Optical table

Abstract

The utility model discloses an optical workbench, comprising: an optical platform comprising a non-magnetic material, the optical platform comprising at least one adsorption hole, a pipeline and a negative pressure interface, the adsorption hole penetrating through the optical platform, the pipeline communicating with the negative pressure interface and the adsorption hole; the adsorption plate is in vacuum adsorption connection with the optical platform through the adsorption holes; and the optical bracket is fixedly mounted at any position of the optical platform through an adsorption plate. According to the optical workbench provided by the embodiment of the invention, the optical support is fixedly connected with the optical platform through the adsorption plate, the optical platform is provided with the adsorption hole communicated with the negative pressure interface through the pipeline, and the adsorption plate is in vacuum adsorption connection with the optical platform through the adsorption hole. Therefore, the optical support can be flexibly positioned on the optical platform and can be fixed at any position on the optical platform, meanwhile, the adsorption strength between the adsorption plate and the adsorption hole is adjusted through the negative pressure interface, the occupied area of the adsorption plate can be small, and the fixed connection effect is also stable.

Description

Technical Field

[0001] The present application relates to the technical field of optical special equipment, and in particular to an optical workbench. Background Art

[0002] The surface of a conventional optical operating table is usually made of magnetic materials, and the optical components are fixed on the optical operating table using the principle of magnetic adsorption. In the field of semiconductor technology, the material of the optical operating table will be made of non-magnetic materials such as marble or aluminum, which requires other fixing methods to be used for the fixation of optical components, including direct fixed connection by mechanical punching or fixed connection with the optical operating table by gravity balance. However, these fixing methods have the problems of inflexible adjustment of the fixed position, large footprint, and poor fixing effect. Especially in the research and development or testing stage, it is difficult for optical components to be flexibly positioned and firmly fixed on the optical operating table at the same time. Utility Model Content

[0003] The embodiment of the present application provides an optical workbench, which can realize flexible positioning and firm fixed connection of an optical bracket on a non-magnetic optical platform.

[0004] In a first aspect, an optical workbench is provided according to an embodiment of the present application, including: an optical platform, the optical platform including at least one adsorption hole, a pipeline and a negative pressure interface, the adsorption hole runs through the optical platform, and the pipeline connects the negative pressure interface and the adsorption hole; an adsorption plate, the adsorption plate and the optical platform are connected by vacuum adsorption through the adsorption hole; and an optical bracket, the optical bracket is fixedly installed at any position of the optical platform through the adsorption plate.

[0005] According to one aspect of the embodiment of the present application, the pipeline further includes a switch valve and a speed regulating valve arranged on the pipeline, and the speed regulating valve is arranged between the adsorption hole and the switch valve.

[0006] According to one aspect of the embodiment of the present application, there are multiple adsorption holes, and the multiple adsorption holes are arranged in an array on the optical platform;

[0007] According to one aspect of the embodiment of the present application, the optical platform further includes a collection chamber and a gas processing unit;

[0008] Among them, the pipeline includes multiple operating ends and connecting ends, the multiple operating ends are at least partially connected one-to-one with the multiple adsorption holes, the connecting end is connected with the summary chamber, and the summary chamber is connected with the negative pressure interface through the gas processing unit.

[0009] According to one aspect of an embodiment of the present application, the adsorption hole is a stepped hole including a first stepped hole and a second stepped hole, the diameter of the first stepped hole is larger than that of the second stepped hole, and the adsorption plate is arranged on the side of the first stepped hole away from the second stepped hole and is connected to the optical platform by vacuum adsorption.

[0010] According to one aspect of an embodiment of the present application, the adsorption hole further includes an annular boss, which is disposed in the first stepped hole, and the diameter of the annular boss is larger than the diameter of the second stepped hole and smaller than the diameter of the first stepped hole.

[0011] According to one aspect of an embodiment of the present application, the optical bracket further includes a connecting component, and the optical bracket is fixedly connected to the adsorption plate via the connecting component.

[0012] According to one aspect of an embodiment of the present application, the connection assembly includes a screw hole bracket, at least one screw hole is provided on one side of the adsorption plate, and the screw hole bracket is threadedly connected to the adsorption plate through the screw hole.

