Air tightness detection device

Abstract

The utility model relates to the technical field of gas sealing detection, in particular to a gas tightness detection device, which comprises a workpiece pressing plate, a sealing gasket and a bottom plate, a workpiece is placed on the bottom plate, the sealing gasket is fixedly arranged between the workpiece and the bottom plate, the workpiece pressing plate is arranged right above the workpiece in a linear lifting manner, and the sealing gasket is fixedly arranged on the bottom plate. The workpiece is provided with an air inlet hole, and the bottom plate is provided with a flange used for being connected with a helium detection special instrument. The air tightness detection device can realize rapid disassembly and assembly and satisfy helium detection work of various workpieces, in addition, the device can realize simultaneous test of the multiple workpieces, and the sealing tool is easy to disassemble and assemble, so that the test efficiency can be effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of gas seal detection, and particularly relates to an airtightness detection device. Background Art

[0002] With the gradual application and popularization of domestic semiconductors in the gas cabinet field, the demand for standard parts products used in gas cabinets is also increasing day by day. At present, many domestic semiconductor companies have participated in the production of standard parts. As the name implies, standard parts have high requirements for production demand consistency, high efficiency, and stable quality. The rapid airtightness detection of standard parts products is an important task in the current product test and verification requirements. The existing airtightness detection of standard parts is relatively traditional, and the products are tested separately. Due to the large output of standard parts, workers need to frequently disassemble and assemble for detection, and different workpieces require different sealing toolings, which takes a lot of time to replace the sealing tooling, resulting in low test efficiency. Therefore, a structure of an airtightness detection device is proposed. Summary of the Utility Model

[0003] In order to solve the above problems, the utility model provides an airtightness detection device, which can realize rapid disassembly and assembly and meet the helium detection work of multiple workpieces. In addition, the invention can realize the simultaneous testing of multiple workpieces, and the disassembly and assembly of the sealing tooling are simple, which can effectively improve the test efficiency.

[0004] The technical solution of the utility model is as follows:

[0005] An airtightness detection device includes a workpiece pressing plate, a sealing gasket, and a bottom plate. The workpiece is placed on the bottom plate, and a sealing gasket is fixedly arranged between the workpiece and the bottom plate. The workpiece pressing plate is arranged directly above the workpiece in a linearly liftable manner. An air inlet hole is arranged on the workpiece, and a flange for connecting with a helium detection special instrument is arranged on the bottom plate.

[0006] Legs are fixedly connected to the bottom plate.

[0007] A vertical plate is fixedly connected to the side of the bottom plate.

[0008] Horizontal plates are respectively fixedly connected to both sides of the vertical plate.

[0009] The three legs are respectively fixedly installed on the bottom plate and the two horizontal plates.

[0010] A slide rail seat is fixedly arranged on the top of the bottom plate. A cylinder bracket is fixedly arranged on the top of the slide rail seat. A cylinder is fixedly installed on the cylinder bracket, and the piston rod of the cylinder is fixedly connected to the workpiece pressing plate.

[0011] The piston rod of the air cylinder is fixedly connected to the workpiece pressing plate through the air cylinder connecting seat. The air cylinder connecting seat is fixedly connected to the piston rod of the air cylinder, and the workpiece pressing plate is fixedly connected to the air cylinder connecting seat.

[0012] The workpiece pressing plate is fixedly connected to the air cylinder connecting seat through a plug pin.

[0013] An air cylinder connecting seat sliding guiding assembly is arranged on the slide rail seat.

[0014] The air cylinder connecting seat sliding guiding assembly includes a guide rail slider and a slide rail connecting piece. The guide rail part of the guide rail slider is fixedly connected to the slide rail seat. One end of the slide rail connecting piece is fixedly connected to the slider part of the guide rail slider, and the other end is fixedly connected to the air cylinder connecting seat.

[0015] The beneficial effects of the present utility model are as follows:

[0016] An airtightness detection device disclosed by the present utility model adds an inner core of a sheathed heating wire so that the two inner cores are respectively in different intervals of the heating wire, and by respectively controlling the heating power of the two inner cores, zonal temperature control of one heating wire is realized; it has advantages such as space saving and simple assembly. Description of the Drawings

[0017] By reading the detailed description of the preferred embodiments below, the solutions and advantages of the present application will become clear to those of ordinary skill in the art. The drawings are only for the purpose of showing the preferred embodiments and are not considered to be a limitation of the present utility model.

