing device 3. Figure 1The cleaning device 1 includes an alkali washing tank 1.1, a desalted water tank 1.2, a pure water tank 1.3 and a return water tank 1.4. The water outlets of the alkali washing tank 1.1, the desalted water tank 1.2 and the pure water tank 1.3 are connected to the material inlet 5.1 of the heat exchanger Ⅰ5 through pipelines Ⅳ16, pipelines Ⅴ17, pipelines Ⅵ18 and booster pumps 4 respectively. The material outlet 5.2 of the heat exchanger Ⅰ5 is connected to the water inlet 3.1 of the three-dimensional tank washing device 3 through pipelines Ⅰ6 and plunger pumps 7. The drying device 2 includes a heat exchanger Ⅱ2.1 for heating the air, and a hot air outlet 2 of the heat exchanger Ⅱ2.1. .1.1 The air inlet 3.2 of the three-dimensional tank washing device 3 is connected through pipeline II8, the medium inlet I5.3 and medium inlet II2.1.2 of heat exchanger I5 and heat exchanger II2.1 are connected to steam pipeline 9, the medium outlet I5.4 and medium outlet II2.1.3 of heat exchanger I5 and heat exchanger II2.1 are connected to the liquid inlet 1.4.1 of the return water tank 1.4 through pipelines, a water purification mechanism 10 is provided in the return water tank 1.4, and the clean water outlet 1.4.2 of the return water tank 1.4 is connected to the alkali washing tank 1.1 and / or the desalted water tank 1.2 through pipeline III15.

[0037] In this embodiment, the alkaline washing tank 1.1, the desalted water tank 1.2, and the pure water tank 1.3 are respectively replenished with new cleaning liquid through the desalted water supply pipeline I22, the desalted water supply pipeline I23, and the ultrapure water supply pipeline 24 to meet the demand for cleaning liquid when the bell jar 19 is cleaned.

[0038] Preferably, the heat exchanger I5 is a shell-and-tube heat exchanger.

[0039] Preferably, the heat exchanger II2.1 is a shell-and-tube heat exchanger with fins.

[0040] Preferably, the sealing ring of the plunger pump 7 is a sealing ring made of PEEK material.

[0041] When cleaning the reduction furnace bell jar 19, it is sequentially subjected to the steps of alkali washing, desalted water washing, ultrapure water washing, and finally drying.

[0042] Taking alkali washing as an example, the alkali solution in the alkali washing tank 1.1 is sent from its outlet to the booster pump 4 through the pipeline IV16, the alkali solution is pressurized by the booster pump 4 and sent to the heat exchanger I5, the alkali solution is heated by the heat exchanger I5 and then sent to the plunger pump 7 through the pipeline I6, the alkali solution after the pressure increase by the plunger pump 7 is used to alkali wash the bell jar 19 of the reduction furnace, generally washed 3 to 5 times, each washing for 1000 to 1200 seconds, in this process, the condensed water generated by the heat exchanger I5 is sent back to the return water tank 1.4, the recovered condensed water is filtered and purified by the water purification mechanism 10 to obtain pure clean water, which is used as the feed liquid of the alkali washing tank 1.1 and the desalted water tank 1.2; similarly, the desalted water is washed 2 to 4 times, each washing for 600 to 800 seconds; the ultrapure water is washed 4 to 6 times, each washing for 300 to 500 seconds.

[0043] After the ultrapure water washing is completed, the drying device 2 is used to heat the air to about 130°C, and then the hot air is dried in the bell jar 19. The heat exchanger II 2.1 of the drying device 2 uses steam to heat the air, and the obtained condensed water is sent back to the return water tank 1.4. The recovered condensed water is filtered and purified by the water purification mechanism 10 to obtain pure clean water, which is used as the replenishing liquid of the alkali washing tank 1.1 and the desalted water tank 1.2. This can reduce the steam usage of the heat exchanger I 5, reduce the energy consumed when obtaining steam, and also reduce the discharge of wastewater, achieving the purpose of energy saving and emission reduction.

