Linear evaporation source plugging dredging device

Abstract

The utility model discloses a blockage dredging device for a linear evaporation source, and relates to the technical field of coating equipment. Comprising an evaporation source body and a dredging mechanism, the dredging mechanism is arranged in the evaporation source body and used for automatically dredging the interior of the evaporation source body, the dredging mechanism comprises a rotating rod, the rotating rod is arranged in the evaporation source body, and a mounting base and an air hole base are arranged at the positions, close to the two ends, in the evaporation source body; the two ends of the rotating rod are rotationally connected to the bottom end and the top end of the mounting base respectively, vortex blades are mounted on the surface, close to the middle, of the rotating rod, scraping strips are arranged between the two ends of the surface of the rotating rod, and the surfaces of the scraping strips are movably connected to the inner wall surface of the evaporation source. Through the arrangement of the dredging mechanism, dredging and film coating can be carried out at the same time when the equipment is used, the situation that the interior of the evaporation source body is thicker due to long-time work is prevented, follow-up cleaning and treatment on the evaporation source body are facilitated, and the practicability and convenience of the equipment are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a linear evaporation source plugging and unblocking device. Background Art

[0002] The linear evaporation source blockage dredging device with the authorization announcement number "CN206570392U" comprises a plurality of airflow branches arranged in the evaporation chamber and corresponding to the nozzles of the linear evaporation source, each of which is provided with a sub-control valve; the nozzles of the linear evaporation source are provided with pressure sensors; the airflow branches are connected to a gas supply main pipe, the gas supply main pipe extends to the outside of the evaporation chamber and is connected to a high-pressure gas source, and the gas supply main pipe is provided with a main control valve. The utility model can timely detect and solve the nozzle blockage problem in the production process, greatly saving the time for handling the problem and improving production efficiency.

[0003] The device can solve the problem of nozzle blockage in the production process, but when the device senses the occurrence of blockage through the pressure sensor, it processes and operates it. Since the blockage requires a long time to run and work, there will be more attachments in the steam source body, which cannot be effectively removed by high-pressure gas, resulting in reduced spraying fluency and extended use time of the equipment. It is impossible to clean the evaporation source body while spraying, which makes the subsequent cleaning process more troublesome, resulting in low practicality and applicability of the equipment. For this reason, the utility model proposes a new solution. Utility Model Content

[0004] The utility model aims to provide a linear evaporation source blocking and unblocking device to solve the problems raised in the above-mentioned background technology.

[0005] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: a linear evaporation source plugging and unblocking device, comprising:

[0006] Evaporation source body;

[0007] A dredging mechanism is arranged inside the evaporation source body and is used for automatically dredging the inside of the evaporation source body;

[0008] The dredging agencies include:

[0009] A rotating rod is arranged inside the evaporation source body, and a mounting seat and an air hole seat are arranged near both ends inside the evaporation source respectively. One end of the rotating rod is rotatably connected to the top of the air hole seat, and the other end of the rotating rod is movably connected to the bottom of the mounting seat. A vortex blade is installed near the middle of the rotating rod surface, and a scraper strip is arranged between the two ends of the rotating rod surface, and the scraper strip surface is movably connected to the inner wall surface of the evaporation source.

[0010] Preferably, a placement plate is provided at the top of the mounting seat, a connecting piece is provided between the mounting seat and the placement plate, the connecting piece is used for limiting the position between the mounting seat and the placement plate, and the mounting seat and the evaporation source are fixedly connected near the top.

[0011] Preferably, the connecting member comprises:

[0012] A plurality of positioning protrusions, the top of each positioning protrusion is fixedly connected to the bottom of the placement plate, a positioning hole matching the positioning protrusion is opened at the top of the mounting seat, and the surface of each positioning protrusion is slidably connected to the inside of the positioning protrusion.

[0013] Preferably, the top of the pore seat is movably connected to the inside of the evaporation source body near the bottom, a connecting pore penetrating the bottom is provided at the top of the pore seat, a threaded groove is provided on the inner wall of the evaporation source body near the bottom, a threaded barrel is threadedly connected to one end of the evaporation source body near the threaded groove, the threaded barrel and the threaded groove are adapted to each other, a plurality of pads are fixedly connected to the top of the threaded barrel, and the top of each pad is movably connected to the bottom end of the pore seat.

[0014] Preferably, a plurality of air inlet holes penetrating the interior are provided on the arc-shaped surface around the mounting seat, and the top of the mounting seat is connected to the interior of the evaporation source.