[0018] In the drawings:

[0019] Figure 1 is a three-dimensional exploded structural schematic diagram of an airtightness detection device according to an embodiment of the present utility model;

[0020] Figure 2 is a front view of an airtightness detection device according to an embodiment of the present utility model;

[0021] The components represented by the reference numerals in the drawings are:

[0022] The present utility model: 1. Air cylinder bracket, 2. Slide rail connecting piece, 3. Slide rail seat, 4. Air cylinder connecting seat, 5. Workpiece pressing plate, 6. Sealing gasket pressing plate, 7. Sealing gasket, 8. Vertical plate, 9. Bottom plate, 10. Horizontal plate, 11. Flange, 12. Leg, 13. Guide rail slider, 14. Plug pin, 15. Air cylinder, 16. Air inlet hole, 17. Workpiece. Detailed Embodiments

[0023] As Figure 1 and Figure 2As shown, the airtightness detection device includes a workpiece pressing plate 5, a sealing gasket 7, and a bottom plate 9. The bottom plate 9 is fixedly arranged, and the workpiece 17 is placed on the bottom plate 9. A sealing gasket 7 is fixedly arranged between the workpiece 17 and the bottom plate 9. The workpiece pressing plate 5 is arranged directly above the workpiece 17 in a linearly liftable manner. An air inlet hole 16 is arranged on the workpiece 17, and a flange 11 for connecting with a helium detection special instrument is arranged on the bottom plate 9. Legs 12 are fixedly connected to the bottom plate 9. A vertical plate 8 is fixedly connected to the side of the bottom plate 9. Horizontal plates 10 are fixedly connected to both sides of the vertical plate 8. The three legs 12 are respectively fixedly installed on the bottom plate 9 and the two horizontal plates 10.

[0024] On the top of the bottom plate 9, a slide rail seat 3 is fixedly arranged. On the top of the slide rail seat 3, a cylinder bracket 1 is fixedly arranged. A cylinder 15 is fixedly installed on the cylinder bracket 1. The piston rod of the cylinder 15 is fixedly connected to the workpiece pressing plate 5. The piston rod of the cylinder 15 is fixedly connected to the workpiece pressing plate 5 through a cylinder connecting seat 4. The cylinder connecting seat 4 is fixedly connected to the piston rod of the cylinder 15, and the workpiece pressing plate 5 is fixedly connected to the cylinder connecting seat 4. The workpiece pressing plate 5 is fixedly connected to the cylinder connecting seat 4 through a plug and pull pin 14.

[0025] A cylinder connecting seat sliding guiding assembly is arranged on the slide rail seat 3. The cylinder connecting seat sliding guiding assembly includes a guide rail slider 13 and a slide rail connecting piece 2. The guide rail part of the guide rail slider 13 is fixedly connected to the slide rail seat 3. One end of the slide rail connecting piece 2 is fixedly connected to the slider part of the guide rail slider 13, and the other end is fixedly connected to the cylinder connecting seat 4.

[0026] In a specific embodiment:

[0027] The airtightness detection device includes a cylinder bracket 1, a slide rail connecting piece 2, a slide rail seat 3, a cylinder connecting seat 4, a workpiece pressing plate 5, a sealing gasket pressing plate 6, a sealing gasket 7, a vertical plate 8, a bottom plate 9, a horizontal plate 10, a flange 11, legs 12, a guide rail slider 13, a plug and pull pin 14, a cylinder 15, an air inlet hole 16, and a workpiece 17.

[0028] The cylinder 15 is installed on the cylinder bracket 1, and the piston rod in the cylinder is connected to the cylinder connecting seat 4. The cylinder bracket 1 is connected and fixed to the slide rail seat 3. The guide rail slider 13 is installed on the slide rail seat 3. The slide rail connecting piece 2 is installed on the guide rail slider 13, and the other side is installed on the cylinder connecting seat 1. The plug and pull pin 14 is installed on the cylinder connecting seat 4. The workpiece pressing plate 5 is connected to the cylinder connecting seat 4 through the plug and pull pin 14, through Figure 2It can be seen that at least five workpiece pressing plates 5 can be installed on the cylinder connecting seat 4 at the same time, that is, at least five workpieces can be detected simultaneously; the gasket pressing plate 6 is installed on the bottom plate 9, and the gasket 7 is clamped between the gasket pressing plate 6 and the bottom plate 9; the vertical plate 8 is installed on the side of the bottom plate 9, and the horizontal plate 10 is installed on the side of the vertical plate 8; the flange 11 is welded to the bottom of the bottom plate 9; the three legs 12 are respectively installed on the bottom plate 9 and the horizontal plate 10.