[0044] Example 2

[0045] This embodiment is a further optimization of the embodiment 1, the difference is that the drying device 2 also includes a primary filter mechanism 2.2 and a folded paper high-efficiency filter mechanism 2.3, the primary filter mechanism 2.2 and the folded paper high-efficiency filter mechanism 2.3 are installed at the air inlet Ⅱ2.1.4 end of the heat exchanger Ⅱ2.1, reference Figure 2 shown.

[0046] Example 3

[0047] The difference between this embodiment and embodiment 1-2 is that, Figure 3 A basket filter 11 with a filtration accuracy of 30 μm is provided on the pipeline between the booster pump 4 and the heat exchanger I5.

[0048] Example 4

[0049] The difference between this embodiment and embodiments 1-3 is that, Figure 3 A filter Ⅰ12 with a filtration accuracy of 60 μm is provided on the pipeline between the plunger pump 7 and the water inlet 3.1 of the three-dimensional tank washing device 3.

[0050] Example 5

[0051] The difference between this embodiment and embodiments 1-4 is that, Figure 4 The water purification mechanism includes an inclined tube sedimentation area 10.1 and a fine filter plate 10.2 with a filtration accuracy of 120 μm.

[0052] Preferably, the alkali washing tank is provided with a grille bucket 13 for adding caustic soda flakes, and the alkali washing tank is also provided with a stirring mechanism 14.

[0053] Example 6

[0054] To facilitate the public to understand the present scheme, the present scheme takes a heat recovery system for cleaning a furnace bell jar in a specific furnace bell jar cleaning system as an example to further illustrate the present scheme.

[0055] Specifically, refer to Figure 3 , 4, including a cleaning device 1, a drying device 2 and a three-dimensional tank washing device 3, the cleaning device 1 includes an alkali washing tank 1.1, a desalted water tank 1.2, a pure water tank 1.3 and a return water tank 1.4, the water outlets of the alkali washing tank 1.1, the desalted water tank 1.2 and the pure water tank 1.3 are connected to the material inlet 5.1 of the heat exchanger Ⅰ5 through pipelines Ⅳ16, pipelines Ⅴ17, pipelines Ⅵ18 and booster pumps 4 respectively, the material outlet 5.2 of the heat exchanger Ⅰ5 is connected to the water inlet 3.1 of the three-dimensional tank washing device 3 through pipelines Ⅰ6 and plunger pumps 7, the drying device 2 includes a heat exchanger Ⅱ2.1 for heating the air, and the heat exchanger Ⅱ2.2 is connected to the material inlet 5.1 of the heat exchanger Ⅰ5 through pipelines Ⅰ6 and plunger pumps 7. The hot air outlet 2.1.1 of the heat exchanger II 2.1 is connected to the air inlet 3.2 of the three-dimensional tank washing device 3 through the pipeline II 8, the medium inlet I5.3 and the medium inlet II 2.1.2 of the heat exchanger I 5 and the heat exchanger II 2.1 are connected to the steam pipeline 9, the medium outlet I5.4 and the medium outlet II 2.1.3 of the heat exchanger I 5 and the heat exchanger II 2.1 are connected to the liquid inlet 1.4.1 of the return water tank 1.4 through a pipeline, the return water tank 1.4 is provided with a water purification mechanism 10, and the clean water outlet 1.4.2 of the return water tank 1.4 is connected to the alkali washing tank 1.1 and / or the desalted water tank 1.2 through the pipeline III 15.

[0056] In this embodiment, the alkaline washing tank 1.1, the desalted water tank 1.2, and the pure water tank 1.3 are respectively replenished with new cleaning liquid through the desalted water supply pipeline I22, the desalted water supply pipeline I23, and the ultrapure water supply pipeline 24 to meet the demand for cleaning liquid when the bell jar 19 is cleaned.

[0057] In this embodiment, the heat exchanger I5 is a shell-and-tube heat exchanger; the heat exchanger II2.1 is a shell-and-tube heat exchanger with fins.

