Fluid control valve and mass flow controller

Abstract

The utility model provides a fluid control valve and a mass flow controller, and the fluid control valve comprises a first valve body which comprises a virtual center and is provided with a first through hole and a second through hole; the protruding rib is arranged on the first valve body in a protruding mode, the protruding rib is arranged around a virtual center and can form a closed space, the distances between at least part of the protruding rib in the circumferential direction and the virtual center are different, and a first through hole and a second through hole are formed in the two sides of the protruding rib respectively. The second valve body is arranged on the side, provided with the protruding ribs, of the first valve body. According to the fluid control valve provided by the embodiment of the invention, the convex rib surrounding the virtual center is arranged on the first valve body, and the distances between at least part of the circumferential part of the convex rib and the virtual center are different, so that the convex rib can form a non-circular annular structure to increase the inner circumference of the convex rib, and the flow area of the fluid control valve is increased; and the flow capacity of the fluid control valve is improved.

Description

Technical Field

[0001] This application belongs to the technical field of flow control, and particularly relates to a fluid control valve and a mass flow controller. Background Art

[0002] A fluid control valve is a device installed between the upstream and downstream of a flow channel, used to control the flow rate and mass of the fluid flowing through the corresponding flow channel. The fluid control valve can open and close components and control the on-off state of the corresponding flow channel. It can also control the flow rate and mass of the fluid by adjusting the opening amplitude.

[0003] Fluid control valves are mostly applied to scenarios with high requirements for ultra-precision, miniaturization, and integration control of fluids, such as the semiconductor photovoltaic and vacuum coating fields. Such scenarios require fluid control valves to control larger flow rates and more types of fluids in a relatively small space.

[0004] Taking the mass flow controller (MFC) in the semiconductor field as an example, the sealing surface of the current fluid control valve is usually circular. Under a limited volume (for example, the length and width are limited to 124mm×28.5mm), the current fluid control valve has a large flow resistance, and the maximum controllable flow rate is usually small, usually the maximum controllable flow rate is 50L.

[0005] The working principle of the fluid control valve in the mass flow controller can be referred to Figure 1 、 Figure 2 , the first through hole in the fluid control valve is connected to the upstream of the flow channel of the mass flow controller, the second through hole is connected to the downstream of the flow channel of the mass flow controller, and the first through hole and the second through hole are connected through the gap (valve flow passage surface) formed between the first valve body sealing surface and the second valve body. The area of the valve flow passage surface is the product of the perimeter of the first valve body sealing surface and the gap. In order to enable the fluid control valve to better control the fluid flow rate through the valve body, the area of the valve flow passage surface should be smaller than the areas of the first through hole and the second through hole; when the gap formed between the first valve body sealing surface and the second valve body is certain, usually only the perimeter of the sealing surface in the first valve body can be increased to increase the maximum flow capacity of the flow control valve.

[0006] Refer to Figure 3 , the sealing surface of the current fluid control valve is usually circular. Due to space limitations, the volume of the fluid control valve is limited, and it is difficult to set a larger diameter for the circular ring sealing surface. Since the perimeter of the circular ring sealing surface is positively correlated with the flow rate, it is difficult to increase the flow rate upper limit of a single circular ring sealing surface fluid control valve.

[0007] Refer to Figure 4, there are currently some fluid control valves that increase the total area and total perimeter of the sealing surface by setting multiple concentric ring-shaped sealing surfaces to improve the flow rate limit. However, due to the limited volume of the fluid control valve, the increase in the volume of the ring-shaped sealing surface will cause the areas of the air inlet hole and the air outlet hole to decrease. When the area of the air inlet hole or the air outlet hole is reduced to less than the gas flow area of the sealing surface, the areas of the air inlet hole and the air outlet hole will become bottlenecks and limit the maximum flow rate of the fluid control valve, resulting in a decrease in the maximum controllable flow rate within the fluid control valve. Summary of the Invention

[0008] In view of the above problems, the present application provides a fluid control valve and a mass flow controller, which alleviate the problems of large flow resistance and poor flow performance of the current fluid control valve under limited volume.

[0009] In a first aspect, some embodiments of the present application provide a fluid control valve, including:

[0010] A first valve body, the first valve body includes a virtual center, and a first through hole and a second through hole are provided on the first valve body, and the flow directions of the fluids in the first through hole and the second through hole are opposite;

[0011] A convex rib, protruding from the first valve body, the convex rib surrounds the virtual center and can form a closed space, and the distance between at least some parts of the convex rib along its circumferential direction and the virtual center is different, and the first through hole and the second through hole are respectively provided on both sides of the convex rib;

[0012] A second valve body, provided on the side of the first valve body with the convex rib, the second valve body can move relative to the first valve body between a first position and a second position, the second valve body can abut against the convex rib at the first position, and the second valve body can disengage from the convex rib at the second position.

[0013] In the technical solution of this embodiment, a convex rib surrounding the virtual center is provided on the first valve body, and the distance between at least some parts of the convex rib along its circumferential direction and the virtual center is different, so that the convex rib can form a non-circular ring structure to increase the inner perimeter of the convex rib, thereby increasing the flow area of the fluid control valve and improving the flow capacity of the fluid control valve.

[0014] In some embodiments, the sum of the areas of the first through holes on one side of the convex rib is the first hole area, and the sum of the areas of the first through holes on the other side of the convex rib is the second hole area;

[0015] When the second valve body is in the second position, the product of the height between the second valve body and the convex rib and the inner perimeter of the convex rib is the valve area;

[0016] The valve area is less than the first hole area and less than the second hole area.

