Developing device and vacuum developing, etching and film removing production line

Abstract

The utility model provides a developing device and a vacuum developing, etching and film removing production line, the developing device comprises a rack, a conveying roller assembly, a liquid storage tank, a first spraying assembly, a first liquid conveying assembly and a new liquid spraying unit, the first spraying assembly is arranged on the upper side and / or the lower side of the conveying roller assembly; the first liquid conveying assembly is connected between the liquid storage tank and the first spraying assembly, the new liquid spraying unit is arranged at the discharging end of the conveying roller assembly and comprises a new liquid tank, a second spraying assembly and a second liquid conveying assembly, and the second spraying assembly is arranged on the upper side and / or the lower side of the conveying roller assembly; the second liquid conveying assembly is connected between the new liquid tank and the second spraying assembly, and the new liquid tank is communicated with the liquid storage tank, so that new liquid in the new liquid tank can enter the liquid storage tank; the first spraying assembly and / or the second spraying assembly can swing in the conveying direction perpendicular to the conveying roller assembly. The vacuum developing, etching and film-removing production line comprises a developing device. The utility model can improve the developing quality and facilitate the subsequent cleaning of the residual film.

Description

Technical Field

[0001] The utility model relates to the technical field of printed circuit board production equipment, in particular to a developing device and a vacuum developing, etching and film removing production line. Background Art

[0002] In the production process of printed circuit boards, pattern transfer technology is the key control point in manufacturing high-density multilayer boards. In the process of pattern transfer, development is a very important step in the pattern transfer process. The quality of development is an important indicator of the success of the entire pattern transfer, which directly affects the production quality of printed circuit boards.

[0003] The developer needs to be regularly added with new developer to maintain a uniform developer concentration. The existing method of adding developer is to add it directly into the developer tank. In order to avoid the printed circuit board being not cleaned properly after development, it is usually necessary to design more than ten washing tanks, which not only consumes a lot of electricity and water, but also takes up a large space.

[0004] In addition, the spray assembly in the existing developing device is generally fixed and immovable, resulting in a narrow and uneven coverage of the spray water, which easily leads to a "pool effect" on the printed circuit board. Utility Model Content

[0005] The first purpose of the utility model is to provide a developing device which can improve the developing quality and facilitate the subsequent cleaning of the transparent residual film.

[0006] The second object of the utility model is to provide a vacuum developing and etching film removal production line comprising the developing device.

[0007] In order to achieve the first purpose of the utility model, the utility model provides a developing device, including a frame, a conveying roller assembly, a liquid storage tank, a first spray assembly, a first infusion assembly and a new liquid spraying unit, wherein the conveying roller assembly is arranged on the frame and can convey the workpiece in the longitudinal direction, the first spray assembly is arranged on the upper side and / or the lower side of the conveying roller assembly, the liquid storage tank is arranged at the lower part or the rear side of the frame, the first infusion assembly is connected between the liquid storage tank and the first spray assembly, and is used to convey the developer in the liquid storage tank to the first spray assembly, the new liquid spraying unit is arranged at the discharge end of the conveying roller assembly, and the new liquid spraying unit includes a new liquid tank, a second spray assembly, and a plurality of spraying units. The first spray assembly and the second spray assembly are arranged on the upper side and / or the lower side of the conveying roller assembly, the new liquid tank is arranged at the lower part or the rear side of the frame, the second infusion assembly is connected between the new liquid tank and the second spray assembly, and is used to transport the new liquid in the new liquid tank to the second spray assembly, and the new liquid tank is provided with an overflow port connected to the storage tank, or the developing device is provided with a circulation pump for transporting the new liquid in the new liquid tank to the storage tank, so that the new liquid in the new liquid tank can enter the storage tank; the first spray assembly and / or the second spray assembly can swing back and forth in the horizontal direction relative to the conveying roller assembly, and the horizontal direction is perpendicular to the conveying direction of the conveying roller assembly.

