Ball mounting device for overcoming warping of substrate
By introducing telescopic arms and resistance to the ball transplanting device, the problem of poor ball transplanting effect caused by substrate warping is solved, and the uniform distribution of the ball ball and the improvement of ball transplanting effect is achieved.
Patent Information
- Application Number
- CN202420355119.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-27
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2034-02-27
AI Technical Summary
In semiconductor manufacturing processes, large-sized substrates are prone to warping during production, resulting in the accumulation of hot balls in the middle of the substrate during the ball planting process, and the ball planting effect is poor.
A ball planting device is designed, including a machine and a steel mesh. The machine is equipped with a telescopic arm and a resistant hand. The resistant hand is connected to the telescopic arm through a connecting seat, which is used to resist and press the steel mesh, so that the middle part is concave and adapt to the warping degree of the substrate, thereby achieving uniform distribution of the hot balls.
Through the cooperation of the resistance finger and the telescopic arm, the warped substrate can be effectively pressed and adapted to improve the ball planting effect and evenly distributed on the substrate.
Smart Images

Figure CN222867627U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of manual ball implantation devices, and in particular to a ball implantation device for overcoming substrate warping. Background Art
[0002] In the semiconductor manufacturing process, the product needs to be printed and ball-planted. The specific ball-planting device is to place a substrate on the machine, and a steel mesh that matches the substrate is placed on the upper side of the machine. The steel mesh is provided with corresponding circular ball-planting holes. When planting the ball, a tin ball is placed in each ball-planting hole, and the tin ball is melted and fixed on the substrate through heating or other welding technology. After cooling, the steel mesh is removed to complete the ball planting.
[0003] Reference Figure 1 However, in actual situations, large-sized substrates are warped during the production process, and then during the ball implantation process, solder balls will accumulate in the middle of the substrate, resulting in poor ball implantation effects. Utility Model Content
[0004] In order to improve the fit between the steel mesh and the substrate and improve the ball planting effect, the present application provides a ball planting device for overcoming the warping of the substrate.
[0005] The present application provides a ball planting device for overcoming the warping of a substrate, which adopts the following technical solution: a ball planting device for overcoming the warping of a substrate, comprising a machine platform and a steel mesh, wherein a resistance structure for resisting against the steel mesh is installed on the machine platform, wherein the resistance structure comprises a telescopic arm fixed on the machine platform and a resistance hand arranged at the end of the telescopic arm, wherein an end of the resistance hand away from the telescopic arm is used for resisting against the steel mesh; a plurality of the resistance hands are provided, and the plurality of the resistance hands are connected to the telescopic arm via a connecting seat.
[0006] By adopting the above technical solution, during the ball planting process, for substrates with a large degree of warping, the substrates are pressed against the steel mesh by the resisting hand, and the telescopic arm is used to press in a direction perpendicular to the substrate, so that the middle part of the steel mesh is concave and adapted to the degree of warping of the substrate below. During the ball planting process, the solder balls can be distributed more evenly on the substrate.
[0007] Preferably, the abutment comprises a fixed block connected to the connection seat and two top plates arranged in parallel on the fixed block, and the top plates are used to abut against the solid part of the steel mesh.
[0008] By adopting the above technical solution, the fixed block is used for connection, and the top plate is mainly used to abut against the steel mesh, and the specific position of the abutment is the part outside the holes of the steel mesh, which can withstand pressure but will not affect the position of the holes.
[0009] Preferably, the two top plates are slidably connected to the fixing block in opposite directions.
[0010] By adopting the above technical solution, the top plate can be adjusted according to the size of the steel mesh.
[0011] Preferably, the top plate has a slider slidably connected to the fixed block in a circumferentially limited manner, the fixed block is rotatably connected to a bidirectional threaded rod passing through and threadedly connected to the slider, and the two sliders are respectively connected to opposite parts of the bidirectional threaded rod.
[0012] By adopting the above technical solution, after rotating the bidirectional threaded rod, in cooperation with the circumferential limit of the slider, the top plates can move relative to or away from each other to adjust the distance between the two top plates.
[0013] Preferably, a side of the top plate away from the fixing block has a receiving groove, the receiving groove extends along the length direction of the top plate, and an adjusting column is provided in the receiving groove for lifting and lowering along the vertical direction.
[0014] By adopting the above technical solution, for some parts where the warping degree is not so uniform, by adjusting the vertical movement of the column, a certain point can be made more prominent, so that a better adaptation effect can be achieved during the top plate pressing process.
[0015] Preferably, a plurality of the adjusting columns are evenly distributed along the extending direction of the accommodating groove.
[0016] Preferably, an elastic leather sheet is disposed on the top plate and wrapped around the notch of the accommodating groove, and the end of the adjusting column is fixedly connected to the inner side of the elastic leather sheet.
[0017] By adopting the above technical solution, in the process of adjusting the top pressure of the column, the elastic leather sheet can keep the lower side of the top plate as a complete surface, and can form a relatively stable top pressure effect.
