PCW system

Abstract

According to the PCW system, high-temperature process cooling water discharged from process equipment is recycled and stored through a PCW water tank, the process cooling water in the PCW water tank is conveyed to a PCW filter at the rear end through operation of a PCW water pump to be filtered, and then the process cooling water is conveyed to an air cooling coil pipe; and then part of heat of the process cooling water in the air cooling coil pipe is taken away by cooling air flow which passes through the air cooling coil pipe and is formed when the cooling fan runs, so that the cooling effect is achieved, and the operation and maintenance cost and energy consumption of an original ice maker system can be reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and more particularly to a PCW system. Background Art

[0002] As a representative of the third-generation semiconductor materials, silicon carbide (SiC) has characteristics such as a wide bandgap, a high breakdown electric field, a high thermal conductivity, and a high saturated electron mobility. Therefore, semiconductor devices prepared using silicon carbide materials are suitable for high-voltage, high-current, high-temperature, high-frequency, etc. scenarios, and the prospects are very broad.

[0003] The silicon carbide crystal growth equipment is an important equipment for preparing silicon carbide crystals. Since the silicon carbide crystal preparation process requires a high-temperature environment, the silicon carbide crystal growth equipment usually sets up a cooling water system to cool down the equipment.

[0004] Currently, the silicon carbide crystal growth process equipment is cooled by a process cooling water (PCW) system, and the PCW system requires an external ice machine system to cool down the process cooling water. The ice machine system runs continuously during the entire production process, resulting in high operation and maintenance costs and energy consumption. Summary of the Utility Model

[0005] The purpose of this application is to provide a PCW system, which can reduce the operation and maintenance costs and energy consumption of the original ice machine system.

[0006] The embodiments of this application can be implemented as follows:

[0007] In a first aspect, the present utility model provides a PCW system, including a PCW water tank, a PCW water pump, a PCW filter, and an air-cooling component;

[0008] The PCW water tank is used to connect to the cooling water outlet of the process equipment;

[0009] The inlet of the PCW water pump is connected to the PCW water tank;

[0010] The outlet of the PCW water pump is connected to the inlet of the PCW filter;

[0011] The air-cooling component includes an air-cooling coil and a cooling fan. The inlet of the air-cooling coil is connected to the outlet of the PCW filter. The outlet of the air-cooling coil is used to connect to the cooling water inlet of the process equipment. The cooling fan is used to form a cooling air flow passing through the air-cooling coil when operating.

[0012] In an alternative embodiment, the PCW system further includes a preheating cycle component, which includes a MAU preheating coil and a preheating water pump; the inlet of the preheating water pump is connected to the PCW water tank, the outlet of the preheating water pump is connected to the inlet of the MAU preheating coil, and the outlet of the MAU preheating coil is connected to the PCW water tank.

[0013] In an alternative embodiment, a preheating inlet valve that can be opened or closed is provided on the preheating inlet pipe connecting the PCW water tank and the inlet of the preheating water pump.

[0014] In an alternative embodiment, an air-cooled outlet thermometer is provided on the air-cooled outlet pipe connecting the air-cooled coil and the cooling water inlet;

[0015] Both the preheating inlet valve and the preheating water pump can be opened or closed according to the detection result of the air-cooled outlet thermometer;

[0016] The cooling fan can adjust its operating frequency according to the detection result of the air-cooled outlet thermometer.

[0017] In an alternative embodiment, a water transmission thermometer is provided on the water transmission pipe connecting the outlet of the PCW water pump and the inlet of the PCW filter;

[0018] Both the preheating inlet valve, the cooling fan and the preheating water pump can be opened or closed according to the detection result of the water transmission thermometer.

[0019] In an alternative embodiment, an air-cooled inlet thermometer is provided on the air-cooled inlet pipe connecting the outlet of the PCW filter and the air-cooled coil, and the cooling fan can be opened or closed according to the detection result of the air-cooled inlet thermometer;

[0020] and / or,

[0021] An air-cooled outlet thermometer is provided on the air-cooled outlet pipe connecting the air-cooled coil and the cooling water inlet, and the cooling fan can adjust its operating frequency according to the detection result of the air-cooled outlet thermometer.