[0008] It can be seen from the above scheme that by setting up a new liquid spraying unit, which is used to spray the printed circuit board with new liquid after the first spray component sprays, it is beneficial to spray away the transparent residual film or photoresist residue remaining on the printed circuit board, avoid the residual film or residue covering the printed circuit board and thus affecting the development operation thereon, which is beneficial to improving the development quality and ensuring the development effect, and can also achieve the cleaning purpose, which is beneficial to reducing the number of subsequent water washing tanks or water washing devices; by setting the first spray component and / or the second spray component to be able to swing back and forth in the horizontal direction relative to the conveying roller component, it is beneficial to increase the coverage range of the first spray component and / or the second spray component, improve its spraying uniformity, and further improve its development quality; by setting the new liquid in the new liquid tank to be able to enter the storage tank, it is beneficial to maintain the concentration of the drug solution in the storage tank always within the preset threshold value, further improving the development quality.

[0009] A further solution is that the frame is provided with a first liquid receiving tank below the first spray assembly and the conveying roller assembly, the first liquid receiving tank is connected to the liquid storage tank, and a first filter element for filtering the developer is connected between the first spray assembly and the first infusion assembly.

[0010] It can be seen from the above scheme that by providing the first liquid receiving tank connected to the liquid storage tank, the developer can be recycled; by providing the first filter element, the developer can be filtered before spraying to prevent clogging of the spray pipe and the nozzle.

[0011] A further solution is that the frame is provided with a second liquid receiving tank below the second spray assembly and the conveying roller assembly, the second liquid receiving tank is connected to the new liquid tank, and a second filter element for filtering the new liquid is connected between the second spray assembly and the second infusion assembly.

[0012] It can be seen from the above scheme that by providing a second liquid receiving tank connected to the new liquid tank, the new liquid can be recycled; by providing a second filter element, the new liquid can be filtered before spraying to prevent clogging of the spray pipe and the nozzle.

[0013] A further solution is that heaters and cooling coils are provided in both the liquid storage tank and the new liquid tank, and a bubble breaking motor is also provided in the liquid storage tank.

[0014] A further solution is that the developing device further comprises a metering box, and the metering box is used to quantitatively add new developer into the new liquid tank and / or the liquid storage tank.

[0015] A further solution is that the metering box includes a metering chamber, an input tube, an output tube and an overflow tube, each end of the input tube and the output tube is connected to the bottom of the metering chamber, a scale is provided on the cavity wall of the metering chamber, a first end of the overflow tube is connected to the upper part of the metering chamber and corresponds to one of the scale values ​​of the scale, a second end of the overflow tube extends to the outside of the metering chamber, and two liquid level sensors are provided in the metering chamber, and each detection end of the two liquid level sensors is respectively set at different heights.

[0016] It can be seen from the above scheme that by setting the first end of the overflow pipe to be connected to the upper part of the metering chamber and corresponding to one of the scale values, when the new developer in the metering chamber is higher than the preset quantity, it can be automatically discharged from the overflow pipe, which is beneficial to ensure the accuracy of quantitative addition.

[0017] A further solution is that the first spray assembly includes a swing drive device, a rotating shaft, a swing frame, a plurality of spray pipes and a plurality of nozzles, the plurality of spray pipes are arranged on the swing frame at intervals, and the plurality of nozzles are arranged along the extension direction of the spray pipes; the driving end of the swing drive device is connected to the rotating shaft, a cam is eccentrically arranged on the rotating shaft, a swing plate is arranged on the front or rear side of the swing frame, the swing plate is cooperatively connected to the cam, guide supporting members are arranged on both sides of the frame, the guide supporting members are provided with grooves extending in the transverse direction, the swing frame is provided with guide rods on both sides thereof, the guide rods are cooperatively connected to the grooves, the swing drive device can drive the rotating shaft to rotate around its axis, and then drive the swing frame to swing back and forth along the extension direction of the groove through the cam and the swing plate.

[0018] It can be seen from the above scheme that the connection between the guide rod and the groove is conducive to controlling the swing frame to swing back and forth along the extension direction of the groove during the swinging process, thereby realizing the guiding function.