[0018] Preferably, the bottom of the accommodating groove has a threaded hole corresponding to the adjusting column, and the adjusting column is threadedly connected to the threaded hole.
[0019] Preferably, the inner side of the elastic leather sheet has a rotating body, and the rotating body includes an outer ring body fixed on the elastic leather sheet, and an inner ring body rotatably connected to the inner side of the outer ring body, and the inner ring body is fixedly connected to the end of the adjusting column.
[0020] By adopting the above technical solution, during the adjustment process, the adjustment column will rotate relatively, and at this time the inner ring body and the outer ring body will rotate relatively, thereby achieving the effect that the elastic leather piece will not rotate during the adjustment process.
[0021] To summarize, the present application includes at least one of the following beneficial technical effects: during the ball planting process, for substrates with a large degree of warping, the substrates are pressed against the steel mesh by a resisting hand, and the telescopic arm is used to press in a direction perpendicular to the substrate, so that the middle part of the steel mesh is concave and adapted to the degree of warping of the substrate below. During the ball planting process, the solder balls can be distributed more evenly on the substrate. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 It is a schematic diagram of the steel mesh and substrate during ball planting in the prior art;
[0023] Figure 2 is a schematic diagram of the structure of Example 1 of the present application;
[0024] Figure 3 It is a partial structural schematic diagram of Example 1 of the present application;
[0025] Figure 4 It is a schematic diagram of the positional relationship between the steel mesh and the top plate;
[0026] Figure 5 is a schematic diagram of the internal structure of the fixed block in Example 1 of the present application;
[0027] Figure 6 is a schematic diagram of the internal structure of the top plate in Example 2 of the present application;
[0028] Figure 7 yes Figure 6 Enlarged schematic diagram of part A.
[0029] Explanation of the reference numerals: 100, machine platform; 110, steel mesh; 111, telescopic arm; 112, resisting hand; 113, connecting seat; 114, fixing block; 115, top plate; 116, slider; 117, sliding groove; 118, bidirectional threaded rod; 120, accommodating groove; 121, adjusting column; 122, threaded hole; 123, elastic leather sheet; 124, outer ring body; 125, inner ring body. DETAILED DESCRIPTION
[0030] The present application is further described in detail below in conjunction with the accompanying drawings. Embodiment 1:
[0031] A ball implantation device for overcoming substrate warping, referring to Figure 2, including a machine 100 and a steel mesh 110, the machine 100 is equipped with a resistance structure for resisting the steel mesh 110, the resistance structure includes a telescopic arm 111 fixed on the machine 100, and a resistance hand 112 arranged at the end of the telescopic arm 111, and the resistance hand 112 is used to resist the steel mesh 110 at one end away from the telescopic arm 111. The telescopic arm 111 can use a driving member such as a cylinder to achieve movement in the vertical direction, and other driving mechanical arms can also be used. It is best to use a telescopic arm 111 that can achieve movement in the XYZ directions, and it can be selected according to actual needs.
[0032] Reference Figure 1 , Figure 2 There are a plurality of resisting hands 112, and the plurality of resisting hands 112 are connected to the telescopic arm 111 through a connecting seat 113. For a substrate with an additional warped portion, additional resisting hands 112 can be added for top pressing. When the telescopic arm 111 performs top pressing, each resisting hand 112 is pressed down through the connecting seat 113.
[0033] The contact hand 112 includes a fixed block 114 connected to the connection seat 113, and two top plates 115 arranged in parallel on the fixed block 114. The top plates 115 are used to contact the solid part of the steel mesh 110. The fixed block 114 is fixed to the connection seat 113 by bolts and can be disassembled and positioned according to needs. The top plates 115 will contact the edges of the holes of the steel mesh 110 (such as Figure 3 as shown) to obtain better force without affecting the hole shape.
[0034] Reference Figure 3 , Figure 5 For substrates of different sizes, the size of the steel mesh 110 and the size of the holes will also be different, so in this embodiment, the distance between the top plates 115 is adjustable. A slider 116 is provided on the upper side of the top plate 115, and a sliding groove 117 is provided on the fixed block 114 at a position perpendicular to the top plate 115. The slider 116 is embedded and circumferentially limited in the sliding groove 117. A bidirectional threaded rod 118 is rotatably connected to the fixed block 114. The two ends of the bidirectional threaded rod 118 are respectively inserted into the two sliders 116 and threadedly matched therewith. In this way, in the process of rotating the bidirectional threaded rod 118, the two sliders 116 can move relative to or away from each other, thereby adjusting the distance between the two top plates 115.
