Coaxiality adjusting device for upper lens and lower lens
By designing a coaxial adjustment device for the upper and lower lenses, the adjustment frame and displacement adjustment components are used to achieve rapid and accurate adjustment of the upper and lower lenses, solving the problem of time-consuming and low accuracy of traditional methods, and improving production efficiency and alignment accuracy.
Patent Information
- Application Number
- CN202421959289.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-13
- Publication Date
- 2025-05-09
- Estimated Expiration
- 2034-08-13
AI Technical Summary
The traditional method of coaxial adjustment of upper and lower lenses relies on manual manual adjustment, which consumes time and is difficult to guarantee, which easily generates errors and affects the machine alignment accuracy.
A coaxial adjustment device for the upper and lower lenses is designed, including a fixing frame, a upper and lower lens adjustment frame and a displacement adjustment component. By adjusting the displacement adjustment component, the upper and lower lens adjustment frames are relatively displaced, achieving fast and accurate coaxial adjustment.
It effectively reduces adjustment time, improves coaxial accuracy, reduces requirements for adjusters, reduces human error, and realizes rapid assembly and disassembly, improving production efficiency.
Smart Images
Figure CN222850795U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of lens installation, and in particular to a device for adjusting the coaxiality of upper and lower lenses. Background Art
[0002] With the continuous development of semiconductor manufacturing processes, the size of wafers continues to increase, and the alignment accuracy requirements in wafer production are also constantly increasing. In alignment equipment, the requirements for the coaxiality of the upper and lower lenses are getting higher and higher. The traditional adjustment method relies on image assistance and manual adjustment, which not only wastes work time, but also makes it difficult to ensure accuracy. It is necessary to develop a rapid adjustment mechanism.
[0003] The traditional method of adjusting the coaxiality of the upper and lower lenses has the following disadvantages: Manual adjustment of the upper and lower coaxiality has high requirements on the operator, and the operator needs to adjust the lens repeatedly to achieve the ideal coaxiality. This process may take a long time, and manual adjustment of coaxiality is prone to errors. During the adjustment process, the operator may be affected by subjective factors, such as fatigue and lack of concentration, which leads to certain errors in the adjustment results, thereby causing errors in the machine alignment accuracy. Utility Model Content
[0004] In view of this, an embodiment of the present application provides a device for adjusting the coaxiality of upper and lower lenses, which at least partially solves the problems of large errors and long time consumption when manually adjusting the coaxiality of upper and lower lenses in the prior art.
[0005] The embodiment of the present application provides a device for adjusting the coaxiality of upper and lower lenses, the device comprising a fixing frame for mounting an upper lens and a lower lens, the top of the upper lens is fixed to the upper part of the fixing frame, the bottom of the lower lens is fixed to the lower part of the fixing frame, and an adjusting tool for adjusting the coaxiality of the upper lens and the lower lens is provided between the upper lens and the lower lens;
[0006] The adjustment tooling includes a lower lens adjustment frame, an upper lens adjustment frame and a displacement adjustment component. The displacement adjustment component is connected to the lower lens adjustment frame and the upper lens adjustment frame respectively. The interior of the lower lens adjustment frame is used to fix the lower lens, and the interior of the upper lens adjustment frame is used to fix the upper lens. By adjusting the displacement adjustment component, the lower lens adjustment frame and the upper lens adjustment frame are relatively displaced, and the displacement direction is along the axis direction of the lower lens.
[0007] According to a specific implementation method of an embodiment of the present application, the displacement adjustment assembly includes an adjusting screw and a rack and a gear that cooperate with each other, the back of the rack is connected to the inner wall of the upper lens adjustment frame, the tail of the adjusting screw passes through the side wall of the lower lens adjustment frame and is connected to the gear, and the head of the adjusting screw is located on one side of the outer wall of the lower lens adjustment frame.