[0019] A further solution is that the first spray assembly also includes multiple liquid supply pipes and multiple hoses, the liquid supply pipes, spray pipes and hoses are arranged in one-to-one correspondence, the liquid supply pipes are respectively connected to the first ends of the spray pipes and the hoses, and the second end of the hoses is connected to the first infusion assembly.

[0020] It can be seen from the above scheme that by providing a hose, the swing frame can still spray normally during the swinging process, avoiding the phenomenon of pipe falling off.

[0021] In order to achieve the second purpose of the utility model, the utility model provides a vacuum developing, etching and film removing production line, including a loading device, a vacuum etching device, a film removing device, an air drying device, a unloading device and the above-mentioned developing device, and the loading device, the developing device, the vacuum etching device, the film removing device, the air drying device and the unloading device are arranged in sequence according to the processing order. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a front view of an embodiment of the developing device of the utility model.

[0023] Figure 2 yes Figure 1 Enlarged view of point A in the middle.

[0024] Figure 3 It is a side view of an embodiment of the developing device of the utility model.

[0025] Figure 4 It is a top view of an embodiment of the developing device of the utility model.

[0026] Figure 5 It is a structural diagram of the first spray assembly in the embodiment of the developing device of the utility model.

[0027] Figure 6 It is a structural diagram of the first upper spray assembly and the first lower spray assembly in the embodiment of the developing device of the utility model.

[0028] Figure 7 It is a structural diagram of the second spray assembly in the embodiment of the developing device of the utility model.

[0029] Figure 8 It is a structural diagram of a metering box in an embodiment of the developing device of the utility model.

[0030] Fig. 9 It is a schematic diagram of the vacuum developing, etching and film removing production line of the utility model.

[0031] The present invention will be further described below with reference to the accompanying drawings and embodiments. DETAILED DESCRIPTION

[0032] Developing device embodiment:

[0033] See also Figures 1 to 4 The developing device provided by the utility model includes a frame 1, a first developing spray unit 2, a second developing spray unit 3 and a new liquid spray unit 4. A conveying roller assembly 11 for conveying workpieces along the longitudinal direction is arranged on the frame 1. The first developing spray unit 2, the second developing spray unit 3 and the new liquid spray unit 4 are arranged in sequence along the conveying direction of the conveying roller assembly 11.

[0034] The first developing spray unit 2 includes a liquid storage tank 21, a first spray assembly 22 and a first infusion assembly 23. The first spray assembly 22 includes a first upper spray assembly 221 and a first lower spray assembly 222, which are respectively arranged on the upper side and the lower side of the conveying roller assembly 11, and the first upper spray assembly 221 and the first lower spray assembly 222 both spray the developing liquid toward the conveying roller assembly 11. The liquid storage tank 21 is arranged at the lower part or the rear side of the frame 1, and is used to store the developing liquid. The first infusion assembly 23 is connected between the liquid storage tank 21 and the first spray assembly 22, and is used to transport the developing liquid in the liquid storage tank 21 to the first upper spray assembly 221 and the first lower spray assembly 222.

[0035] The structure of the second developing spray unit 3 of this embodiment is the same as that of the first developing spray unit 2, and will not be described in detail herein.

[0036] The new liquid spraying unit 4 is arranged at the discharge end of the conveying roller assembly 11, and the new liquid spraying unit 4 includes a new liquid tank 41, a second spraying assembly 42, and a second infusion assembly. The second spraying assembly 42 includes a second upper spraying assembly 421 and a second lower spraying assembly 422, which are arranged on the upper side and the lower side of the conveying roller assembly 11, respectively. The second upper spraying assembly 421 and the second lower spraying assembly 422 both spray new liquid toward the conveying roller assembly 11, and the new liquid tank 41 is arranged at the lower part or the rear side of the frame 1 for storing new liquid. The second infusion assembly is connected between the new liquid tank 41 and the second spraying assembly 42, and is used to transport the new liquid in the new liquid tank 41 to the second upper spraying assembly 421 and the second lower spraying assembly 422. The new liquid in this embodiment refers to a relatively fresh developer compared to the developer in the liquid storage tank 21. The time for the new liquid in the new liquid tank 41 to participate in the development reaction is shorter than that of the developer in the liquid storage tank 21, so that the concentration of the new liquid in the new liquid tank 41 is slightly higher than the concentration of the developer in the liquid storage tank 21.

