Vacuumizing device with novel circulating cleaning and maintaining structure

Abstract

A vacuumizing device with a novel circulating cleaning and maintaining structure comprises a vacuum pump set composed of at least one vacuum pump, an extraction opening of the vacuum pump set is connected with a main path extraction pipe, and an extraction valve is arranged on the main path extraction pipe; an exhaust port of the vacuum pump set is connected with a main exhaust pipe which is provided with an exhaust valve; a liquid supply unit is connected between the extraction valve and the vacuum pump set and comprises a cleaning liquid conveying device and a maintenance liquid conveying device. A first circulating pipe is arranged on one side of the vacuum pump set. A first circulating valve is arranged at the end, close to the main pipeline exhaust pipe, of the first circulating pipe, and an air inlet pipe is arranged on the side, away from the main pipeline exhaust pipe, of the first circulating valve. The air inlet pipe guides external clean air to the vacuum pump set for air drying operation, liquid detained in the first circulating pipe is emptied at the same time, the structure is simple, and the effect is remarkable; and an independent second circulating pipe is adopted to circulate the protection liquid, so that the protection liquid is prevented from being polluted by the cleaning liquid, and the influence of the protection liquid on the cleaning effect is also avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum pump equipment, in particular to a vacuum pumping device with a novel circulation cleaning and maintenance structure. Background Art

[0002] In industrial processing and manufacturing, media composed of a large amount of waste gas and fine debris are often generated. In particular, in processes such as thin film processing, photovoltaic manufacturing and pharmaceutical packaging, media such as unstable low-molecular polymers and pharmaceutical powders are generated. In order to prevent these media from affecting the quality of production and processing, the above media are extracted from the processing area through a vacuum device during the production process. Since the vacuum device is mainly composed of a vacuum pump, the impurities extracted from the medium area to be extracted are easily adhered to the inside of the vacuum pump during operation, and regular cleaning and maintenance are required.

[0003] Currently, there is a cleaning device that uses the vacuum pump's own power as a power source and cooperates with a circulating pipe to perform cyclic cleaning and maintenance on the vacuum pump. However, in actual use, a portion of the cleaning fluid will always remain in the circulating pipe after the cleaning is completed. During maintenance operations, the maintenance fluid will pass through the circulating pipe and drive the retained cleaning fluid to move with it, interfering with the coating of the maintenance fluid on the inside of the vacuum pump; at the same time, the cleaning fluid that has been retained in the circulating pipe for a long time is prone to deterioration and breeding bacteria, and when the circulating pipe is used again, it will cause pollution to the vacuum pump and the surrounding environment.

[0004] Therefore, in view of the shortcomings of the prior art, it is necessary to design a vacuum pumping device with a novel circulation cleaning and maintenance structure to solve the above problems.

[0005] It should be noted that the above introduction to the technical background is only for the convenience of providing a clear and complete description of the technical solution of the utility model and facilitating the understanding of those skilled in the art. It cannot be considered that the above contents are well known to those skilled in the art simply because they are explained in the background technology of the utility model. Utility Model Content

[0006] In order to overcome the above-mentioned deficiencies in the prior art, the utility model aims to disclose a vacuum pumping device with a novel circulation cleaning and maintenance structure, which is used to overcome the problem of cleaning liquid being retained in the circulation pipe.

[0007] The utility model discloses a vacuum pumping device with a novel circulation cleaning and maintenance structure, comprising a vacuum pump group consisting of at least one vacuum pump, the vacuum pump group's air suction port is connected to a main air suction pipe for a medium area to be sucked, the main air suction pipe is provided with an air suction valve, the vacuum pump group's air exhaust port is connected to a main exhaust pipe, the main exhaust pipe is provided with an exhaust valve, wherein:

[0008] A liquid supply unit is connected to the main air extraction pipe between the air extraction valve and the vacuum pump group. The liquid supply unit includes a cleaning liquid delivery device and a maintenance liquid delivery device, which are used to deliver cleaning liquid or maintenance liquid into the main air extraction pipe.

[0009] A first circulation pipe is provided on one side of the vacuum pump unit, one end of which is arranged on the main air extraction pipe between the air extraction valve and the liquid supply unit, and the other end is arranged on the main exhaust pipe between the exhaust valve and the vacuum pump unit. Through the above design, the first circulation pipe and the vacuum pump form a circulation system, so that the cleaning liquid or maintenance liquid can continuously flush the inside of the vacuum pump through the circulation system.

[0010] A first circulation valve is provided at one end of the first circulation pipe close to the main exhaust pipe, and an air intake pipe is provided at one side of the first circulation valve away from the main exhaust pipe, and an air intake valve is provided on the air intake pipe. After cleaning is completed, the liquid retained in the first circulation pipe can be emptied by opening the air intake valve on the air intake pipe and the exhaust valve on the main exhaust pipe, and external clean gas can also be provided for the air drying operation of the vacuum pump.