[0015] Preferably, a hexagonal block is fixedly connected to the bottom end of the screw-connected barrel, the bottom end of the hexagonal block is communicated with the inside of the screw-connected barrel, and the top end of the hexagonal block is movably connected to the evaporation source body.

[0016] Compared with the prior art, the beneficial effects of the utility model are:

[0017] The linear evaporation source blocking and unclogging device, through the provided unclogging mechanism, can simultaneously perform unclogging and coating when the device is in use, thereby preventing the occurrence of thick adhesion inside the evaporation source body due to long-term work, facilitating subsequent cleaning and processing, and increasing the practicality and convenience of the device.

[0018] At the same time, the screw-connected barrel can be used to conveniently remove the dredging device, which facilitates the cleaning of the dredging device, increases the convenience of the equipment during use, reduces the limitations of the equipment, and increases the practicality and applicability of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the adaption structure of the screw-connected cylinder and the evaporation source body of the utility model;

[0020] Figure 2 It is a schematic diagram of the overall cross-sectional structure of the utility model;

[0021] Figure 3 It is a schematic diagram of the bottom structure of the utility model.

[0022] In the figure: 1. Evaporation source body; 2. Mounting seat; 3. Positioning hole; 4. Positioning protrusion; 5. Rotating rod; 6. Scraper strip; 7. Air hole seat; 8. Air hole; 9. Vortex blade; 10. Threaded groove; 11. Spacer block; 12. Screw-on cylinder; 13. Hexagonal block. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Vacuum coating technology equipment occupies an increasingly important position in modern new materials, new energy, metallurgy, chemical industry, aerospace and other fields. Vacuum transmission coating technology equipment adopts a saturated vapor pressure environment mode, uses an evaporation source plugging and unblocking device, and adopts a saturated gas component (including target material) step-by-step graded diversion mode, with equal pressure and uniform passage (similar to passing through a sieve, ensuring that the molecular particles passing through are uniform, equal speed and pressure) through the pores to ensure the uniformity of coating, and the rate is about ten times higher than that of traditional sputtering. It also innovatively adopts independently designed vacuum high-temperature large-size ceramic heater technology, and can rearrange the coating process by simply replacing the cavity cover according to different processes. The equipment of this project can also replace the coating raw materials according to customer needs, and can plate organic, inorganic, and even metal materials. It has a wide range of applications. The evaporation source plugging and unblocking device provided by the utility model is specifically used to reduce the blockage of the evaporation source when the equipment is in use.

[0025] like Figure 1 - Figure 3 As shown, the utility model provides a technical solution: a linear evaporation source blocking and unblocking device, comprising:

[0026] An evaporation source body 1 and a dredging mechanism are provided inside the evaporation source body 1 for automatically dredging the inside of the evaporation source body 1. The dredging mechanism comprises a rotating rod 5, which is provided inside the evaporation source body 1. A mounting seat 2 and an pore seat 7 are provided near both ends of the evaporation source. One end of the rotating rod 5 is rotatably connected to the top of the pore seat 7, and the other end of the rotating rod 5 is movably connected to the bottom end 2 of the mounting seat. A vortex blade 9 is installed near the middle of the surface of the rotating rod 5. A scraper strip 6 is provided between the two ends of the surface of the rotating rod 5, and the surface of the scraper strip 6 is movably connected to the inner wall surface of the evaporation source.

[0027] It should be noted that, through the setting of this structure, the device can effectively remove the attachments on the inner wall of the evaporation source body 1 when in use, ensuring that the device can achieve a good cleaning effect when in use. When in use, the device drives the vortex blade 9 through the downwardly moving steam, and the rotation of the vortex blade 9 drives the rotating rod 5 to rotate. The rotation of the rotating rod 5 drives the scraper 6 to scrape off the coating material attached to the inside of the evaporation source body 1, preventing the accumulation of too much material and causing blockage, thereby increasing the use effect of the device when in use, and increasing the practicability and applicability of the device.

[0028] like Figure 2 As shown, a placement plate is provided at the top of the mounting seat 2, and a connecting piece is provided between the mounting seat 2 and the placement plate. The connecting piece is used to limit the mounting seat 2 and the placement plate. The mounting seat 2 and the evaporation source are fixedly connected near the top. The connecting piece includes a plurality of positioning protrusions 4, and the top of each positioning protrusion 4 is fixedly connected to the bottom end of the placement plate. A positioning hole 3 matching the positioning protrusion 4 is provided at the top of the mounting seat 2, and the surface of each positioning protrusion 4 is slidably connected to the inside of the positioning protrusion 4. A plurality of air inlet holes penetrating the inside are provided on the arc-shaped surface around the mounting seat 2, and the top of the mounting seat 2 is connected to the inside of the evaporation source.

