Plate glass deposition device

Abstract

The utility model discloses a plate glass deposition device, which comprises a chamber, an electron beam generator, a container, a rotating unit and a rotating body, the electron beam generator, the container, the rotating unit and the rotating body are arranged in the chamber, the chamber comprises a chamber main body and an opening and closing door arranged on one side of the chamber, the chamber main body is communicated with a vacuum generator, and the electron beam generator and the container are arranged at the bottom in the chamber main body. The upper part of the rotating body is connected with the rotating unit, a plurality of groups of fixed guide rails are arranged at the bottom of the rotating body, a plurality of groups of trays are slidably arranged at the bottoms of the fixed guide rails, and plate glass is arranged on the lower surfaces of the trays through double-sided adhesive tapes. The utility model has the advantages that not only is the deposition coating efficiency of the plate glass improved, but also the deposition coating of the large-area plate glass is realized.

Description

Technical Field

[0001] The utility model relates to the technical field of flat glass deposition coating, in particular to a flat glass deposition device. Background Art

[0002] Generally speaking, when transparent components such as glass plates or plastic films are used for display screens of electronic products such as televisions, smartphones, and laptop computers, coatings are applied to form coating films for various reasons, such as to improve aperture and readability, to reduce reflection of visible light by the transparent components, and to prevent scratches caused by external forces.

[0003] Methods for forming coating films on transparent components include: chemical vapor deposition; physical vapor deposition, which includes thermal deposition, flushing, electron beam deposition, and the like.

[0004] The electron beam cooling method is a method that uses electron beams to heat the vaporizer and cool it, and is suitable for materials with high efficiency, low pollution, and melting points. The electron beam detection method, when a strong current is supplied to the filament, it generates an electron beam, and the adhesive material is heated with an electron beam to be deposited on the opaque material to form a coating.

[0005] Prior art In the optical coating equipment using electron beam to coat glass substrate, a glass platform for coating material is installed. The platform bracket is installed at the bottom of the circular dome, and the rotating dome is installed on the rotating shaft centered on the rotating shaft, and multiple heat is arranged in the original direction. The platform carrier is equipped with a glass platform, and the glass platform is equipped with a glass platform.

[0006] However, the platform carrier for mounting the glass substrate is arranged in a circumferential direction with the circular rotation axis as the center, so the plate carrier cannot be arranged in the center part of the circular hole, which not only reduces the efficiency but also has the problem of being unsuitable for large-area glass deposition. Utility Model Content

[0007] The utility model aims to provide a flat glass deposition device, which not only improves the deposition coating efficiency of the flat glass, but also realizes the deposition coating of large-area flat glass.

[0008] The above technical objectives of the utility model are achieved through the following technical solutions:

[0009] A flat glass deposition device, characterized in that it includes a chamber 10 and an electron beam generator 20, a container 30, a rotating unit 40 and a rotating body 50 arranged inside the chamber 10, the chamber 10 includes a chamber body 11 and an opening and closing door 12 arranged on one side of the chamber, the chamber body 11 is connected to a vacuum generator, the electron beam generator 20 and the container 30 are installed at the bottom of the chamber body 11, the rotating unit 40 is installed in the middle of the upper surface of the chamber body 11, the upper part of the rotating body 50 is connected to the rotating unit 40, and a plurality of groups of fixed guide rails 60 are installed at the bottom of the rotating body 50, and a plurality of groups of trays 70 are slidably installed at the bottom of the fixed guide rails 60, and the lower surface of the tray 70 is mounted with a flat glass G by double-sided tape.

[0010] Preferably, the rotating body 50 includes a rotating ring 51 and a rotating shaft 52, the rotating shaft 52 is connected to the rotating unit 40, the rotating ring 51 is arranged on the outside of the rotating shaft 52, and connecting rods 53 are arranged between the inner side of the rotating ring 51 and the rotating shaft 52 at intervals along the circumferential direction, and at least two connecting rods 53 are provided.

[0011] Preferably, four groups of fixed guide rails 60 are provided, and the fixed guide rails 60 are parallel to each other and symmetrically arranged at the bottom of the rotating body 50. The two middle groups of fixed guide rails 60 are long-axis fixed guide rails 61, and the two groups of fixed guide rails 60 on both sides are short-axis fixed guide rails 62. The straight-line distance between the two groups of long-axis fixed guide rails 61 is greater than the straight-line distance between the long-axis fixed guide rail 61 and the short-axis fixed guide rail 62 on the same side.