[0013] According to one aspect of an embodiment of the present application, the adsorption plate includes a magnetic material, and the connecting component includes a magnetic base, which is magnetically adsorbed and connected to the adsorption plate.

[0014] According to one aspect of the embodiment of the present application, the optical platform further includes a pressure sensor and a control module, and the control module is electrically connected to the pressure sensor, the switch valve, and the speed regulating valve.

[0015] In the optical workbench provided in the embodiment of the present application, the optical bracket is fixedly connected to the optical platform through an adsorption plate, the optical platform is provided with an adsorption hole connected to the negative pressure interface through a pipeline, and the adsorption plate and the optical platform are connected by vacuum adsorption through the adsorption hole, so that the optical bracket can be flexibly positioned on the optical platform and can be fixed at any position on the optical platform. At the same time, the adsorption strength between the adsorption plate and the adsorption hole is adjusted by the negative pressure interface, so that the adsorption plate occupies a small area and the fixed connection effect is equally stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The features, advantages and technical effects of exemplary embodiments of the present application will be described below with reference to the accompanying drawings.

[0017] Figure 1 It is a structural schematic diagram of an optical workbench provided in an embodiment of the present application;

[0018] Figure 2 It is a schematic structural diagram of an adsorption hole of an optical platform of another optical workbench provided in an embodiment of the present application;

[0019] Figure 3 It is a schematic structural diagram of an adsorption hole of an optical platform of another optical workbench provided in an embodiment of the present application;

[0020] Figure 4 yes Figure 1 A schematic diagram of the structure of the enlarged area A in the embodiment;

[0021] Figure 5 It is a schematic diagram of the connection structure between an adsorption plate and an optical bracket of another optical workbench provided in an embodiment of the present application.

[0022] in:

[0023] 100-optical workbench;

[0024] 1-optical platform; 10-adsorption hole; 11-pipeline; 12-negative pressure interface; 13-collection chamber; 14-gas processing unit;

[0025] 101-first stepped hole; 102-second stepped hole; 103-annular boss;

[0026] 111-switching valve; 112-speed regulating valve; 113-operating end; 114-connecting end;

[0027] 2-adsorption plate; 21-screw hole;

[0028] 3-optical bracket; 31-connecting assembly; 311-screw bracket; 312-magnetic table base; 32-support rod; 33-lens frame.

[0029] In the drawings, the same reference numerals are used for the same components. The drawings are not drawn to scale. DETAILED DESCRIPTION

[0030] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In the detailed description below, many specific details are proposed to provide a comprehensive understanding of the present application. However, it is obvious to those skilled in the art that the present application can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by illustrating examples of the present application. In the accompanying drawings and the following description, at least some of the known structures and technologies are not shown to avoid unnecessary ambiguity in the present application; and, for clarity, the size of some structures may be exaggerated. In addition, the features, structures or characteristics described below may be combined in one or more embodiments in any suitable manner.

[0031] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or equipment. In the absence of more restrictions, the elements limited by the sentence "comprise..." do not exclude the existence of other identical elements in the process, method, article or equipment including the elements.

[0032] The directional words appearing in the following description are all directions shown in the figures, and do not limit the specific structure of this application. In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set" and "connect" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0033] First, see Figure 1 An embodiment of the present application provides an optical workbench 100, including an optical platform 1, an adsorption plate 2 and an optical bracket 3.

[0034] The optical platform 1 includes at least one adsorption hole 10 , a pipeline 11 and a negative pressure interface 12 . The adsorption hole 10 is arranged throughout the optical platform 1 , and the pipeline 11 connects the negative pressure interface 12 and the adsorption hole 10 .

[0035] The adsorption plate 2 is connected to the optical platform 1 by vacuum adsorption through the adsorption holes 10 .

[0036] The optical bracket 3 is fixedly mounted on any position of the optical platform 1 through the adsorption plate 2 .

[0037] In the optical workbench 100 provided in the embodiment of the present application, the optical bracket 3 is fixedly connected to the optical platform 1 through the adsorption plate 2, and the optical platform 1 is provided with an adsorption hole 10 connected to the negative pressure interface 12 through a pipeline 11. The adsorption plate 2 and the optical platform 1 are connected by vacuum adsorption through the adsorption hole 10, so that the optical bracket 3 can be flexibly positioned on the optical platform 1 and can be fixed at any position on the optical platform 1. At the same time, the adsorption strength between the adsorption plate 2 and the adsorption hole 10 is adjusted by the negative pressure interface 12, so that the adsorption plate 2 occupies a small area and the fixed connection effect is equally stable.

