Diaphragm adjusting device
By designing a diaphragm adjustment device including a shaft collar, a diaphragm, a diaphragm and a fine-tuning top wire, the problem of the Z-direction and RZ-direction adjustment in the prior art is solved, and the four-dimensional adjustment of the diaphragm is realized, and the adjustment accuracy and maintainability are improved.
Patent Information
- Application Number
- CN202421895003.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-06
- Publication Date
- 2025-05-09
- Estimated Expiration
- 2034-08-06
AI Technical Summary
The existing aperture adjustment device cannot realize movement along the optical axis direction (Z direction) and rotation adjustment of the aperture around the optical axis direction (RZ direction).
A diaphragm adjustment device including a shaft collar, a diaphragm, a diaphragm and a fine-tuning top wire is designed. The shaft collar is screwed into the inside of the aperture barrel through an external thread for Z-direction adjustment. The rotation of the aperture barrel achieves RZ-direction adjustment, and the fine-tuning top wire is used for adjustment and locking in the X and Y directions.
The four dimensions of the aperture (X, Y, Z, RZ) adjustment is realized, with high adjustment accuracy, simple structure and low cost, and is suitable for various specifications of apertures.
Smart Images
Figure CN222850794U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of wafer key dimension detection equipment, in particular to an aperture adjustment device. Background Art
[0002] One of the core systems of wafer critical dimension detection equipment is the optical machine. An important component of the optical machine is the aperture. According to the function of the aperture, it can be roughly divided into two categories: field aperture and aperture. The field aperture is the aperture that limits the field of view the most in the optical path; the aperture aperture is the aperture that limits the light beam the most in the optical path. Due to design reasons, the optical machine often needs to adjust the radial or axial displacement of the aperture to meet the needs of the optical machine. However, the spatial layout of the optical machine is mostly compact, and there are more than one aperture in the surrounding interference optical elements and structures. A reliable and easy-to-adjust aperture adjustment device designed for use in narrow spaces is a constantly developing technical point in this field.
[0003] However, the prior art cannot realize movement along the optical axis direction (Z direction), and cannot realize rotation adjustment of the aperture around the optical axis direction (RZ direction). Summary of the invention
[0004] In order to solve many problems existing in the current design of aperture adjustment devices, this scheme proposes a new aperture adjustment device.
[0005] To achieve the above object, the utility model is implemented through the following technical solution: an aperture adjustment device, characterized in that the adjustment device includes:
[0006] A shaft collar, which is screwed into the interior of the aperture barrel through an external thread to adjust the spatial position of the aperture;
[0007] An aperture lens barrel, the outer wall of which is provided with a stop screw for locking the shaft collar;
[0008] an aperture seat, one end of which is in contact with the top of the collar so that the aperture can be installed in the aperture barrel; and
[0009] A fine-tuning top screw is arranged through the wall of the diaphragm lens barrel to adjust the spatial position of the diaphragm.
[0010] Preferably, the fine-tuning top screw comprises: a first fine-tuning top screw, a second fine-tuning top screw and a third fine-tuning top screw, wherein the three fine-tuning top screws are arranged through the wall of the aperture barrel and are evenly distributed on the wall of the aperture barrel, and the three fine-tuning top screws are configured to adjust and lock the spatial position of the aperture seat in the horizontal direction.
[0011] Preferably, the outer surface of the aperture seat is constructed as a circumferential conical surface, and the ball head ends of the three fine-tuning screws are in contact with the conical surface.
[0012] Preferably, a light-through hole is provided in the middle of the collar, the top end face of the light-through hole is a plane, and the other end face is provided with evenly distributed adjustment teeth, wherein the spatial position in the vertical direction within the aperture barrel is adjusted by adjusting the evenly distributed adjustment teeth.
[0013] Preferably, a shaft ring observation window is provided on the side wall of the aperture barrel, wherein the evenly distributed adjustment teeth are adjusted using a tool through the shaft ring observation window, and a stop screw is provided on the outer side of the aperture barrel for radially locking the shaft ring.