[0058] In this embodiment, the drying device 2 further comprises a primary filtering mechanism 2.2 and a folded paper high efficiency filtering mechanism 2.3, and the primary filtering mechanism 2.2 and the folded paper high efficiency filtering mechanism 2.3 are installed at the air inlet II2.1.4 end of the heat exchanger II2.1.

[0059] In this embodiment, the sealing ring of the plunger pump 7 is a sealing ring made of PEEK material.

[0060] In this embodiment, a basket filter 11 with a filtration accuracy of 30 μm is provided on the pipeline between the booster pump 4 and the heat exchanger I5.

[0061] In this embodiment, a filter I12 with a filtration accuracy of 60 μm is provided on the pipeline between the plunger pump 7 and the water inlet 3.1 of the three-dimensional tank washing device 3.

[0062] In this embodiment, the water purification mechanism includes an inclined tube sedimentation area 10.1 and a fine filter plate 10.2 with a filtration accuracy of 120 μm.

[0063] In this embodiment, a grille bucket 13 for adding caustic soda flakes is provided in the caustic washing tank, and a stirring mechanism 14 is also provided in the caustic washing tank.

[0064] Cleaning bell jar 19, reference Figure 3 , 4 , comprising the following steps:

[0065] ①Alkaline washing

[0066] The alkali solution in the alkali washing tank 1.1 is sent from its outlet to the booster pump 4 through the pipeline IV16. The alkali solution is pressurized by the booster pump 4 and sent to the heat exchanger I5. The alkali solution is heated to 50-120°C by the heat exchanger I5 and then sent to the plunger pump 7 through the pipeline I6. The alkali solution pressurized by the plunger pump 7 is used to perform alkali washing on the bell jar 19 of the reduction furnace. Generally, the washing is performed 3-5 times, and each washing takes 1000-1200 seconds. In this process, the condensed water generated by the heat exchanger I5 is sent back to the return water tank 1.4. The recovered condensed water is filtered and purified by the water purification mechanism 10 to obtain pure clean water. The clean water is used as the replenishing liquid of the alkali washing tank 1.1 and the desalted water tank 1.2.

[0067] ② Desalted water washing

[0068] The desalted water in the desalted water tank 1.2 is sent from its outlet to the booster pump 4 through the pipeline V17. The desalted water is boosted by the booster pump 4 and sent to the heat exchanger I5. The alkali solution is heated to 50-120°C by the heat exchanger I5 and then sent to the plunger pump 7 through the pipeline I6. The desalted water boosted by the plunger pump 7 is used to wash the reduction furnace bell 19, generally 2-4 times, each time for 600-800 seconds. In this process, the condensed water generated by the heat exchanger I5 is sent back to the return water tank 1.4. The recovered condensed water is filtered and purified by the water purification mechanism 10 to obtain pure clean water, which is used as the replenishing liquid of the alkali washing tank 1.1 and the desalted water tank 1.2;

[0069] ③Ultrapure water washing

[0070] The ultrapure water in the pure water tank 1.3 is sent from its outlet to the booster pump 4 through the pipeline VI 18. The ultrapure water is boosted by the booster pump 4 and sent to the heat exchanger I5. The ultrapure water is heated to 50-120°C by the heat exchanger I5 and then sent to the plunger pump 7 through the pipeline I6. The ultrapure water boosted by the plunger pump 7 is used to perform alkali washing on the bell jar 19 of the reduction furnace. Generally, the washing is performed 4-6 times, and each washing is 300-500 ss. In this process, the condensed water generated by the heat exchanger I5 is sent back to the return water tank 1.4. The recovered condensed water is filtered and purified by the water purification mechanism 10 to obtain pure clean water. The clean water is used as the feed liquid of the alkali washing tank 1.1 and the desalted water tank 1.2.