[0037] During the development process, the concentration of the recycled developer will gradually decrease. In order to control the concentration of the developer in the storage tank 21 to always be within a preset threshold, the new tank 41 of this embodiment is connected to the storage tank 21 so that the new liquid in the new tank 41 can enter the storage tank 21. Specifically:

[0038] The new liquid tank 41 is provided with an overflow port connected to the liquid storage tank 21, and the excess new liquid in the new liquid tank 41 automatically overflows into the liquid storage tank 21. Alternatively,

[0039] The developing device 20 is provided with a circulation pump 5 for conveying the new liquid in the new liquid tank 41 to the liquid storage tank 21. The suction end of the circulation pump 5 is arranged in the new liquid tank 41, and the output end of the circulation pump 5 is arranged in the liquid storage tank 21. The circulation pump 5 conveys the new liquid in the new liquid tank 41 to the liquid storage tank 21 at a regular time.

[0040] The frame 1 is provided with a first liquid receiving tank 12 below the first spray assembly 22. The first liquid receiving tank 12 is connected to the liquid storage tank 21. The developer sprayed by the first upper spray assembly 221 and the first lower spray assembly 222 first falls into the first liquid receiving tank 12 and then flows into the liquid storage tank 21. A first filter 24 for filtering the developer is connected between the first spray assembly 22 and the first infusion assembly. Specifically, the first infusion assembly 23 includes a spray pump 231 and a pipeline. The suction end of the spray pump 231 is arranged in the liquid storage tank 21. The spray pump 231 is connected to the first upper spray assembly 221 and the first lower spray assembly 222 through the pipeline. The first filter 24 can be arranged on one side of the spray pump 231. The developer sucked by the spray pump 231 is first filtered by the first filter 24 and then enters the first upper spray assembly 221 and the first lower spray assembly 222 through the pipeline.

[0041] The frame 1 is provided with a second liquid receiving trough 13 below the second spray assembly 42. The second liquid receiving trough 13 is connected to the new liquid trough 41. The new liquid after being sprayed by the second upper spray assembly 421 and the second lower spray assembly 422 first falls into the second liquid receiving trough 13 and then flows into the new liquid trough 41. A second filter element 44 for filtering the new liquid is connected between the second spray assembly 42 and the second infusion assembly. Specifically, the second infusion assembly includes a new liquid pump 43 and a pipeline. The suction end of the new liquid pump 43 is arranged in the new liquid trough 41. The new liquid pump 43 is connected to the second upper spray assembly 421 and the second lower spray assembly 422 through the pipeline. The second filter element 44 is connected to the pipeline. The new liquid sucked by the new liquid pump 43 is first filtered by the second filter element 44 and then enters the second upper spray assembly 421 and the second lower spray assembly 422.

[0042] Of course, a filtering device may also be provided in the first liquid receiving tank 12 and / or the second liquid receiving tank 13 , so that the developer and the new liquid first pass through the filtering device and then enter the liquid storage tank 21 and the new liquid tank 41 .

[0043] The liquid storage tank 21 and the new liquid tank 41 are both provided with a heater 25 / 45 and a cooling coil 26 / 46. The heater 25 is used to heat the developer, the heater 45 is used to heat the new liquid, and cold water is passed through the cooling coil 46 / 26 to cool down and adjust the temperature of the developer and the new liquid. The liquid storage tank 21 is also provided with a bubble breaking motor 7 to break the bubbles in the developer.

