Magnetron target 3D magnetic field detection system

Abstract

The utility model discloses a magnetic control target 3D magnetic field detection system which comprises a workbench, a control box, a display device and a 3D magnetic field detector, the 3D magnetic field detector comprises a Y-axis moving assembly and a single cantilever which is installed on the Y-axis moving assembly and can linearly move along the Y-axis moving assembly, a Z-axis moving assembly is arranged on a vertical section of the single cantilever, a first sliding block is arranged on the Z-axis moving assembly, and a second sliding block is arranged on the first sliding block. An X-axis moving assembly is fixedly installed on the first sliding block, a second sliding block is arranged on the X-axis moving assembly, and a gauss meter detection head is fixedly installed on the second sliding block. During magnetic field detection, the magnetic control target is placed on the working table. According to the invention, the Y-axis moving assembly, the X-axis moving assembly and the Z-axis moving assembly cooperate with each other, so that the detection head of the gauss meter carries out multidirectional magnetic field testing in a three-dimensional space, the testing effect and the result accuracy are improved, and data support is provided for subsequent work of the magnetic control target. And the Y-axis moving assembly is mounted below the surface of the workbench, so that the position influence of the detector is reduced, and the detection steps are simplified.

Description

Technical Field

[0001] The utility model relates to the technical field of surface magnetic field intensity detection, in particular to a magnetron target 3D magnetic field detection system. Background Art

[0002] Magnetron sputtering is an important physical vapor deposition technology, which is widely used in the preparation of various thin film materials. In the magnetron sputtering process, the magnetic field strength determines the distribution and confinement of the plasma. On the surface of the magnetron sputtering target, the strong magnetic field can form magnetic field lines that are approximately parallel to the target surface, so that the plasma is effectively confined near the target surface, which improves the density and energy of the plasma, helps to achieve uniform sputtering of the target material, and improves the utilization rate of the target material. Secondly, the magnetic field strength affects the motion trajectory and energy of the sputtered particles. Under the action of the strong magnetic field, the sputtered particles are affected by the Lorentz force, and their motion trajectory is deflected, so that the particles can bombard the substrate more evenly. At the same time, the magnetic field strength can also affect the energy distribution of the sputtered particles, making the particle energy more concentrated, which helps to improve the quality and performance of the film. In addition, the magnetic field strength also affects the sputtering rate and the density of the film. Under appropriate magnetic field strength, the sputtering rate can be significantly improved because the strong magnetic field helps to increase the number and energy of the plasma. At the same time, the strong magnetic field can also reduce the internal stress of the film, improve the density of the film, and thus improve the performance of the film. It should be noted that the magnetic field strength is not the greater the better. Too high a magnetic field strength may cause excessive sputtering of the target material, reduce the utilization rate of the target material, and even cause damage to the equipment.

[0003] The magnetic field strength on the surface of the magnetron sputtering target plays a vital role and has a significant impact on the sputtering effect. Therefore, in practical applications, it is necessary to select the appropriate magnetic field strength according to the specific sputtering materials and process requirements. The magnetic field strength detection of the magnetron sputtering target is a key link to ensure the stability and efficiency of the sputtering process.

[0004] Accurate measurement of magnetic field strength is a technical challenge. The magnetic field of a magnetron sputtering target usually has a complex distribution and variation, especially at the edge and center of the target, where the magnetic field strength may be significantly different. The distribution of magnetic field strength on the target surface and in the surrounding space is uneven, and choosing a suitable measurement position is crucial. However, due to the shape, size of the target and the characteristics of the sputtering process, it is not easy to determine a suitable measurement position. Utility Model Content

[0005] In order to overcome the shortcomings of the existing three-dimensional magnetic field detection technology, such as complex equipment structure and low detection result accuracy, the utility model provides a magnetron target 3D magnetic field detection system.