[0017] In the technical solution of this embodiment, the valve area is smaller than the first hole area and the second hole area, so that the flow capacity of the fluid between the first valve body and the second valve body is smaller than the flow capacity of the fluid at the first through hole and the second through hole, thereby facilitating the fluid control valve to adjust the flow rate of the flowing fluid.

[0018] In some embodiments, the first hole area is greater than or equal to 2 times the valve area, and the second hole area is greater than or equal to 2 times the valve area.

[0019] The technical solution of this embodiment provides some dimensional relationships between the valve area, the first hole area, and the second hole area, so that 2 times the fluid control valve area is smaller than either the first hole area or the second hole area, thereby facilitating the fluid control valve to better adjust the flow rate of the flowing fluid.

[0020] In some embodiments, the fluid control valve further includes a virtual axis passing through the virtual center, and the rib, the first through hole, and the second through hole are all symmetric about the virtual axis.

[0021] In the technical solution of this embodiment, the rib, the first through hole, and the second through hole are all symmetric about the virtual axis, so that the airflows on both sides of the virtual axis can flow through the fluid control valve more evenly and consistently, thereby improving the consistency of the fluid control valve and the uniformity of the fluid flowing through the fluid control valve.

[0022] In some embodiments, the number of ribs is at least two, each rib is arranged around the virtual center, and the ribs are not connected to each other;

[0023] A first through hole and a second through hole are respectively provided on both sides of any rib.

[0024] In the technical solution of this embodiment, the number of ribs is at least two, each rib can form an annular structure surrounding the virtual center, and the annular structures formed by the ribs are not connected to each other. At the same time, a first through hole and a second through hole are respectively arranged on both sides of any rib to further increase the flow capacity of the fluid between the first valve body and the second valve body.

[0025] In some embodiments, the rib includes a protruding portion protruding in a direction away from the virtual center and a recessed portion recessed in a direction close to the virtual center, and the protruding portion and the recessed portion are alternately connected end to end in sequence along a circular trajectory surrounding the virtual center.

[0026] The technical solution of this embodiment provides a specific structure of the rib, so that the rib includes a protruding portion and a recessed portion that are alternately connected end to end in sequence along a circular trajectory, increasing the inner circumference of the rib while keeping the covered area of the rib unchanged or substantially unchanged, thereby improving the flow capacity of the fluid flowing between the first valve body and the second valve body.

[0027] In some embodiments, the ratio of the inner perimeter of the rib to the perimeter of the circular locus is greater than or equal to 1.2.

[0028] The technical solution of this embodiment provides a range of ratios of the inner perimeter of some ribs to the perimeter of the circular locus, so that the ribs can have a larger inner perimeter, thereby enabling the fluid to have better flow performance and lower flow resistance between the first valve body and the second valve body.

[0029] In some embodiments, the number of the protruding portions is at least three.

[0030] On the premise that the covering area of the rib remains unchanged or is approximately unchanged, the more the number of the protruding portions, the longer the inner perimeter of the rib, and the better the flow performance of the fluid between the first valve body and the second valve body; accordingly, in the technical solution of this embodiment, the number of the protruding portions is made at least three, so that the fluid can have better flow performance and lower flow resistance between the first valve body and the second valve body.

[0031] In some embodiments, the thickness of the rib is greater than or equal to 0.2 mm.

[0032] When the second valve body abuts against the rib, the smaller the thickness of the rib, the more likely the edge of the second valve body is to be deformed, and thus the more likely it is to have a negative impact on the sealing performance of the fluid control valve; accordingly, the technical solution of this embodiment provides a range of rib thicknesses to reduce the risk of deformation when the second valve body abuts against the rib, reduce the negative impact of the rib thickness on the sealing performance of the fluid control valve, and improve the service life of the fluid control valve.

[0033] In a second aspect, some embodiments of the present application further provide a mass flow controller, including the fluid control valve provided by some embodiments of the first aspect.

[0034] The above description is only an overview of the technical solution of the present application. In order to be able to understand the technical means of the present application more clearly, it can be implemented according to the content of the specification. And in order to make the above and other purposes, features and advantages of the present application more obvious and understandable, the specific embodiments of the present application are hereinafter specifically exemplified. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] By reading the detailed description of the preferred embodiments below, various other advantages and benefits will become clear to those of ordinary skill in the art. The drawings are only for the purpose of showing the preferred embodiments and are not considered to be a limitation of the present application. And in all the drawings, the same reference numerals are used to represent the same components. In the drawings:

[0036] Figure 1 It is a front view schematic diagram when the second valve body is in the first position in the fluid control valve provided by some embodiments of the present application.

[0037] Figure 2 The front view schematic diagram of the second valve body in the second position in the fluid control valve provided by some embodiments of the present application.

[0038] Figure 3 The top view schematic diagram of the current fluid control valve with an annular sealing surface.

[0039] Figure 4 The top view schematic diagram of the current fluid control valve with a concentric annular sealing surface.

[0040] Figure 5 The top view schematic diagram of the first valve body provided by some embodiments of the present application.

[0041] Figure 6 For Figure 5 The cross-sectional schematic diagram at A-A in

[0042] Figure 7 The top view schematic diagram of the first valve body provided by some other embodiments of the present application.

[0043] Figure 8 For Figure 7 The partial enlarged schematic diagram at B in

[0044] Figure 9 The top view schematic diagram of the first valve body provided by some other embodiments of the present application.

