Ultra-precise temperature-control efficient filtering device

Abstract

The utility model discloses an ultra-precise temperature-control high-efficiency filtering device which comprises an FFU high-efficiency filtering unit and an electric heating device, the FFU is provided with a mounting groove, and the electric heating device is integrated in the mounting groove of the FFU; the electric heating device is provided with an upper air inlet, a pressurizing air duct is arranged in the FFU, and external air enters the electric heating device from the upper air inlet, is heated to a certain temperature by the electric heating device and then enters the pressurizing air duct; and a sealing structure is arranged at the joint of the electric heating device and the FFU. According to the filtering device disclosed by the utility model, the temperature precision control of + / -0.01 DEG C in the purification industry is realized through the electric heating device; and meanwhile, the electric heating device and the FFU serve as main equipment, so that the occupied space of the high-precision temperature control environment air conditioning system is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors and high-precision instruments, and in particular to an ultra-precision temperature-controlled high-efficiency filtering device. Background Art

[0002] Most electronic cleanroom workshops use dry terminal coils (DCC) or cold coils in cleanroom air conditioning units (CAU) for temperature control. This method is suitable for cleanroom systems with a temperature control accuracy of more than ±1°C. For high-precision temperature control with a control accuracy higher than ±0.1°C, CAU+multi-stage electric heating is generally used in the market. This control method occupies a large building space, has a serious cold and heat offset phenomenon, and has high operating costs.

[0003] In the prior art, the Chinese utility model patent with application number 202223552821.5 and titled "A High-efficiency Constant Temperature Filtration Unit" adopts a fan filter unit (FFU) + DCC product, which solves the problem that the high-precision temperature control system occupies a large building space and has high operating costs. However, the maximum temperature control accuracy of the previous generation of products can only reach ±0.1°C, and the DCC part of the product needs to be connected with an air-conditioning water pipe. A large number of air-conditioning water pipes are arranged above the clean room, which may cause water leakage and damage high-end process equipment.

[0004] Therefore, based on the above technical problems, technicians in this field urgently need to develop an ultra-precision temperature-controlled and high-efficiency filtration device. Utility Model Content

[0005] The purpose of the utility model is to provide an ultra-precision temperature-controlled high-efficiency filtering device, which has a temperature accuracy of ±0.01°C. Compared with the traditional CAU+ multi-stage electric heating method, it saves a lot of building space, reduces cold and heat offset, and saves operating energy consumption.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] The utility model discloses an ultra-precision temperature-controlled high-efficiency filtering device, which comprises:

[0008] FFU high efficiency filtration unit and electric heating device;

[0009] The FFU high-efficiency filter unit has a mounting groove, and the electric heating device is integrated into the mounting groove of the FFU high-efficiency filter unit;

[0010] The electric heating device has an upper air inlet, and a pressurized air cylinder is arranged in the FFU high-efficiency filter unit. External air enters the electric heating device through the upper air inlet, and enters the pressurized air cylinder after being heated to a certain temperature by the electric heating device;

[0011] A sealing structure is provided at the connection between the electric heating device and the FFU high efficiency filtering unit.

[0012] Furthermore, a filter assembly for purifying the air heated by the electric heating device is provided inside the FFU high efficiency filter unit;

[0013] The installation groove is provided at the center of the upper part of the FFU high efficiency filter unit, the size of the installation groove matches the electric heating device, and the electric heating device is partially embedded in the installation groove;

[0014] The sealing structure is arranged at the edge of the mounting groove.

[0015] Furthermore, the internal heating element of the electric heating device is a fin tube;

[0016] The fin tube is supported by an electric heating fixing structure and fixed in the electric heating device, and an overheating protection element is integrated on the fin tube;

[0017] The electric heating device comprises:

[0018] The temperature control unit shell is provided with the upper air inlet, and a power box is integrated on one side of the temperature control unit shell, the fin tube is connected to the power box through an electric wire, and the power box supplies power to the fin tube.

[0019] Furthermore, the upper air inlet is provided with a filter.

