PECVD (plasma enhanced chemical vapor deposition) sucker structure

Abstract

The utility model discloses a PECVD (Plasma Enhanced Chemical Vapor Deposition) sucker structure, which belongs to the technical field of PECVD suckers, and comprises a mounting rack, an air inlet pipe arranged on the outer wall of the mounting rack, a chute I arranged on the outer wall of the mounting rack, a mounting block slidably connected to the inner wall of the chute I, and a fixing plate rotatably connected to the outer wall of the mounting block; the second sliding groove is formed in the outer wall of the mounting frame, a sliding block is slidably connected to the inner wall of the second sliding groove, and a first spring is fixedly connected between the outer wall of the sliding block and the inner wall of the second sliding groove; the limiting groove is formed in the outer wall of the fixing plate; the sliding block is pulled to extrude the first spring to slide, when the sliding block slides out of the limiting groove, limiting on the fixing plate is relieved, the fixing plate can be rotated through the mounting block, or the mounting block slides out, so that the fixing plate is separated independently, and the clamping air bag is convenient to replace.

Description

Technical Field

[0001] The utility model relates to the technical field of PECVD suction cups, in particular to a PECVD suction cup structure. Background Technique

[0002] PECVD, namely plasma enhanced chemical vapor deposition, is a thin film growth technology that uses plasma to deposit at a lower temperature. In the PECVD process, a suction cup is required to fix and move workpieces such as silicon wafers.

[0003] When the existing PECVD suction cup device clamps a workpiece, the gas source fills the airbag with gas through the inflatable pipeline. The airbag gradually expands and firmly fixes the workpiece on the suction cup. The pressure control system monitors the pressure in the airbag in real time. When the pressure reaches the preset value, the inflation stops and a stable clamping state is maintained. During the PECVD process, the suction cup carries out various operations with the clamped workpiece. After the process is completed, the air is released through the valve, the airbag contracts, and the clamping of the workpiece is released so as to remove the workpiece. However, the PECVD process is usually carried out under a certain temperature and gas environment. The airbag is long-term exposed to this environment and is easily affected by chemical gas corrosion and high temperature, resulting in the aging, hardening and brittleness of its material, thereby reducing the service life of the airbag. Therefore, the internal airbag needs to be replaced. The airbag of the existing device is installed inside the fixing plate, and multiple groups of fixing plates are closely arranged, which is not convenient for replacing the airbag. Summary of the Utility Model

[0004] The purpose of the utility model is to solve the xx problem in the prior art, and a PECVD suction cup structure is proposed.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A PECVD suction cup structure includes a mounting frame and an air inlet pipe installed on the outer wall of the mounting frame, and further includes: a first chute opened on the outer wall of the mounting frame, an installation block slidably connected to the inner wall of the first chute, and a fixing plate rotatably connected to the outer wall of the installation block; a second chute opened on the outer wall of the mounting frame, a slider slidably connected to the inner wall of the second chute, and a first spring fixedly connected between the outer wall of the slider and the inner wall of the second chute; a limiting groove opened on the outer wall of the fixing plate.

[0007] Further, an installation groove is opened on the outer wall of the fixing plate, a branch air pipe is arranged inside the installation groove, and one end of the branch air pipe is fixedly connected with a clamping airbag.

[0008] Further, a connecting pipe is fixedly installed between the end of the branch air pipe far away from the clamping airbag and the outer wall of the air inlet pipe.

[0009] Furthermore, an air collecting groove is formed inside the fixing plate. A piston is slidably connected to the inner wall of the air collecting groove. A connecting line is fixedly connected to the outer wall of the piston. One end of the connecting line away from the piston penetrates through the fixing plate and is fixedly connected to the outer wall of the mounting block.

[0010] Furthermore, a second spring is fixedly connected to the inner wall of the air collecting groove. One end of the second spring away from the inner wall of the air collecting groove is fixedly installed at the bottom of the piston.

[0011] Furthermore, a through groove is formed inside the fixing plate. One end of the through groove communicates with the air collecting groove.

[0012] Furthermore, a limiting airbag group is arranged on the inner wall of the mounting groove. Multiple limiting airbags included in the limiting airbag group are all communicated with the through groove.