[0008] According to a specific implementation method of an embodiment of the present application, an upper lens adjustment frame includes an upper end and a lower end, the inner wall of the upper end is provided with an upper lens positioning groove for fixing the upper lens, the outer wall of the lower end is gap-matched with the inner wall of the lower lens adjustment frame, the outer wall of the lower end is provided with an adjustment gap groove and a coaxiality adjustment component that cooperates with the lower lens adjustment frame, one end of the rack is connected to the inner wall of the lower end, and the tail of the adjustment screw passes through the side wall of the lower lens adjustment frame and the adjustment gap groove and is connected to the gear.
[0009] According to a specific implementation method of an embodiment of the present application, the inner wall of the lower part of the lower lens adjustment frame is provided with a lower lens positioning groove for fixing the lower lens, and the side wall of the upper part of the lower lens adjustment frame is provided with an adjustment screw mounting hole for the tail of the adjustment screw to pass through.
[0010] According to a specific implementation method of the embodiment of the present application, the coaxiality adjustment assembly includes a concentric key arranged on the outer wall of the lower end portion and a concentric groove arranged on the upper inner wall of the lower lens adjustment frame, and the concentric key and the concentric groove are clearance-matched.
[0011] According to a specific implementation method of an embodiment of the present application, the displacement adjustment assembly also includes a locking screw, the tail of the locking screw passes through the side wall of the lower lens adjustment frame, the head of the locking screw is located on one side of the outer wall of the lower lens adjustment frame, and the lower end is locked by rotating the locking screw.
[0012] According to a specific implementation of the embodiment of the present application, the device also includes an upper lens mounting base, and the top of the upper lens is fixed to the upper part of the fixing frame through the upper lens mounting base.
[0013] According to a specific implementation of the embodiment of the present application, the device also includes a lower lens mounting base, and the bottom of the lower lens is fixed to the lower part of the fixing frame through the lower lens mounting base.
[0014] According to a specific implementation of the embodiment of the present application, the upper lens adjustment frame and the lower lens adjustment frame are configured as a cylindrical structure.
[0015] According to a specific implementation of the embodiment of the present application, the fixing frame is configured as a C-shaped arm.
[0016] Beneficial effects:
[0017] The upper and lower lens coaxiality adjustment device in the embodiment of the present application can achieve the coaxiality adjustment of the upper and lower lenses by setting the adjustment tooling, which can effectively reduce the adjustment time and improve the coaxial accuracy; the use of this device has low requirements on the adjustment personnel and can reduce human errors; it can achieve rapid assembly and disassembly and improve production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0019] Figure 1 It is a structural diagram of a device for adjusting the coaxiality of upper and lower lenses according to an embodiment of the utility model;
[0020] Figure 2 An exploded view of a device for adjusting the coaxiality of upper and lower lenses according to an embodiment of the utility model;
[0021] Figure 3 It is a structural diagram of a lower lens adjustment frame according to an embodiment of the utility model;
[0022] Figure 4 The figure is a structural diagram of an upper lens adjustment frame according to an embodiment of the utility model.
[0023] In the figure: 1. fixing screw; 2. upper lens mounting base; 3. upper lens; 4. adjustment tooling; 5. lower lens mounting base; 6. C-shaped arm; 7. upper lens adjustment frame; 8. lower lens adjustment frame; 9. rack; 10. gear; 11. adjusting screw; 12. locking screw; 13. adjusting screw mounting hole; 14. concentric groove; 15. locking screw mounting hole; 16. lower lens positioning groove; 17. adjustment gap groove; 18. upper lens positioning groove; 19. concentric key. DETAILED DESCRIPTION
[0024] The embodiments of the present application are described in detail below with reference to the accompanying drawings.
[0025] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.
[0026] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number of aspects described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.
[0027] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.
[0028] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects described may be practiced without these specific details.
[0029] The present application embodiment provides a device for adjusting the coaxiality of upper and lower lenses. Figures 1 to 4 Describe in detail.