[0045] Figure 10 For Figure 9 The cross-sectional schematic diagram at E-E in

[0046] The meanings of the marks in the figure are:

[0047] 100, fluid control valve;

[0048] 10, first valve body; 101, virtual center; 102, circular trajectory; 11, first through hole; 12, second through hole; 13, rib; 131, protruding part; 132, recessed part;

[0049] 20, second valve body;

[0050] H, the distance between the second valve body and the rib when the second valve body is in the second position; C1, the inner perimeter of the rib; C2, the outer perimeter of the rib; R1, the radius of the recessed part; R2, the radius of the protruding part; d, the angle at the connecting part of the recessed part and the protruding part. Detailed implementation manners

[0051] Next, embodiments of the technical solutions of the present application will be described in detail with reference to the accompanying drawings. The following embodiments are only used to illustrate the technical solutions of the present application more clearly, so they are only examples and cannot be used to limit the protection scope of the present application.

[0052] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terms used herein are for the purpose of describing specific embodiments only and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above drawings are intended to cover non-exclusive inclusion.

[0053] In the description of the embodiments of this application, technical terms such as "first" and "second" are only used to distinguish different objects and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity, specific order or primary-secondary relationship of the indicated technical features. In the description of the embodiments of this application, the meaning of "a plurality of" is more than two, unless otherwise specifically defined.

[0054] Reference to "embodiment" herein means that a particular feature, structure or characteristic described in connection with the embodiment can be included in at least one embodiment of this application. The phrase appears in various places in the specification and does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0055] In the description of the embodiments of this application, the term "and / or" is merely a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " herein generally represents an "or" relationship between the associated objects before and after.

[0056] In the description of the embodiments of this application, the term "a plurality of" refers to more than two (including two). Similarly, "a plurality of groups" refers to more than two groups (including two groups), and "a plurality of pieces" refers to more than two pieces (including two pieces).

[0057] In the description of the embodiments of this application, the orientation or positional relationship indicated by technical terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the embodiments of this application and simplifying the description, rather than indicating or implying that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of this application.

[0058] In the description of the embodiments of the present application, unless otherwise clearly specified and limited, technical terms such as "installation", "connection", "linkage", "fixation" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral body; it can also be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0059] A mass flow controller is an instrument used to measure and control the mass flow of gas. As one of the key components in the mass flow controller, the fluid control valve is used to regulate the flow rate of the flowing fluid. In the fluid control valve, the flow rate of the fluid flowing through the fluid control valve is proportional to the height between the upper sealing surface and the lower sealing surface, and the flow rate of the fluid control valve is also proportional to the contact perimeter of the lower sealing surface. Specifically in the mass flow controller, the volume of the mass flow controller is usually small, and the space inside it for accommodating the fluid control valve is also small. Therefore, the overall volume of the fluid control valve in the mass flow controller should not be too large.

[0060] Reference Figure 3 , in current fluid control valves, the lower sealing surface is mostly in an annular structure; when the volume of the fluid control valve is limited, it is difficult to set a larger diameter for the annular sealing surface, and the perimeter of the annular sealing surface is positively correlated with the flow rate. Therefore, it is difficult to increase the upper limit of the flow rate of a fluid control valve with a single annular sealing surface.

[0061] Reference Figure 4 , there are also some methods for current fluid control valves to increase the total area and total perimeter of the sealing surface by setting multiple concentric annular sealing surfaces to increase the upper limit of the flow rate; however, due to the limited volume of the fluid control valve, the increase in the volume of the annular sealing surface will cause the areas of the air inlet hole and the air outlet hole to decrease. When the areas of the air inlet hole or the air outlet hole are reduced to be smaller than the gas flow area of the sealing surface, the areas of the air inlet hole and the air outlet hole will become bottlenecks and limit the maximum flow rate of the fluid control valve, thereby reducing the maximum controllable flow rate inside the fluid control valve.

[0062] Based on the above considerations, in order to alleviate the problems of large flow resistance and poor flow performance of the current fluid control valve under limited volume, the embodiments of the present application provide a fluid control valve, in which ribs are provided on the first valve body of the fluid control valve, so that the ribs surround the virtual center of the first valve body to form a closed annular structure, and at the same time, the distance between at least some parts of the ribs along their circumferences and the virtual center is different.

[0063] In such a fluid control valve, compared with the circular lower sealing surface, the rib can form a non-circular and tortuous closed annular structure; on the premise that the area covered by the rib does not increase or increases slightly, and the volume of the fluid control valve remains unchanged or changes slightly, this setting increases the inner perimeter of the rib, reduces the flow resistance, has a larger flow rate upper limit under the condition of the same pre-stage pressure, increases the flow area of the fluid control valve, and improves the flow capacity of the fluid control valve.

[0064] The fluid control valve provided by the embodiment of the present application can be applied to a mass flow controller or other scenarios, such as: the photovoltaic field, the semiconductor field, the vacuum coating field, the chemical industry, the instrument and meter field, etc. Specifically, it can be applied to precision control devices for gas flow in the photovoltaic field and the semiconductor field. This fluid control valve can be used to regulate the flow rate and quality of gases, liquids, etc.

[0065] For the convenience of description in the following embodiments, an example is given in which a fluid control valve 100 provided by some embodiments of the present application is applied to a mass flow controller and is used to regulate the flow rate of the flowing gas.

[0066] Reference Figure 1 、 Figure 2 、 Figures 5 to 8 Some embodiments of the present application provide a fluid control valve 100, including: a first valve body 10, a rib 13, and a second valve body 20. Among them, the first valve body 10 includes a virtual center 101, the first valve body 10 is provided with a first through hole 11 and a second through hole 12, and the flow directions of the fluids in the first through hole 11 and the second through hole 12 are opposite; the rib 13 protrudes from the first valve body 10, the rib 13 is arranged around the virtual center 101 and can form a closed space, the distance between at least part of the rib 13 along its circumferential direction and the virtual center 101 is different, and the first through hole 11 and the second through hole 12 are respectively arranged on both sides of the rib 13; the second valve body 20 is arranged on the side of the first valve body 10 with the rib 13, and the second valve body 20 can move relative to the first valve body 10 between a first position and a second position, the second valve body 20 can abut against the rib 13 at the first position, and the second valve body 20 can disengage from the rib 13 at the second position.