[0006] The technical solution of the utility model is as follows:

[0007] A magnetron target 3D magnetic field detection system comprises a workbench, a control box, a display device and a three-dimensional magnetic field detector, wherein the display device and the three-dimensional magnetic field detector are electrically connected to the control box respectively;

[0008] The three-dimensional magnetic field detector includes a Y-axis moving component fixed under the table surface of the workbench, a single cantilever that can move linearly along the Y-axis is installed on the Y-axis moving component, and the single cantilever protrudes from a side of the workbench parallel to the Y-axis to above the table surface, and a Z-axis moving component is provided on the vertical section of the single cantilever, and a first slider is provided on the Z-axis moving component, and an X-axis moving component is fixedly installed on the first slider, and the X-axis moving component can move linearly along the Z-axis with the first slider, and a second slider is provided on the X-axis moving component, and a Gaussmeter detection head is fixedly installed on the second slider, and the Gaussmeter detection head can move linearly along the X-axis with the second slider;

[0009] During magnetic field detection, the magnetron target to be detected is placed on the workbench surface.

[0010] Furthermore, in one embodiment, an adjustable positioning structure is provided on the workbench surface, and the adjustable positioning structure positions the magnetron target at a preset position to prevent the magnetron target from moving and causing an error in the magnetic field detection position.

[0011] Furthermore, in one embodiment, a level adjustment component is provided at the bottom end of the legs of the workbench, and the level adjustment component is used to keep the workbench surface level.

[0012] Furthermore, in one embodiment, the Y-axis moving assembly includes a motor and a ball screw connected to the motor, and a plurality of first slide rails parallel to the ball screw and symmetrically arranged, a fixed slider is provided on the first slide rail, a third slider is provided on the ball screw, the fixed slider is connected to the third slider so that the third slider drives the fixed slider to move linearly, and the single cantilever is fixedly connected to the lower end of the fixed slider so that the single cantilever is suspended on the first slide rail.

[0013] Further, in one embodiment, the number of the first slide rails is two, and the number of the fixed sliding block on each of the first slide rails is one.

[0014] Furthermore, in one embodiment, a limit block is provided at one end of the ball screw, and the limit block is used to prevent the third sliding block from moving out of a set position.

[0015] Furthermore, in one embodiment, a balance chain is provided on the X-axis moving assembly, and as the second slider moves, the balance chain rotates so that the center of gravity of the X-axis moving assembly above the work surface remains unchanged in the horizontal direction.

[0016] Furthermore, in one embodiment, the display is a liquid crystal display.

[0017] Furthermore, in one embodiment, the control box is also connected to a keyboard and a mouse, and the keyboard and the mouse are used to input commands.

[0018] Furthermore, in one embodiment, the first slider is T-shaped, the T-shaped top of the first slider is located at one side of the Z-axis moving component, and the X-axis moving component is fixed on the T-shaped top of the first slider.

[0019] The utility model according to the above scheme has the beneficial effect that the Y-axis moving component, the X-axis moving component and the Z-axis moving component cooperate with each other, so that the Gaussmeter detection head installed on the X-axis moving component can perform multi-directional magnetic field testing in three-dimensional space, the mobile position control is simple, the test effect and results are accurate, the reliability of the test is improved, and data support is provided for the subsequent work of the magnetron target. And the Y-axis moving component is installed under the workbench table, which reduces the influence of the detector on the position of the magnetron target to be tested and simplifies the detection steps. The three-dimensional magnetic field strength detection of the object to be detected is realized, so that the intangible and invisible magnetic field can display the true situation of the magnetic field strength distribution on the computer monitor. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure of the utility model;

[0021] Figure 2 for Figure 1 Exploded diagram of

[0022] Figure 3 Schematic diagram of the structure of a three-dimensional magnetic field detector.