[0044] Combination Figures 2 to 7 The first spray assembly 22 and / or the second spray assembly 42 can swing horizontally relative to the conveying roller assembly 11, and the horizontal direction is perpendicular to the conveying direction of the conveying roller assembly 11. In this embodiment, the first spray assembly 22 swings back and forth horizontally, and the second spray assembly 42 is fixedly arranged on the frame 1 as an example.

[0045] The first spray assembly 22 includes a swing drive device 223, a rotating shaft 227, two swing racks 224, a plurality of spray pipes 225 and a plurality of nozzles 226. The two swing racks 224 are respectively arranged on the upper side and the lower side of the conveying roller assembly 11. The driving end of the swing drive device 223 is connected to the rotating shaft 227, and the rotating shaft 227 extends in the up-down direction. Two cams 228 are arranged on the rotating shaft 227, and the cams 228 are eccentrically arranged with the rotating shaft 227. A swing plate 229 is arranged on the front side or the rear side of the swing rack 224, and the swing plate 229 is matched and connected with the cams 228. Specifically, a receiving cavity is arranged in the swing plate 229, and the cams 228 are arranged in the receiving cavity. Guide support members 14 are arranged on both the left and right sides of the frame 1, and the guide support members 14 are provided with grooves 141 extending in the transverse direction. Guide rods 2241 are arranged on both the left and right sides of the swing rack 224, and the guide rods 2241 are slidably connected with the grooves 141. The swing driving device 223 can drive the rotating shaft 227 to rotate, so as to drive the cam 228 to rotate around the axis of the rotating shaft 227 , thereby driving the swing plate 229 and the swing frame 224 to swing back and forth along the extending direction of the groove 141 .

[0046] A plurality of spray pipes 225 are arranged on the swing frame 224 in a lateral spacing arrangement, and the extension direction of the spray pipe 225 intersects with the conveying direction of the conveying roller assembly 11 to form an acute angle. The extension directions of the spray pipes 225 in the first developing spray unit 2 and the second developing spray unit 3 are arranged in parallel or intersecting, and the latter is preferred in this embodiment. Specifically, the spray pipe 225 in the first developing spray unit 2 extends obliquely toward the rear side of the frame 1 along the conveying direction of the conveying roller assembly 11, and the spray pipe 225 in the second developing spray unit 3 extends obliquely toward the front side of the frame 1 along the conveying direction of the conveying roller assembly 11.

[0047] The plurality of nozzles 226 are arranged evenly spaced along the extension direction of the spray pipe 225. The nozzles 226 on the upper and lower swing frames 224 can be arranged correspondingly up and down, or can be arranged staggered. In this embodiment, the nozzles 226 in the first developing spray unit 2 and the second developing spray unit 3 are arranged correspondingly up and down. The nozzles 226 of the new liquid spray unit 4 are arranged staggered up and down.

[0048] Multiple rows of nozzle groups extending in the transverse direction are formed on the multiple spray pipes 225, and each nozzle in the same nozzle group comes from a different spray pipe 225. In the same nozzle group, the spray ranges of two adjacent nozzles 226 partially overlap or do not overlap. In this embodiment, partial overlap is preferred, which is conducive to ensuring that there will be no leakage in the transverse direction; and because the extension direction of the spray pipe 225 intersects with the conveying direction of the conveying roller assembly 11 at an acute angle, the two adjacent nozzles 226 on the same spray pipe 225 have a certain misalignment in the conveying direction. Even if a certain part on the printed circuit board is not sprayed by the first nozzle, it will be sprayed by the second or Nth nozzle, so as to ensure that there will be no leakage in the longitudinal direction and avoid the leakage area between the two adjacent spray pipes 225.

[0049] In order to facilitate the swinging and spraying, the first spraying assembly 22 further includes a plurality of liquid supply pipes 220 and a plurality of hoses 230. The liquid supply pipes 220, the spraying pipes 225 and the hoses 230 are arranged one by one, and the two ends of the liquid supply pipe 220 are respectively connected to the spraying pipe 225 and the first end of the hose 230, and the second end of the hose 230 is connected to the first infusion assembly 23. The arrangement of the hose 230 can ensure that the first infusion assembly 23 can smoothly transport the developer to the liquid supply pipe 220 during the swinging process.