[0067] The first valve body 10 refers to a part of the structure of the fluid control valve 100, and the first valve body 10 is used to provide a fixed foundation for structures such as the rib 13 and the second valve body 20.

[0068] The shape of the first valve body 10 can be cylindrical, prismatic or other shapes, and the material of the first valve body 10 can include metals, plastics or other materials.

[0069] The first through-hole 11 refers to a hole structure formed on the first valve body 10. The flow channel tube in the mass flow controller can be connected to the first through-hole 11 so that the fluid can flow to the fluid control valve 100. The shape of the first through-hole 11 can be a circular hole, a square hole or a hole structure of other shapes. The first through-hole 11 can be a straight hole, a stepped hole or a hole structure of other shapes. The number of the first through-holes 11 can be one, or two or more.

[0070] The second through-hole 12 refers to a hole structure formed on the first valve body 10. The second through-hole 12 can be connected to the flow channel tube in the mass flow controller so that the fluid can flow to the connected flow channel tube through the second through-hole 12. The shape of the second through-hole 12 can be a circular hole, a square hole or a hole structure of other shapes. The second through-hole 12 can be a straight hole, a stepped hole or a hole structure of other shapes. The number of the second through-holes 12 can be one, or two or more.

[0071] The flow directions of the fluid in the first through-hole 11 and the second through-hole 12 are opposite. That is, the fluid can flow into the fluid control valve 100 through the first through-hole 11 and flow out of the fluid control valve 100 through the second through-hole 12. The fluid can also flow into the fluid control valve 100 through the second through-hole 12 and flow out of the fluid control valve 100 through the first through-hole 11. This setting enables the first through-hole 11 and the second through-hole 12 to communicate with the upstream and downstream pipelines of the mass flow controller respectively, so as to facilitate the control of the flow rate, mass, etc. of the fluid flowing through the fluid control valve 100.

[0072] The second valve body 20 refers to a part of the structure of the fluid control valve 100. The second valve body 20 is used to move relative to the first valve body 10 to open or close the fluid control valve 100, thereby controlling the flow state of the fluid. The shape of the second valve body 20 can be cylindrical, prismatic or other shapes. The material of the second valve body 20 can include metal, plastic or other materials.

[0073] The second valve body 20 can move relative to the first valve body 10 between a first position and a second position. Herein, both the first position and the second position are positions where the second valve body 20 can move to. When the second valve body 20 is in the first position, the second valve body 20 is close to the first valve body 10, and the second valve body 20 can separate the first through-hole 11 and the second through-hole 12. At this time, the fluid cannot flow from the first through-hole 11 to the second through-hole 12, and the fluid control valve 100 is in a closed state. When the second valve body 20 is in the second position, the second valve body 20 is far from the first valve body 10. At this time, the fluid can flow from the first through-hole 11 to the second through-hole 12, and the fluid control valve 100 is in an open state.

[0074] It can be understood that the second position can be the maximum position at which the fluid control valve 100 is opened. At this time, the distance between the second valve body 20 and the first valve body 10 is the largest. In addition to being able to be located at the first position and the second position, the valve body can also be located at other positions between the first position and the second position.

[0075] The virtual center 101 refers to a virtual point set on the first valve body 10. The virtual center 101 is set on the first valve body 10 to facilitate the setting of the rib 13. The virtual center 101 can be located at the center position of the surface of the first valve body 10 facing the second valve body 20, or can be located at an eccentric position of the surface of the first valve body 10 facing the second valve body 20.

[0076] The rib 13 refers to a protruding structure protruding from the first valve body 10. The cross-sectional shape of the rib 13 can be square, or can be trapezoidal, semi-circular or other shapes. The material of the rib 13 can include metal, plastic or other materials.

[0077] The rib 13 is arranged around the virtual center and can form a closed space, that is, the rib 13 can form a closed annular structure arranged around the virtual center 101. The distance between at least part of the rib 13 along its circumferential direction and the virtual center 101 is different, that is, the closed annular structure surrounded by the rib 13 is a non-circular annular structure. The rib 13 can enclose a square annular structure, an elliptical annular structure or other regular-shaped annular structures. The rib 13 can also enclose a petal-shaped, crescent-shaped or other irregular-shaped annular structures. It is possible to make only the distance between part of the rib 13 and the virtual center 101 different from the distance between other parts of the rib 13 and the virtual center 101, or it is possible to make the distance between each part of the rib 13 and the virtual center 101 different.

[0078] Since the rib 13 can form a closed annular structure, that is, the rib 13 can enclose a closed inner space on the first valve body 10. Compared with making the rib 13 form a closed circular ring structure, when the area remains unchanged or is approximately unchanged, making the distance between at least part of the rib 13 along its circumferential direction and the virtual center 101 different can increase the inner perimeter of the rib 13, thereby being able to increase the flow rate of the fluid flowing through the rib 13 and improve the flow performance of the fluid control valve 100.

[0079] The inner perimeter of the rib 13 refers to the length of the edge of the rib 13 facing the inner space. Referring to Figure 8 , the inner perimeter of the rib 13 is the length of the edge of the rib 13 shown as C1 in the figure. Opposite to this inner perimeter, the outer perimeter of the rib 13 is the length of the edge of the rib 13 shown as C2 in the figure. The outer perimeter of the rib 13 refers to the length of the edge of the rib 13 facing the outside. The length of the inner perimeter is proportional to the flow rate of the fluid flowing through the rib 13, that is, the longer the inner perimeter of the rib 13, the greater the flow rate of the fluid that can flow through the rib 13 per unit time.