[0020] Furthermore, the electric heating fixed structure is symmetrically arranged at the bottom of the fin tube;

[0021] The electric heating fixing structure comprises:

[0022] A channel steel supported at the bottom of the fin tube, and a side wing plate of the channel steel is supported at the bottom of the fin tube; and

[0023] A clamp is arranged on the wing plate of the channel steel, and the fin tube is fixed to the channel steel through the clamp.

[0024] Furthermore, the channel steel is made of galvanized steel plate.

[0025] In the above technical solution, the utility model provides an ultra-precision temperature-controlled high-efficiency filtering device, which has the following beneficial effects:

[0026] The filtering device of the utility model is provided with two main devices, an electric heating device and an FFU high-efficiency filtering unit. The electric heating device is used as an electric heating temperature control device, and the FFU high-efficiency filtering unit is used as a purification air conditioning control device, ensuring that all purified air passes through the electric heating device and the FFU high-efficiency filtering unit in sequence to finally form a high-efficiency constant temperature filtering unit. The device has a high degree of integration and the temperature control accuracy can be controlled within ±0.01°C. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0028] Figure 1 This is a schematic diagram of the structure of the ultra-precision temperature-controlled high-efficiency filtering device disclosed in the embodiment of the present application;

[0029] Figure 2 It is an enlarged structural diagram of the electric heating device of the ultra-precision temperature-controlled high-efficiency filtering device disclosed in the embodiment of the present application;

[0030] Figure 3 It is a cross-sectional view of the electric heating device of the ultra-precision temperature-controlled high-efficiency filtering device disclosed in the embodiment of the present application.

[0031] Description of reference numerals:

[0032] 1. FFU high efficiency filtration unit; 2. Electric heating device; 3. Sealing structure; 4. Electric heating fixed structure;

[0033] 101. mounting slot; 102. pressurized air duct;

[0034] 201, temperature control unit housing; 202, upper air inlet; 203, filter screen; 204, power supply box; 205, fin tube; 206, wire; 207, filter protection element;

[0035] 401, channel steel; 402, clamp. DETAILED DESCRIPTION

[0036] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0037] See also Figures 1 to 3 As shown;

[0038] This embodiment discloses an ultra-precision temperature-controlled high-efficiency filtering device, which includes:

[0039] FFU high efficiency filtration unit 1 and electric heating device 2;

[0040] The FFU high-efficiency filter unit 1 has a mounting groove 101, and the electric heating device 2 is integrated into the mounting groove 101 of the FFU high-efficiency filter unit 1;

[0041] The electric heating device 2 has an upper air inlet 202, and a pressurized air cylinder 102 is provided in the FFU high efficiency filter unit 1. External air enters the electric heating device 2 through the upper air inlet 202, and enters the pressurized air cylinder 102 after being heated to a certain temperature by the electric heating device 2;

[0042] A sealing structure 3 is provided at the connection between the electric heating device 2 and the FFU high efficiency filtering unit 1 .

[0043] Specifically, the present embodiment discloses an ultra-precision temperature-controlled high-efficiency filtering device, which mainly includes two devices, an FFU high-efficiency filtering unit 1 and an electric heating device 2; the two are integrated together, specifically, the electric heating device 2 is embedded and integrated in the air inlet position of the FFU high-efficiency filtering unit 1, that is, the FFU high-efficiency filtering unit 1 is provided with a mounting groove 101 matching the electric heating device 2, and the electric heating device 2 is partially embedded in the mounting groove 101. Since this part is an air inlet structure, it is necessary to set a sealing structure 3 at the connection between the electric heating device 2 and the mounting groove 101. There are many types of sealing structures 3, such as being sealed at the edge of the mounting groove by a steel plate and a sealing gasket, or other structures with a sealing effect. The type and structure of the sealing structure 3 are not the key design of this application. As long as the structure meets the sealing requirements, it will not be repeated.