[0023] In the figure, 100, workbench; 110, horizontal adjustment component; 120, fixed beam; 200, control box; 300, display device; 400, three-dimensional magnetic field detector; 410, Y-axis moving component; 411, ball screw; 412, motor; 413, first slide rail; 414, fixed slider; 415, third slider; 416, limit block; 420, Z-axis moving component; 421, first slider; 430, X-axis moving component; 431, second slider; 432, balance chain; 500, Gaussmeter detection head; 440, single cantilever; 600, adjustable positioning structure; 700, table. DETAILED DESCRIPTION

[0024] The utility model is further described below in conjunction with the accompanying drawings and embodiments. It should be noted that when an element is described as "fixed to" another element, it can be directly on another element or there can be one or more centered elements therebetween. When an element is described as "connected" to another element, it can be directly connected to another element or there can be one or more centered elements therebetween. The terms "vertical", "horizontal", "left", "right", "inside", "outside" and similar expressions used in this specification are for illustrative purposes only. In the description of the utility model, the terms "first" and "second" are used only for descriptive purposes and cannot be understood as indicating relative importance or implicitly indicating the number of technical features indicated. Therefore, unless otherwise specified, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features; the meaning of "multiple" is two or more. The term "include" and any variation thereof means non-exclusive inclusion, and one or more other features, integers, steps, operations, units, components and / or combinations thereof may be present or added.

[0025] In addition, unless otherwise expressly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, an indirect connection through an intermediate medium, or a connection between two components. All technical and scientific terms used in this specification have the same meaning as those generally understood by technicians in the technical field of the present utility model. The terms used in the specification of the present utility model are only for the purpose of describing specific embodiments and are not used to limit the present utility model. The term "and / or" used in this specification includes any and all combinations of one or more related listed items.

[0026] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0027] like Figure 1 and Figure 2As shown, the present application provides an embodiment of a magnetron target 3D magnetic field detection system, which includes a workbench 100, a control box 200, a display device 300 and a three-dimensional magnetic field detector 400, wherein the display device 300 and the three-dimensional magnetic field detector 400 are electrically connected to the control box 200, respectively. The three-dimensional magnetic field detector 400 includes a Y-axis moving component 410 fixed under the table top of the workbench 100, a single cantilever 440 which can move linearly along the Y-axis is installed on the Y-axis moving component 410, the single cantilever 440 is L-shaped, and the single cantilever 440 protrudes from the side of the workbench 100 parallel to the Y-axis to above the table top, a Z-axis moving component 420 is provided on the vertical section of the single cantilever 440, a first slider 421 is provided on the Z-axis moving component 420, an X-axis moving component 430 is fixedly installed on the first slider 421, the X-axis moving component 430 can move linearly along the Z-axis with the first slider 421, a second slider 431 is provided on the X-axis moving component 430, a Gaussmeter detection head 500 is fixedly installed on the second slider 431, and the Gaussmeter detection head 500 can move linearly along the X-axis with the second slider 431; during magnetic field detection, the magnetron target to be measured is placed on the table top of the workbench 100. In this embodiment, the Y-axis moving component 410, the X-axis moving component 430 and the Z-axis moving component 420 cooperate with each other, so that the Gaussmeter detection head 500 installed on the X-axis moving component 430 can perform multi-directional magnetic field testing in three-dimensional space. The moving position control is simple, and the three-dimensional magnetic field strength detection of the detected object is realized, so that the intangible and invisible magnetic field can display the true situation of the magnetic field strength distribution on the computer monitor. The test effect and results are accurate, which improves the reliability of the test and provides data support for the subsequent work of the magnetron target.

[0028] The single cantilever 440 structural design of the three-dimensional magnetic field detector 400 facilitates the loading and testing of large workpieces from the other side of the workbench 100, and the Y-axis moving component 410 is installed under the workbench 100, reducing the influence of the various moving components of the detector on the placement of the magnetron target to be tested, thereby reducing the difficulty of the detection operation.

[0029] like Figure 1 As shown, in one embodiment, an adjustable positioning structure 600 is further provided on the workbench 100, and the adjustable positioning structure 600 positions the magnetron target at a preset position to prevent the magnetron target from moving and causing an error in the magnetic field detection position. The controllable positioning structure generally includes a fixed seat and a telescopic shaft installed on the fixed seat, and the telescopic shaft is retractable so that two relatively arranged fixed seats can be used to fix magnetron targets of different widths, thereby increasing the specifications of the magnetron targets that can be tested and improving the applicability of the product.