[0080] On both sides of the rib 13, a first through-hole 11 and a second through-hole 12 are respectively provided. When the second valve body 20 is in the first position, the second valve body 20 can abut against the rib 13. At this time, the first valve body 10, the second valve body 20 and the rib 13 can close the first through-hole 11 or the second through-hole 12 in the inner space, that is, the second through-hole 12 and the first through-hole 11 are separated, and the fluid cannot flow from the first through-hole 11 to the second through-hole 12, nor can it flow from the second through-hole 12 to the first through-hole 11.

[0081] Exemplarily, the first through-hole 11 can be located inside the rib 13 and in the inner space. At this time, the second through-hole 12 is located outside the rib 13. When the second valve body 20 is in the first position, the second valve body 20 abuts against the rib 13. At this time, the first through-hole 11 is jointly closed in the inner space by the first valve body 10, the second valve body 20 and the rib 13, that is, the second through-hole 12 and the first through-hole 11 are separated, and the fluid cannot flow from the first through-hole 11 to the second through-hole 12, nor can it flow from the second through-hole 12 to the first through-hole 11.

[0082] The number of ribs 13 can be one, or two or more; it can be understood that when the number of ribs 13 is two or more, a first through-hole 11 and a second through-hole 12 are respectively provided on both sides of each rib 13, that is, the fluid flow directions in the through-holes on both sides of each rib 13 are different, so that the fluid can flow into the fluid control valve 100 from one side of the rib 13 and flow out of the fluid control valve 100 through the other side of the rib 13.

[0083] Exemplarily, taking Figure 1 、 Figure 2 as an example for illustration, Figure 2 the direction indicated by the arrow in is the direction of fluid flow, that is, the first through-hole 11 in the figure is the fluid inlet hole, and the second through-hole 12 is the fluid outlet hole; Figure 1 In, the second valve body 20 is in the first position and abuts against the rib 13 of the first valve body 10. At this time, under the action of the rib 13 and the second valve body 20, the first through-hole 11 and the second through-hole 12 are separated and cannot communicate, and the fluid cannot flow through; Figure 2 In, the second valve body 20 is in the second position and disengages from the rib 13 of the first valve body 10. At this time, the first through-hole 11 and the second through-hole 12 communicate, and the fluid flows through.

[0084] In this embodiment, a rib 13 surrounding the virtual center 101 is provided on the first valve body 10, and the distance between the rib 13 and the virtual center 101 is different at at least part of its circumferential direction, so that the rib 13 can form a non-circular annular structure to increase the inner circumference of the rib 13, thereby increasing the flow area of the fluid control valve 100 and improving the flow capacity of the fluid control valve 100.

[0085] Reference Figure 1 、 Figure 2 、 Figures 5 to 8 In some embodiments, the sum of the areas of the first through-holes 11 on one side of the rib 13 is the first hole area, and the sum of the areas of the first through-holes 11 on the other side of the rib 13 is the second hole area; when the second valve body 20 is in the second position, the product of the height between the second valve body 20 and the rib 13 and the inner circumference of the rib 13 is the valve area; the valve area is less than the first hole area and less than the second hole area.

[0086] The first hole area refers to the sum of the areas of the first through-holes 11 on one side of the rib 13, and the area of the first through-hole 11 is proportional to the inner diameter of the first through-hole 11; for example, when the fluid control valve 100 includes only one rib 13 and there is only one first through-hole 11 on one side of the rib 13, the first hole area is the area of this first through-hole 11; for example, when the fluid control valve 100 includes only one rib 13 and there are two or more first through-holes 11 on one side of the rib 13, the first hole area is the sum of the areas of the first through-holes 11; for example, when the fluid control valve 100 includes two or more ribs 13, the first hole area is the sum of the areas of the first through-holes 11 on the adjacent side of any rib 13.

[0087] Similar to the first hole area, the second hole area refers to the sum of the areas of the second through-holes 12 on one side of the rib 13, and the area of the second through-hole 12 is proportional to the inner diameter of the second through-hole 12; for example, when the fluid control valve 100 includes only one rib 13 and there is only one second through-hole 12 on one side of the rib 13, the second hole area is the area of this second through-hole 12; for example, when the fluid control valve 100 includes only one rib 13 and there are two or more second through-holes 12 on one side of the rib 13, the second hole area is the sum of the areas of the second through-holes 12; for example, when the fluid control valve 100 includes two or more ribs 13, the second hole area is the sum of the areas of the second through-holes 12 on the adjacent side of any rib 13.

[0088] When the second valve body 20 is in the second position, the height between the second valve body 20 and the rib 13 refers to the dimension between the surface of the second valve body 20 facing the rib 13 and the surface of the rib 13 facing the second valve body 20, and this dimension is called the opening height of the fluid control valve 100, and the opening height is the Figure 2 dimension shown as H in; accordingly, the valve area refers to the product of the inner circumference of the rib 13 and the opening height of the fluid control valve 100, and the valve area is proportional to the flow capacity of the fluid flowing through the rib 13.

[0089] Make the valve area smaller than the first hole area and smaller than the second hole area; that is, when the second valve body 20 is in the second position, the fluid control valve 100 is in the maximum open state. At this time, the flow rate of the fluid flowing through the rib 13 is still smaller than the sum of the flow rates of the fluid flowing through each first through hole 11 and smaller than the sum of the flow rates of the fluid flowing through each second through hole 12, so as to facilitate the fluid control valve 100 to adjust the flow rate of the fluid flowing through the rib 13.