[0013] Compared with the prior art, the present utility model provides a PECVD chuck structure, which has the following beneficial effects:

[0014] 1. For this PECVD chuck structure, by pulling the slider, the slider squeezes the first spring to slide. When the slider slides out of the limiting groove, the limitation on the fixing plate is released. The fixing plate can be rotated through the mounting block, or the mounting block can be slid out to separately isolate the fixing plate, so as to facilitate the replacement of the clamping airbag.

[0015] 2. For this PECVD chuck structure, by rotating the fixing plate, the connecting line is wound around the mounting block, so that the piston inside the air collecting groove slides upward under the action of the connecting line, enabling the gas inside the limiting airbag group to enter the air collecting groove through the through groove, so that the sub-air pipe and the clamping airbag can be conveniently taken out of the mounting groove for replacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a schematic three-dimensional front view structure diagram of a PECVD chuck structure proposed by the present utility model;

[0017] Figure 2 is a schematic cross-sectional structure diagram of a part of the second chute in a PECVD chuck structure proposed by the present utility model;

[0018] Figure 3 is a schematic structure diagram of a part of the fixing plate in a PECVD chuck structure proposed by the present utility model;

[0019] Figure 4 is a schematic structure diagram of a part of the air collecting groove in a PECVD chuck structure proposed by the present utility model;

[0020] Figure 5 is a schematic structure diagram of a part of the through groove in a PECVD chuck structure proposed by the present utility model.

[0021] In the figure: 1, mounting bracket; 2, intake pipe; 3, connecting pipe; 4, first chute; 5, fixing plate; 6, mounting block; 7, mounting groove; 8, manifold; 9, clamping airbag; 10, second chute; 11, first spring; 12, slider; 13, limiting groove; 14, air collecting groove; 15, second spring; 16, piston; 17, connecting line; 18, through groove; 19, limiting airbag group. Specific embodiments

[0022] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0023] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0024] Refer to Figures 1 - 5 , a PECVD chuck structure, including a mounting bracket 1 and an intake pipe 2 installed on the outer wall of the mounting bracket 1. It also includes a first chute 4 opened on the outer wall of the mounting bracket 1. An installation block 6 is slidably connected to the inner wall of the first chute 4. A fixing plate 5 is rotatably connected to the outer wall of the installation block 6. A second chute 10 is opened on the outer wall of the mounting bracket 1. A slider 12 is slidably connected to the inner wall of the second chute 10. A first spring 11 is fixedly connected between the outer wall of the slider 12 and the inner wall of the second chute 10. A limiting groove 13 is opened on the outer wall of the fixing plate 5.

[0025] A mounting groove 7 is opened on the outer wall of the fixing plate 5. A manifold 8 is arranged inside the mounting groove 7. One end of the manifold 8 is fixedly connected with a clamping airbag 9. By pulling the slider 12, the slider 12 compresses the first spring 11 and slides. When the slider 12 slides out of the limiting groove 13, the limitation on the fixing plate 5 is released. The fixing plate 5 can be rotated through the mounting block 6, or the mounting block 6 can be slid out, so that the fixing plate 5 is separated separately to facilitate the replacement of the clamping airbag 9.

[0026] A connecting pipe 3 is fixedly installed between the end of the manifold 8 far from the clamping airbag 9 and the outer wall of the intake pipe 2.

[0027] The fixed plate 5 is internally provided with an air collecting groove 14. The inner wall of the air collecting groove 14 is slidably connected with a piston 16. The outer wall of the piston 16 is fixedly connected with a connecting line 17. One end of the connecting line 17 far away from the piston 16 penetrates through the fixed plate 5 and is fixedly connected with the outer wall of the mounting block 6.

[0028] The inner wall of the air collecting groove 14 is fixedly connected with a second spring 15. One end of the second spring 15 far away from the inner wall of the air collecting groove 14 is fixedly installed at the bottom of the piston 16. When the replacement is completed, the fixed plate 5 is rotated, and the piston 16 slides downward under the action of the second spring 15 to supplement air to the limiting airbag group 19, so as to fix the branch air pipe 8 and the clamping airbag 9.