[0030] In one embodiment, a horizontal adjustment component 110 is provided at the bottom of the legs of the workbench 100, and the horizontal adjustment component 110 is used to keep the workbench 100 surface level. Keeping the workbench 100 surface level can prevent the magnetron target to be tested placed on the surface from sliding on the surface under the action of gravity, thereby ensuring the accuracy of the detection. At the same time, it can also reduce the requirements for the flatness of the bottom surface of the workshop, reduce the manufacturing accuracy requirements of the workbench 100, and thus reduce the detection cost.

[0031] like Figure 3 As shown, in one embodiment, the Y-axis moving assembly 410 includes a motor 412 and a ball screw 411 connected to the motor 412, and a plurality of first slide rails 413 parallel to the ball screw 411 and symmetrically arranged, a fixed slider 414 is provided on the first slide rail 413, a third slider 415 is provided on the ball screw 411, the fixed slider 414 is connected to the third slider 415 so that the third slider 415 drives the fixed slider 414 to move linearly, and the single cantilever 440 is fixedly connected to the lower end of the fixed slider 414, so that the single cantilever 440 is suspended on the first slide rail 413. The ball screw 411 has low sliding friction, precise positioning, and low noise, which facilitates the precise positioning of the position of the Gaussmeter detection head 500 and improves the reliability of detection.

[0032] like Figure 3 As shown, in one embodiment, the number of first slide rails 413 is two, and the number of fixed sliders 414 on each first slide rail 413 is one. With two first slide rails 413 symmetrical about the ball screw 411, the single cantilever 440 can be stably suspended under the workbench 100 without shaking. In other embodiments, the number of first slide rails 413 can be increased, or the number of fixed sliders 414 on each first slide rail 413 can be increased, and the fixing points of the single cantilever 440 can be increased to increase the stability of the suspension of the single cantilever 440.

[0033] like Figure 3 As shown, in one embodiment, a stop block 416 is provided at one end of the ball screw 411, and the stop block 416 is used to prevent the third slider 415 from moving out of the set position. The stop block 416 hinders the movement of the third slider 415 to prevent the third slider 415 from sliding off the top of the ball screw 411 when the motor 412 connected to the ball screw 411 fails, prevents the single cantilever 440 from falling and damaging the Z-axis moving assembly 420 and the X-axis moving assembly 430, protects the three-dimensional magnetic field detector 400, and improves its safety.

[0034] like Figure 3As shown, in one embodiment, a balancing chain 432 is provided on the X-axis moving assembly 430. As the second slider 431 moves, the balancing chain 432 rotates so that the center of gravity of the X-axis moving assembly 430 above the workbench 100 remains unchanged in the horizontal direction. The balancing chain 432 keeps the center of gravity of the X-axis moving assembly 430 stable in the horizontal direction, balances the forces on the two first slide rails 413, and prevents the first slide rails 413 from being deformed due to the change in the center of gravity, thereby hindering the linear motion of the single cantilever 440 on the Y-axis.

[0035] In one embodiment, the display shown is a liquid crystal display. A keyboard and a mouse are also connected to the control box, and the keyboard and the mouse are used to input commands. The liquid crystal display displays data such as operation commands, detection process, and detection results, so that the magnetic field strength of the magnetron target is displayed on the display, and the actual situation of the magnetic field strength distribution can be intuitively seen, providing data support for subsequent work on the detected object. The external keyboard and mouse facilitate the input of control commands. The input of keyboard and mouse control commands is simple and widely applicable. Most users only need simple training to master the detection of the magnetron target, reducing the difficulty of using the magnetron target 3D magnetic field detection system. And the keyboard and mouse are easy to replace when problems occur after long-term use.

[0036] like Figure 1 As shown, in order to facilitate the operation of the operator, the display, keyboard and mouse are often placed on a separate table 700, which is not connected to the workbench 100, so as to prevent the display, keyboard and mouse from obstructing the loading of the workbench 100. It is also possible to prevent external components from affecting the placement of the magnetron target to be tested.