[0090] In this embodiment, the valve area is smaller than the first hole area and the second hole area, so that the flow capacity of the fluid between the first valve body 10 and the second valve body 20 is smaller than the flow capacity of the fluid at the first through hole 11 and the second through hole 12, thereby facilitating the fluid control valve 100 to adjust the flow rate of the flowing fluid.

[0091] Reference Figure 1 、 Figure 2 、 Figures 5 to 8 In some embodiments, the first hole area is greater than or equal to 2 times the valve area, and the second hole area is greater than or equal to 2 times the valve area.

[0092] The first hole area is greater than or equal to 2 times the valve area, and the second hole area is greater than or equal to 2 times the valve area, that is, 2 times the valve area is less than or equal to any one of the first hole area and the second hole area; in this setting, the flow rate through the valve area can be smaller than the sum of the flow rates through each first through hole 11 and can also be smaller than the sum of the flow rates through each second through hole 12. When the second valve body 20 is in the second position, the fluid control valve 100 is in the maximum open state. At this time, the flow rate of the fluid flowing through the rib 13 is still smaller than the sum of the flow rates of the fluid flowing through each first through hole 11 and smaller than the sum of the flow rates of the fluid flowing through each second through hole 12, so as to facilitate the fluid control valve 100 to adjust the flow rate of the fluid flowing through the rib 13.

[0093] The first through hole 11 can be located in the inner space surrounded by the rib 13. At this time, the second through hole 12 is located outside the rib 13; the second through hole 12 can also be located in the inner space surrounded by the rib 13. At this time, the first through hole 11 is outside the rib 13; taking the fluid as gas as an example, the first through hole 11 can be an air inlet hole, and at this time the second through hole 12 is an air outlet hole; the first through hole 11 can also be an air outlet hole, and at this time the second through hole 12 is an air inlet hole.

[0094] This embodiment provides some dimensional relationships between the valve area, the first hole area and the second hole area, so that 2 times the area of the fluid control valve 100 is smaller than any one of the first hole area and the second hole area, thereby facilitating the fluid control valve 100 to better adjust the flow rate of the flowing fluid.

[0095] Reference Figure 5, in some embodiments, the fluid control valve 100 further includes a virtual axis passing through the virtual center 101, and the rib 13, the first through hole 11, and the second through hole 12 are all symmetric about the virtual axis.

[0096] The virtual axis refers to a virtual line set on the first valve body 10, and the virtual axis passes through the virtual center 101; the number of virtual axes can be one, or two or more. In the case where the number of virtual axes is two or more, the multiple virtual axes are arranged at an angle and intersect at the virtual center 101.

[0097] The rib 13 is symmetric about the virtual axis. Since the rib 13 is a structure surrounding the virtual center 101 and the virtual axis passes through the virtual center 101, the virtual axis also passes through the rib 13. The structures of the rib 13 on both sides of the virtual axis are symmetric about the virtual axis, thereby improving the consistency of fluid flow on both sides of the rib 13 with respect to the virtual axis.

[0098] The first through hole 11 is symmetric about the virtual axis. The virtual axis may pass through a part of the first through hole 11, or the virtual axis may not pass through any of the first through holes 11, so that the first through holes 11 are respectively located on both sides of the virtual axis and are symmetric about the virtual axis.

[0099] Similar to the first through hole 11, the second through hole 12 is symmetric about the virtual axis. The virtual axis may pass through a part of the second through hole 12, or the virtual axis may not pass through any of the second through holes 12, so that the second through holes 12 are respectively located on both sides of the virtual axis and are symmetric about the virtual axis.

[0100] It can be understood that due to the influence of the processing technology, the rib 13, the first through hole 11, and the second through hole 12 may be completely symmetric about the virtual axis or approximately symmetric about the virtual axis.

[0101] In this embodiment, the rib 13, the first through hole 11, and the second through hole 12 are all symmetric about the virtual axis, so that the airflows on both sides of the virtual axis can flow through the fluid control valve 100 more evenly and consistently, thereby improving the consistency of the fluid control valve 100 and the uniformity of the fluid flowing through the fluid control valve 100.

[0102] Reference Figures 7 to 10 , in some embodiments, the number of ribs 13 is at least two, each rib 13 is arranged surrounding the virtual center 101, and the ribs 13 are not connected to each other; the first through hole 11 and the second through hole 12 are respectively provided on both sides of any one of the ribs 13.

[0103] The number of the convex ribs 13 is at least two, that is, the number of the convex ribs 13 can be two, or three or more; each convex rib 13 is arranged around the virtual center 101, that is, each convex rib 13 can form an annular structure around the virtual center 101; it can be understood that the annular structures formed by the shapes of the convex ribs 13 are all non-circular annular structures.

[0104] The convex ribs 13 are not connected to each other, that is, the convex ribs 13 are sleeved with each other and do not contact each other, and an interval space can be formed between the convex ribs 13.

[0105] On both sides of any one of the convex ribs 13, a first through hole 11 and a second through hole 12 are respectively arranged, so that the fluid can flow between the first through hole 11 and the second through hole 12, and can cross the adjacent convex rib 13 during the flowing process; when the second valve body 20 is in the first position, the second valve body 20 abuts against the convex rib 13, so as to cut off the flow between the first through hole 11 and the second through hole 12 on both sides of the convex rib 13.

[0106] It can be understood that when the number of the convex ribs 13 is two or more, the first through hole 11 and the second through hole 12 should not be arranged on one side of any one of the convex ribs 13 at the same time.