[0022] In an alternative embodiment, the PCW system further includes a PCW heat exchanger. The outlets of the PCW filter and the air-cooled coil are both connected to the inlet of the PCW heat exchanger, and the outlet of the PCW heat exchanger is used to connect to the cooling water inlet.

[0023] In an alternative embodiment, a heat exchange inlet valve that can be opened or closed is provided on the heat exchange inlet pipe connecting the PCW filter and the inlet of the PCW heat exchanger.

[0024] In an optional embodiment, a water delivery thermometer is provided on the water delivery pipe for connecting the outlet of the PCW water pump and the PCW filter;

[0025] The heat exchange water inlet valve can be opened or closed according to the detection result of the water delivery thermometer.

[0026] In an optional embodiment, an air-cooling water inlet valve is provided on the air-cooling water inlet pipe connecting the outlet of the PCW filter and the inlet of the air-cooling coil, and the air-cooling water inlet valve and the cooling fan can be opened or closed according to the detection result of the water supply thermometer.

[0027] The beneficial effects of the embodiments of the present application include, for example:

[0028] The PCW water tank is used to recover and store the high-temperature process cooling water discharged from the process equipment. The PCW water pump is used to transport the process cooling water in the PCW water tank to the PCW filter at the rear end for filtration before being sent to the air-cooled coil. Then, when the cooling fan is running, a cooling air flow is formed through the air-cooled coil to take away part of the heat of the process cooling water in the air-cooled coil, thereby achieving a cooling effect and reducing the operation and maintenance costs and energy consumption of the original ice machine system. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0030] Figure 1 Schematic diagram of the PCW system according to an embodiment of the present application.

[0031] Icons: 10-PCW water tank; 11-return pipe; 12-return valve; 20-PCW water pump; 21-water supply pipe; 22-water supply thermometer; 30-PCW filter; 40-PCW heat exchanger; 41-heat exchange inlet pipe; 42-heat exchange inlet valve; 50-air cooling assembly; 51-air cooling coil; 52-cooling fan; 53-air cooling inlet pipe; 54-air cooling inlet valve; 55-air cooling inlet thermometer; 56-air cooling outlet pipe; 57-air cooling outlet thermometer; 58-first check valve; 60-preheating circulation assembly; 61-preheating inlet pipe; 62-preheating inlet valve; 63-preheating water pump; 64-MAU preheating coil; 65-preheating outlet pipe; 66-second check valve; 70-process equipment. DETAILED DESCRIPTION

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the following will clearly and completely describe the technical solutions in the embodiments of this application with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are part of the embodiments of this application, rather than all of them. Components of the embodiments of this application usually described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0033] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of this application that is claimed, but merely represents selected embodiments of this application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in this application without creative efforts belong to the scope of protection of this application.

[0034] It should be noted that: Similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0035] In the description of this application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this application is usually placed during use. It is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and should not be construed as indicating or implying relative importance.

[0036] In addition, the terms "horizontal", "vertical", "overhanging", etc. do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0037] In the description of this application, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected", "connected to" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific situations.

[0038] The following is combined with Figure 1, some embodiments of the present application will be described in detail. In the case of no conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0039] An embodiment of the present application discloses a PCW system, which includes a PCW water tank 10, a PCW water pump 20, a PCW filter 30, and an air-cooling component 50;

[0040] The PCW water tank 10 is used to connect to the cooling water outlet of the process equipment 70;

[0041] The inlet of the PCW water pump 20 is connected to the PCW water tank 10;

[0042] The outlet of the PCW water pump 20 is connected to the inlet of the PCW filter 30;

[0043] The air-cooling component 50 includes an air-cooling coil 51 and a cooling fan 52. The inlet of the air-cooling coil 51 is connected to the outlet of the PCW filter 30. The outlet of the air-cooling coil 51 is used to connect to the cooling water inlet of the process equipment 70. The cooling fan 52 is used to form a cooling air flow passing through the air-cooling coil 51 during operation.