[0071] ④ Drying

[0072] After the ultrapure water washing is completed, the drying device 2 is used to heat the air to about 130°C, and then the hot air is dried in the bell jar 19. The drying device 2 also includes a primary filter mechanism 2.2 and a paper folding high-efficiency filter mechanism 2.3 for air purification. The purified air is then transported to the heat exchanger II 2.1 of the drying device 2 by the fan 21 for heating. In this embodiment, steam is used to heat the air, and the obtained condensed water is sent back to the return water tank 1.4. The recovered condensed water is filtered and purified by the water purification mechanism 10 to obtain pure clean water, which is used as the replenishing liquid of the alkali washing tank 1.1 and the desalted water tank 1.2. In this way, the steam usage of the heat exchanger I5 can be reduced, the energy consumed when obtaining steam can be reduced, and the discharge of wastewater can also be reduced, thereby achieving the purpose of energy saving and emission reduction.

Claims

1. A heat recovery system for cleaning a furnace bell jar, comprising a cleaning device (1), a drying device (2) and a three-dimensional tank washing device (3), characterized in that: The cleaning device (1) comprises an alkali washing tank (1.1), a desalted water tank (1.2), a pure water tank (1.3) and a return water tank (1.4). The water outlets of the alkali washing tank (1.1), the desalted water tank (1.2) and the pure water tank (1.3) are connected to the material inlet (5.1) of the heat exchanger I (5) through pipelines and a booster pump (4), respectively. The material outlet (5.2) of the heat exchanger I (5) is connected to the water inlet (3.1) of the three-dimensional tank washing device (3) through pipeline I (6) and a plunger pump (7). The drying device (2) comprises a heat exchanger II (2.1) for heating air. The heat exchanger II (2 The hot air outlet (2.1.1) of the heat exchanger (1.1) is connected to the air inlet (3.2) of the three-dimensional tank washing device (3) through the pipeline II (8), the medium inlet of the heat exchanger I (5) and the heat exchanger II (2.1) are connected to the steam pipeline (9), the medium outlet of the heat exchanger I (5) and the heat exchanger II (2.1) are connected to the liquid inlet (1.4.1) of the return water tank (1.4) through the pipeline, the return water tank (1.4) is provided with a water purification mechanism (10), and the clean water outlet (1.4.2) of the return water tank (1.4) is connected to the alkali washing tank (1.1) and / or the desalted water tank (1.2) through the pipeline III (15).

2. The heat recovery system for cleaning the furnace bell jar according to claim 1, characterized in that: The heat exchanger I (5) is a shell-and-tube heat exchanger.

3. The heat recovery system for cleaning the furnace bell jar according to claim 1, characterized in that: The heat exchanger II (2.1) is a shell-and-tube heat exchanger with fins.

4. The heat recovery system for cleaning the furnace bell jar according to claim 1, characterized in that: The drying device (2) further comprises a primary filtering mechanism (2.2) and a paper folding high-efficiency filtering mechanism (2.3), wherein the primary filtering mechanism (2.2) and the paper folding high-efficiency filtering mechanism (2.3) are installed at the air inlet II (2.1.4) end of the heat exchanger II (2.1).

5. The heat recovery system for cleaning the furnace bell jar according to claim 1, characterized in that: The sealing ring of the plunger pump (7) is a sealing ring made of PEEK material.

6. The heat recovery system for cleaning the furnace bell jar according to claim 1, characterized in that: A basket filter (11) with a filtration accuracy of 30 μm is provided on the pipeline between the booster pump (4) and the heat exchanger I (5).

7. The heat recovery system for cleaning the furnace bell jar according to claim 1, characterized in that: A filter I (12) with a filtration accuracy of 60 μm is provided on the pipeline between the plunger pump (7) and the water inlet (3.1) of the three-dimensional tank washing device (3).

8. The heat recovery system for cleaning the furnace bell jar according to claim 1, characterized in that: The water purification mechanism comprises an inclined tube sedimentation area (10.1) and a fine filter plate (10.2) with a filtration accuracy of 120 μm.

9. The heat recovery system for cleaning the furnace bell jar according to claim 1, characterized in that: The alkali washing tank is provided with a grille bucket (13) for adding caustic soda flakes, and the alkali washing tank is also provided with a stirring mechanism (14).

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