Vacuum detection system and detection device for VOC detection
By designing a vacuum detection system for VOC detection, vacuum pumps and photoionization sensors are used to detect organic gases inside the lithium battery, the safety hazards caused by the leakage of the lithium battery electrolyte are solved and safe and accurate liquid leakage detection is achieved.
Patent Information
- Application Number
- CN202421960042.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-13
- Publication Date
- 2025-05-30
- Estimated Expiration
- 2034-08-13
AI Technical Summary
The leakage of electrolytes in lithium batteries leads to safety hazards, affects battery performance and life, and may cause safety accidents such as fires or explosions.
A vacuum detection system for VOC detection is designed. Through the vacuum pump interface, an optical ionization sensor, a self-priming pump, a sealed gas storage tank and a detection interface, the organic gas in the test chamber is sucked into the ionization chamber of the PID sensor to detect the content and concentration of the organic gas, thereby realizing the liquid leakage detection of lithium batteries.
The detection of leakage of lithium batteries is achieved without direct contact with the inside of the lithium battery, avoiding damage to the battery, and improving the safety and accuracy of the detection.
Smart Images

Figure CN222926349U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of lithium battery preparation, in particular to a vacuum detection system and a detection device for VOC detection. Background Art
[0002] With the wide application of lithium batteries in many fields, their safety issues have attracted the attention of consumers. Among them, the leakage problem of the electrolyte is a great potential safety hazard, which not only affects the performance and life of the battery, but may also cause safety accidents such as fires and explosions. Summary of the Utility Model
[0003] The utility model provides a vacuum detection system and a detection device for VOC detection, which can inhale the organic gas in the test cavity into the ionization chamber of the PID sensor to detect the content and concentration of each component in the organic gas, and then can realize the leakage detection of the lithium battery without directly contacting the inside of the lithium battery and without causing damage to the lithium battery.
[0004] According to the first aspect of the utility model, a vacuum detection system for VOC detection is provided, which is used in a leakage detection device of a lithium battery. The vacuum detection system includes a vacuum pump interface, a photoionization sensor, a self-priming pump, a sealed gas storage tank, a second pipeline and a detection interface. The detection interface includes a first detection interface and a second detection interface. The first detection interface and the second detection interface are respectively connected to two cavity interfaces of the test cavity. The vacuum pump interface is divided into two paths through the second pipeline. One path is connected to the first detection interface through the sealed gas storage tank, and the other path is connected to the photoionization sensor and the second detection interface. The self-priming pump is connected to one end of the photoionization sensor away from the second detection interface, and is used to inhale the organic gas in the test cavity into the ionization chamber of the PID sensor to detect the leakage of the lithium battery placed in the test cavity.
[0005] In the vacuum detection system of an embodiment of the utility model, the PID sensor includes an ionization chamber, a UV electrodeless ultraviolet lamp, positive and negative electrodes and a detector. The UV electrodeless ultraviolet lamp, the positive and negative electrodes and the detector are all arranged in the ionization chamber.
[0006] In the vacuum detection system of an embodiment of the utility model, the vacuum detection system includes a vacuum gauge, and the vacuum gauge is arranged at one end of the sealed gas storage tank close to the first detection interface.
[0007] According to the second aspect of the present utility model, the present utility model provides a detection device, which includes an air circuit system, an electric control system, and the above-mentioned vacuum detection system. The air circuit system is used to control the on-off of the vacuum detection system, and the electric control system is used to control the working modes of the air circuit system and the vacuum detection system.
[0008] In the detection device according to an embodiment of the present utility model, the electric control system includes a control board and a display screen. The air circuit system, the vacuum detection system, and the display screen are all communicatively connected to the control board.
[0009] In the detection device according to an embodiment of the present utility model, the electric control system includes a start button and a status light. The start button and the status light are communicatively connected to the control board.
[0010] In the detection device according to an embodiment of the present utility model, the air circuit system has a gas source interface and a control valve group connected to the gas source interface. The gas source interface is connected to the vacuum detection system through the control valve group.
[0011] In the detection device according to an embodiment of the present utility model, the air circuit system includes a first pipeline, a first filter, and a muffler. The first filter is connected between the gas source interface and the control valve group through the first pipeline, and the muffler is connected downstream of the first pipeline.