[0011] Preferred technical solution: A second circulation valve is provided at one end of the first circulation pipe close to the main exhaust pipe; a second circulation pipe is also provided on one side of the vacuum pump group, which is used for the circulation loop of the maintenance liquid during maintenance operations; one end of the second circulation pipe is provided on the main exhaust pipe between the exhaust valve and the liquid supply unit, and the other end is provided on the main exhaust pipe between the exhaust valve and the vacuum pump group; isolation valves are provided at both ends of the second circulation pipe to prevent the cleaning liquid from flowing into the second circulation pipe and causing contamination during the cleaning operation. The second circulation pipe is provided for separate maintenance circulation operations to prevent the cleaning liquid and the maintenance liquid from mixing and affecting the cleaning and maintenance effects.

[0012] Preferred technical solution: A filter or other device may also be provided on the first circulation pipe, and the filter is located between the air inlet pipe and the second circulation valve.

[0013] Optimal technical solution: On the main exhaust pipe, a first multi-purpose control valve is used to replace the combination of the exhaust valve, the second circulation valve and the adjacent isolation valve; on the main exhaust pipe, a second multi-purpose control valve is used to replace the combination of the exhaust valve, the first circulation valve and the adjacent isolation valve, so as to reduce the number of valves used and improve the convenience of operation and maintenance.

[0014] Preferred technical solution: The vacuum pump group consists of at least two vacuum pumps connected in series.

[0015] Preferred technical solution: The vacuum pump group consists of at least two vacuum pumps connected in parallel.

[0016] Due to the application of the above technical solution, the vacuum pumping device with a novel circulation cleaning and maintenance structure of the utility model has the following beneficial effects:

[0017] (1) An air inlet pipe is provided at the first circulation pipe for circulation of the cleaning liquid. The air inlet pipe guides the external cleaning gas to the vacuum pump group for air drying, while emptying the liquid retained in the first circulation pipe. The structure is simple and the effect is significant.

[0018] (2) A separate second circulation pipe is used to circulate the protective liquid, which prevents the cleaning liquid from contaminating the protective liquid and also prevents the protective liquid from affecting the cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the structure of a vacuum pumping device with a novel circulation cleaning and maintenance structure of the utility model in Example 1;

[0020] Figure 2 This is a schematic diagram of the structure of a vacuum pumping device with a novel circulating cleaning and maintenance structure in the utility model in Example 2.

[0021] In the above drawings, 100, the area of ​​the medium to be extracted; 1, the vacuum pump group; 2, the main exhaust pipe; 21, the exhaust valve; 22, the first multi-purpose control valve; 3, the main exhaust pipe; 31, the exhaust valve; 32, the second multi-purpose control valve; 4, the liquid supply unit; 41, the cleaning liquid delivery device; 42, the maintenance liquid delivery device; 5, the first circulation pipe; 51, the first circulation valve; 52, the second circulation valve; 53, the filter; 6, the air intake pipe; 61, the air intake valve; 7, the second circulation pipe; 71, the isolation valve. DETAILED DESCRIPTION

[0022] The following is a description of the implementation of the present invention by means of specific embodiments. People familiar with the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

[0023] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, terms such as "horizontal", "vertical", and "overhanging" do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0024] In the description of the present invention, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be an indirect connection through an intermediate medium, and it can be the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] Embodiment 1:

[0026] like Figure 1 As shown, a vacuum pumping device with a novel circulation cleaning and maintenance structure disclosed in the utility model includes a vacuum pump group 1, a main exhaust pipe 2, a main exhaust pipe 3, a liquid supply unit 4, a first circulation pipe 5, an air intake pipe 6 and a second circulation pipe 7. The main components of the utility model are described in detail below:

[0027] like Figure 1 As shown, the vacuum pump group 1 is composed of a vacuum pump, which is used as a power source for vacuuming and impurity removal operations and cleaning and maintenance operations. It should be noted that the above structure is only exemplary and not restrictive. In this embodiment, the vacuum pump group 1 is composed of a vacuum pump, but in other embodiments, the vacuum pump group can also be composed of two or more vacuum pumps connected in series or in parallel.

[0028] like Figure 1 As shown, one end of the main exhaust pipe 2 is connected to the exhaust port of the vacuum pump group 1, and the other end is arranged in the medium area 100 to be exhausted, and an exhaust valve 21 is provided on the main exhaust pipe 2.