[0044] Based on the combination of the electric heating device 2 and the FFU high-efficiency filter unit 1 of the present embodiment, the air entering the device passes through the electric heating device 2 and the FFU high-efficiency filter unit 1 in sequence, and is first temperature-controlled and heated in the electric heating device 2. After being heated to a specified temperature, the heated air enters the FFU high-efficiency filter unit 1 through the pressurized air cylinder 102, and the air is purified by the filter component in the FFU high-efficiency filter unit 1, and finally discharged into the room.

[0045] Preferably, the FFU high-efficiency filter unit 1 of this embodiment is internally provided with a filter assembly for purifying the air heated by the electric heating device 2;

[0046] A mounting groove 101 is provided at the center of the upper portion of the FFU high efficiency filter unit 1. The size of the mounting groove 101 matches the electric heating device 2, and the electric heating device 2 is partially embedded in the mounting groove 101.

[0047] A sealing structure 3 is disposed at the edge of the mounting groove 101 .

[0048] Preferably, the internal heating element of the electric heating device 2 of this embodiment is a fin tube 205; the interior of the electric heating device 2 of this embodiment mainly uses the fin tube 205 as the electric heating element, and the fin tube 205 is arranged in the form of a serpentine trajectory distribution in the electric heating device 2, that is, in the temperature control unit shell 201 described below, and the air entering from the upper air inlet 202 is heated and temperature-controlled by the fin tube 205, and according to the requirements of the process and equipment, the working condition of the fin tube 205 is controlled by a controller and necessary detection elements, and the temperature of the air heating is monitored.

[0049] Secondly, from the installation perspective, the fin tube 205 of this embodiment is supported and fixed in the electric heating device 2 by the electric heating fixing structure 4, and the overheating protection element 207 is integrated on the fin tube 205;

[0050] The electric heating device 2 comprises:

[0051] The temperature control unit shell 201 is provided with an upper air inlet 202 , and a power box 204 is integrated on one side of the temperature control unit shell 201 . The fin tube 205 is connected to the power box 204 via an electric wire 206 , and the power box 204 supplies power to the fin tube 205 .

[0052] The present embodiment further defines the structural composition of the electric heating device 2, the exterior of which is a temperature control unit shell 201, and the interior of which is supported and fixed by an electric heating fixed structure 4 for the serpentine-arranged fin tubes 205. At the same time, in order to be able to supply power to the fin tubes 205, a power box 204 is integrated on one side of the temperature control unit shell 201 of the present embodiment, and is electrically connected to the fin tubes 205 by wires 206, thereby ensuring the heating of the fin tubes 205 under the control of the controller.

[0053] More preferably, the upper air inlet 202 of this embodiment is provided with a filter 203. In this embodiment, the filter 203 is integrated in the upper air inlet 202, and the material can be selected from stainless steel mesh, which can effectively prevent debris from entering the air duct, not only protecting the internal electric heating element, but also further improving the air quality, and also reducing the workload of the filter assembly in the FFU high-efficiency filter unit 1 at the downstream end of the process.

[0054] Preferably, the electric heating fixed structure 4 of this embodiment is symmetrically arranged at the bottom of the fin tube 205;

[0055] The electric heating fixed structure 4 comprises:

[0056] A channel steel 401 is supported at the bottom of the fin tube 205, and a side wing plate of the channel steel 401 is supported at the bottom of the fin tube 205; and

[0057] The clamp 402 is arranged on the wing plate of the channel steel 401 , and the fin tube 205 is fixed to the channel steel 401 through the clamp 402 .

[0058] The channel steel 401 of this embodiment is made of galvanized steel plate.

[0059] This embodiment further defines the integration method of the fin tube 205, which uses galvanized steel plates to be processed into a channel steel structure, and the channel steel 401 is placed horizontally, wherein the wing plate on one side supports the fin tube 205, and the wing plate on the other side is supported on the shell structure, so that the fin tube 205 is supported and fixed inside the electric heating device 2. Secondly, since the fin tube 205 of this embodiment adopts a serpentine distribution form, two groups of electric heating fixing structures 4 are symmetrically arranged in the extension direction, that is, the length direction, and two channel steels 401 with a length that meets the requirements are placed under the fin tube 205, and then the fin tube 205 is positioned and fixed using the clamp 402.