[0012] In the detection device according to an embodiment of the present utility model, the control valve group includes a first pressure regulating valve and a vacuum pumping valve. The first pipeline is divided into two paths at the end of the first filter away from the gas source interface. One path is connected to the PID sensor through the vacuum pumping valve, and the other path is connected to the first detection interface through the first pressure regulating valve.
[0013] In the detection device according to an embodiment of the present utility model, the control valve group includes a first throttle valve and a first air change valve connected to the PID sensor. The first pipeline is divided into two paths at the end of the first filter away from the gas source interface. One path is connected to the detection interface through the first throttle valve, and the other path is connected to the muffler through the first air change valve.
[0014] The technical solutions provided by the embodiments of the present application may include the following beneficial effects: The present application designs a vacuum detection system and a detection device for VOC detection, including a vacuum pump interface, a photoionization sensor, a self-priming pump, a sealed gas storage tank, a second pipeline, and a detection interface. The detection interface includes a first detection interface and a second detection interface, and the first detection interface and the second detection interface are respectively connected to two cavity interfaces of a test cavity. The vacuum pump interface is divided into two paths through the second pipeline. One path is connected to the first detection interface through the sealed gas storage tank, and the other path is connected to the photoionization sensor and the second detection interface. The self-priming pump is connected to one end of the photoionization sensor away from the second detection interface, and is used to suck the organic gas in the test cavity into the ionization chamber of the PID sensor to detect the liquid leakage of the lithium battery placed in the test cavity. Among them, the lithium battery is placed in the test cavity, so that the PID sensor can detect the organic gas VOCs in the environment where the lithium battery is placed, that is, detect the content and concentration of the organic gas sucked into the ionization chamber from the test cavity, so as to realize the liquid leakage detection of the lithium battery without directly contacting the inside of the lithium battery and without causing damage to the lithium battery.
[0015] It should be understood that the above general description and the following detailed description are only exemplary and explanatory, and cannot limit the present application. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0017] Figure 1 is a schematic structural diagram of a detection device provided by an embodiment of the present application;
[0018] Figure 2 is Figure 1 a schematic structural diagram of the detection device in another angle in;
[0019] Figure 3 is Figure 1 a partial schematic structural diagram of the detection device in;
[0020] Figure 4 is Figure 1 an exploded schematic diagram of the detection device in;
[0021] Figure 5 is Figure 1 a connection schematic diagram of the gas path system and the vacuum detection system in;
[0022] Figure 6 isFigure 1 Schematic diagram of the connection of the gas path system and the vacuum detection system in another perspective;
[0023] Figure 7 is Figure 1 System block diagram of the detection device in
[0024] Figure 8 is Figure 1 System schematic diagram of the detection device in
[0025] Description of the reference numerals:
[0026] 10. Frame; 10a. Front end; 10b. Rear end;
[0027] 20. Gas path system; 21. Gas source interface; 22. Exhaust port; 23. First filter; 24. Control valve group; 241. First pressure regulating valve; 242. Vacuum pumping valve; 243. First throttle valve; 244. First air change valve; 245. Vacuum breaking valve; 246. Third throttle valve; 247. Second throttle valve; 248. Single unit detection valve; 249. Whole machine detection valve; 25. Muffler;
[0028] 30. Vacuum detection system; 31. Vacuum pump interface; 32. Detection interface; 321. First detection interface; 322. Second detection interface; 33. Photoionization sensor; 34. Self-priming pump; 35. Sealed gas storage tank; 36. Vacuum gauge; 37. Second filter;
[0029] 40. Electric control system; 41. Display screen; 42. Start button; 43. Status light; 44. Reset button; 45. Communication serial port; 46. Communication network port; 47. Power supply interface; 48. Grounding interface; 49. Control board;
[0030] 300. Test cavity;
[0031] 100. Gas source;
[0032] 200. Vacuum pump;
[0033] 301. First cavity interface;
[0034] 302. Second cavity interface;
[0035] 400. Lithium battery. Detailed implementation manners
[0036] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.
[0037] It should also be understood that the terms used in the description of the present utility model herein are only for the purpose of describing specific embodiments. In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the present application. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more, unless otherwise specifically defined.