[0050] See also Figure 8 The developing device 20 further includes a metering box 6 , which is used to quantitatively add new developer into the new liquid tank 41 and / or the liquid storage tank 21 .

[0051] The metering box 6 includes a metering chamber 61, an input pipe 62, an output pipe 63 and an overflow pipe 64. One end of each of the input pipe 62 and the output pipe 63 is connected to the bottom of the metering chamber 61. A funnel is provided at the bottom of the metering chamber 61. The bottom of the funnel is connected to a pipeline. A three-way pipe 66 is connected to the lower part of the pipeline. The three-way pipe 66 is respectively connected to the pipeline, the input pipe 62 and the output pipe 63. The input pipe 62 and the output pipe 63 are respectively provided with a first valve 621 and a second valve 631.

[0052] The wall of the metering chamber 61 is provided with scales arranged from bottom to top. The first end of the overflow pipe 64 is connected to the upper part of the metering chamber 61, and the end of the first end of the overflow pipe 64 opens upward, and the opening corresponds to one of the scale values ​​of the scale; the second end of the overflow pipe 64 extends to the outside of the metering chamber 61. When the new developer in the metering chamber 61 exceeds the opening of the overflow pipe 64, the excess new developer is automatically discharged from the overflow pipe 64 to ensure that the new developer in the metering chamber 61 is accurately measured.

[0053] Two liquid level sensors 65 are arranged in the metering cavity 61 . The detection ends of the two liquid level sensors 65 are arranged at different heights respectively for detecting two preset liquid levels.

[0054] Vacuum development and etching film removal production line example:

[0055] See also Fig. 9 The present embodiment provides a vacuum developing and etching film stripping production line, comprising a loading device 10, a vacuum etching device 30, a film stripping device 40, an air drying device 50, a unloading device 60 and the above-mentioned developing device 20, wherein the loading device 10, the developing device 20, the vacuum etching device 30, the film stripping device 40, the air drying device 50 and the unloading device 60 are arranged in sequence according to the processing sequence. A compensation etching device 70 is also arranged at the rear side of the vacuum etching device 30, and a water washing device 80 is arranged at the rear sides of the compensation etching device 70, the developing device 20 and the film stripping device 40.

[0056] In summary, the utility model provides a new liquid spraying unit for spraying the printed circuit board with new liquid after the first spray component sprays, which is beneficial to spraying away the transparent residual film or photoresist residue remaining on the printed circuit board, avoiding the residual film or residue covering the printed circuit board and thus affecting the development operation thereon, which is beneficial to improving the development quality and ensuring the development effect, and can also achieve the cleaning purpose, which is beneficial to reducing the number of subsequent washing tanks or washing devices; by providing the first spray component and / or the second spray component to be able to swing back and forth laterally relative to the conveying roller component, it is beneficial to increase the coverage range of the first spray component and / or the second spray component, improve the uniformity of its spraying, and further improve its development quality; by providing the new liquid in the new liquid tank to be able to enter the liquid storage tank, it is beneficial to maintain the concentration of the liquid in the liquid storage tank always within the preset threshold value, thereby further improving the development quality.