[0012] Preferably, the tray 70 includes two groups of small trays 72 and one group of large trays 71, the large tray 71 is rectangular, the width of the large tray 71 is the distance between the two groups of long-axis fixed guide rails 61, the large tray 71 is horizontally movably inserted between the two groups of long-axis fixed guide rails 61 on both sides, the length of the large tray 71 is the same as the length of the long-axis fixed guide rail 61, the small tray 72 is trapezoidal in shape, the width of the small tray 72 is the distance between the long-axis fixed guide rail 61 and the short-axis fixed guide rail 62, the small tray 72 is horizontally movably inserted between the long-axis fixed guide rail 61 and the short-axis fixed guide rail 62 on both sides, and the short side of the small tray 72 corresponds to the length of the short-axis fixed guide rail 62, and the long side corresponds to the length of the long-axis fixed guide rail 61.

[0013] Preferably, the large tray 71 and the small tray 72 both include a glass mounting plate 5 of corresponding shape and a frame member 6 installed on the frames on both sides of the top surface of the glass mounting plate 5, and the glass mounting plate 5 is provided with heat dissipation holes 4. The heat dissipation holes 4 of the glass mounting plate in the large tray 71 are arranged in two rows.

[0014] Preferably, guide grooves 2 are horizontally opened along the length direction on both sides of the two groups of long-axis fixed guide rails 61 and on the inner sides of the two groups of short-axis fixed guide rails 62, and sliding protrusions 8 are provided on both sides of the small tray 72 and the large tray 71, and the sliding protrusions 8 are horizontally slidably inserted into the guide grooves 2.

[0015] Preferably, a plurality of guide rollers 3 are arranged inside the guide groove 2 below the sliding protrusion 8 , and the guide rollers 3 are arranged to roll relative to the bottom of the sliding protrusion 8 .

[0016] Preferably, when the four corners of the small tray 72 and the large tray 71 reach the set position of the fixed guide rail 60, they are fixed to the fixed guide rail 60 by bolts.

[0017] Preferably, a mask 80 is further provided between the electron beam generator 20 and the tray 70, and the mask 80 is mounted on a bracket 90, the bracket 90 is an inverted L-shape, and the bottom is fixedly mounted on the bottom of the chamber body 11, and the bracket 90 is movable up and down.

[0018] To sum up, the utility model has the following beneficial effects: the utility model provides multiple tray installations, which can adapt to flat glass of different sizes. Both small-size and large-area flat glass can be installed and fixed, which increases the practicality of the device. The utility model uses a sliding installed tray to achieve that the center part of the platform can also be used to install a flat plate for deposition coating, thereby improving the installation and deposition coating efficiency of the flat glass. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the internal structure of the device of the utility model;

[0020] Figure 2 It is a schematic diagram of the installation structure of the rotating body and the fixed guide rail of the utility model;

[0021] Figure 3 It is a front view of the installation structure of the rotating unit, rotating body, fixed guide rail and tray of the utility model;

[0022] Figure 4 It is a top view of the installation structure of the rotating body, fixed guide rail and tray of the utility model;

[0023] Figure 5 It is a schematic diagram of the tray structure of the utility model;

[0024] Figure 6 It is a detailed view of the connection between the tray and the fixed guide rail of the utility model. DETAILED DESCRIPTION

[0025] The specific implementation manner of the present utility model is further described below in conjunction with the accompanying drawings. This embodiment does not constitute a limitation to the present utility model.

[0026] like Figures 1 to 6 A flat glass deposition device shown includes a chamber 10 and an electron beam generator 20, a container 30, a rotating unit 40 and a rotating body 50 arranged inside the chamber 10. The chamber 10 includes a chamber body 11 and an opening and closing door 12 arranged on one side of the chamber. The chamber body 11 is connected to a vacuum generator. When the opening and closing door 12 is in a closed state, the deposition space of the chamber body 11 can be placed in a vacuum state through the vacuum generator. The electron beam generator 20 and the container 30 are installed at the bottom of the chamber body 11. The container 30 contains an adhesive material heated by an electron beam. The container may contain one filling material or multiple filling materials. The container 30 may contain prescribed attachment materials such as an AR coating for preventing reflection and an ETC coating for preventing scratches. In addition, materials such as HfO2 and SiO2 are also used. The rotating unit 40 is installed in the middle of the upper surface of the chamber body 11. The upper part of the rotating body 50 is connected to the rotating unit 40. Several groups of fixed guide rails 60 are installed at the bottom of the rotating body 50. Several groups of trays 70 are slidably installed at the bottom of the fixed guide rails 60. The lower surface of the tray 70 is installed with flat glass G by double-sided tape.

[0027] The rotating body 50 includes a rotating ring 51 and a rotating shaft 52. The rotating shaft 52 is connected to the rotating unit 40. The rotating ring 51 is arranged on the outside of the rotating shaft 52. Connecting rods 53 are arranged symmetrically at intervals along the circumferential direction between the inner side of the rotating ring 51 and the rotating shaft 52. There are at least two connecting rods 53. Figure 2 As shown, the utility model uses four connecting rods 53, which are vertically arranged at 90 degrees to each other. The connecting rods 53 can be bent into a spring shape or a straight line shape. The cross-sectional shape of the rotating ring 51 can be a rectangle or other shapes.