[0038] Next, some embodiments of the present application will be described in detail in conjunction with the accompanying drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.
[0039] As Figures 1 to 8 shown, the present application provides a detection device for detecting the liquid leakage of a lithium battery 400. The detection device includes a frame 10, a gas path system 20, and a vacuum detection system 30. The vacuum detection system 30 is communicated with the gas path system 20, so that the gas path system 20 and the vacuum detection system 30 can be combined into a complete gas path circulation system, and is used to control the on-off of each gas path in the vacuum detection system 30 to realize the various detection logics of the vacuum detection system 30. Among them, at least part of the structures of the gas path system 20 and the vacuum detection system 30 are arranged in the frame 10, and at least part of the structures are arranged on the side wall of the frame 10 for connecting with an external gas source 100, a vacuum pump 200, and a test cavity 300, so that the detection device can detect the liquid leakage of the lithium battery 400 placed in the test cavity 300.
[0040] Exemplarily, the test chamber 300 has two chamber interfaces, namely a first chamber interface 301 and a second chamber interface 302. Two detection interfaces 32 provided on the side wall of the frame 10 of the vacuum detection system 30 are respectively connected to the chamber interfaces correspondingly, so that the detection device can create a vacuum detection environment for the test chamber 300 through the vacuum pump 200, thereby accelerating the flow rate of organic gas molecules in the test chamber 300 in the vacuum detection system 30 and the gas path system 20, and effectively improving the detection efficiency.
[0041] In an alternative embodiment, the gas path system 20 has a gas source 100 interface 21, a control valve group 24 and a first pipeline. The gas source 100 interface 21 is connected to the control valve group 24 through the first pipeline, and the control valve group 24 is connected to the vacuum detection system 30 through the first pipeline, for controlling the on-off of each gas path in the vacuum detection system 30. Among them, the gas source 100 interface 21 is provided on the side wall of the frame 10, for connecting to an external gas source 100.
[0042] In an alternative embodiment, the vacuum detection system 30 has a vacuum pump 200 interface 31, a photoionization sensor 33, a self-priming pump 34, a detection interface 32 and a second pipeline. One end of the photoionization sensor 33 is connected to the vacuum pump 200 interface 31, the detection interface 32 and the control valve group 24 through the second pipeline. The vacuum pump 200 interface 31 is used to connect to an external vacuum pump 200, and the detection interface 32 is used to connect to the test chamber 300. A lithium battery 400 to be detected can be placed in the test chamber 300, so that the lithium battery 400 is in a vacuum environment and does not need to be in direct contact with the inside of the lithium battery 400, thus not causing damage to the lithium battery 400. The other end of the photoionization sensor 33 is connected to the self-priming pump 34 through the second pipeline, so that the cooperation of the vacuum pump 200 and the self-priming pump 34 can create an optimal vacuum environment for the vacuum detection system 30, thereby effectively improving the detection efficiency of the vacuum detection system 30.
[0043] Exemplarily, when the control valve group 24 controls the vacuum detection system 30 to perform oil leakage detection on the lithium battery 400 placed in the test chamber 300, the vacuum pump 200 and the self-priming pump 34 work, so that a vacuum can be formed in the second pipeline and the test chamber 300, and then the organic gas VOCs in the test chamber 300 are inhaled into the ionization chamber of the PID sensor through the built-in pump, so that the lithium battery 400 placed in the test chamber 300 can be subjected to liquid leakage detection. The operation is simple and the response is fast. At the same time, the detection of the lithium battery 400 in different environments can also be realized through the control of the control valve group 24 on the vacuum detection system 30, improving the accuracy and reliability of the detection.
[0044] In an alternative embodiment, the PID sensor includes an ionization chamber, a UV electrodeless ultraviolet lamp, positive and negative electrodes, and a detector. The UV electrodeless ultraviolet lamp, the positive and negative electrodes, and the detector are all disposed within the ionization chamber. When the built-in pump sucks the organic gas VOCs in the test chamber 300 into the ionization chamber of the PID sensor, photons emitted by the UV electrodeless ultraviolet lamp bombard the molecules of the organic gas VOCs, ionizing them into positive and negative ions, namely M+ and e-. The positive and negative ions are respectively attracted by the positive and negative electrodes of the PID sensor to form an ion current. Then, the PID sensor determines the molar concentration of the organic gas by measuring the current value and displays it in concentration units of ppb or ppm. This not only has a large measurement range but also high precision, and can achieve a detection level of 1 ppb within the range of 0 to 50 ppm.