[0107] In this embodiment, the number of the convex ribs 13 is at least two, each convex rib 13 can form an annular structure around the virtual center 101, and the annular structures formed by the convex ribs 13 are not connected to each other. At the same time, the first through hole 11 and the second through hole 12 are respectively arranged on both sides of any one of the convex ribs 13, so as to further increase the flow capacity of the fluid between the first valve body 10 and the second valve body 20.

[0108] Reference Figures 5 to 9 , in some embodiments, the convex rib 13 includes a protruding portion 131 protruding in a direction away from the virtual center 101 and a recessed portion 132 recessed in a direction close to the virtual center 101, and the protruding portion 131 and the recessed portion 132 are sequentially and alternately connected end to end along a circular track 102 around the virtual center 101.

[0109] The protruding portion 131 refers to a partial structure of the convex rib 13 that deforms in a direction away from the virtual center 101. The protruding portion 131 can protrude to form a protruding arc-shaped structure, or can form a protruding sharp-angle structure or other shaped structures; the protruding portion 131 can have one, or two or more.

[0110] The recessed portion 132 refers to a partial structure of the convex rib 13 that deforms in a direction close to the virtual center 101. The recessed portion 132 can be recessed to form a recessed arc-shaped structure, or can form a recessed sharp-angle structure or other shaped structures; the recessed portion 132 can have one, or two or more.

[0111] The circular trajectory 102 refers to a circular virtual line centered on the virtual center 101 and surrounding the virtual center 101. The concave portions 132 and the convex portions 131 are connected end to end alternately in sequence, so that the ribs 13 can form a non-circular structure that fluctuates in the radial direction of the circular trajectory 102. For example, the ribs 13 can form a petal-shaped structure with the circular trajectory 102 as the reference line.

[0112] Compared with the solution of making the ribs 13 surround the virtual center 101 along the circular trajectory 102 and form an annular structure, setting the convex portions 131 and the concave portions 132 can increase the inner circumference of the ribs 13, thereby being able to increase the flow rate of the fluid flowing through the ribs 13.

[0113] For example, referring to Figure 7 、 Figure 8 , the convex portion 131 is an arc-shaped structure protruding outward from the rib 13, and the outer diameter R2 at the top of the convex portion 131 is greater than or equal to 0.5 mm (millimeter), for example, it can be 0.50 mm, 0.52 mm, 0.54 mm, 0.56 mm, 0.58 mm, 0.60 mm or other values; the concave portion 132 is an arc-shaped structure recessed inward from the rib 13, and the outer diameter R1 at the bottom of the concave portion 132 is greater than or equal to 0.5 mm, for example, it can be 0.50 mm, 0.52 mm, 0.54 mm, 0.56 mm, 0.58 mm, 0.60 mm or other values; the connecting part between the convex portion 131 and the concave portion 132 is tangent to both the convex portion 131 and the concave portion 132, and an angle d is formed between the connecting part of the convex portion 131 and the concave portion 132 and the radial direction of the circular trajectory 102. The angle d should be greater than or equal to 5°, for example, it can be 5°, 6°, 7°, 8° or other values for easy processing.

[0114] This embodiment provides some specific structures of the ribs 13, making the ribs 13 include the convex portions 131 and the concave portions 132 that are connected end to end alternately along the circular trajectory 102, increasing the inner circumference of the ribs 13 while the covered area of the ribs 13 remains unchanged or approximately unchanged, thereby improving the flow capacity of the fluid flowing between the first valve body 10 and the second valve body 20.

[0115] It can be understood that on the premise that the ribs 13 can enclose a closed space, the circular trajectory 102 can also be replaced by a regular-shaped trajectory such as an involute circular ring trajectory or a hexagonal trajectory that is closed at both ends, and the circular trajectory 102 can also be replaced by other irregular-shaped trajectories.

[0116] In some embodiments, the ratio of the inner circumference of the ribs 13 to the circumference of the circular trajectory 102 is greater than or equal to 1.2.

[0117] The ratio of the inner perimeter of the rib 13 to the perimeter of the circular locus 102 can be 1.2, or greater than 1.2; for example, the ratio of the inner perimeter of the rib 13 to the perimeter of the circular locus 102 can be 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2.0, or other values.

[0118] When the rib 13 is in the form of an annular structure surrounding the virtual center 101, the perimeter of the circular locus 102 is positively correlated with the flow rate of the fluid flowing through the rib 13; when the rib 13 is in the form of a non-circular annular structure surrounding the virtual center 101, the ratio of the inner perimeter of the rib 13 to the perimeter of the circular locus 102 is made greater than or equal to 1.2, so that the flow rate of the fluid flowing through the rib 13 can be greater, thereby improving the flow capacity of the fluid control valve 100.

[0119] This embodiment provides some ranges for the ratio of the inner perimeter of the rib 13 to the perimeter of the circular locus 102, so that the rib 13 can have a larger inner perimeter, thereby enabling the fluid to have better flow performance and lower flow resistance between the first valve body 10 and the second valve body 20.

[0120] Reference Figures 5 to 9 , in some embodiments, the number of the protruding portions 131 is at least three.

[0121] The number of the protruding portions 131 can be three, or four or more; since the protruding portions 131 and the recessed portions 132 are connected end to end in sequence around the circular locus 102 in an alternating manner, the number of the recessed portions 132 is the same as the number of the protruding portions 131.

[0122] Since, on the premise that the coverage area of the rib 13 remains unchanged or is approximately unchanged, the more the number of the protruding portions 131, the longer the inner perimeter of the rib 13, and the better the flow performance of the fluid between the first valve body 10 and the second valve body 20; accordingly, in this embodiment, the number of the protruding portions 131 is made at least three, so that the fluid can have better flow performance and lower flow resistance between the first valve body 10 and the second valve body 20.