[0029] like Figure 1 As shown, one end of the main exhaust pipe 3 is connected to the exhaust port of the vacuum pump group 1 , and the other end is arranged to be open to air, and an exhaust valve 31 is arranged on the main exhaust pipe 3 .

[0030] like Figure 1 As shown, the liquid supply unit 4 is arranged on the main air extraction pipe 2 between the air extraction valve 31 and the vacuum pump group 1, and includes a cleaning liquid delivery device 41 and a maintenance liquid delivery device 42. The cleaning liquid delivery device 41 delivers cleaning liquid to the main air extraction pipe 2 alone, and the maintenance liquid delivery device 42 delivers maintenance liquid to the main air extraction pipe 2 alone.

[0031] like Figure 1As shown, one end of the first circulation pipe 5 is arranged on the main exhaust pipe 2 between the exhaust valve 21 and the liquid supply unit 4, and the other end is arranged on the main exhaust pipe 3 between the exhaust valve 21 and the vacuum pump group 1; and the first circulation pipe 5 is provided with a first circulation valve 51 at one end close to the main exhaust pipe 3, and a second circulation valve 52 at one end close to the main exhaust pipe 2; a filter 53 is provided on the first circulation pipe 5 between the air intake pipe 6 and the second circulation valve 52. It should be noted that, firstly, in this embodiment, the second circulation valve 52 is provided on the first circulation pipe 5, but in other embodiments, only the first circulation valve 51 may be provided on the first circulation pipe 5; secondly, in this embodiment, the filter 53 is provided on the first circulation pipe 5 between the air intake pipe 6 and the second circulation valve 52, but in other embodiments, a condenser or other functional devices may also be provided on the first circulation pipe 5 between the air intake pipe 6 and the second circulation valve 52.

[0032] like Figure 1 As shown, one end of the air intake pipe 6 is arranged on the first circulation pipe 5 on the side of the first circulation valve 51 away from the main exhaust pipe 3, and the other end is arranged to the air, and an air intake valve 61 is provided on the air intake pipe 6.

[0033] like Figure 1 As shown, one end of the second circulation pipe 7 is arranged on the main exhaust pipe 2 between the exhaust valve 21 and the liquid supply unit 4, and the other end is arranged on the main exhaust pipe 3 between the exhaust valve 21 and the vacuum pump group 1, and both ends of the second circulation pipe 7 are provided with isolation valves 71. It should be noted that, in this embodiment, the second circulation pipe 7 is provided, but in other embodiments, the second circulation pipe 7 may not be provided.

[0034] refer to Figure 1 As shown, the principle and use method of the vacuum device with a new circulation cleaning and maintenance structure of the utility model are as follows:

[0035] During the vacuuming and impurity removal operation: keep the first circulation valve 51, the second circulation valve 52, the air inlet valve 61 and the isolation valve 71 in a closed state; open the vacuum valve 21 and the exhaust valve 31, connect the vacuum pump group 1 with the main vacuum pipe 2 and the main exhaust pipe 3, and then start the vacuum pump group 1 to perform vacuuming and impurity removal operations on the medium area 100 to be vacuumed.

[0036] During the vacuum pump cleaning operation: close the vacuum pump group 1, so that the isolation valves 71 at both ends of the second circulation pipe 7, the intake valve 61 on the intake pipe 6, the exhaust valve 21 on the main exhaust pipe 2 and the exhaust valve 31 on the main exhaust pipe 3 are all kept in a closed state; open the first circulation valve 51 and the second circulation valve 52 on the first circulation pipe 5, so that the first circulation pipe 5 and the vacuum pump group 1 form a circulation loop, and then start the vacuum pump group 1, and at the same time, the cleaning liquid delivery device 41 delivers a certain amount of cleaning liquid, and uses the airflow in the circulation loop to drive the cleaning liquid to continuously flush the vacuum pump group 1 to perform the cleaning operation. During this process, the filter 53 filters out the impurities flushed down to prevent the impurities from entering the vacuum pump group 1 for the second time with the circulation.

[0037] During the air drying operation of the vacuum pump: after the vacuum pump cleaning operation is completed, close the vacuum pump group 1, keep the isolation valves 71 at both ends of the second circulation pipe 7, the exhaust valve 21 on the main exhaust pipe 2 and the first circulation valve 51 on the first circulation pipe 5 closed, open the exhaust valve 31, the second circulation valve 52 and the intake valve 61; then start the vacuum pump group 1, allow external air to enter from the intake pipe 6, and be discharged from the main exhaust pipe 3 after passing through the vacuum pump group 1. In this process, the external air takes away the cleaning liquid retained in the first circulation pipe 5 when passing through it, and at the same time, the vacuum pump group 1 and the first circulation pipe 5 are air-dried.