[0044] In this way, the relatively high-temperature process cooling water discharged from the process equipment 70 is recovered and stored through the PCW water tank 10. The process cooling water in the PCW water tank 10 is transported to the PCW filter 30 at the rear end for filtration through the operation of the PCW water pump 20 and then sent to the air-cooling coil 51. Then, part of the heat of the process cooling water in the air-cooling coil 51 is taken away by the cooling air flow passing through the air-cooling coil 51 formed by the operation of the cooling fan 52 to achieve the cooling effect, and the operation and maintenance cost and energy consumption of the original ice machine system can be reduced.

[0045] The cooling fan 52 can be aligned with the air-cooling coil 51 on the positive pressure side to blow air on the air-cooling coil 51 to take away heat. Of course, the cooling fan 52 can also be aligned with the air-cooling coil 51 on the negative pressure side to suck air on the air-cooling coil 51 to take away heat.

[0046] A return water valve 12 that can be opened or closed is provided on the return water pipe 11 connecting the inlet of the PCW water tank 10 and the PCW water pump 20 to conduct or block the water circulation of the PCW system correspondingly when the process equipment 70 is in the running state or the stopped state.

[0047] The PCW system further includes a PCW heat exchanger 40. The outlets of the PCW filter 30 and the air-cooled coil 51 are both connected to the inlet of the PCW heat exchanger 40. The outlet of the PCW heat exchanger 40 is used to connect to the inlet of the cooling water. In this way, the outlet of the air-cooled coil 51 is connected to the inlet of the cooling water of the process equipment 70 through the PCW heat exchanger 40. The inlet and outlet of the cooling medium of the PCW heat exchanger 40 are used to connect to the ice machine system. The ice machine system operates mainly when the operation of only the air-cooled component 50 cannot meet the cooling demand, so as to reduce the cooling medium inside the PCW heat exchanger 40, thereby quickly reducing the temperature of the process cooling water transported from the PCW filter 30 or the air-cooled coil 51. When the operation of only the air-cooled component 50 can meet the cooling demand of the process cooling water, the ice machine system does not operate to save the operation and maintenance cost and energy consumption of the ice machine system.

[0048] An openable or closable heat exchange inlet valve 42 is provided on the heat exchange inlet pipe 41 for connecting the inlet of the PCW filter 30 and the PCW heat exchanger 40, so that the heat exchange inlet valve 42 is opened when the ice machine system needs to provide cooling capacity, and the heat exchange inlet valve 42 is closed when it is not needed.

[0049] A water transmission thermometer 22 is provided on the water transmission pipe 21 for connecting the outlet of the PCW water pump 20 and the PCW filter 30; the heat exchange inlet valve 42 can be opened or closed according to the detection result of the water transmission thermometer 22. For example, the heat exchange inlet valve 42 is normally closed, and when the water transmission thermometer 22 detects that the water temperature is too high, the heat exchange inlet valve 42 is opened to reduce the temperature of the process cooling water passing through the PCW heat exchanger 40 by the operation of the ice machine system.

[0050] A first check valve 58 is provided on the air-cooled outlet pipe 56 for connecting the air-cooled coil 51 and the cooling water inlet to prevent the process cooling water from flowing back from the PCW heat exchanger 40 to the air-cooled coil 51.

[0051] Since the silicon carbide production workshop needs to provide fresh air that has been filtered, heated or cooled, humidified or dehumidified, etc. through the MAU (Make-up Air Unit) air conditioning system, and in winter, the outside air temperature is low, and the MAU air conditioner needs to preheat the air. Since the temperature of the process cooling water recovered by the PCW water tank 10 is lower than the outside air temperature, the inventor considers using the process cooling water in the PCW water tank 10 to provide heat for the MAU air conditioning system.

[0052] For example, the PCW system further includes a preheating cycle component 60, and the preheating cycle component 60 includes a MAU preheating coil 64 and a preheating water pump 63; the inlet of the preheating water pump 63 is connected to the PCW water tank 10, the outlet of the preheating water pump 63 is connected to the inlet of the MAU preheating coil 64, and the outlet of the MAU preheating coil 64 is connected to the PCW water tank 10. In this way, when the preheating water pump 63 operates, the process cooling water in the PCW water tank 10 can be conveyed to the MAU preheating coil 64, so as to preheat the cold air entering from the outside through the MAU preheating coil 64, realizing the function of heat recovery. At the same time, since the process cooling water loses heat when passing through the MAU preheating coil 64, the temperature of the process cooling water in the PCW water tank 10 can be reduced after returning to the PCW water tank 10.