[0014] Preferably, the aperture lens barrel has:
[0015] A first interface is provided on the inner circle of one end of the aperture lens barrel and is configured to receive a dovetail structure of an external matching component, and a first locking screw hole is radially provided on the inner circle for locking the dovetail structure of the external matching component; and
[0016] The second interface is arranged at the other end of the aperture lens barrel and is constructed as an outward dovetail structure, through which the aperture is integrally mounted to the external structural member.
[0017] Preferably, the stop screw is initially in a pre-tightened state, so that the collar can rotate and the fitting clearance of the collar installation is eliminated.
[0018] Preferably, the aperture seat is provided with an internal thread, and a stopping boss is provided at the bottom, and the aperture is provided with an external thread, which is screwed into the bottom of the aperture seat for stopping and locking through the cooperation of the internal and external threads.
[0019] In summary, the utility model has at least the following beneficial effects:
[0020] (1) In this solution, an aperture interface is provided in the center of the aperture seat, and apertures of different shapes and diameters can be installed. A set of aperture adjustment mechanisms can be compatible with apertures of various specifications;
[0021] (2) The Z-axis adjustment of the aperture is achieved through the collar, and the adjustment accuracy can be controlled according to the pitch of the collar;
[0022] (3) The aperture RZ direction can be adjusted by rotating the aperture barrel, which is of great significance for apertures with non-circular apertures.
[0023] (4) The adjustment mechanisms in the X, Y, Z, and RZ directions can be easily locked. The X and Y directions are locked by fine-tuning the top screws during the adjustment process, the Z direction is locked by the stop screw, and the RZ direction can be locked by installing it to the external structure;
[0024] (5) The first interface can receive the dovetail structure of the external matching component, and the dovetail structure of the second interface can also be quickly installed on other external structures. The dovetail structure can be quickly disassembled inside the optical machine;
[0025] (6) The aperture can be adjusted in four dimensions with fewer parts, which is convenient to adjust and highly maintainable. The overall structure is simple, easy to process, and low in cost. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] Figure 1 It shows a cross-sectional structural diagram of an aperture adjustment device in one embodiment of the utility model;
[0027] Figure 2 A schematic diagram of the top view of the aperture adjustment device in one embodiment of the utility model is shown;
[0028] Figure 3 A schematic diagram of the side structure of the aperture adjustment device in one embodiment of the utility model is shown;
[0029] Figure 4 It shows a schematic diagram of the shaft ring structure in one embodiment of the utility model;
[0030] Figure 5 A schematic diagram of the structure of the aperture seat in one embodiment of the utility model is shown; and
[0031] Figure 6 A flow chart showing the installation and adjustment of the aperture adjustment device in one embodiment of the utility model is shown. DETAILED DESCRIPTION
[0032] In order to make the purpose, technical scheme and advantages of the embodiments of the present invention clearer, the following will be combined with the present invention
[0033] The drawings in the embodiments of the utility model clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0034] In the description of the present utility model, it is necessary to understand that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, features defined as "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.
[0035] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0036] The following describes in detail embodiments of the present invention, examples of which are shown in the accompanying drawings.
[0037] The same or similar reference numerals represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.
[0038] Figure 1 A schematic cross-sectional structure diagram of an aperture adjustment device in an embodiment of the utility model is shown.
[0039] like Figure 1 As shown, in one embodiment provided by the utility model, the aperture adjustment device includes: an aperture barrel 1, a shaft ring 2, an aperture seat 3, a stop screw 4, and a fine-tuning top screw, wherein the aperture barrel 1 also has a first interface 101 and a second interface 102, the first interface 101 is arranged at the inner circle of one end of the aperture barrel 1, and is configured as a dovetail structure capable of receiving an external matching part; the second interface 102 is arranged at the other end of the aperture barrel 1, and is configured as an external dovetail structure, and the dovetail structure can be quickly disassembled inside the optical machine. At the same time, a first locking screw hole 104 is also arranged outside the aperture barrel 1, which can lock the dovetail structure inserted outside.