[0029] It should be noted that, through the setting of this structure, the coating material can be placed inside the device when the device is in use for stable coating, and the connecting parts arranged in the device are used to ensure the stability between the placement plate and the mounting seat 2, ensuring that the device can achieve good use stability when in use. The placement plate is used to conveniently place the material to be coated, which facilitates coating, thereby increasing the practicality and applicability of the device.

[0030] like Figure 2 - Figure 3 As shown, the top of the pore seat 7 is movably connected to the inside of the evaporation source body 1 near the bottom, a connecting pore 8 penetrating the bottom is provided at the top of the pore seat 7, a threaded groove 10 is provided on the inner wall of the evaporation source body 1 near the bottom, a threaded tube 12 is screwed on one end of the evaporation source body 1 near the threaded groove 10, the threaded tube 12 and the threaded groove 10 are adapted to each other, a plurality of pads 11 are fixedly connected to the top of the threaded tube, the top of each pad 11 is movably connected to the bottom of the pore seat 7, a hexagonal block 13 is fixedly connected to the bottom of the threaded tube 12, the bottom end of the hexagonal block 13 is communicated with the inside of the threaded tube 12, and the top of the hexagonal block 13 is movably connected to the evaporation source body 1.

[0031] Through the setting of this structure, the device can evenly discharge the incoming gas when in use, and after the interior of the evaporation source body 1 is cleaned, the pore seat 7 and the dredging mechanism can be conveniently removed through the screw tube 12, which is convenient for the subsequent unified removal of the coating material obtained by cleaning, facilitates the use and disposal of the entire device, and increases the practicality and applicability of the device.

[0032] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is limited by the attached embodiments and their equivalents.

Claims

1. A linear evaporation source blocking and unblocking device, characterized in that: include: Evaporation source body (1); A dredging mechanism, which is arranged inside the evaporation source body (1) and is used for automatically dredging the inside of the evaporation source body (1); The dredging agencies include: A rotating rod (5) is arranged inside the evaporation source body (1), and a mounting seat (2) and an air hole seat (7) are respectively arranged near both ends inside the evaporation source, one end of the rotating rod (5) is rotatably connected to the top end of the air hole seat (7), and the other end of the rotating rod (5) is movably connected to the bottom end of the mounting seat (2), a vortex blade (9) is installed near the middle of the surface of the rotating rod (5), and a scraper (6) is arranged between the two ends of the surface of the rotating rod (5), and the surface of the scraper (6) is movably connected to the inner wall surface of the evaporation source.

2. A linear evaporation source blocking and unblocking device according to claim 1, characterized in that: A placement plate is provided at the top of the mounting seat (2), a connecting piece is provided between the mounting seat (2) and the placement plate, the connecting piece is used to limit the position between the mounting seat (2) and the placement plate, and the mounting seat (2) and the evaporation source are fixedly connected near the top.

3. A linear evaporation source blocking and unblocking device according to claim 2, characterized in that: The connecting piece comprises: A plurality of positioning protrusions (4), the top end of each positioning protrusion (4) is fixedly connected to the bottom end of the placement plate, a positioning hole (3) matching the positioning protrusion (4) is opened at the top end of the mounting seat (2), and the surface of each positioning protrusion (4) is slidably connected to the inside of the positioning protrusion (4).

4. A linear evaporation source blocking and unblocking device according to claim 1, characterized in that: The top of the pore seat (7) is movably connected to the inside of the evaporation source body (1) near the bottom, the top of the pore seat (7) is provided with a connecting pore (8) penetrating the bottom, the inner wall of the evaporation source body (1) is provided with a threaded groove (10) near the bottom, one end of the evaporation source body (1) near the threaded groove (10) is threadedly connected with a threaded connection tube (12), the threaded connection tube (12) and the threaded groove (10) are adapted to each other, a plurality of cushion blocks (11) are fixedly connected to the top of the threaded tube, and the top of each cushion block (11) is movably connected to the bottom of the pore seat (7).

5. The linear evaporation source blocking and unblocking device according to claim 2, characterized in that: The arc-shaped surface around the mounting seat (2) is provided with a plurality of air inlet holes penetrating the interior, and the top of the mounting seat (2) is connected to the interior of the evaporation source.

6. A linear evaporation source blocking and unblocking device according to claim 4, characterized in that: The bottom end of the screw connection tube (12) is fixedly connected to a hexagonal block (13), the bottom end of the hexagonal block (13) is connected to the inside of the screw connection tube (12), and the top end of the hexagonal block (13) is movably connected to the evaporation source body (1).

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