[0037] Below the workbench 100, a fixed beam 120 is generally provided, and the control box is mounted and fixed on the fixed beam 120. The control box is designed to be integrated with the workbench 100 to reduce the footprint of the system. In particular, it is also necessary to leave a gap between the top surface of the control box and the bottom surface of the single cantilever 440 to prevent the control box from hindering the movement of the single cantilever 440.

[0038] like Figure 3 As shown, in one embodiment, the first slider 421 is T-shaped, the T-shaped top of the first slider 421 is located on one side of the Z-axis moving assembly 420, and the X-axis moving assembly 430 is fixed on the T-shaped top of the first slider 421. The irregular slider shape meets the fixing requirements of the X-axis moving assembly 430 and has a simpler assembly structure.

[0039] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to the utility model.

[0040] The above is an exemplary description of the utility model patent in conjunction with the accompanying drawings. It is obvious that the implementation of the utility model patent is not limited to the above-mentioned method. As long as various improvements are made by adopting the method concept and technical solution of the utility model patent, or the concept and technical solution of the utility model patent are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. A magnetron target 3D magnetic field detection system, characterized in that: It includes a workbench, a control box, a display device and a three-dimensional magnetic field detector, wherein the display device and the three-dimensional magnetic field detector are electrically connected to the control box respectively; The three-dimensional magnetic field detector includes a Y-axis moving component fixed under the table surface of the workbench, a single cantilever that can move linearly along the Y-axis is installed on the Y-axis moving component, and the single cantilever protrudes from a side of the workbench parallel to the Y-axis to above the table surface, and a Z-axis moving component is provided on the vertical section of the single cantilever, and a first slider is provided on the Z-axis moving component, and an X-axis moving component is fixedly installed on the first slider, and the X-axis moving component can move linearly along the Z-axis with the first slider, and a second slider is provided on the X-axis moving component, and a Gaussmeter detection head is fixedly installed on the second slider, and the Gaussmeter detection head can move linearly along the X-axis with the second slider; During magnetic field detection, the magnetron target to be detected is placed on the workbench surface.

2. The magnetron target 3D magnetic field detection system according to claim 1, characterized in that: The workbench surface is also provided with an adjustable positioning structure, which positions the magnetron target at a preset position to prevent the magnetron target from moving and causing an error in the magnetic field detection position.

3. The magnetron target 3D magnetic field detection system according to claim 1, characterized in that: The bottom end of the legs of the workbench is provided with a level adjustment component, and the level adjustment component is used to keep the workbench surface level.

4. The magnetron target 3D magnetic field detection system according to claim 1, characterized in that: The Y-axis moving assembly includes a motor and a ball screw connected to the motor, and a plurality of first slide rails parallel to and symmetrically arranged with the ball screw, a fixed slider is provided on the first slide rail, a third slider is provided on the ball screw, the fixed slider is connected to the third slider so that the third slider drives the fixed slider to move linearly, and the single cantilever is fixedly connected to the lower end of the fixed slider so that the single cantilever is suspended on the first slide rail.

5. The magnetron target 3D magnetic field detection system according to claim 4, characterized in that: The number of the first slide rails is two, and the number of the fixed sliding block on each of the first slide rails is one.

6. The magnetron target 3D magnetic field detection system according to claim 4, characterized in that: A limit block is provided at one end of the ball screw, and the limit block is used to prevent the third sliding block from moving out of a set position.

7. The magnetron target 3D magnetic field detection system according to claim 1, characterized in that: A balance chain is provided on the X-axis moving assembly. As the second sliding block moves, the balance chain rotates so that the center of gravity of the X-axis moving assembly above the worktable remains unchanged in the horizontal direction.

8. The magnetron target 3D magnetic field detection system according to claim 1, characterized in that: The display shown is a liquid crystal display.

9. The magnetron target 3D magnetic field detection system according to claim 8, characterized in that: The control box is also connected with a keyboard and a mouse, and the keyboard and the mouse are used to input instructions.

10. The magnetron target 3D magnetic field detection system according to claim 1, characterized in that: The first slider is T-shaped, the T-shaped top of the first slider is located at one side of the Z-axis moving component, and the X-axis moving component is fixed on the T-shaped top of the first slider.

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