[0053] A preheating inlet pipe 61 for connecting the PCW water tank 10 and the inlet of the preheating water pump 63 is provided with an openable or closable preheating inlet valve 62 to correspondingly control the start or stop of the heat recovery function.

[0054] A second check valve 66 is provided on a preheating outlet pipe 65 for connecting the outlet of the MAU preheating coil 64 and the PCW water tank 10 to prevent backflow.

[0055] An air-cooled outlet water thermometer 57 is provided on an air-cooled outlet pipe 56 for connecting the air-cooled coil 51 and the cooling water inlet;

[0056] The preheating inlet valve 62 and the preheating water pump 63 can be opened or closed according to the detection result of the air-cooled outlet water thermometer 57. For example, when the air-cooled component 50 is operating at full load and the temperature signal feedback by the air-cooled outlet water thermometer 57 still does not reach the standard, the preheating inlet valve 62 is opened, the preheating water pump 63 operates, and the preheating cycle component 60 is started.

[0057] The cooling fan 52 can adjust its operating frequency according to the detection result of the air-cooled outlet water thermometer 57. For example, the larger the feedback signal of the air-cooled outlet water thermometer 57, the higher the operating frequency of the cooling fan 52, and vice versa, the smaller the feedback signal, the lower the operating frequency of the cooling fan 52.

[0058] An air-cooled inlet valve 54 is provided on an air-cooled inlet pipe 53 for connecting the outlet of the PCW filter 30 and the inlet of the air-cooled coil 51, and the air-cooled inlet valve 54 can be opened or closed according to the detection result of the water transmission thermometer 22.

[0059] A water delivery thermometer 22 is provided on the water delivery pipe 21 for connecting the outlet of the PCW water pump 20 and the inlet of the PCW filter 30; the preheating inlet valve 62, the cooling fan 52, and the preheating water pump 63 can all be turned on or off according to the detection result of the water delivery thermometer 22. For example, when the feedback signal of the water delivery thermometer 22 exceeds the set value, the preheating inlet valve 62 is opened, the preheating water pump 63 runs, and the preheating circulation assembly 60 starts. When the preheating circulation assembly 60 is at full load and the feedback signal of the water delivery thermometer 22 still does not meet the standard, the air-cooled inlet valve 54 is opened, the heat exchange inlet valve 42 is closed, and the air-cooled assembly 50 is started.

[0060] An air-cooled inlet thermometer 55 is provided on the air-cooled water inlet pipe 53 for connecting the outlet of the PCW filter 30 and the air-cooled coil 51. The cooling fan 52 can be turned on or off according to the detection result of the air-cooled inlet thermometer 55. For example, when the feedback signal of the air-cooled inlet thermometer 55 exceeds the set value, the cooling fan 52 is turned on.

[0061] An example of the operating principle of the PCW system in the embodiment of this application is as follows:

[0062] (1) The humidification demand of the MAU air conditioning system is small: Open the return water valve 12 and the air-cooled inlet valve 54, close the preheating inlet valve 62 and the heat exchange inlet valve 42. When the feedback signal of the air-cooled inlet thermometer 55 exceeds the set value, turn on the cooling fan 52, and the cooling fan 52 adjusts the frequency according to the feedback signal of the air-cooled outlet thermometer 57. When the cooling fan 52 is at full load and the feedback signal of the air-cooled outlet thermometer 57 still does not meet the standard, open the preheating inlet valve 62 and the preheating water pump 63.

[0063] (2) The humidification demand of the MAU air conditioning system is large: Open the return water valve 12 and the heat exchange inlet valve 42, close the air-cooled inlet valve 54. When the feedback signal of the water delivery thermometer 22 exceeds the set value, open the preheating inlet valve 62 and the preheating water pump 63. When the preheating circulation assembly 60 is at full load and the feedback signal of the water delivery thermometer 22 still does not meet the standard, open the air-cooled inlet valve 54 and the cooling fan 52, close the heat exchange inlet valve 42, and adjust the frequency of the cooling fan 52 according to the feedback signal of the air-cooled outlet thermometer 57.