[0038] The optical platform 1 in the semiconductor field usually includes non-magnetic materials, and the inclusion of non-magnetic materials should be understood as: at least the surface of the optical platform 1 that contacts and is fixedly connected to the optical bracket 3 is made of non-magnetic materials. The optical platform 1 is set with non-magnetic materials, which can further avoid the influence of the magnetic field on the movement of electrons in the semiconductor device, and at the same time has better processability and compatibility, which is conducive to the manufacture of high-performance semiconductor optical devices.

[0039] The adsorption hole 10 is opened on the optical platform 1 by machining or other processing methods. The shape of the adsorption hole 10 can be further processed by a more precise processing method to make the adsorption effect between the adsorption hole 10 and the adsorption plate 2 better, so that the vacuum adsorption connection between the adsorption plate 2 and the optical platform 1 is more stable. The shape of the adsorption hole 10 will be further described in other embodiments below.

[0040] Optionally, a plurality of adsorption holes 10 may be connected to each other in the optical platform 1 and then connected to a pipeline 11 , thereby saving the layout of the pipeline 11 .

[0041] Optionally, one adsorption hole 10 may also be connected to a single pipeline 11 to achieve more precise control of the adsorption hole 10 .

[0042] One side of the adsorption plate 2 covers at least one adsorption hole 10 on the optical platform 1. The covering here should be understood as that one side of the adsorption plate 2 and the holes in at least one adsorption hole 10 and the pipeline 11 together form a negative pressure space.

[0043] Because it is connected to the negative pressure interface 12, the air pressure on the side of the adsorption plate 2 covering the adsorption hole 10 is away from the air pressure on the side of the adsorption plate 2 away from the adsorption hole 10. Under the action of atmospheric pressure, the adsorption plate 2 is in a vacuum adsorption connection relationship with the optical platform 1.

[0044] Optionally, the adsorption plate 2 can cover a plurality of adsorption holes 10 according to the design requirements for a stable connection, thereby further improving the vacuum adsorption connection effect.

[0045] The optical bracket 3 is a structural component used to support and fix optical elements and systems, and needs to form a stable connection with the optical platform 1 to ensure the stability of the optical system and controllable errors.

[0046] The optical bracket 3 itself also has a certain fine-tuning mechanism for the fixed optical element, which can allow the angle and position of the optical element to be accurately adjusted within a certain range, thereby helping to achieve optical path alignment. Therefore, during the adjustment process of the optical bracket 3 itself, a stable connection between the optical bracket 3 and the optical platform 1 is also required to ensure a certain stability.

[0047] The optical bracket 3 and the adsorption plate 2 can be set to be fixedly connected, and the fixed connection relationship between the two may include but is not limited to magnetic attraction, snap connection, threaded connection and other connection methods, wherein the specific connection method will be further explained in the following other embodiments.

[0048] Optionally, due to the specific setting or design requirements for further improving the connection effect, the optical bracket 3 can be fixedly connected to multiple adsorption plates 2, and each adsorption plate 2 forms a covering relationship with the adsorption hole 10 on the optical platform 1, which can further adapt to optical brackets 3 with different structures or further improve the stable connection effect.

[0049] Through the arrangement of the adsorption plate 2 and the adsorption hole 10, during the debugging stage of the optical component or the optical system, the operator can adjust the negative pressure interface 12 to weaken the adsorption force, and the optical bracket 3 can be flexibly installed at any position of the optical platform 1, and the debugging is flexible and convenient; at the same time, during the formal operation or implementation stage of the optical component or the optical system, the operator adjusts the negative pressure interface 12 to enhance the adsorption force, and the optical bracket 3 can be fixedly installed, and the connection effect is also stable.