[0029] The cylinder 15 can drive the cylinder connecting seat 4 and other related connecting parts to move up and down.

[0030] The guide rail slider 13 can achieve vertical movement.

[0031] The air inlet hole 16 can be connected to a helium gas source to spray helium onto the workpiece 17 to be measured.

[0032] The gasket 7 can meet the static sealing requirements of the workpiece 17, and its material is nitrile rubber.

[0033] The flange 11 can be connected to a special helium detection instrument to realize the airtightness detection work.

[0034] Working principle of the airtightness detection device: Manually place the workpiece 17 product on the bottom plate 9, align the holes to be sealed and place them. Through the control of the electric control system, the cylinder 15 descends to drive the workpiece pressing plate 5 to press the workpiece 17 to make the workpiece reach a static sealing state. At the same time, the workpiece pressing plate 5 will cover the workpiece 17. Then, helium is sprayed onto the workpiece 17 through the air inlet hole 16 for helium detection test. Wait for 10 seconds to observe the results of the special helium detection instrument. After passing the test, the electric control system controls the cylinder to rise, and the operator takes away the workpiece to be measured to complete the test.

[0035] This airtightness detection device can achieve quick disassembly and assembly and meet the helium detection work of various workpieces. In addition, the present invention can realize the simultaneous testing of five workpieces, and the sealing tooling is easy to disassemble and assemble, which can effectively improve the testing efficiency.

Claims

1. An airtightness detection device, characterized in that: The invention comprises a workpiece pressing plate (5), a sealing gasket (7) and a bottom plate (9), wherein the workpiece (17) is placed on the bottom plate (9), the sealing gasket (7) is fixedly arranged between the workpiece (17) and the bottom plate (9), the workpiece pressing plate (5) is arranged directly above the workpiece (17) in a linearly movable manner, an air inlet hole (16) is arranged on the workpiece (17), and a flange (11) for connecting to a dedicated helium detection instrument is arranged on the bottom plate (9).

2. The airtightness detection device according to claim 1, characterized in that: A support leg (12) is fixedly connected to the base plate (9).

3. The airtightness detection device according to claim 2, characterized in that: A vertical plate (8) is fixedly connected to the side of the bottom plate (9).

4. The airtightness detection device according to claim 3, characterized in that: Horizontal plates (10) are respectively fixedly connected to both sides of the vertical plate (8).

5. The airtightness detection device according to claim 4, characterized in that: The three supporting legs (12) are respectively fixedly mounted on the bottom plate (9) and the two transverse plates (10).

6. The airtightness detection device according to claim 1, characterized in that: A slide rail seat (3) is fixedly arranged on the top of the base plate (9), a cylinder bracket (1) is fixedly arranged on the top of the slide rail seat (3), a cylinder (15) is fixedly mounted on the cylinder bracket (1), and a piston rod of the cylinder (15) is fixedly connected to the workpiece pressure plate (5).

7. The airtightness detection device according to claim 6, characterized in that: The piston rod of the cylinder (15) is fixedly connected to the workpiece pressure plate (5) via a cylinder connecting seat (4); the cylinder connecting seat (4) is fixedly connected to the piston rod of the cylinder (15); and the workpiece pressure plate (5) is fixedly connected to the cylinder connecting seat (4).

8. The airtightness detection device according to claim 7, characterized in that: The workpiece pressing plate (5) is fixedly connected to the cylinder connecting seat (4) via a plug-in pin (14).

9. The airtightness detection device according to claim 6, characterized in that: A cylinder connecting seat sliding guide assembly is arranged on the slide rail seat (3).

10. The airtightness detection device according to claim 9, characterized in that: The cylinder connection seat sliding guide assembly comprises a guide rail slider (13) and a slide rail connector (2), wherein the guide rail portion of the guide rail slider (13) is fixedly connected to the slide rail seat (3), and one end of the slide rail connector (2) is fixedly connected to the slider portion of the guide rail slider (13), and the other end is fixedly connected to the cylinder connection seat (4).

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