[0057] Finally, it should be emphasized that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various changes and modifications. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A developing device, comprising a frame, a conveying roller assembly, a liquid storage tank, a first spray assembly and a first infusion assembly, wherein the conveying roller assembly is arranged on the frame and can convey a workpiece in a longitudinal direction, the first spray assembly is arranged on the upper side and / or the lower side of the conveying roller assembly, the liquid storage tank is arranged at the lower part or the rear side of the frame, the first infusion assembly is connected between the liquid storage tank and the first spray assembly, and is used to convey the developer in the liquid storage tank to the first spray assembly, characterized in that: The developing device further comprises a new liquid spraying unit, which is arranged at the discharge end of the conveying roller assembly, and comprises a new liquid tank, a second spraying assembly and a second infusion assembly, wherein the second spraying assembly is arranged on the upper side and / or the lower side of the conveying roller assembly, the new liquid tank is arranged at the lower part or the rear side of the frame, the second infusion assembly is connected between the new liquid tank and the second spraying assembly, and is used to transport the new liquid in the new liquid tank to the second spraying assembly, and the new liquid tank is provided with an overflow port connected with the liquid storage tank, or the developing device is provided with a circulation pump for transporting the new liquid in the new liquid tank to the liquid storage tank, so that the new liquid in the new liquid tank can enter the liquid storage tank; The first spray assembly and / or the second spray assembly can swing back and forth in a lateral direction relative to the conveying roller assembly, and the lateral direction is perpendicular to the conveying direction of the conveying roller assembly.

2. The developing device according to claim 1, characterized in that: The frame is provided with a first liquid receiving tank below the first spray assembly and the conveying roller assembly, the first liquid receiving tank is communicated with the liquid storage tank, and a first filter element for filtering the developer is connected between the first spray assembly and the first infusion assembly.

3. The developing device according to claim 1, characterized in that: The frame is provided with a second liquid receiving tank below the second spray assembly and the conveying roller assembly, the second liquid receiving tank is communicated with the new liquid tank, and a second filter element for filtering the new liquid is connected between the second spray assembly and the second infusion assembly.

4. The developing device according to claim 1, characterized in that: The liquid storage tank and the new liquid tank are both provided with a heater and a cooling coil, and the liquid storage tank is also provided with a bubble breaking motor.

5. The developing device according to claim 1, characterized in that: The developing device further comprises a metering box, and the metering box is used for quantitatively adding new developer to the new liquid tank and / or the liquid storage tank.

6. The developing device according to claim 5, characterized in that: The metering box includes a metering chamber, an input tube, an output tube and an overflow tube. One end of each of the input tube and the output tube is connected to the bottom of the metering chamber. A scale is provided on the cavity wall of the metering chamber. The first end of the overflow tube is connected to the upper part of the metering chamber and corresponds to one of the scale values ​​of the scale. The second end of the overflow tube extends to the outside of the metering chamber. Two liquid level sensors are provided in the metering chamber, and the detection ends of the two liquid level sensors are respectively set at different heights.

7. The developing device according to claim 1, characterized in that: The first spray assembly includes a swing drive device, a rotating shaft, a swing frame, a plurality of spray pipes and a plurality of nozzles, wherein the plurality of spray pipes are arranged on the swing frame at intervals, and the plurality of nozzles are arranged along the extension direction of the spray pipes at intervals; The driving end of the swing drive device is connected to the rotating shaft, a cam is eccentrically arranged on the rotating shaft, a swing plate is arranged on the front side or the rear side of the swing frame, the swing plate is cooperatively connected with the cam, guide support members are arranged on the left and right sides of the frame, the guide support members are provided with grooves extending in the transverse direction, and the swing frame is provided with guide rods on the left and right sides thereof, the guide rods are cooperatively connected with the grooves, the swing drive device can drive the rotating shaft to rotate around its axis, and then drive the swing frame to swing back and forth along the extension direction of the groove through the cam and the swing plate.

8. The developing device according to claim 7, characterized in that: The first spray assembly also includes multiple liquid supply pipes and multiple hoses. The liquid supply pipes, the spray pipes and the hoses are arranged in a one-to-one correspondence. The liquid supply pipes are respectively connected to the spray pipes and the first ends of the hoses, and the second ends of the hoses are connected to the first infusion assembly.

9. Vacuum development and etching film removal production line, characterized by: The invention comprises a loading device, a vacuum etching device, a film removing device, an air drying device, a loading device and a developing device as described in any one of claims 1 to 8, wherein the loading device, the developing device, the vacuum etching device, the film removing device, the air drying device and the loading device are arranged in sequence according to the processing order.

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