[0028] Four groups of fixed guide rails 60 are provided. The fixed guide rails 60 are parallel to each other and symmetrically arranged at the bottom of the rotating body 50. The two middle groups of fixed guide rails 60 are long-axis fixed guide rails 61, and the two groups of fixed guide rails 60 on both sides are short-axis fixed guide rails 62. The straight-line distance between the two groups of long-axis fixed guide rails 61 is greater than the straight-line distance between the long-axis fixed guide rail 61 and the short-axis fixed guide rail 62 on the same side.

[0029] The tray 70 includes two groups of small trays 72 and one group of large trays 71. The large tray 71 is rectangular. The width of the large tray 71 is the distance between the two groups of long-axis fixed guide rails 61. The large tray 71 is horizontally movably inserted between the two groups of long-axis fixed guide rails 61 on both sides. The length of the large tray 71 is the same as the length of the long-axis fixed guide rail 61. The small tray 72 is trapezoidal in shape. The width of the small tray 72 is the distance between the long-axis fixed guide rail 61 and the short-axis fixed guide rail 62. The small tray 71 is horizontally movably inserted between the long-axis fixed guide rail 61 and the short-axis fixed guide rail 62 on both sides, and the short side of the small tray 72 corresponds to the length of the short-axis fixed guide rail 62, and the long side corresponds to the length of the long-axis fixed guide rail 61.

[0030] The large tray 71 and the small tray 72 both include a glass mounting plate 5 of corresponding shape and frame components 6 mounted on the frames on both sides of the top surface of the glass mounting plate 5. The glass mounting plate 5 is provided with heat dissipation holes 4. The heat dissipation holes 4 of the glass mounting plate in the large tray 71 are arranged in two rows.

[0031] Guide grooves 2 are horizontally opened along the length direction on both sides of the two sets of long-axis fixed guide rails 61 and on the inner sides of the two sets of short-axis fixed guide rails 62. Sliding protrusions 8 are provided on both sides of the small tray 72 and the large tray 71, and the sliding protrusions 8 are horizontally slidably inserted into the guide grooves 2.

[0032] A plurality of guide rollers 3 are arranged inside the guide groove 2 below the sliding protrusion 8 , and the guide rollers 3 are arranged to roll relative to the bottom of the sliding protrusion 8 .

[0033] When the four corners of the small tray 72 and the large tray 71 reach the set positions of the fixed rail 60 , they are fastened to the fixed rail 60 by bolts.

[0034] A mask 80 is also provided between the electron beam generator 20 and the tray 70. The mask 80 is installed on a bracket 90. The bracket 90 is an inverted L-shape, and the bottom is fixedly installed at the bottom of the chamber body 11. The bracket 90 is movable up and down, and the position of the mask 80 is adjusted by moving the bracket 90 up and down.

[0035] The workflow of the utility model is as follows: first, the rotating body 50 located inside the chamber 10 is rotated to position one end of the fixed guide rail 60 in the front direction, and the tray 70 is positioned in the horizontal direction, and then inserted and pushed between the two fixed guides 60, that is, the large tray 71 is pushed between the two long-axis fixed guide rails 61 to couple them, and the small tray 72 is pushed between the short-axis fixed guide rail 62 and the long-axis fixed guide rail 61 to couple them. The trays 70 are coupled between the fixed guide rails 60, and then both sides of each tray 70 are fixed with bolts, so that one side of the tray 70 is fixed to the fixed guide rail 60, and then, when the rotating body 50 is rotated 180 degrees, the other sides of the tray 70 are fixed with bolts, and the other side of the tray 70 is fixed to the fixed guide rail 60, so that the tray 70 has been reliably fixed to the fixed guide rail 60.

[0036] Then, a flat glass G is installed on the bottom of the tray 70. The flat glass G is attached to the lower surface of the tray 70 by double-sided tape. A large flat glass G can be installed on the lower surface of the tray 70, or multiple small flat glasses G can be installed on the lower surface of the tray 70. After the flat glass G is installed on the lower surface of the tray 70, the interior of the chamber 10 is evacuated to form a vacuum.

[0037] Next, the rotating body 50 is rotated by the rotation driving unit 40. As the rotating body 50 rotates, the tray 70 fixed on the fixed guide rail 60 is rotated, and an electron beam is generated in the electron beam generator 20, and the electron beam is guided to the deposition material contained in the container 30. The evaporation material is heated by the electron beam to vaporize it, and the vaporized evaporation material is condensed into a solid on the surface of the flat glass G mounted on the tray 70 to form a thin film layer.