[0123] Reference Figure 7 、 Figure 8 , in some embodiments, the thickness of the rib 13 is greater than or equal to 0.2 mm.

[0124] The thickness of the rib 13 refers to the dimension of the rib 13 in the radial direction of the circular locus 102, reference Figure 8 , the thickness of the rib 13 is the dimension shown as W in the figure; the thickness of the rib 13 is greater than or equal to 0.2 mm, for example, the thickness of the rib 13 can be 0.20 mm, 0.22 mm, 0.24 mm, 0.26 mm, 0.28 mm, 0.30 mm, or other values.

[0125] It can be understood that when the area covered by the rib 13 remains unchanged, the thicker the rib 13 is, the smaller the inner perimeter of the rib 13 is, and the smaller the flow rate of the fluid flowing through the rib 13 is. Therefore, the thickness of the rib 13 should not be too large.

[0126] When the second valve body 20 abuts against the rib 13, the smaller the thickness of the rib 13 is, the easier it is for the edge of the second valve body 20 to deform, and thus the more likely it is to have a negative impact on the sealing performance of the fluid control valve 100. Accordingly, in this embodiment, some thickness ranges of the rib 13 are provided to reduce the risk of deformation when the second valve body 20 abuts against the rib 13, reduce the negative impact of the thickness of the rib 13 on the sealing performance of the fluid control valve 100, and improve the service life of the fluid control valve 100.

[0127] In some embodiments, the fluid control valve 100 includes a first valve body 10 and a second valve body 20.

[0128] Three ribs 13 are provided on the first valve body 10, and the three ribs 13 are all in a petal-like structure; the three ribs 13 are all arranged around the virtual center 101 and are not connected to each other, so that the covered areas of the three ribs 13 increase in sequence.

[0129] A first through hole 11 is provided inside the innermost rib 13, a second through hole 12 is provided between the innermost rib 13 and the middle rib 13, a first through hole 11 is provided between the middle rib 13 and the outermost rib 13, and a second through hole 12 is provided outside the outermost rib 13, so that the flow directions of the fluid in the through holes on both sides of each rib 13 are different.

[0130] The second valve body 20 can move relative to the first valve body 10 between a first position and a second position. When the second valve body 20 is in the first position, the second valve body 20 abuts against the surface of the rib 13 facing away from the first valve body 10, and at this time the fluid control valve 100 is in a closed state; when the second valve body 20 is in the second position, the second valve body 20 is away from the first valve body 10 and is spaced from the surface of the rib 13 facing away from the first valve body 10, and at this time the fluid control valve 100 is in an open state.

[0131] In a second aspect, some embodiments of the present application further provide a mass flow controller, including the fluid control valve 100 provided in some embodiments of the first aspect.

[0132] In this mass flow controller, the fluid control valve 100 has better flow performance, so as to reduce the energy loss of the fluid in the flow channel pipe, reduce the impact of the fluid on the flow channel pipe and the impact on the fluid control valve 100, thereby reducing structural damage and improving the service life.

[0133] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A fluid control valve, characterized in that: include: A first valve body, the first valve body comprising a virtual center, the first valve body being provided with a first through hole and a second through hole, and the flow directions of the fluid in the first through hole and the second through hole being opposite; a convex rib, convexly disposed on the first valve body, the convex rib being disposed around the virtual center and capable of forming a closed space, the convex rib having different spacings from the virtual center along at least a portion of its circumference, and the first through hole and the second through hole being respectively disposed on both sides of the convex rib; The second valve body is arranged on the side of the first valve body having the convex rib, and the second valve body can move between a first position and a second position relative to the first valve body. The second valve body can be abutted against the convex rib at the first position, and the second valve body can be separated from the convex rib at the second position.

2. The fluid control valve according to claim 1, characterized in that: The sum of the areas of the first through holes on one side of the convex rib is the first hole area, and the sum of the areas of the first through holes on the other side of the convex rib is the second hole area; When the second valve body is located at the second position, the product of the height between the second valve body and the convex rib and the inner perimeter of the convex rib is the valve area; The valve area is smaller than the first hole area, and the valve area is smaller than the second hole area.

3. The fluid control valve according to claim 2, characterized in that: The first hole area is greater than or equal to twice the valve area, and the second hole area is greater than or equal to twice the valve area.

4. The fluid control valve according to claim 1, characterized in that: The fluid control valve further includes a virtual axis passing through the virtual center, and the rib, the first through hole, and the second through hole are symmetrical about the virtual axis.

5. The fluid control valve according to any one of claims 1 to 4, characterized in that: The number of the convex ribs is at least two, each of the convex ribs is arranged around the virtual center, and each of the convex ribs is not connected to each other; The first through hole and the second through hole are respectively provided on both sides of any convex rib.

6. The fluid control valve according to any one of claims 1 to 4, characterized in that: The convex rib includes a protruding portion protruding in a direction away from the virtual center and a concave portion concave in a direction close to the virtual center. The protruding portion and the concave portion are alternately connected end to end in sequence along a circular trajectory surrounding the virtual center.

7. The fluid control valve according to claim 6, characterized in that: The ratio of the inner circumference of the convex rib to the circumference of the circular track is greater than or equal to 1.

2.

8. The fluid control valve according to claim 6, characterized in that: The number of the protrusions is at least three.

9. The fluid control valve according to claim 6, characterized in that: The thickness of the convex rib is greater than or equal to 0.2 mm.

10. A mass flow controller, characterized in that: The invention comprises a fluid control valve as claimed in any one of claims 1 to 9.

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