[0030] This embodiment provides a device for adjusting the coaxiality of upper and lower lenses, referring to Figure 1 and Figure 2 , including a fixing frame for installing an upper lens 3 and a lower lens, the top of the upper lens 3 is fixed to the upper part of the fixing frame, the bottom of the lower lens is fixed to the lower part of the fixing frame, and an adjusting tool 4 for adjusting the coaxiality of the upper lens 3 and the lower lens is provided between the upper lens 3 and the lower lens; the adjusting tool 4 includes a lower lens adjusting frame 8, an upper lens adjusting frame 7 and a displacement adjusting component, the displacement adjusting component is connected to the lower lens adjusting frame 8 and the upper lens adjusting frame 7 respectively, the interior of the lower lens adjusting frame 8 is used to fix the lower lens, and the interior of the upper lens adjusting frame 7 is used to fix the upper lens 3, by adjusting the displacement adjusting component, the lower lens adjusting frame 8 and the upper lens adjusting frame 7 are relatively displaced, and the displacement direction is along the axial direction of the lower lens.
[0031] When operating the device, first fix the lower lens firmly on the fixing frame to ensure its stable position. Then, install the lower lens adjustment frame 8 on the lower lens and fix it, and drive the upper lens adjustment frame 7 to rise through the displacement adjustment component. When the upper lens adjustment frame 7 rises to the position of the upper lens 3, the upper lens 3 is locked through the positioning structure, so that the upper and lower lenses are in a coaxial position, and then tighten the fasteners used to fasten the upper lens 3, and the whole adjustment process is completed.
[0032] In this embodiment, the coaxiality adjustment of the upper and lower lenses can be achieved by setting the adjustment tool 4, which can effectively reduce the adjustment time and improve the coaxial accuracy; the use of this device has low requirements on the adjustment personnel and can reduce human errors; it can achieve rapid assembly and disassembly and improve production efficiency.
[0033] In one embodiment, referring to Figure 2 The displacement adjustment assembly includes an adjustment screw 11 and a rack 9 and a gear 10 that cooperate with each other. The back of the rack 9 is connected to the inner wall of the upper lens adjustment frame 7. The tail of the adjustment screw 11 passes through the side wall of the lower lens adjustment frame 8 and is connected to the gear 10. The head of the adjustment screw 11 is located on one side of the outer wall of the lower lens adjustment frame 8. By rotating the adjustment screw 11, the gear 10 can be driven to rotate. The rotation of the gear 10 drives the rack 9 to move up and down, thereby driving the upper lens adjustment frame 7 to move up and down.
[0034] Further, see Figure 4 The upper lens adjustment frame 7 includes an upper end and a lower end. The inner wall of the upper end is provided with an upper lens positioning groove 18 for fixing the upper lens 3. The outer wall of the lower end is clearance-matched with the inner wall of the lower lens adjustment frame 8. The outer wall of the lower end is provided with an adjustment gap groove 17 and a coaxiality adjustment component that cooperates with the lower lens adjustment frame 8. One end of the rack 9 is connected to the inner wall of the lower end. The tail of the adjustment screw 11 passes through the side wall of the lower lens adjustment frame 8 and the adjustment gap groove 17 and is connected to the gear 10.
[0035] In this embodiment, the upper lens adjustment frame 7 and the lower lens adjustment frame 8 are configured as a cylindrical structure, the outer periphery of the upper end of the upper lens adjustment frame 7 protrudes from the outer periphery of the lower end, and the lower end can extend into the inner wall of the lower lens adjustment frame 8, and the adjustment gap groove 17 of the lower end is arranged along the axial direction of the upper lens adjustment frame 7. The adjustment screw 11 can pass through the adjustment gap groove 17 and connect with the internal gear 10. Therefore, when the adjustment screw 11 is rotated, the upper lens adjustment frame 7 can be moved up and down, and when the upper lens adjustment frame 7 moves to the upper lens 3 position, the upper lens 3 is fixed by the upper lens positioning groove 18. The application of the gear 10 and the rack 9 can ensure the smooth use of the entire mechanism.