[0064] Finally, it should be noted that in this article, the terms "including", "comprising", or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article, or device.

[0065] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A PCW system, characterized in that: It comprises a PCW water tank (10), a PCW water pump (20), a PCW filter (30) and an air cooling component (50); The PCW water tank (10) is used to be connected to the cooling water outlet of the process equipment (70); The inlet of the PCW water pump (20) is connected to the PCW water tank (10); The outlet of the PCW water pump (20) is connected to the inlet of the PCW filter (30); The air cooling component (50) comprises an air cooling coil (51) and a heat dissipation fan (52), wherein the inlet of the air cooling coil (51) is connected to the outlet of the PCW filter (30), the outlet of the air cooling coil (51) is used to be connected to the cooling water inlet of the process equipment (70), and the heat dissipation fan (52) is used to form a cooling air flow passing through the air cooling coil (51) during operation.

2. The PCW system according to claim 1, characterized in that: The PCW system further comprises a preheating circulation component (60), wherein the preheating circulation component (60) comprises a MAU preheating coil (64) and a preheating water pump (63); the inlet of the preheating water pump (63) is connected to the PCW water tank (10), the outlet of the preheating water pump (63) is connected to the inlet of the MAU preheating coil (64), and the outlet of the MAU preheating coil (64) is connected to the PCW water tank (10).

3. The PCW system according to claim 2, characterized in that: A preheating water inlet pipe (61) for connecting the PCW water tank (10) and the inlet of the preheating water pump (63) is provided with a preheating water inlet valve (62) that can be opened or closed.

4. The PCW system according to claim 3, characterized in that: An air-cooling water outlet thermometer (57) is provided on the air-cooling water outlet pipe (56) for connecting the air-cooling coil (51) and the cooling water inlet; The preheating water inlet valve (62) and the preheating water pump (63) can both be opened or closed according to the detection result of the air-cooled water outlet thermometer (57); The cooling fan (52) can adjust the operating frequency according to the detection result of the air-cooling water outlet temperature meter (57).

5. The PCW system according to claim 3, characterized in that: A water delivery thermometer (22) is provided on the water delivery pipe (21) for connecting the outlet of the PCW water pump (20) and the inlet of the PCW filter (30); The preheating water inlet valve (62), the cooling fan (52) and the preheating water pump (63) can all be opened or closed according to the detection result of the water delivery thermometer (22).

6. The PCW system according to claim 1, characterized in that: An air-cooling water inlet thermometer (55) is provided on an air-cooling water inlet pipe (53) for connecting the outlet of the PCW filter (30) and the air-cooling coil (51), and the cooling fan (52) can be turned on or off according to the detection result of the air-cooling water inlet thermometer (55); and / or, An air-cooling water outlet pipe (56) for connecting the air-cooling coil (51) and the cooling water inlet is provided with an air-cooling water outlet thermometer (57), and the cooling fan (52) can adjust the operating frequency according to the detection result of the air-cooling water outlet thermometer (57).

7. The PCW system according to claim 1, characterized in that: The PCW system further comprises a PCW heat exchanger (40), the outlet of the PCW filter (30) and the outlet of the air-cooling coil (51) are both connected to the inlet of the PCW heat exchanger (40), and the outlet of the PCW heat exchanger (40) is used to connect to the cooling water inlet.

8. The PCW system according to claim 7, characterized in that: A heat exchange water inlet pipe (41) for connecting the PCW filter (30) and the inlet of the PCW heat exchanger (40) is provided with a heat exchange water inlet valve (42) that can be opened or closed.

9. The PCW system according to claim 8, characterized in that: A water delivery thermometer (22) is provided on the water delivery pipe (21) for connecting the outlet of the PCW water pump (20) and the PCW filter (30); The heat exchange water inlet valve (42) can be opened or closed according to the detection result of the water delivery thermometer (22).

10. The PCW system according to claim 9, characterized in that: An air-cooling water inlet valve (54) is provided on the air-cooling water inlet pipe (53) used to connect the outlet of the PCW filter (30) and the inlet of the air-cooling coil (51). The air-cooling water inlet valve (54) and the cooling fan (52) can be opened or closed according to the detection result of the water delivery thermometer (22).

Images