[0050] Furthermore, since the negative pressure interface 12 can be adjusted to increase or decrease the adsorption strength between the adsorption plate 2 and the adsorption hole 10, the connection effect between the adsorption plate 2 and the optical platform 1 is determined by the adsorption strength of the two, and is no longer determined only by the weight and floor space of the adsorption plate 2 as in the gravity-balanced connection method. Therefore, the floor space of the adsorption plate 2 can be further reduced, and the adsorption plate 2 occupies a small floor space.

[0051] See also Figure 1 In some embodiments, the optical workbench 100 further includes a switch valve 111 and a speed regulating valve 112 disposed on the pipeline 11 , and the speed regulating valve 112 is disposed between the switch valve 111 and the adsorption hole 10 .

[0052] In these embodiments, the switch valve 111 is used to control the opening and closing of the pipeline 11 , and the speed regulating valve 112 can adjust the flow rate of the gas in the pipeline 11 , thereby controlling the adsorption strength between the adsorption hole 10 and the adsorption plate 2 .

[0053] During the pipeline startup phase, the operator first opens the switch valve 111 , and then adjusts the speed regulating valve 112 to gradually increase the gas flow rate in the pipeline 11 , thereby achieving a vacuum adsorption connection between the adsorption plate 2 and the optical platform 1 .

[0054] During the debugging stage, since the speed regulating valve 112 is disposed between the switch valve 111 and the adsorption hole 10 , the adsorption strength between the adsorption hole 10 and the adsorption plate 2 can be controlled by adjusting the speed regulating valve 112 .

[0055] In the pipeline closing stage, the operator can first adjust the speed regulating valve 112 to gradually reduce the gas flow rate in the pipeline 11, and finally close the switch valve 111 to disconnect the vacuum adsorption connection between the adsorption plate 2 and the optical platform 1.

[0056] See also Figure 1 In some embodiments, there are multiple adsorption holes 10 , and the multiple adsorption holes 10 are arranged in an array on the optical platform 1 .

[0057] In these embodiments, there are multiple adsorption holes 10 distributed in an array and covering the entire optical platform 1, so that the optical bracket 3 has more fixed position options, and the optical bracket 3 can flexibly adjust the fixed position, thereby further improving the vacuum adsorption connection effect.

[0058] See also Figure 1 In some embodiments, the optical platform 1 further includes a collecting chamber 13 and a gas processing unit 14 .

[0059] Among them, the pipeline 11 includes multiple working ends 113 and connecting ends 114, the multiple working ends 113 are at least partially one-to-one connected to the multiple adsorption holes 10, the connecting end 114 is connected to the aggregation chamber 13, and the aggregation chamber 13 is connected to the negative pressure interface 12 through the gas processing unit 14.

[0060] In these embodiments, the pipelines 11 connected to the adsorption holes 10 are first connected to the collecting chamber 13. The gas in the pipelines 11 is gathered in the collecting chamber 13 and then processed by the gas processing unit 14 before being sucked into the negative pressure interface 12, thereby improving the processing efficiency.

[0061] The collecting chamber 13 can solve the problem of multiple pipelines 11 being connected to the negative pressure interface 12, causing the pipelines 11 to be chaotic, thereby improving the processing efficiency of the inhaled gas.

[0062] The gas processing unit 14 uniformly purifies or pressurizes the gas sucked into one side of the adsorption hole 10, and then sucks it into the negative pressure interface 12 for recycling.

[0063] See also Figure 2 In some embodiments, the adsorption hole 10 is a stepped hole including a first stepped hole 101 and a second stepped hole 102, the diameter of the first stepped hole 101 is larger than the second stepped hole 102, and the adsorption plate 2 is arranged on the side of the first stepped hole 101 away from the second stepped hole 102 and is vacuum adsorbed and connected to the optical platform 1.

[0064] In these embodiments, the adsorption hole 10 is configured as a two-stage structure of a first step hole 101 and a second step hole 102, wherein the diameter of the first step hole 101 on the side directly in contact with the adsorption plate 2 is larger than the diameter of the second step hole 102, thereby increasing the surface area of ​​the inner wall of the adsorption hole 10, and further increasing the area between the adsorption hole 10 and the adsorption plate 2, and can further enhance the adsorption force between the adsorption hole 10 and the adsorption plate 2 under the same air pressure conditions.