[0038] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art may make various modifications or equivalent substitutions to the present invention within the essence and protection scope of the present invention, and such modifications or equivalent substitutions should also be deemed to fall within the protection scope of the technical solution of the present invention.

Claims

1. A flat glass deposition device, characterized in that: The invention comprises a chamber (10), an electron beam generator (20), a container (30), a rotating unit (40) and a rotating body (50) arranged inside the chamber (10); the chamber (10) comprises a chamber body (11) and an opening and closing door (12) arranged on one side of the chamber; the chamber body (11) is connected to a vacuum generator; the electron beam generator (20) and the container (30) are installed at the bottom of the chamber body (11); the rotating unit (40) is installed at the middle of the upper surface of the chamber body (11); the upper part of the rotating body (50) is connected to the rotating unit (40); a plurality of groups of fixed guide rails (60) are installed at the bottom of the rotating body (50); a plurality of groups of trays (70) are slidably installed at the bottom of the fixed guide rails (60); a flat glass (G) is installed on the lower surface of the tray (70) by means of double-sided adhesive tape.

2. A flat glass deposition device according to claim 1, characterized in that: The rotating body (50) comprises a rotating ring (51) and a rotating shaft (52), wherein the rotating shaft (52) is connected to the rotating unit (40), the rotating ring (51) is arranged on the outside of the rotating shaft (52), and connecting rods (53) are arranged between the inside of the rotating ring (51) and the rotating shaft (52) at intervals symmetrically along the circumferential direction, and at least two connecting rods (53) are provided.

3. The flat glass deposition device according to claim 1, characterized in that: Four groups of the fixed guide rails (60) are provided. The fixed guide rails (60) are parallel to each other and symmetrically arranged at the bottom of the rotating body (50). The two middle groups of the fixed guide rails (60) are long-axis fixed guide rails (61), and the two groups of the fixed guide rails (60) on both sides are short-axis fixed guide rails (62). The straight-line distance between the two groups of the long-axis fixed guide rails (61) is greater than the straight-line distance between the long-axis fixed guide rail (61) and the short-axis fixed guide rail (62) on the same side.

4. A flat glass deposition device according to claim 3, characterized in that: The tray (70) comprises two groups of small trays (72) and one group of large trays (71); the large tray (71) is rectangular; the width of the large tray (71) is the distance between the two groups of long-axis fixed guide rails (61); the two sides of the large tray (71) are horizontally movably inserted between the two groups of long-axis fixed guide rails (61); the length of the large tray (71) is the same as the length of the long-axis fixed guide rail (61); the small tray (72) is trapezoidal; the width of the small tray (72) is the distance between the long-axis fixed guide rail (61) and the short-axis fixed guide rail (62); the two sides of the small tray (72) are horizontally movably inserted between the long-axis fixed guide rail (61) and the short-axis fixed guide rail (62); and the short side of the small tray (72) corresponds to the length of the short-axis fixed guide rail (62), and the long side corresponds to the length of the long-axis fixed guide rail (61).

5. A flat glass deposition device according to claim 4, characterized in that: The large tray (71) and the small tray (72) both comprise a glass mounting plate (5) of corresponding shape and frame members (6) mounted on the frames on both sides of the top surface of the glass mounting plate (5); the glass mounting plate (5) is provided with heat dissipation holes (4); and the heat dissipation holes (4) of the glass mounting plate in the large tray (71) are arranged in two rows.

6. The flat glass deposition device according to claim 4, characterized in that: Guide grooves (2) are horizontally provided along the length direction on both sides of the two groups of long-axis fixed guide rails (61) and on the inner sides of the two groups of short-axis fixed guide rails (62). Sliding protrusions (8) are provided on both sides of the small tray (72) and the large tray (71). The sliding protrusions (8) are horizontally slidably inserted into the guide grooves (2).

7. A flat glass deposition device according to claim 6, characterized in that: A plurality of guide rollers (3) are arranged inside the guide groove (2) below the sliding protrusion (8), and the guide rollers (3) are arranged to roll relative to the bottom of the sliding protrusion (8).

8. The flat glass deposition device according to claim 4, characterized in that: When the four corners of the small tray (72) and the large tray (71) reach the set position of the fixed guide rail (60), they are fixed to the fixed guide rail (60) by bolts.

9. The flat glass deposition device according to claim 4, characterized in that: A mask (80) is also provided between the electron beam generator (20) and the tray (70); the mask (80) is mounted on a bracket (90); the bracket (90) is in an inverted L shape, with a bottom fixedly mounted on the bottom of the chamber body (11); and the bracket (90) is movable up and down.

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