[0029] A through groove 18 is opened inside the fixed plate 5. One end of the through groove 18 is communicated with the air collecting groove 14, and the limiting airbag group 19 is communicated with the air collecting groove 14 through the through groove 18.

[0030] The inner wall of the installation groove 7 is provided with a limiting airbag group 19. Multiple limiting airbags included in the limiting airbag group 19 are all communicated with the through groove 18. By rotating the fixed plate 5, the connecting line 17 is wound around the mounting block 6, so that the piston 16 inside the air collecting groove 14 slides upward under the action of the connecting line 17, and the gas inside the limiting airbag group 19 enters the air collecting groove 14 through the through groove 18, so that the branch air pipe 8 and the clamping airbag 9 can be conveniently taken out from the installation groove 7 for replacement.

[0031] In the present utility model, by pulling the slider 12, the slider 12 is extruded to slide the first spring 11. When the slider 12 slides out of the limiting groove 13, the limit on the fixed plate 5 is released, and the fixed plate 5 can be rotated through the mounting block 6, or the mounting block 6 is slid out to separately separate the fixed plate 5, so as to facilitate the replacement of the clamping airbag 9. At the same time, the fixed plate 5 is rotated, so that the connecting line 17 is wound around the mounting block 6, so that the piston 16 inside the air collecting groove 14 slides upward under the action of the connecting line 17, and the gas inside the limiting airbag group 19 enters the air collecting groove 14 through the through groove 18, so that the branch air pipe 8 and the clamping airbag 9 can be conveniently taken out from the installation groove 7 for replacement.

[0032] The above is only a preferred specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model, according to the technical solution of the present utility model and its inventive concept, makes equivalent replacements or changes, and should be covered by the protection scope of the present utility model.

Claims

1. A PECVD suction cup structure, comprising a mounting frame (1), and an air inlet pipe (2) mounted on the outer wall of the mounting frame (1), characterized in that: Also includes: A slide groove (4) is provided on the outer wall of the mounting frame (1); the inner wall of the slide groove (4) is slidably connected to a mounting block (6); the outer wall of the mounting block (6) is rotatably connected to a fixing plate (5); A second slide groove (10) is provided on the outer wall of the mounting frame (1), the inner wall of the second slide groove (10) is slidably connected with a slider (12), and a first spring (11) is fixedly connected between the outer wall of the slider (12) and the inner wall of the second slide groove (10); The limiting groove (13) is provided on the outer wall of the fixing plate (5).

2. A PECVD suction cup structure according to claim 1, characterized in that: The outer wall of the fixing plate (5) is provided with a mounting groove (7), an air distribution pipe (8) is arranged inside the mounting groove (7), and one end of the air distribution pipe (8) is fixedly connected to a clamping air bag (9).

3. A PECVD suction cup structure according to claim 2, characterized in that: A connecting pipe (3) is fixedly installed between one end of the air distribution pipe (8) away from the clamping airbag (9) and the outer wall of the air intake pipe (2).

4. A PECVD suction cup structure according to claim 1, characterized in that: An air collecting groove (14) is provided inside the fixed plate (5), the inner wall of the air collecting groove (14) is slidably connected to a piston (16), the outer wall of the piston (16) is fixedly connected to a connecting line (17), and the end of the connecting line (17) away from the piston (16) passes through the fixed plate (5) and is fixedly connected to the outer wall of the mounting block (6).

5. A PECVD suction cup structure according to claim 4, characterized in that: A second spring (15) is fixedly connected to the inner wall of the gas collecting groove (14), and one end of the second spring (15) away from the inner wall of the gas collecting groove (14) is fixedly mounted on the bottom of the piston (16).

6. A PECVD suction cup structure according to claim 1, characterized in that: A through groove (18) is provided inside the fixing plate (5), and one end of the through groove (18) is connected to the air collecting groove (14).

7. A PECVD suction cup structure according to claim 2, characterized in that: The inner wall of the installation groove (7) is provided with a limiting airbag group (19), and the limiting airbag group (19) includes a plurality of limiting airbags which are all connected to the through groove (18).

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