[0036] Preferably, the displacement adjustment component also includes a locking screw 12, the tail of the locking screw 12 passes through the side wall of the lower lens adjustment frame 8, specifically, the tail of the locking screw 12 passes through the locking screw mounting hole 15 on the lower lens adjustment frame 8, the head of the locking screw 12 is located on the outer wall side of the lower lens adjustment frame 8, and the lower end is locked by rotating the locking screw 12. When the upper lens 3 is locked by the upper lens positioning groove 18, the upper lens 3 and the lower lens are in a coaxial position, and the locking screw 12 is rotated to ensure that the entire assembly no longer moves. The coordinated use of the adjustment screw 11 and the locking screw 12 ensures quick adjustment and quick disassembly of the mechanism.
[0037] Further, see Figure 3 The inner wall of the lower part of the lower lens adjustment frame 8 is provided with a lower lens positioning groove 16 for fixing the lower lens, and the side wall of the upper part of the lower lens adjustment frame 8 is provided with an adjustment screw mounting hole 13 for the tail of the adjustment screw 11 to pass through. When installing, the lower lens is first fixed, and the lower lens is locked with the lower lens adjustment frame 8 through the cooperation of the lower lens positioning groove 16.
[0038] In one embodiment, the coaxiality adjustment assembly includes a concentric key 19 arranged on the outer wall of the lower end portion and a concentric groove 14 arranged on the upper inner wall of the lower lens adjustment frame 8. The concentric key 19 and the concentric groove 14 are clearance-matched. Through the cooperation between the concentric key 19 and the concentric groove 14, it is ensured that the axes of the upper lens adjustment frame 7 and the lower lens adjustment frame 8 are located in the same straight line, thereby avoiding mutual movement of the various adjustment frames in the future.
[0039] In one embodiment, the device further includes an upper lens mounting base 2 and a lower lens mounting base 5, the top of the upper lens 3 is fixed to the upper part of the fixing frame through the upper lens mounting base 2; the bottom of the lower lens is fixed to the lower part of the fixing frame through the lower lens mounting base 5.
[0040] In one embodiment, the fixing frame is configured as a C-shaped arm 6 , the upper lens 3 is fixed to the upper portion of the C-shaped arm 6 via the upper lens mounting base 2 , and the lower lens is fixed to the lower portion of the C-shaped arm 6 via the lower lens mounting base 5 .
[0041] When operating the device, first fix the lower lens firmly on the lower lens mounting base 5 to ensure that its position is stable. Then, install the lower lens adjustment frame 8 on the lower lens, and lock the lower lens and the adjustment frame through the cooperation of the lower lens positioning groove 16. Rotating the adjustment screw 11 will drive the gear 10 to rotate, and the rotation of the gear 10 will drive the rack 9 to rise. Since the rack 9 is connected to the upper lens adjustment frame 7, the rise of the rack 9 will drive the upper lens adjustment frame 7 to rise. When the upper lens adjustment frame 7 rises to the position of the upper lens 3, it is locked with the upper lens 3 through the upper lens positioning groove 18, so that the upper and lower lenses are in a coaxial position. Rotate the locking screw 12 to ensure that the entire assembly does not move. Finally, tighten the fixing screw 1 of the upper lens mounting base 2 to complete the entire adjustment process. After the adjustment is completed, loosen the locking screw 12, rotate the adjusting screw 11, lower the upper lens 3 adjustment bracket to the starting position, and then remove the entire adjustment tooling 4.
[0042] The embodiment provided by the utility model ensures the concentricity of the upper and lower lenses by using the upper and lower lens positioning grooves 16; ensures the rapid adjustment and rapid disassembly of the mechanism by using the adjusting screw 11 and the locking screw 12; and ensures the smooth use of the entire mechanism by using the gear 10 and the rack 9. Therefore, the coaxiality adjustment of the upper and lower lenses can be achieved by setting the adjusting tool 4, which can effectively reduce the adjustment time and improve the coaxial accuracy; the use of this device has low requirements on the adjustment personnel and can reduce human errors; it can achieve rapid assembly and rapid disassembly, and improve production efficiency.
[0043] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.