[0040] like Figure 1 As shown, the aperture lens barrel 1 also has a side wall provided with a collar observation window 103, and a tool can be used to adjust the adjustment tooth 201 through the collar observation window 103. Thus, the Z-direction adjustment of the aperture is achieved through the collar 2, and the adjustment accuracy can be controlled according to the pitch of the collar 2. At the same time, the aperture lens barrel 1 is also provided with a reference shoulder 105 as the initial reference position of the collar 2.
[0041] Obviously, the material of the stop screw 4 can be nylon or other plastic screws, and the purpose is to lock the shaft ring without damaging the external thread of the shaft ring. The present invention does not limit the material.
[0042] Figure 2 A schematic diagram of the top view of the aperture adjustment device in one embodiment of the utility model is shown.
[0043] like Figure 2 As shown, in one embodiment of the utility model, through a top-down perspective, three fine-tuning top screws can be clearly observed, which are evenly distributed on the wall of the aperture lens barrel 1. The first fine-tuning top screw 501, the second fine-tuning top screw 502, and the third fine-tuning top screw 503 are used to adjust and lock the X and Y directions of the aperture seat. The adjustment and locking of the X and Y directions of the aperture are achieved through the combined movement of screwing in and out of the first, second, and third fine-tuning top screws.
[0044] Figure 3 Shows a schematic diagram of the side structure of the aperture adjustment device in one embodiment of the utility model.
[0045] like Figure 3 As shown, in one embodiment of the present invention, the display of the adjusting tooth 201 by the collar observation window 103 can be visually observed.
[0046] Figure 4 A schematic diagram of the shaft ring structure in an embodiment of the utility model is shown.
[0047] like Figure 4 As shown, in one embodiment of the present invention, the external thread pitch of the collar 2 can be the commonly used 0.25mm, 0.5mm pitch. Obviously, other pitches can be selected according to needs and selected according to actual adjustment accuracy.
[0048] Figure 5 A schematic diagram of the structure of the aperture seat in one embodiment of the utility model is shown.
[0049] like Figure 5As shown, in one embodiment of the utility model, the aperture seat 3 has an aperture installation thread 301, a stop boss 302, and a tapered surface 303. The aperture seat 3 is provided with an internal thread, and a stop boss 302 is provided at the bottom. The field aperture that can be installed in this embodiment is provided with an external thread, which is screwed into the bottom of the aperture seat 3 for stop and locking through the cooperation of the internal and external threads. The aperture seat tapered surface 303 contacts the spherical ends of the first, second, and third fine-tuning top screws. The above fine-tuning top screws are evenly distributed in the outer diameter circumferential direction of the aperture lens barrel. The three fine-tuning top screws are pre-tightened, and the aperture seat 3 is fixed through the radial and axial force components of the tapered surface.
[0050] Figure 6 A flow chart showing the installation and adjustment of the aperture adjustment device in one embodiment of the utility model is shown.
[0051] like Figure 6 As shown, in one embodiment of the present invention, the adjustment method of the aperture adjustment device includes the following steps:
[0052] Step 1, install the collar 2, with the collar adjustment tooth 201 facing downward and the second interface 102 of the aperture barrel facing downward, and screw the collar 2 in clockwise from the bottom of the aperture barrel 1. When the other end of the collar 2 is visually flush with the reference shoulder 105 of the aperture barrel 1, stop screwing the collar 2 in. At this time, screw the stop screw into the stop screw mounting hole 4 of the aperture barrel.
[0053] Step 2: Place the field diaphragm into the diaphragm seat 3 and tighten it.
[0054] Step three, place the aperture seat 3 and the field aperture as a whole into the aperture barrel 1, the bottom surface of the aperture seat 3 is completely in contact with the plane end of the shaft ring 2, the aperture is placed radially and visually centered, the cone surface 303 of the aperture seat is in contact with the spherical ends of the first, second and third fine-tuning top screws, the above fine-tuning top screws are evenly distributed in the circumferential direction of the outer diameter of the aperture barrel 1, the three fine-tuning top screws are pre-tightened, and the aperture seat 3 is fixed by the radial and axial components of the cone surface 303.