[0045] In an alternative embodiment, the detection device further includes an electric control system 40. The frame 10 has a front end 10a and a rear end 10b. The gas source 100 interface 21 is disposed on the rear end 10b, and the display screen 41 of the electric control system 40 is disposed on the front end 10a for controlling the working modes of the gas path system 20 and the vacuum detection system 30.
[0046] In an alternative embodiment, the electric control system 40 includes a control board 49 and a display screen 41. The display screen 41 is disposed on the front end 10a, and the control board 49 is disposed inside the frame 10. Among them, the display screen 41 is a touch screen, and the gas path system 20, the vacuum detection system 30, and the touch screen are all communicatively connected to the control board 49 so that the touch screen can switch the working modes of the gas path system 20 and the vacuum detection system 30, such as the whole machine detection mode and the single unit detection mode, etc., which are not limited in this application.
[0047] In an alternative embodiment, a support frame is provided inside the frame 10. The support frame is a multi-layer structure. The control board 49 is disposed on the top layer on one side of the support frame, and some structures of the gas path system 20 and the vacuum detection system 30 are disposed on the bottom layer, the middle layer, or the top layer on the other side of the support frame, so that the control board 49 is separately disposed from the gas path system 20 and the vacuum detection system 30, realizing gas-electric separation and avoiding the influence of the gas path system 20 and the vacuum detection system 30 on the control board 49.
[0048] In an alternative embodiment, the rack 10 is divided into two parts from one side to the other side of the rack 10. Most of the structures of the gas path system 20 and the vacuum detection system 30 are sequentially installed on one of the parts, and the remaining structures of the gas path system 20 and the vacuum detection system 30 and the electronic control system 40 are installed on the other part. The control board 49 and the remaining structures of the gas path system 20 and the vacuum detection system 30 are separately arranged through a support frame, and the support frame of the control board 49 is on the top layer on one side, so as to achieve gas-electric separation, effectively prevent the contact between the components and / or cables on the gas path system 20 and the vacuum detection system 30 and the electronic control system 40, avoid relevant safety accidents, make the safety factor of the detection device higher, and ensure the safety of use; at the same time, it is also convenient for the routing of the cables between the first pipeline, the first pipeline on the gas path system 20 and the components on the electronic control system 40.
[0049] In an alternative embodiment, the electronic control system 40 includes a start button 42 and a status light 43. The start button 42 and the status light 43 are communicatively connected to the control board 49. The start button 42 is used to control the opening or closing of the detection device, and the status light 43 is used to indicate the working status of the detection device.
[0050] In an alternative embodiment, the electronic control system 40 includes a reset button 44, a communication serial port 45, a communication network port 46, a power supply interface 47 and a grounding interface 48. The reset button 44 and the start button 42 are arranged on both sides of the status light 43 and below the display screen 41. The communication serial port 45, the communication network port 46, the power supply interface 47 and the grounding interface 48 are sequentially arranged at the rear end 10b, and the communication serial port 45, the communication network port 46, the power supply interface 47 and the grounding interface 48 are arranged in the upper part of the rear end 10b. The vacuum pump 200 interface 31, the gas source 100 interface 21 and the detection interface 32 are sequentially arranged at the lower part of the rear end 10b, or the vacuum pump 200 interface 31 and the detection interface 32 are arranged at the lower part of the rear end 10b, and the gas source 100 interface 21 is arranged between the detection interface 32 and the communication serial port 45.
[0051] In an alternative embodiment, the gas path system 20 includes a first filter 23 and a muffler 25. The first filter 23 is connected between the gas source 100 interface 21 and the control valve group 24 through a first pipeline, and the muffler 25 is connected downstream of the first pipeline.