[0065] See also Figure 3 In some embodiments, the adsorption hole 10 further includes an annular boss 103 , which is disposed in the first stepped hole 101 , and a diameter of the annular boss 103 is larger than a diameter of the second stepped hole 102 and smaller than a diameter of the first stepped hole 101 .

[0066] In these embodiments, by further providing an annular boss 103, the surface area inside the first step hole 101 can be further increased, and the surface area of ​​the inner wall of the adsorption hole 10 can be further increased, thereby further increasing the contact area between the adsorption hole 10 and the adsorption plate 2, and further improving the adsorption force between the adsorption hole 10 and the adsorption plate 2 under the same air pressure conditions.

[0067] In some embodiments, the optical bracket 3 further includes a connecting component 31 , and the optical bracket 3 is fixedly connected to the adsorption plate 2 via the connecting component 31 .

[0068] In these embodiments, the connection component 31 can fix the optical bracket 3 and the adsorption plate 2, and the connection component 31 includes a variety of settings and can be adjusted according to the actual needs of the operation and design.

[0069] See also Figure 5 In some embodiments, the connection component 31 includes a screw hole bracket 311 , at least one screw hole 21 is provided on one side of the adsorption plate 2 , and the screw hole bracket 311 is threadedly connected to the adsorption plate 2 through the screw hole 21 .

[0070] In these embodiments, the screw hole bracket 311 itself has a threaded hole structure, a screw hole 21 is opened on the adsorption plate 2, and the screw hole bracket 311 and the adsorption plate 2 can be installed with bolts set in the screw hole 21 for threaded connection, and the optical bracket 3 is fixedly connected to the adsorption plate 2 through the screw hole bracket 311.

[0071] In the embodiment using the screw hole bracket 311 as the connecting component 31, the fixing method of the optical bracket 3 is to first thread the optical bracket 3 and the adsorption plate 2, and then install the optical bracket 3 and the adsorption plate 2 on the optical platform 1, open the negative pressure interface 12 and gradually increase the gas flow rate in the pipeline 11, the adsorption plate 2 can flexibly adjust the position first and the optical bracket 3 is not easy to tip over, and after determining the position, the optical bracket 3 and the adsorption plate 2 are firmly connected to the optical platform 1.

[0072] See also Figure 4 In some embodiments, the adsorption plate 2 includes a magnetic material, and the connecting component 31 includes a magnetic base 312 , and the magnetic base 312 is magnetically adsorbed and connected to the adsorption plate 2 .

[0073] In these embodiments, the adsorption plate 2 is fixedly connected to the magnetic base 312 .

[0074] In the embodiment using the magnetic stand 312 as the connecting component 31, the method for fixing the optical bracket 3 can be to first connect the optical bracket 3 with the adsorption plate 2 by magnetic adsorption, and then install the optical bracket 3 and the adsorption plate 2 on the optical platform 1, open the negative pressure interface 12 and gradually increase the gas flow rate in the pipeline 11, the adsorption plate 2 can flexibly adjust the position and the optical bracket 3 is not easy to tip over, and after determining the position, a stable connection between the optical bracket 3 and the adsorption plate 2 and the optical platform 1 is achieved.

[0075] Optionally, the optical bracket 3 can also be magnetically adsorbed and connected to the adsorption plate 2 after the adsorption plate 2 is firmly connected to the optical platform 1, and the steps can be adjusted flexibly.

[0076] Optionally, the optical bracket 3 can first connect the magnetic base 312 to the adsorption plate 2 by magnetic adsorption, and then install other parts of the optical bracket 3 on the magnetic base 312 after the adsorption plate 2 is firmly connected to the optical platform 1. The steps can be adjusted flexibly.

[0077] Optionally, the optical bracket 3 further includes a support rod 32 and a lens frame 33 , and the lens frame 33 is fixedly connected to the connecting assembly 31 via the support rod 32 .

[0078] The support rod 32 and the lens frame 33 of the optical bracket 3 constitute the main mechanical framework of the optical bracket 3, and can be fixedly connected to the vacuum adsorption plate 2 through the connecting component 31 to meet the requirements of its own stability.

[0079] The lens frame 33 is a supporting structure for fixing and positioning a single or multiple optical components, and the support rod 32 provides vertical or horizontal support for the lens frame 33 and fixedly connects the lens frame 33 to the connecting component 31 .