[0055] Step 4: After the above steps, an aperture assembly is formed, and the assembly is fixed to the external structure, that is, installed in the optical path corresponding to the optical machine to achieve RZ direction adjustment. The first and second interfaces of the aperture barrel are compatible with the dovetail groove structure. When the aperture assembly is installed externally, it can be rotated around the central optical axis to a certain appropriate RZ angle corresponding to the required angle of the field aperture, and then the aperture assembly is locked with the top screw.
[0056] Step 5. Adjust the X, Y, and Z directions of the diaphragm according to external requirements. When adjusting the Z direction, loosen the first, second, and third fine-tuning screws, use a tool to move the adjustment teeth through the observation window, adjust the field diaphragm in the Z direction and tighten the stop screw after it is in place; then, adjust and lock the diaphragm in the X and Y directions through the combined movement of screwing in and out the first, second, and third fine-tuning screws.
[0057] Thus, the collar 2 realizes the Z-direction adjustment of the aperture, and the adjustment accuracy can be controlled according to the pitch of the collar 2 , and the aperture RZ direction adjustment can be realized by rotating the aperture barrel 1 .
[0058] The utility model optimizes the locking steps after adjustment, wherein the X and Y directions are locked by fine-tuning the top screws during the position adjustment process, the Z direction is locked by a stop screw, and the RZ direction can be locked by installing it to an external structure.
[0059] In summary, this solution uses a relatively small number of parts to achieve adjustment of the diaphragm in four dimensions, is easy to adjust, has high maintainability, and has a simple overall structure, convenient processing, and low cost.
Claims
1. An aperture adjustment device, characterized in that: The regulating device comprises: A shaft collar, which is screwed into the interior of the aperture barrel through an external thread to adjust the spatial position of the aperture; An aperture lens barrel, the outer wall of which is provided with a stop screw for locking the shaft collar; an aperture seat, one end of which is in contact with the top of the collar so that the aperture can be installed in the aperture barrel; and A fine-tuning top screw is arranged through the wall of the diaphragm lens barrel to adjust the spatial position of the diaphragm.
2. The aperture adjustment device according to claim 1, characterized in that: The fine-tuning top screw includes: a first fine-tuning top screw, a second fine-tuning top screw and a third fine-tuning top screw, wherein the three fine-tuning top screws are arranged through the wall of the aperture barrel and are evenly distributed on the wall of the aperture barrel, and the three fine-tuning top screws are configured to adjust and lock the spatial position of the aperture seat in the horizontal direction.
3. The aperture adjustment device according to claim 2, characterized in that: The outer surface of the aperture seat is constructed as a circumferential cone surface, and the ball head ends of the three fine-tuning top screws are in contact with the cone surface.
4. The aperture adjustment device according to claim 1, characterized in that: A light-through hole is provided in the middle of the shaft ring, the top end face of the light-through hole is a plane, and the other end face is provided with evenly distributed adjustment teeth, wherein the spatial position in the vertical direction within the aperture lens barrel is adjusted by adjusting the evenly distributed adjustment teeth.
5. The aperture adjustment device according to claim 4, characterized in that: A shaft ring observation window is provided on the side wall of the aperture lens barrel, wherein the evenly distributed adjustment teeth are adjusted using a tool through the shaft ring observation window, and a stop screw is provided on the outside of the aperture lens barrel for radially locking the shaft ring.
6. The aperture adjustment device according to claim 1, characterized in that: The aperture lens barrel has: A first interface, which is arranged on the inner circle of one end of the aperture lens barrel and is configured to receive the dovetail structure of the external matching component, and a first locking screw hole is radially arranged on the inner circle for locking the dovetail structure of the external matching component; as well as The second interface is arranged at the other end of the aperture lens barrel and is constructed as an outward dovetail structure, through which the aperture is integrally mounted to the external structural member.
7. The aperture adjustment device according to claim 1, characterized in that: The stop screw is initially in a pre-tightened state, so that the shaft collar can rotate and the matching clearance of the shaft collar installation is eliminated.
8. The aperture adjustment device as described in claim 1 is characterized in that the aperture seat is provided with an internal thread and a stopping boss is provided at the bottom, and the aperture is provided with an external thread, which is screwed into the bottom of the aperture seat for stopping and locking through the cooperation of the internal and external threads.