[0052] Exemplarily, the gas path system 20 includes an exhaust port 22. The exhaust port 22 is arranged on the rear end 10b and is symmetrically arranged with the gas source 100 interface 21 with respect to the central axis of the rack 10. Among them, the muffler 25 can be connected to the exhaust port 22 or at other exhaust positions of the first pipeline.
[0053] In an alternative embodiment, the control valve group 24 includes a first pressure regulating valve 241 and a vacuum pumping valve 242. The first pipeline is divided into two paths at one end of the first filter 23 away from the gas source 100 interface 21. One path is connected to the PID sensor through the vacuum pumping valve 242, and the other path is connected to the detection interface 32 through the first pressure regulating valve 241.
[0054] In an alternative embodiment, the control valve group 24 includes a first throttle valve 243 and a first air change valve 244 connected to the PID sensor. The first pipeline is divided into two paths at one end of the first filter 23 away from the first pressure regulating valve 241. One path is connected to one of the detection interfaces 32 through the first throttle valve 243, and the other path is connected to the other detection interface 32 through the first air change valve 244. The detection interface 32 is connected to the PID sensor through the first air change valve 244.
[0055] In an alternative embodiment, the detection interface 32 includes a first detection interface 32132 and a second detection interface 32232. The first detection interface 32132 is connected to the first cavity interface 301, and the second detection interface 32232 is connected to the second cavity interface 302. Among them, the first throttle valve 243 is connected to the first detection interface 32132, and the first air change valve 244 is connected to the second detection interface 32232.
[0056] In an alternative embodiment, the first air change valve 244 is a two-position five-way solenoid valve.
[0057] In an alternative embodiment, the muffler 25 is connected to the first air change valve 244.
[0058] In an alternative embodiment, a third throttle valve 246 is connected between the first air change valve 244 and the muffler 25.
[0059] In an alternative embodiment, the control valve group 24 includes a vacuum breaking valve 245, and the vacuum breaking valve 245 is arranged between the first throttle valve 243 and the first detection interface 32132.
[0060] In an alternative embodiment, the control valve group 24 includes a second throttle valve 247, and the second throttle valve 247 is arranged between the first air change valve 244 and the second detection interface 32232.
[0061] In an alternative embodiment, the gas path system 20 further includes a monomer detection valve 248, and the monomer detection valve 248 is arranged between the vacuum pumping valve 242 and the second detection interface 32232.
[0062] In an alternative embodiment, the gas path system 20 further includes an overall machine detection valve 249. The overall machine detection valve 249 is disposed between the first air change valve 244 and the second detection interface 32232, and the single unit detection valve 248 is connected to one end of the overall machine detection valve 249 away from the second detection interface 32232.
[0063] In an alternative embodiment, the vacuum detection system 30 includes a sealed gas storage tank 35. The vacuum breaking valve 245 branches into two paths at one end close to the first detection interface 32132. One path is connected to the first detection interface 32132, and the other path is connected to the first air change valve 244 through the sealed gas storage tank 35.
[0064] In an alternative embodiment, the vacuum detection system 30 includes a vacuum gauge 36. The vacuum gauge 36 is disposed at one end of the sealed gas storage tank 35 away from the first air change valve 244.
[0065] In an alternative embodiment, a second filter 37 is connected between the PID sensor and the first air change valve 244.
[0066] After adopting the above technical solutions, the switching of multiple working modes of the vacuum detection system 30 can be realized by opening and closing the control valve group 24. For example, in the overall machine detection mode suitable for detecting the finished product of the lithium battery 400, first open the vacuum breaking valve 245, the overall machine detection valve 249 and the first air change valve 244 for background testing, then open the vacuum pumping valve 242 for vacuum pumping, then close all the control valve group 24 for pressure holding, then open the vacuum breaking valve 245, and finally open the vacuum breaking valve 245, the overall machine detection valve 249 and the first air change valve 244 to detect the finished product of the lithium battery 400. After the detection is completed, open the test cavity 300 to remove the residual background. Among them, when the control valve group 24 is testing in the overall machine detection mode, the corresponding control valve group 24 is opened, and the rest of the control valve group 24 are all in the closed state.