Claims
1. A device for adjusting the coaxiality of upper and lower lenses, characterized in that: The device comprises a fixing frame for mounting an upper lens (3) and a lower lens, the top of the upper lens (3) being fixed to the upper part of the fixing frame, the bottom of the lower lens being fixed to the lower part of the fixing frame, and an adjusting tool (4) for adjusting the coaxiality of the upper lens (3) and the lower lens being provided between the upper lens (3) and the lower lens; The adjustment tool (4) comprises a lower lens adjustment frame (8), an upper lens adjustment frame (7) and a displacement adjustment component. The displacement adjustment component is connected to the lower lens adjustment frame (8) and the upper lens adjustment frame (7) respectively. The interior of the lower lens adjustment frame (8) is used to fix the lower lens, and the interior of the upper lens adjustment frame (7) is used to fix the upper lens (3). By adjusting the displacement adjustment component, the lower lens adjustment frame (8) and the upper lens adjustment frame (7) are relatively displaced, and the displacement direction is along the axis direction of the lower lens.
2. The upper and lower lens coaxiality adjustment device according to claim 1, characterized in that: The displacement adjustment component comprises an adjustment screw (11) and a rack (9) and a gear (10) which cooperate with each other, the back of the rack (9) is connected to the inner wall of the upper lens adjustment frame (7), the tail of the adjustment screw (11) passes through the side wall of the lower lens adjustment frame (8) and is connected to the gear (10), and the head of the adjustment screw (11) is located on one side of the outer wall of the lower lens adjustment frame (8).
3. The upper and lower lens coaxiality adjustment device according to claim 2, characterized in that: The upper lens adjustment frame (7) comprises an upper end portion and a lower end portion, the inner wall of the upper end portion is provided with an upper lens positioning groove (18) for fixing the upper lens (3), the outer wall of the lower end portion is clearance-matched with the inner wall of the lower lens adjustment frame (8), the outer wall of the lower end portion is provided with an adjustment clearance groove (17) and a coaxiality adjustment component that matches the lower lens adjustment frame (8), one end of the rack (9) is connected to the inner wall of the lower end portion, and the tail of the adjustment screw (11) passes through the side wall of the lower lens adjustment frame (8) and the adjustment clearance groove (17) and is connected to the gear (10).
4. The upper and lower lens coaxiality adjustment device according to claim 3, characterized in that: The inner wall of the lower part of the lower lens adjustment frame (8) is provided with a lower lens positioning groove (16) for fixing the lower lens, and the side wall of the upper part of the lower lens adjustment frame (8) is provided with an adjustment screw mounting hole (13) for the tail of the adjustment screw (11) to pass through.
5. The upper and lower lens coaxiality adjustment device according to claim 4, characterized in that: The coaxiality adjustment component comprises a concentric key (19) arranged on the outer wall of the lower end portion and a concentric groove (14) arranged on the upper inner wall of the lower lens adjustment frame (8), and the concentric key (19) and the concentric groove (14) are clearance-matched.
6. The upper and lower lens coaxiality adjustment device according to claim 3, characterized in that: The displacement adjustment component also includes a locking screw (12), the tail of the locking screw (12) passes through the side wall of the lower lens adjustment frame (8), the head of the locking screw (12) is located on one side of the outer wall of the lower lens adjustment frame (8), and the lower end is locked by rotating the locking screw (12).
7. The upper and lower lens coaxiality adjustment device according to claim 1, characterized in that: The device also comprises an upper lens mounting base (2), and the top of the upper lens (3) is fixed to the upper part of the fixing frame through the upper lens mounting base (2).
8. The upper and lower lens coaxiality adjustment device according to claim 1, characterized in that: The device also comprises a lower lens mounting base (5), and the bottom of the lower lens is fixed to the lower part of the fixing frame through the lower lens mounting base (5).
9. The upper and lower lens coaxiality adjustment device according to claim 1, characterized in that: The upper lens adjustment frame (7) and the lower lens adjustment frame (8) are configured as cylindrical structures.
10. The upper and lower lens coaxiality adjustment device according to claim 1, characterized in that: The fixing frame is configured as a C-shaped arm (6).