[0035] The implementation principle of Example 1 of the present application is: for a substrate with a warped middle part, after adjusting the distance of the top plate 115 on the resisting hand 112 to an appropriate value, it resists against the solid part of the steel mesh 110, and then the telescopic arm 111 presses down to form an adaptation operation for the warped product. At this time, the qualified rate of ball planting is greatly improved. Embodiment 2:
[0036] The difference from Example 1 is that, referring to Figure 6 The top plate 115 has a receiving groove 120 on one side away from the fixed block 114. The receiving groove 120 extends along the length direction of the top plate 115. An adjusting column 121 is provided in the receiving groove 120 to be lifted and lowered in the vertical direction. Specifically, the adjusting column 121 is threadedly connected to the fixed block 114. A threaded hole 122 corresponding to the adjusting column 121 is provided at the bottom of the receiving groove 120. The adjusting column 121 has a plurality of holes along the extending direction of the receiving groove 120. By rotating, the end of the adjusting column 121 can be extended out of the top plate 115.
[0037] Its specific applicable working condition is that for substrates with uneven warping degrees, a shape similar to a partial convex point is formed on part of the top plate 115 by adjusting the end of the column 121, and a top pressure is applied to the steel mesh 110 in certain areas to better adapt to the substrate. This is a fine-tuning function. In addition, for the case of multiple resistance hands 112, the initial pressure position of each resistance hand 112 can also be adjusted by pushing out the adjustment column 121.
[0038] In order to maintain a complete plane when the adjusting column 121 makes the lower side of the top plate 115 bulge outward, in this embodiment, an elastic leather sheet 123 is provided on the top plate 115 and wrapped around the notch of the accommodating groove 120, and the end of the adjusting column 121 is fixedly connected to the inner side of the elastic leather sheet 123.
[0039] Reference Figure 6 , Figure 7 When the adjusting column 121 rotates, its end extends outward, but can maintain a plane state. Since the adjustment method itself is rotation, in order to prevent the adjusting column 121 from twisting the elastic leather sheet 123, in this embodiment, a rotating body is provided inside the elastic leather sheet 123, and the rotating body includes an outer ring body 124 fixed on the elastic leather sheet 123, and an inner ring body 125 rotatably connected to the inner side of the outer ring body 124, and the inner ring body 125 is fixedly connected to the end of the adjusting column 121. In this way, when the adjusting column 121 rotates, the original state of the elastic leather sheet 123 will not be affected.
[0040] The embodiments of this specific implementation method are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. Therefore, all equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.
Claims
1. A ball implantation device for overcoming substrate warping, comprising a machine platform (100) and a steel mesh (110), characterized in that: The machine platform (100) is provided with a resistance structure for resisting against a steel mesh (110), the resistance structure comprising a telescopic arm (111) fixed on the machine platform (100), and a resistance hand (112) arranged at the end of the telescopic arm (111), wherein one end of the resistance hand (112) away from the telescopic arm (111) is used for resisting against the steel mesh (110); a plurality of the resistance hands (112) are provided, and the plurality of the resistance hands (112) are connected to the telescopic arm (111) via a connecting seat (113).
2. A ball implantation device for overcoming substrate warping according to claim 1, characterized in that: The resisting hand (112) comprises a fixing block (114) connected to a connecting seat (113), and two top plates (115) arranged in parallel on the fixing block (114), wherein the top plates (115) are used to resist against a solid part of the steel mesh (110).
3. The ball implanting device for overcoming substrate warping according to claim 2, characterized in that: The two top plates (115) are connected to the fixed block (114) in an adjustable sliding manner along opposite directions.
4. The ball implanting device for overcoming substrate warping according to claim 3, characterized in that: The top plate (115) has a slider (116) slidably connected to a fixed block (114) in a circumferentially limited manner; a bidirectional threaded rod (118) is rotatably connected to the fixed block (114) and penetrates through and is threadedly connected to the slider (116); the two sliders (116) are respectively connected to opposite parts of the bidirectional threaded rod (118).
5. The ball implanting device for overcoming substrate warping according to claim 4, characterized in that: A side of the top plate (115) away from the fixed block (114) has a receiving groove (120), the receiving groove (120) extending along the length direction of the top plate (115), and an adjusting column (121) is provided in the receiving groove (120) to be lifted and lowered in the vertical direction.
6. The ball implanting device for overcoming substrate warping according to claim 5, characterized in that: A plurality of the adjusting columns (121) are evenly distributed along the extension direction of the accommodating groove (120).
7. The ball implanting device for overcoming substrate warping according to claim 6, characterized in that: An elastic leather sheet (123) is disposed on the top plate (115) and is located at the notch of the accommodating groove (120), and the end of the adjusting column (121) is fixedly connected to the inner side of the elastic leather sheet (123).
8. The ball implanting device for overcoming substrate warping according to claim 7, characterized in that: The bottom of the accommodating groove (120) has a threaded hole (122) corresponding to the adjusting column (121), and the adjusting column (121) is threadedly connected to the threaded hole (122).
9. The ball implanting device for overcoming substrate warping according to claim 8, characterized in that: The elastic leather sheet (123) has a rotating body inside, the rotating body comprising an outer ring body (124) fixed on the elastic leather sheet (123), an inner ring body (125) rotatably connected to the inner side of the outer ring body (124), and the inner ring body (125) is fixedly connected to the end of the adjusting column (121).