[0067] Or, when the detection device is suitable for the single unit detection mode of detecting the single unit of the lithium battery 400, first open the vacuum breaking valve 245, the single unit detection valve 248 and the first air change valve 244 for background testing, then open the vacuum pumping valve 242 for vacuum pumping, then close all the control valve group 24 for pressure holding, then open the vacuum breaking valve 245, and finally open the vacuum breaking valve 245, the single unit detection valve 248 and the first air change valve 244 to detect the single unit of the lithium battery 400. After the detection is completed, open the test cavity 300 to remove the residual background. Among them, when the control valve group 24 is testing in the overall machine detection mode, the corresponding control valve group 24 is opened, and the rest of the control valve group 24 are all in the closed state.
[0068] In this application, unless otherwise clearly specified or limited, the first feature being "on" or "under" the second feature may include direct contact between the first and second features, or may include contact between the first and second features through additional features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the horizontal height of the first feature is less than that of the second feature.
[0069] The above disclosure provides many different embodiments or examples for implementing different structures of the present application. To simplify the disclosure of the present application, components and settings of specific examples are described above. Of course, they are only examples and are not intended to limit the present application. In addition, the present application may repeat reference numerals and / or reference letters in different examples. Such repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present application provides examples of various specific processes and materials, but those of ordinary skill in the art may be aware of the application of other processes and / or the use of other materials.
[0070] In the description of this specification, descriptions with reference to terms such as "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.
Claims
1. A vacuum detection system for VOC detection, used in a lithium battery leakage detection device, characterized in that: The vacuum detection system includes a vacuum pump interface, a photoionization sensor, a self-priming pump, a sealed gas storage tank, a second pipeline and a detection interface, the detection interface includes a first detection interface and a second detection interface, the first detection interface and the second detection interface are respectively connected to two cavity interfaces of the test cavity, the vacuum pump interface is divided into two paths through the second pipeline, one of which is connected to the first detection interface through the sealed gas storage tank, and the other is connected to the photoionization sensor and the second detection interface, the self-priming pump is connected to the end of the photoionization sensor away from the second detection interface, and is used to suck the organic gas in the test cavity into the ionization chamber of the PID sensor to perform leakage detection on the lithium battery placed in the test cavity.
2. The vacuum detection system according to claim 1, characterized in that: The PID sensor comprises an ionization chamber, a UV electrodeless ultraviolet lamp, positive and negative electrodes and a detector, and the UV electrodeless ultraviolet lamp, positive and negative electrodes and the detector are all arranged in the ionization chamber.
3. The vacuum detection system according to claim 1, characterized in that: The vacuum detection system comprises a vacuum gauge, and the vacuum gauge is arranged at one end of the sealed gas storage tank close to the first detection interface.
4. A detection device, characterized in that: It comprises an air circuit system, an electric control system and a vacuum detection system as described in any one of claims 1 to 3, wherein the air circuit system is used to control the on and off of the vacuum detection system, and the electric control system is used to control the working modes of the air circuit system and the vacuum detection system.
5. The detection device according to claim 4, characterized in that: The electric control system comprises a control panel and a display screen, and the gas circuit system, vacuum detection system and display screen are all communicatively connected with the control panel.
6. The detection device according to claim 5, characterized in that: The electric control system includes a start button and a status light, and the start button and the status light are communicatively connected with the control panel.
7. The detection device according to claim 4, characterized in that: The gas circuit system comprises a gas source interface and a control valve group connected to the gas source interface, and the gas source interface is connected to the vacuum detection system through the control valve group.
8. The detection device according to claim 7, characterized in that: The gas circuit system includes a first pipeline, a first filter and a muffler. The first filter is connected between the gas source interface and the control valve group through the first pipeline, and the muffler is connected downstream of the first pipeline.
9. The detection device according to claim 8, characterized in that: The control valve group includes a first pressure regulating valve and a vacuum valve. The first pipeline is divided into two paths at the end of the first filter away from the air source interface, one of which is connected to the PID sensor through the vacuum valve, and the other is connected to the first detection interface through the first pressure regulating valve.
10. The detection device according to claim 8, characterized in that: The control valve group includes a first throttle valve and a first ventilation valve connected to the PID sensor. The first pipeline is divided into two paths at the end of the first filter away from the air source interface, one of which is connected to the detection interface through the first throttle valve, and the other is connected to the muffler through the first ventilation valve.