[0060] In the above technical solution, the utility model provides an ultra-precision temperature-controlled high-efficiency filtering device, which has the following beneficial effects:

[0061] The filtering device of the utility model is provided with two main devices, an electric heating device 2 and an FFU high-efficiency filtering unit 1. The electric heating device 2 is used as an electric heating temperature control device, and the FFU high-efficiency filtering unit 1 is used as a purification air conditioning control device, ensuring that all purified air passes through the electric heating device 2 and the FFU high-efficiency filtering unit 1 in sequence to finally form a high-efficiency constant temperature filtering unit. The device has a high degree of integration and the temperature control accuracy can be controlled at ±0.01°C.

[0062] The filter device of the utility model realizes temperature precision control of ±0.01°C in the purification industry through the electric heating device 2; at the same time, the electric heating device 2 and FFU are used as main equipment to save the space occupied by the high-precision temperature control environment air-conditioning system.

[0063] The filtering device of the utility model saves initial investment and operating energy consumption; avoids the hidden danger of water leakage above the suspended ceiling, and protects the safety of important equipment and property.

[0064] The above only describes some exemplary embodiments of the present invention by way of illustration. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. Ultra-precision temperature control high-efficiency filtering device, characterized in that: The device includes: FFU high efficiency filtration unit (1) and electric heating device (2); The FFU high-efficiency filter unit (1) has a mounting groove (101), and the electric heating device (2) is integrated in the mounting groove (101) of the FFU high-efficiency filter unit (1); The electric heating device (2) has an upper air inlet (202), and a pressurized air cylinder (102) is arranged in the FFU high-efficiency filter unit (1), and external air enters the electric heating device (2) through the upper air inlet (202), and enters the pressurized air cylinder (102) after being heated to a certain temperature by the electric heating device (2); A sealing structure (3) is provided at the connection between the electric heating device (2) and the FFU high-efficiency filtering unit (1).

2. The ultra-precision temperature-controlled high-efficiency filtering device according to claim 1, characterized in that: The FFU high-efficiency filter unit (1) is provided with a filter component inside for purifying the air heated by the electric heating device (2); The installation groove (101) is provided at the center of the upper part of the FFU high-efficiency filter unit (1), the size of the installation groove (101) matches the electric heating device (2), and the electric heating device (2) is partially embedded in the installation groove (101); The sealing structure (3) is provided at the edge of the installation groove (101).

3. The ultra-precision temperature-controlled high-efficiency filtering device according to claim 1, characterized in that: The internal heating element of the electric heating device (2) is a fin tube (205); The fin tube (205) is supported and fixed in the electric heating device (2) by an electric heating fixing structure (4), and an overheating protection element (207) is integrated on the fin tube (205); The electric heating device (2) comprises: A temperature control unit shell (201), wherein the temperature control unit shell (201) is provided with the upper air inlet (202), and a power box (204) is integrated on one side of the temperature control unit shell (201), the fin tube (205) is connected to the power box (204) via an electric wire (206), and the power box (204) supplies power to the fin tube (205).

4. The ultra-precision temperature-controlled high-efficiency filtering device according to claim 3, characterized in that: The upper air inlet (202) is provided with a filter screen (203).

5. The ultra-precision temperature-controlled high-efficiency filtering device according to claim 3, characterized in that: The electric heating fixed structure (4) is symmetrically arranged at the bottom of the fin tube (205); The electric heating fixed structure (4) comprises: A channel steel (401) supported at the bottom of the fin tube (205), and a side wing plate of the channel steel (401) supported at the bottom of the fin tube (205); as well as A clamp (402) is arranged on the wing plate of the channel steel (401), and the fin tube (205) is fixed to the channel steel (401) through the clamp (402).

6. The ultra-precision temperature-controlled high-efficiency filtering device according to claim 5, characterized in that: The channel steel (401) is made of galvanized steel plate.

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