[0038] During vacuum pump maintenance: close vacuum pump unit 1, keep the air extraction valve 21, exhaust valve 31, first circulation valve 51, second circulation valve 52 and intake valve 61 closed, open the isolation valves 71 at both ends of the second circulation pipe 7, so that the second circulation pipe 7 and vacuum pump unit 1 form a circulation loop; then start vacuum pump unit 1, and at the same time, the maintenance liquid delivery device 42 delivers a certain amount of maintenance liquid, and uses the airflow in the circulation loop to drive the maintenance liquid to continuously flush the vacuum pump unit 1; after the maintenance is completed, close vacuum pump unit 1, open the air extraction valve 21 and exhaust valve 31 and close the remaining valves. During vacuum pump maintenance, the maintenance liquid will be atomized after passing through the vacuum pump unit 1. When the vacuum pump unit 1 stops running, the atomized maintenance liquid will gradually deposit on the inner wall of the device, and there is no need to air dry and discharge it.

[0039] Embodiment 2:

[0040] like Figure 1 and Figure 2 As shown, the difference from Example 1 lies in that the first multi-purpose control valve 22 is used on the main exhaust pipe 2 to replace the combination of the exhaust valve 21, the second circulation valve 52 and the adjacent isolation valve 71; the second multi-purpose control valve 32 is used on the main exhaust pipe 3 to replace the combination of the exhaust valve 31, the first circulation valve 51 and the adjacent isolation valve 71; when in use, the first multi-purpose control valve 22 and the second multi-purpose control valve 32 are adjusted to achieve the effect of the corresponding valve opening and closing combination in Example 1, thereby reducing the number of pipeline divisions and improving the convenience of control.

[0041] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without violating the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A vacuum pumping device with a novel circulation cleaning and maintenance structure, comprising a vacuum pump group (1) composed of at least one vacuum pump, wherein the vacuum pump group (1) has an air suction port connected to a main air suction pipe (2) for a medium area (100) to be sucked, the main air suction pipe (2) being provided with an air suction valve (21), and the vacuum pump group (1) has an air exhaust port connected to a main exhaust pipe (3), the main exhaust pipe (3) being provided with an exhaust valve (31), characterized in that: The main air extraction pipe (2) between the air extraction valve (21) and the vacuum pump assembly (1) is connected to a liquid supply unit (4), the liquid supply unit (4) comprising a cleaning liquid delivery device (41) and a maintenance liquid delivery device (42); A first circulation pipe (5) is provided on one side of the vacuum pump group (1); one end of the first circulation pipe (5) is arranged on the main air extraction pipe (2) between the air extraction valve (21) and the liquid supply unit (4), and the other end is arranged on the main exhaust pipe (3) between the exhaust valve (31) and the vacuum pump group (1); A first circulation valve (51) is provided at one end of the first circulation pipe (5) close to the main exhaust pipe (3), an intake pipe (6) is provided at a side of the first circulation valve (51) away from the main exhaust pipe (3), and an intake valve (61) is provided on the intake pipe (6).

2. A vacuum pumping device with a novel circulation cleaning and maintenance structure according to claim 1, characterized in that: A second circulation valve (52) is provided at one end of the first circulation pipe (5) close to the main air extraction pipe (2); a second circulation pipe (7) is also provided on one side of the vacuum pump group (1); one end of the second circulation pipe (7) is arranged on the main air extraction pipe (2) between the air extraction valve (21) and the liquid supply unit (4), and the other end is arranged on the main exhaust pipe (3) between the exhaust valve (31) and the vacuum pump group (1); and isolation valves (71) are provided at both ends of the second circulation pipe (7).

3. A vacuum pumping device with a novel circulation cleaning and maintenance structure according to claim 2, characterized in that: The first circulation pipe (5) is provided with a filter (53), and the filter (53) is located between the air intake pipe (6) and the second circulation valve (52).

4. A vacuum pumping device with a novel circulation cleaning and maintenance structure according to claim 3, characterized in that: On the main exhaust pipe (2), a first multi-purpose control valve (22) is used to replace the exhaust valve (21), the second circulation valve (52) and the combination of the adjacent isolation valve (71); and on the main exhaust pipe (3), a second multi-purpose control valve (32) is used to replace the exhaust valve (31), the first circulation valve (51) and the combination of the adjacent isolation valve (71).

5. The vacuum pumping device with a novel circulation cleaning and maintenance structure according to claim 1 is characterized in that: The vacuum pump group (1) consists of at least two vacuum pumps connected in series.

6. A vacuum pumping device with a novel circulation cleaning and maintenance structure according to claim 1, characterized in that: The vacuum pump group (1) consists of at least two vacuum pumps connected in parallel.

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