[0080] The support rod 32 itself can also be configured as an adjustment component for adjusting the position and angle of the lens frame 33. The support rod 32 can fine-tune the position and angle of the lens frame 33 by rotating or extending, thereby adjusting the position and angle of the optical component.

[0081] Therefore, the self-adjustment requirement of the support rod 32 also places certain requirements on the stability of the components connected to the support rod 32. The support rod 32 is connected to the adsorption plate 2 using the connecting component 31, so that the support rod 32 can be stably connected.

[0082] In some embodiments, the optical platform 1 further includes a pressure sensor and a control module, and the control module is electrically connected to the pressure sensor, the switch valve 111 and the speed regulating valve 112 .

[0083] In these embodiments, the pressure sensor obtains information that an adsorption plate 2 is provided near the adsorption holes 10 at some positions of the optical platform 1. The control module processes the information obtained by the pressure sensor and opens and closes and controls the gas flow rate in the pipeline 11 through the switch valve 111 and the speed regulating valve 112, thereby realizing automatic opening and closing of the pipeline 11 of the part of the adsorption holes 10 covered by the adsorption plate 2, and realizing automatic adjustment.

[0084] Optionally, the optical platform 1 may further include a visual detection device, which can detect whether part of the adsorption holes 10 are blocked by the adsorption plate 2, thereby transmitting the information to the control module for processing, and executing it through the switch valve 111 and the speed regulating valve 112, which can also achieve automatic adjustment.

[0085] Although the present application has been described with reference to preferred embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present application. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there are no structural conflicts. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0086] Although the present application has been described with reference to preferred embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present application. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there are no structural conflicts. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. An optical workbench, characterized in that: include: An optical platform, the optical platform comprising at least one adsorption hole, a pipeline, a negative pressure interface, a switch valve and a speed regulating valve, the adsorption hole is arranged through the optical platform, the pipeline connects the negative pressure interface and the adsorption hole, the switch valve and the speed regulating valve are arranged on the pipeline, and the speed regulating valve is arranged between the switch valve and the adsorption hole; An adsorption plate, wherein the adsorption plate is connected to the optical platform by vacuum adsorption through the adsorption holes; An optical bracket is fixedly mounted on any position of the optical platform through the adsorption plate.

2. The optical workbench according to claim 1, characterized in that: The number of the adsorption holes is multiple, and the multiple adsorption holes are arranged in an array on the optical platform.

3. The optical workbench according to claim 2, characterized in that: The optical platform also includes a collection chamber and a gas processing unit; Wherein, the pipeline includes multiple working ends and connecting ends, the multiple working ends are at least partially connected one-to-one with the multiple adsorption holes, the connecting end is connected with the summary chamber, and the summary chamber is connected with the negative pressure interface through the gas processing unit.

4. The optical workbench according to claim 1, characterized in that: The adsorption hole is a stepped hole including a first stepped hole and a second stepped hole, the diameter of the first stepped hole is larger than the second stepped hole, and the adsorption plate is arranged on a side of the first stepped hole away from the second stepped hole and is connected to the optical platform by vacuum adsorption.

5. The optical workbench according to claim 4, characterized in that: The adsorption hole further includes an annular boss, which is disposed in the first stepped hole. The diameter of the annular boss is larger than the diameter of the second stepped hole and smaller than the diameter of the first stepped hole.

6. The optical workbench according to claim 1, characterized in that: The optical bracket also includes a connecting component, and the optical bracket and the adsorption plate are fixedly connected via the connecting component.

7. The optical workbench according to claim 6, characterized in that: The connection assembly includes a screw hole bracket, at least one screw hole is provided on one side of the adsorption plate, and the screw hole bracket is threadedly connected to the adsorption plate through the screw hole.

8. The optical workbench according to claim 6, characterized in that: The adsorption plate includes a magnetic material, and the connection component includes a magnetic table seat, and the magnetic table seat is connected to the adsorption plate by magnetic adsorption.

9. The optical workbench according to claim 1, characterized in that: The optical platform further includes a pressure sensor and a control module, and the control module is electrically connected to the pressure sensor, the switch valve and the speed regulating valve.

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